JPS6186403A - Ozonizer constructed with ceramic - Google Patents

Abstract

PURPOSE:To obtain the title ozonizer having increased capacity for producing ozone and improved energy efficiency for generating ozone by providing a corona discharge electrode to one side of a ceramic base plate and a face-shaped induction electrode to another side of the base plate, impressing an AC high voltage across both electrodes and passing oxidizing gas on the surface where the corona discharge electrode is arranged. CONSTITUTION:A corona discharge electrode 6 having a discharging part of >=0.1mm radius of curvature is provided to one side of ceramic base plates A, B comprising an insulative ceramic having <=2mm thickness so as to arranged the discharging parts 6b, 6c of the discharging electrode in contact with one surface of the ceramic base plate A, B. Further, face-shaped induction electrodes 1, 2 are calcined on another side of the base plates A, B so as to cover at least the whole pat confronting the contacting position of the corona electrode 6 with the base plates A, B, thus forming one body with the base plates A, B. An AC high voltage is impressed across both electrodes 1, 2 and 6, and the gas to be oxidized (e.g. O2) is passed along the surface where the corona discharge electrode 6 of the base plates A, B are arranged. Thus, a miniaturized and inexpensive ozonizer capable of operating with high yield and high efficiency is obtd.

Description

[Detailed Description of the Invention] [Field of Industrial Application] This invention relates to an ozonizer device that generates both short-gap air discharge and surface discharge.
The main field of application is the production of 03 by the oxidation of 03, but this other species discharge chemistry can also be used to perform denitrification and desulfurization by oxidizing NOx and SOx, and furthermore, the plasma generated during discharge can be used. This makes it a powerful ion source and can also be used to charge or remove static electricity from objects.

Here, an onosu/fzer is an electrode that is provided through a dielectric layer, and is operated with a commercial frequency high voltage or a pulsed high voltage! By applying E or a high voltage in the form of extremely short pulses, a discharge is generated, which causes discharge chemical actions such as ozone generation to occur, and also generates plasma consisting of positive and negative ions.

[Conventional technology]

Conventional ozonizers generally have flat or cylindrical parallel electrodes interposed between a dielectric layer such as glass and a gap, and apply a commercial frequency AC high voltage to this to generate a so-called silent discharge in the gap. 03 is produced by flowing a gas containing 02 through the discharge chemical action to oxidize 02', but in order to effectively generate 03 without using excessive voltage, the gap length of the air gap must be made as small as possible. There is a need to. However, a device with a large capacity generally requires a large flat plate or cylinder, and the electrodes must be kept completely parallel and insulated while maintaining the above-mentioned short gap, making the device extremely expensive. Moreover, the generation of heat and the rise in temperature associated with discharge are
This reduces the generation efficiency, so it is necessary to constantly cool both electrodes sufficiently, but since a high voltage is applied during that time and both electrodes are independent of each other, it is necessary to cool both electrodes. It is extremely difficult to do so, and in this respect, it is also large and expensive. Another disadvantage is that the glass dielectric material has a short lifespan.

In response, the present inventor has proposed another invention "Electric field device and method for manufacturing the electric field device" (Japanese Patent Application No. 155617/1982) and "
"Electrostatic Processing Device for Objects" (Japanese Patent Application No. 57-155618) uses an extremely thin fine ceramic substrate (with a thickness of 2
Preferably less than L < C 0. A thin and narrow strinop-shaped corona electrode (approximately 50 to 100 μm thick, approximately 1 mm wide) made of tungsten or molybdenum is placed on the surface of the substrate (in the range of 5 to 1, Q mm), and a small amount is placed on the back surface of the substrate. A planar induction electrode made of tungsten or molybdenum, etc., is formed by firing as a single unit so as to cover the entire area facing the corona electrode, using a method for manufacturing IC multilayer wiring, and a high frequency and high voltage is applied between both electrodes. We have proposed a new ozonizer that generates a high-frequency creeping discharge from the corona electrode on the surface of the fine ceramic substrate, thereby oxidizing O2 and generating O3. This ozonizer uses a glass dielectric material, and compared to conventional ozonizers that use silent discharge, (1) the dielectric material is far mechanically, thermally, and electrically Since semilac is used, the life is extremely long, +z+L so 5~1OKHz
There is no deterioration even when using higher frequency and high voltage, and it becomes significantly smaller (the amount of ozone produced is proportional to the frequency).+31 Only the back side of the fine ceramic base is directly cooled by air or water cooling. if.

The bath surface discharge area, the corona electrode, and the dielectric layer can all be effectively cooled (the fine Semirak layer has relatively high thermal conductivity, and the corona electrode is in close contact with it), +4+
The structure is simple, the manufacturing cost is extremely low, and unlike silent discharge, there is no need to keep the gap length constant, so there is no increase in assembly costs. A number of advantages have been achieved, and most of the drawbacks of conventional ozonizers have been successfully overcome.

