JPS62203041A - Apparatus for preparing standard specimen - Google Patents

Abstract

PURPOSE:To make it possible to uniformly scatter a shower of individual standard particles and to prevent the adhesion of dust, by providing a scattering chamber of which interior is held to a high vacuum degree and a standard particle supply device for supplying the standard particles into the scattering chamber. CONSTITUTION:At first, the door 2 of a specimen inlet side is opened to place a specimen on the specimen stand 4 provided in a scattering chamber 1. Next, the door 2 of the specimen inlet side is closed while a valve 7 is opened and the scattering chamber 1 is roughly evacuated by a first vacuum pump 12. Then, a valve 8 is closed and a valve 6 is opened and the scattering chamber 1 is brought to a high vacuum state by a second vacuum pump 11 and, thereafter, the disc 9b of a standard particle supply device 9 is rotated in a clockwise direction to supply a definite minute quantity of standard particles 13a received in the recessed part 9c of the disc 9b so as to drop the same in the scattering chamber 1. At this time, the standard particles 13a are uniformly diffused in the scattering chamber 1 to be scattered to the specimen 5. At last, the valve 6 is closed while a valve 10 is slightly opened and N2-gas is gradually supplied into the scattering chamber 1 to brought said chamber 1 to an atmospheric pressure state. By the above mentioned operation, the standard particles are uniformly scattered to the specimen 5 and, at the same time, the adhesion of dust to the specimen is prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for preparing a standard sample used for investigating and calibrating the dust detection sensitivity of a dust inspection apparatus.

[Prior Art] In order to investigate and calibrate the dust detection sensitivity of a dust inspection device, a standard sample having standard particles adhered to its surface is used.

Conventionally, standard samples have been created by artificially attaching particles to the sample in the atmosphere.

[Problem to be solved by the invention] However, in the conventional method, standard particles were attached to the sample in the atmosphere, so dust in the atmosphere also attached to the sample, and the test created in this way When the dust detection sensitivity of a dust inspection device is investigated and calibrated using a standard sample, there is a problem that the dust detection device cannot be accurately calibrated. Furthermore, it was impossible to uniformly scatter the standard particles one by one onto the sample.

SUMMARY OF THE INVENTION An object of the present invention is to provide a standard sample preparation device that prevents the adhesion of dust in the atmosphere and makes it possible to prepare a standard sample optimal for calibrating a dust inspection device.

[Means for Solving the Problems] The standard sample preparation device of the present invention has a dispersion chamber whose interior is maintained at a high degree of vacuum, and a standard particle supply device that supplies standard particles into the dispersion chamber. Features a standard sample preparation device.

[Example] Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

In FIG. 1, a second vacuum pump 11 is connected to the dispersion chamber 1 via a valve 6, and a first vacuum pump 11 is connected to the dispersion chamber 1 via a valve 8.
Connect the vacuum pump 12. A standard particle supplier 9 is installed directly above the sample stage 4 in the dispersion chamber 1.

The standard particle supplier 9 supplies standard particles 13 to be deposited on the sample 5.
and a disk 9b rotatably supported at the lower end of the syringe 9a with a part thereof facing into the dispersion chamber 1.A fixed amount of standard particles 1 is attached to the circumferential surface of the disk 9b.
A plurality of recesses 9C for accommodating the recesses 3a are arranged at regular intervals.

In the example, first, @2 on the sample inlet side is opened, and the sample 5 is placed on the sample stage 4 in the defeat chamber 1. Next, close the door 2 on the sample inlet side, open the valve 7, and open the second vacuum pump 11.
is roughly pumped using the first vacuum pump 12. Next, valve 7
, open the valve 8 and move the dispersion chamber 1 to the first vacuum pump 12.
Roughly pull. Then, after closing the valve 8 and opening the valve 6 to make the dispersion chamber 1 a high vacuum with the second vacuum pump 11, the disc 9b of the standard particle supplier is rotated clockwise, and the disc 9b
A fixed amount of trace standard particles accommodated in the recess 9C of the scattering chamber 1
Supply the inside of the mouth. At this time, the standard particles 13a are uniformly diffused within the spraying chamber 1 and sprayed onto the sample 5.

Finally, the valve 6 is closed, the valve 10 is opened by gravity, and N2 gas is gradually fed into the dispersion chamber 1 to bring it to atmospheric pressure.

By the above operation, the standard particles are uniformly scattered on the sample 5. When the sample outlet side door 3 is opened and the sample 5 is taken out, the operation for preparing the standard sample 5 is completed.

Although the second vacuum pump and the second vacuum pump are used in the embodiment of the present invention, the degree of vacuum in the dispersion chamber and the means for creating a vacuum may be other than these. Further, as the gas for returning the dispersion chamber to atmospheric pressure, any gas other than N2 may be used as long as it is clean.

[Effects of the Invention J As explained above, the present invention allows standard particles to be dispersed onto a sample in a high-vacuum chamber, thereby making it possible to disperse individual standard particles uniformly and separately, and to eliminate dust in the atmosphere. This has the effect of making it possible to create a standard sample that is most suitable for accurately calibrating a dust inspection device without soiling.

[Brief explanation of drawings]

FIG. 1 is a schematic cross-sectional view of an embodiment of the invention. 1...Dispersion chamber 6.7, 8.10...Valve 2...Sample inlet side door 9...Standard particle supplier 3
...Sample outlet side door 11...Second vacuum pump 4.
...Sample stage 12...First vacuum pump 5...
・Sample 13...Standard particle patent applicant
Kyushu NEC Co., Ltd. Representative Patent Attorney Naka Kanno
See

Claims (1)

[Claims] (1) A standard sample preparation device comprising a dispersion chamber whose interior is maintained at a high degree of vacuum, and a standard particle supply device that supplies standard particles into the dispersion chamber.