However, the above-mentioned ozonizer using creeping discharge has another major drawback in that the amount of ozone generated and the ozone generation energy efficiency are insufficient.

[Problem that the invention seeks to solve]

Amount of ozone generated in an ozonizer that uses the above fine ceramic substrate and uses creeping discharge.

The present inventor discovered that the root cause of the disadvantage of low ozone generation energy efficiency lies in the inability to maintain a high electric field for accelerating the electrons that form the various chemically active species that prevent ozone generation during discharge. Ta. That is, the thickness is 50 to 100 μm formed by thick film printing using molybdenum ink or tungsten ink and fired.
The thin strip-shaped tungsten corona electrode has very sharp edges on both sides.

The electric field tends to be locally concentrated in this area, and looking at the electric field distribution at the moment of the start of the creeping discharge, the electric field strength in the narrow area near both sides of the corona electrode is sufficient for the initial start of the IJ-ma. )strongly.

Although electron acceleration is sufficient, the electric field strength drops rapidly in other regions. Therefore, even if the electric field is concentrated at the tip of the creeping streamer discharge as it progresses, the electric field will drop rapidly as the streamer progresses, and the electrons will not be sufficiently accelerated.In the end, if we look at the entire discharge area,
On average, the electric field that can be used to accelerate electrons does not become high. This is based on the fundamental reason that as long as the thick film printing and firing method used in the manufacture of IC multilayer wiring boards is used to form the corona electrode, as described above, both edges will inevitably become sharp. .

[Means to solve the problem]

The present invention aims to solve the above-mentioned problems of an ozonizer using a fine ceramic substrate and utilizing creeping discharge, and to provide a compact, inexpensive, and high-performance ozonizer.

Accordingly, the present invention forms a corona electrode with a thin thickness and a narrow width on the surface of the ceramic substrate A of the ozonizer by thick film printing.

Instead of being constructed by firing, metal wires or metal tubes with a circular or oval cross section, square or flat metal wires or metal tubes with a polygonal cross section and chamfered tops, and corrugated tops with chamfered tops. A corrugated metal plate formed so that the edges are not sharp, a corrugated insulating plate made of ceramic or the like that has an extreme shape and which forms a conductive layer on the surface, a metal plate that has many cusps that are not sharp, and An insulating plate made of ceramic or the like on which a conductive layer is formed on a shaped surface, or other corona having a non-sharp discharge part with a minimum effective radius of curvature of at least Q, 1 am or more, preferably Q, 5 nttr or more. This can be solved by using an electrode and attaching it so that its non-sharp discharge part is in direct contact with the surface of the fine ceramic substrate A having the planar induction electrode on the back surface, or at least in close proximity with an extremely short gap. .

That is, the novel ozonizer according to the present invention.

A corona discharge electrode having a discharge electrode with a radius of curvature of 0.1 am or more on one surface of a ceramic substrate made of insulating ceramic having a thickness of 2 mm or less, the discharge part of which is substantially in contact with one surface of the ceramic substrate. Further, on the other surface of the ceramic substrate, a planar induction electrode is integrally fired with the ceramic substrate so as to cover at least the entire portion of the corona electrode facing the contact portion with the ceramic substrate. Accordingly, an alternating current high voltage is applied between the two electrodes, and the gas to be oxidized is caused to flow along the surface of the ceramic substrate on the side where the corona discharge electrode is disposed. This is an ozonizer using ceramic.

[・effect]

In this way, the gap distance between the surface of the discharge portion of the corona electrode and the surface of the substrate A is zero at the point of contact between the two, and gradually increases as the distance from the point of contact increases. Therefore, when an AC high voltage is applied between the corona electrode and the induction electrode, a spark discharge is first generated between the surface of the discharge part and the surface of the substrate A at the position of the minimum spark gap dm according to Paschen's law, and then sparks on the substrate A creeping discharge is generated from the base point of the discharge column to the substrate surface in the direction toward the corona electrode. In this case, the gap distance dm where sparks occur varies depending on the gas composition and temperature/pressure (essentially the mean free path for electrons), but it is extremely short at about 7.5 μm in air at room temperature and pressure. And the spark voltage is about 327
It is V. Therefore, the electric field in the discharge space at this time is approximately 436
It takes an extremely high value of KV/c1rL.

Since the discharge gap distance dm is significantly smaller than the radius of curvature γm of the corona electrode, the electric field is approximately equal in the spark discharge region. This corresponds to keeping the electrode gap to a significantly small value in the conventional ozonizer, and the electric field strength in the discharge region at the beginning of the spark discharge is much higher than that in the conventional ozonizer, as described above throughout the discharge region. The temperature becomes higher by more than an order of magnitude, and sufficient acceleration of electrons is achieved. Correspondingly, even in the case of a creeping discharge starting from the base point of the spark discharge column, the electric field strength in the creeping direction at the beginning becomes extremely high, and sufficient acceleration of electrons can be achieved here as well. As a result, both the amount of ozone produced and the energy efficiency of ozone production are significantly improved.

However, in this case, the induction electrode is generally the same as the opposing part of the corona electrode, and if it covers only a narrower area, the sharp edge of the induction electrode and the discharge part of the corona electrode will directly oppose or intersect, The electric field concentrates here, promoting dielectric breakdown of the substrate. Therefore, the induction electrode needs to be arranged so as to include the entire region where the discharge portion of the corona discharge electrode exists and cover a wider area than this. In addition, it is necessary to make the thickness of the ceramic substrate between the induction electrode and the discharge part extremely thin, generally about 0.5 to 1.0, in order to lower the operating voltage. In order to supplement the mechanical strength, it is preferable that another ceramic layer is integrally added and fired behind the induction electrode, so that the induction electrode is substantially embedded in the ceramic substrate.

〔Example〕

Next, one embodiment of the present invention will be explained with reference to the drawings.

Figure g1 is the simplest example of the ozonizer of the present invention, and is an assembled perspective view showing the basic block of wafer type configuration.
, B is a fine ceramic dense substrate (hereinafter simply referred to as the substrate) made of high-purity alumina porcelain, silicon nitride porcelain, or the like. A has a planar electrode 1.2 on the top surface, and B has a planar electrode 1.2 on the bottom surface. The electrode is formed by a metallized layer of, for example, molybdenum or tungsten, and nickel plating provided thereon.

The substrates A and B have terminals 1a and 2a at their ends, respectively, and columnar bodies 3, 3 and 4, 4 are provided at both ends of the upper and lower surfaces of the substrates A and B, respectively, on the sides that do not have terminals. Also, 4 of board B,
There is another columnar body 5.5 on the upper surface side of both ends different from 4.

6 is a corona electrode made of a corrugated metal plate and has a terminal 6a;
6 is inserted into the space surrounded by the substrates A and B and the columnar bodies 5 and 5, and supports the substrates A and B, and their upper and lower tops 6L),
6C forms a discharge part and contacts the lower and upper surfaces of A and B, and faces the planar induction electrode 1°2 via A and B, and the terminal 1
By applying an AC high voltage between a-za (both are connected) and 6a.

From 6b+6c, bath surface discharge following spark discharge is performed on the lower and upper surfaces of substrates A and B, as described above. When an oxidizing gas 9, for example, sufficiently dehumidified air or pure oxygen, is introduced and distributed in the direction of the arrow 7 into the space surrounded by the substrates A and B and the columnar body 5, the chemical action of the discharge causes 1, for example, 02. It is effectively oxidized to 03, which acts as an ozonizer. At this time, since the columns 3 and 4 have a direction perpendicular to 5, the gas that is blocked and oxidized cannot pass through the upper and lower portions of the substrates A and B.

Above the columnar body 3.3 of the substrate A and below the columnar bodies 4, 4 of the substrate B, substrates C, Df: each having no electrode are provided, and are surrounded by the substrates A, O and the columnar body 3.3. Supporting corrugated plates 8 and 9 made of metal, ceramic, plastic, or other suitable material are inserted into the space and the space surrounded by the substrates B and D and the columnar body 4.4 in a direction perpendicular to the substrate 6. Support C and D against A and H. And water in this space in the direction of arrow 10111.

By supplying and flowing a cooling fluid such as air or insulating oil Freon, the heat generated by the discharge is transferred to the substrate A.

B is removed, effectively cooling A, B and 6. And the cooling fluid and 02 or 03 never mix.

Here, the supports 8 and 9 are the substrate A.

When it is made of the same material as B, O, and D, it is convenient because it can be fired together with them.

Incidentally, the corona electrode 6 does not necessarily have to be a corrugated metal plate, but may be made of any suitable shape, structure, or material that allows gas to flow in the direction of the arrow 7 and that does not have a sharp point in contact with the substrate.

For example, as shown in FIG. 2, a metal plate is bent to form upper and lower discharge portions 12 which are not sharp. Elongated parallel electrode bodies 3 are connected at equal intervals in the center by connecting portions parallel to A and H on the substrate A,
The multiple cross-shaped electrodes 15 may have a structure in which they are connected perpendicularly to B. Further, as shown in FIG. 3, a large number of equally spaced and parallel electrode bodies 16 each having a circular or oval cross section and a long thin line or pipe shape are connected by a connecting body 14 at both central generatrices. A linear electrode 17 may also be used.

In this case, if the electrode body 16 is a pipe, it is necessary to close it in an appropriate manner so that the oxidizing gas does not flow therein, or it is necessary to close it in an appropriate manner so that the oxidizing gas does not flow therein, or there is The corona electrode itself may be cooled by supplying and flowing a cooling fluid such as the like. Furthermore, the corona electrode used in the present invention is
As shown in FIG. 4, a coil spring electrode 19 may be constructed of an electrode body 18 consisting of a large number of coil springs arranged in parallel and at equal intervals.

In this case, a suitable frame 4 for supporting and tensioning the coil spring 18 may be used.

As shown in FIG. 5, simply connect the coil spring 18 to the substrate A.
It is also possible to simply fill the space surrounded by B and the columnar body 5 in a meandering manner.

In order to actively cool the corona electrode itself, a rectangular box 21 which also serves as a support for the corona electrode is provided as shown in FIG.
A pipe u, 73 for supplying and discharging cooling fluid is provided in front and behind the cooling fluid to flow the cooling fluid inside 21,
The above-mentioned corrugated corona electrode 6 is placed on the upper and lower surfaces of 21, respectively.
, 6' in constant contact (■ in the same figure), or in constant contact with linear or pipe-shaped electrode bodies 16 and 16' (in the same figure @
).

Alternatively, a fin-shaped electrode body 24 + 24' whose tip is bent so that it is not sharp may be used (see FIG. 0). It is also possible to omit the box 21 in FIG. 3 and use a structure in which the two waveform electrodes 6, 6' are stacked directly and the cooling fluid flows into the gap between them (FIG. 0).

Any suitable shape, structure, and material may be used as long as it allows flow in the direction 11 and has a supporting function.For example, a grid-like member as shown in FIG. 7 may also be used. In this case, since the lattice-like portion has plate-like portions and holes at both ends, the columnar bodies 3 and 4 at one side end are not required, which is economical.

Next, the substrate A of the ozonizer shown in FIG.

B. Corona electrode 6. Column bodies 3, 3 and 5, 5 and support body 8
As shown in FIG. 8, basic blocks consisting of a plurality of layers are stacked in multiple layers as shown in FIG. 8, and induction electrodes 1. 2
．． I', 2', I", 2", l"'.

f terminal 1a + za l l'a + 2”a
+ ``'' are connected together through the common conductor 27 to the terminal hole grounded at one of the output terminals of the AC high voltage power supply path, and also to the terminal G of the corona electrode 6 + 6'1 6'' + 6''.
a, 5'3, 6%... are connected to each other and connected to another output terminal 31 via another common conductor 30, a small volume with an extremely high space occupancy factor and a large generated capacity can be achieved. Needless to say, it is possible to construct an ozonizer.

Next, the ceramic substrate used in the present invention is not only in the form of a flat plate, but also in the form of 9 discs, 2 strips, and 2 cylinders.

In addition, the corona electrode can be configured in any other suitable shape.1 For example, when using a cylindrical ceramic substrate (hereinafter referred to as the substrate tube), the corona electrode may be provided on the outside of the substrate tube or on the inside. It is also possible to provide it on both the inner and outer sides.

In FIG. 9, a cylindrical induction electrode 32 is embedded and fired inside the thick wall of a ceramic substrate cylindrical body E, and linear corona electrodes 33 with a circular cross section are spirally spaced at regular intervals on the outside of the cylindrical body E. FIG. 6 is a longitudinal cross-sectional view of an example in which the present invention can be carried out by winding the ring under tension and welding it to a metal fixing ring 34, 35 fixed to E at both ends of the ring. It goes without saying that an induction electrode may be provided on the inner surface of E, but by embedding it within the cylindrical wall thickness of E as described above, the wall thickness is increased and the mechanical strength of E is improved. can.

In the figure, 36137 is a cup-shaped end plate made of ceramic, plastic, metal, etc., which has a cylindrical body 39 in the center that can protrude to the left and right, and has a cylindrical body 39 on its outer peripheral wall that protrudes inward from the circular base. 1 with an annular embankment body 40+41
As shown in the figure, the ends 42 and 43 of the ceramic substrate cylinder E are fitted, and the fitting surfaces 44 and 45 are watertightly bonded with cement, silicone rubber, epoxy resin, or the like. Wings 39 constitute the inlet and outlet of the cooling fluid, and the cooling fluid sent from 38 in the direction of arrow 46 flows through the interior 47 of E in the direction of arrow 48 to cool it, and then from 38 to the direction of arrow 46. It is ejected in the direction of 49. 50 is a swirling vane installed inside the upstream end of E, which imparts a strong swirling motion to the cooling fluid to enhance its cooling effect. Instead of providing the swirling blades 50, it is also possible to provide a swirling motion by providing a jetting nozzle at the right end of the cylinder for jetting cooling fluid in the tangential direction toward the inner wall of the substrate cylinder E. Reference numeral 51 denotes a cylindrical cover made of metal or plastic that covers the outside of the corona discharge electrode 33, and both ends 52 and 53 of the cover are connected to the outer walls 5 of the annular embankments 40 and 41 of the cup-shaped end plates 36 and 37.
4, ', +5, and further has an inlet 56 and an outlet 57 for the oxidizing gas near both ends 52+53. 58 is corona discharge electrode 33 5? The terminal passes through the cover 51 via the insulator tube i.

It is electrically connected to the metal fixed ring 32. Further, 60 is a terminal of the induction electrode 32 to be grounded, which passes through the cup-shaped end plate and is electrically connected to the upper part 32. Now, when an AC high voltage is applied between both terminals 58 and 60, the above-mentioned spark discharge and surface discharge are generated from the linear corona discharge electrode, and when the gas to be oxidized is supplied from the inlet 56 in the direction of arrow 01, the gas 03 is generated by flowing in the direction of arrow 63 through the gap 62 between the cover 51 and the outer wall of the substrate cylindrical body E,
It is discharged from the outlet 57 in the direction of the arrow 64. in this case,
When the gas inlet 56 is provided eccentrically on the cover 51 so that the gas flows into the gap 62 in the tangential direction, it promotes the flow and agitation of the gas, further enhances the cooling effect of the corona discharge electrode 33, and increases the ozone yield. I can do it.

Further, in this example, a large number of linear corona discharge electrodes 33 may be arranged in the axial direction along the outer peripheral surface of E.

Furthermore, as shown in cross section in FIG. 1O, a corona discharge electrode may be constructed by wrapping a corrugated metal plate 65 around the outer periphery of E so that its top ridgeline 66 faces in the axial direction of B. In this case, the ridgeline portion 66 contacts the outer wall of E to form a discharge portion, causing the gas to be oxidized to flow into a large number of passages 67 surrounded by the corrugated metal plate 65 and the outside of E. However, in order to prevent oxidizing gas from flowing into the passage 68 surrounded by the inner wall of the cover 51 and the passage 65,
It is necessary to close this, and even if cooling fluid is flowed here to cool the corona discharge electrode 65f, it is still small. In these cases,
When the induction electrode is used with a grounding bond, the cover 51 must be made of an insulating material.

Conversely, the corona discharge electrode 65 may be grounded and the induction electrode may be used while being insulated from the ground; in this case.

The cover 51 can be removed as shown in cross section in FIG. In these cases, when water is used as a cooling medium, an appropriate waterproof film is applied to the inner surface of the substrate cylinder E to prevent water molecules from reaching the vicinity of the corona discharge electrode 33 through the ceramic. This is effective in preventing a decline in discharge performance.

In FIG. 12, a cylindrical induction electrode 32 is embedded and fired in the thick inside of a ceramic substrate cylinder E, and a linear corona electrode 69 with a circular cross-sectional shape is placed inside the substrate cylinder E on the inner wall of E. 7 is a vertical cross-sectional view of an embodiment of the present invention, which is fixed by welding to metal fixing rings 70 and 71, which are arranged in a helical manner at regular intervals so as to be in close contact with the inner wall of E, and which are crimped and fixed at both ends to the inner wall of E. In the figure, reference numerals 72 and 73 are cup-shaped end plates made of ceramic, plastic, metal, etc., and the outer peripheral wall thereof has an annular embankment body 74.7 that protrudes inward from the circular base.
5 and is fitted to the ends 42 and 43 of the ceramic substrate cylinder E via a backing 76177 as shown in the figure. The end plates 72 and 73 pass through the central part of the end plates 72 and 73, and further extend through the cylindrical body E.
By tightening from the left and right with a metal tightening rod 78 having thread grooves at both ends of the part that penetrates the inside of the rod along its central axis, and a naso (79+80) fitting into the thread grooves,
Maintains the airtightness of the interior of E. 81.82 is backing + 83184 is washer. The tightening metal rod 78 has a hollow cylindrical shape except for a part at the right end, and the left end also serves as a gas inlet, from which the oxidized gas introduced in the direction of arrow 87 flows into the hollow cylindrical internal chamber. flows in the direction of arrow 89, and near the right end thereof.

Hole 91 provided in front of the inner base head of the end plate 73
It is discharged to the inner side of the right end 43 of the substrate cylindrical body E, and further flows in the direction of the arrow 93 in the space 92 between the tightening rod and the inner wall of the cylindrical body E, during which time it is oxidized by the discharge action, and the end plate 72
The gas is discharged to the outside from a gas outlet 94 provided in the. % is a terminal of the corona radiation fjL pole 69, which is connected to a metal fixed ring 70 through an insulator tube % passing through an end plate 72. Further, reference numeral 97 denotes a terminal of the induction electrode 32, which penetrates through the substrate cylindrical body E and is connected to 32. Reference numeral 98 denotes a thin tungsten layer formed by firing on the outer wall of the ceramic substrate cylinder E, the outer surface of which is plated with nickel to form a waterproof film. 99 is a cylindrical metal sleeve surrounding the outside of the cylinder E, and the metal layer 9 is connected to the flanges 100 and 101 at both ends.
Cooling fluid inlet +02 and outlet 103 welded together and tangentially mounted in the vicinity of 100° 101
has. The cooling fluid introduced from the inlet 102 in the direction of the arrow 104 cools the cylinder E while circulating in the gap +05 between the burn throat 99 and the outer wall of the cylinder E in the direction of the arrow 106, and then exits. 103 to the outside. If we now apply an AC high voltage between terminals 95 and 97,
Needless to say, a spark discharge and a creeping discharge are generated from the corona discharge electrode 69, whereby the oxidized gas traveling inside the gap 92 in the direction of the arrow 93 is strongly oxidized to generate +03.

In this case, the yield and efficiency of ozone generation increases as the gas pressure increases, and the structure of FIG. 12 is suitable for increasing the gas pressure.

In the embodiment shown in FIG. 12, it is not necessary to use the jacket 99 for cooling the cylinder E.

By removing this, the cylinder body E is directly inserted into the cooling fluid at the end plate 72.
It may be inserted vertically to cool the cylinder so that it is above the liquid level, or water may be sprayed onto the outside of the cylinder E. Appropriate cooling fins may be attached to the outer wall of the cylinder E to cool it naturally or Cooling may be performed by forced air cooling. In this case, a metal plate is formed into an inverted T-shape as shown in Fig. 13 (■), and an inverted T-shaped cooling fin 108 with a large number of notches 1 (17) in the left and right vertical parts is formed into an inverted T-shaped cooling fin 108 as shown in Fig. As shown in and θ, while applying tension to the outer wall of the cylinder E, it is wound spirally and fixed by welding to the nickel-plated metal layer 98 at both ends, and furthermore, the top 109 of the 1-shaped part that is in contact with the outer wall of the cylinder E is fixed. By welding 98 over the entire surface, the heat conduction from the cylindrical body E to the fin tOS will be improved, and the cooling effect will be greatly improved.

In the embodiment shown in FIG. 12, the linear corona discharge electrodes 69 do not necessarily need to be arranged in a spiral shape on the inner wall of the substrate cylinder E, but may be arranged in a plurality of ring-shaped structures perpendicular to the central axis of the cylinder E. Alternatively, the corona discharge electrode may be constructed by bending a wire mesh or a metal grid into a cylindrical shape and bringing it into close contact with the inner wall of the cylinder E. Further, as shown in the cross section in FIG. 14, the corrugated metal plate 65 is bent into a cylindrical shape so that its top ridgeline mark is approximately parallel to or at a certain angle with the central axis of the cylinder E, and the top ridgeline 66 is aligned with the cylinder E. A corona discharge electrode may be constructed by inserting the electrode into the inner wall of the electrode so as to make contact with the inner wall of the electrode, and using the wall as a discharge portion. In this case, since the oxidation reaction region is a passage 67 surrounded by the corrugated metal plate 65 and the inner wall of the cylinder E, the gas to be oxidized must necessarily pass through this passage.

In FIG. 14, the corrugated metal plate 65 is welded and supported by a supporting metal cylinder 110 coaxial with the substrate cylinder E, and gas does not pass through the passage 68 surrounded by the two cylinders 110 and the corrugated metal plate 65. It's kind of blocked.

However, the corrugated metal plate 65 is passed through the cooling fluid through one passage 6B.
It goes without saying that the cylinder 110 may be made into a double cylinder and a cooling fluid may be flowed through the gap therebetween, or the cooling fluid may be flowed through the cylinder 110 itself.

FIG. 15 is a longitudinal cross-sectional view of another example in which the present invention can be implemented by disposing a corona discharge electrode inside the substrate cylinder E, and FIG. 16 is a cross-sectional view taken along the line X--X. The names and functions of the elements numbered 32 to 110 in the figures are the same as the names and functions of the elements numbered the same in FIGS. 12 and 14. In the figure, the corona discharge electrode consists of a number of U-shaped channel-shaped metal lits.

The base portion 112 is welded and fixed to the outer surface of a supporting metal cylinder 110 disposed coaxially inside the cylindrical body E.
The tips 114 of both side surfaces 113 of 1 are bent as shown in the figure to form a non-sharp discharge portion, and are in contact with the inner wall surface of the cylinder E.

The supporting metal cylinder 110 passes through the cylinder E and both end plates 72 and 73, and is fitted with a nut 7 at the threaded portions at both ends thereof.
9 and 80 serve as a tightening rod for tightening and fixing the end plates 72 and 73 to the cylinder E. And the cylinder 1
Cooling fluid is introduced in the direction of arrow 116 from one end 115 of 10, flows inside 117 of two cylinders 110, cools the corona discharge electrode 111 fixed to 110, and then cools the other end 118.
It is discharged in the direction of arrow +19. 120 is the lth terminal of the corona discharge electrode, which is connected to the corona discharge electrode 111 via a washer 839 and a cylinder 110, and by applying an AC high voltage between the terminals 97 and 120, spark discharge and creeping discharge are generated from the discharge part 114. conduct.

121 is a gas inlet provided in the end plate 72, and the gas to be oxidized introduced from here in the direction of arrow +22 enters the cylinder 11.
0, passes through a passage 123 surrounded by the substrate cylinder E and the corona discharge electrode 111, and generates 03.

The gas is discharged from a gas outlet 124 provided in the end plate 73 in the direction of an arrow 125. The major features of this embodiment are:

By flowing cooling fluid inside the cylinder 110.

By being able to cool both the corona discharge [ii+xt and the gas to be oxidized, this greatly increases the yield and efficiency of ozone generation. In this example, a cylindrical jacket spring is provided outside the substrate cylinder E, and cooling fluid is flowed into the gap 105 to cool the cylinder E from the outside. You may also do the 13th
It goes without saying that cooling may be applied as shown in the figure.

Note that the new ozonizer according to the present invention is as follows.

(1) The more the inlet gas is dehumidified, (2) the more the inlet gas is cooled, (3) the gas pressure is increased, and (4) the more the cylinder E and the corona discharge electrode are cooled, the higher the ozone generation will be. Yields and efficiencies are obtained, and yields can be approximately doubled when oxygen is used in place of regular air. Also,
The applied AC high voltage is not only the normal commercial frequency AC voltage.

High frequency AC high voltage and pulsed high voltage can be used.
In this case, the yield of ozone generation is proportional to the frequency. In particular, when using an extremely short high voltage pulse with a width of 1 microsecond or less, the efficiency of ozone generation is greatly improved. It is also desirable to remove impurity gases such as SO2+NH3 from the inlet gas in advance through a suitable adsorbent such as an activated carbon filter in order to prevent the discharge surface of the cylinder E from becoming contaminated.

The present invention uses an extremely thick fine ceramic layer as an insulating dielectric, and provides a shoulder-shaped induction electrode on one side of the layer and a corona discharge electrode with a non-sharp discharge part on the other side. It generates ozone or oxidizes gas by applying high voltage and generating spark discharge and bath surface discharge, but by using fine ceramic with extremely strong electrical dielectric strength and mechanical and thermal strength. (1) The thickness can be made extremely thin, the power supply voltage can be lowered, and the power supply becomes cheaper. (2) Since high-frequency AC voltage can be used, the power supply is not only inexpensive, but also ozone generation is proportional to frequency, so a large amount of ozone can be generated with a small ozonizer. (3) The thermal conductivity of fine ceramics is extremely high, and the cooling effect is significantly improved, resulting in a higher yield and efficiency of ozone production.

(4) When using tungsten as the induction electrode and firing it together with ceramic, the coefficient of thermal expansion of tungsten is equal to that of high-purity alumina ceramic.
In addition to having the effect that there is no fear of the induction electrode peeling off even when the ozonizer is strongly cooled, the use of a non-sharp discharge part in contact with the ceramic layer surface improves the electric field at the beginning of spark discharge and the transition to clear surface discharge. As a result, the initial electric field can be significantly increased, and the electron velocity can be sufficiently increased, a large amount of oxidizing chemically active species can be efficiently generated, and the yield and efficiency of ozone generation can be significantly improved. As a result of these efforts, it has become possible to realize an ozonizer that is small, inexpensive, and has a high yield and high efficiency.

[Brief explanation of the drawing]

Figure 1 is an assembled perspective view of one embodiment of the present invention, Figures 2 and 3 are
Figures 4, 5 and 6 are. FIG. 7 is a perspective view showing various configurations of the corona discharge electrode used in the present invention, and FIG. 7 is a perspective view of one configuration of the lattice-like support. FIG. 8 is a vertical sectional view of ff1J, which uses the embodiment of FIG. 1 as a basic block and stacks these blocks in multiple layers to implement the present invention. FIG. 9 is a longitudinal cross-sectional view of one full-scale embodiment of the present invention, FIGS. 10 and 11 are cross-sectional views of modified configurations thereof, and FIG. 12 is a longitudinal cross-sectional view of one embodiment of the present invention. A vertical cross-sectional view of the embodiment, FIG. 13 is a diagram showing cooling fins of a modified configuration and their attachment, and FIG.
FIG. 1 is a yellow cross-sectional view that does not show another modified configuration mode of the figure. 15th
The figure is a longitudinal sectional view of one embodiment of the present invention, and FIG. 16 is a sectional view thereof. The names of the main elements in the figure are as follows: A, B, C, D.・・・ Ceramink substrate E ・・・
... ... ... Ceramic substrate cylinder 112, 1
'+ 2'...Induction electrode 6 + 6Z 6''
+ 65... Corrugated metal plate corona discharge electrodes 8, 9.
8', 9'---Supporting corrugated plates 6b, 6c
+ 12, 66 + 114-=-discharge section 1:'l
, 16. lli', 17. +8.19.24.
・・・Corona discharge electrode side ・・・・ ・ ・・・・
AC high voltage power supply 32 ・・・・・・・・・ Cylindrical induction electrode 33.69 ・・・ ・ ・・・・・・ Spiral corona discharge electrode 36.37 ・・・・・・・・・
...... End plate 38.102. ■5...
- Cooling fluid inlet 39, 103, 118...
Exit 51.99 ・・・・・・・・・−・・・
... Cylindrical/burnt throat 56+ 84++ 121
...... Gas inlet 57, 94. 124・
・・・・・・・・・・・・ Gas outlet lower 8 ・・・・・・
・・・・・・・・・・・・・・・ Metal rod for tightening 79.
80 ・・・・・・・・・・・・・・・ Natsuto+
08 ・・・・・・・・・・・・・・・ Inverted T-shaped cooling fin +10 ・・・・・・・・・・・・・・・ Supporting metal cylinder +11 ・−・・・・・・・・・ ・・・・・・・・
・・U-shaped channel corona discharge electrode or higher

Claims (30)

[Claims] (1) A corona discharge electrode having a discharge part with a radius of curvature of 0.1 mm or more on one surface of a ceramic substrate made of insulating ceramic with a thickness of 2 mm or less, and the discharge part substantially touching one surface of the ceramic substrate. Further, on the other surface of the ceramic substrate, a planar induction electrode is integrally fired with the ceramic substrate so as to cover at least the entire portion of the corona electrode facing the contact portion with the ceramic substrate. A high-voltage AC power supply is provided for applying an AC high voltage between the two electrodes, and a passage is provided for causing the oxidizing gas to flow along the surface of the ceramic substrate on the side on which the corona discharge electrode is disposed. This is an ozonizer device using ceramic, which is characterized by: (2) Claim (1) characterized in that the planar induction electrode is embedded and fired inside the ceramic substrate A.
An ozonizer device using the ceramic described in . (3) The ceramic substrate is made of high-purity alumina porcelain, and the induction electrode is made of a tungsten thin film layer formed by a thick film printing method and then integrally fired with the high-purity alumina porcelain. An ozonizer device using the ceramic according to claims (1) and (2). (4) Claims (1) to (3) characterized in that the ceramic substrate is cooled by flowing a cooling fluid to the side of the ceramic substrate opposite to the side where the corona discharge portion is present. An ozonizer device using the ceramic described above. (5) A cooling fin is provided on the surface of the ceramic substrate opposite to the side where the corona discharge portion is present, in close contact therewith. Ozonizer device using ceramic. (6) The ozonizer device using ceramic according to claim (5), wherein the cooling fin is an inverted T-shaped cooling fin as described in the main text and FIG. (7) An ozonizer device using the ceramic according to claims (1) to (6), characterized in that the corona discharge electrode is cooled by a cooling fluid. (8) An ozonizer device using ceramic according to claims (1) to (7), characterized in that a dehumidifier is provided to dehumidify the gas to be oxidized in advance. (9) From claim (1), the gas to be oxidized is caused to flow under pressure along the surface of the ceramic substrate on which the corona discharge electrode is disposed. 8) An ozonizer device using the ceramic described above. (10) The ceramic substrate is a flat plate, the two plates are supported parallel to each other, a corona discharge electrode is disposed between them, and a cooling fluid is provided on the side of each ceramic substrate opposite to the side where the corona discharge electrode is present. An ozonizer device using the ceramic described in claims (1) to (9), characterized in that the ceramic is made to flow. (11) The device according to claim (10) is used as a basic block, and is stacked in multiple layers with a partition wall so that the passage for the gas to be oxidized and the passage for the cooling fluid are separated. Claim (1) to (10)
) An ozonizer device using the ceramic described above. (12) An ozonizer device using ceramic according to claim (11), characterized in that a support for supporting the upper and lower ceramic substrates is provided in the cooling fluid passage. (13) An ozonizer device using the ceramic described in claims (1) to (9), wherein the ceramic substrate is a cylindrical substrate tube. (14) An ozonizer device using ceramic according to claim (13), characterized in that cup-shaped end plates are provided on both sides of the substrate cylinder for airtightly sealing it. (15) disposing a corona discharge electrode on the outer wall surface of the substrate cylinder;
An ozonizer device using the ceramic according to claims (13) and (14), characterized in that a cooling fluid is allowed to flow inside the ozonizer device. (16) A cylindrical jacket is provided on the outside of the corona discharge electrode of the substrate cylindrical body, so as to surround it, both ends of which are in close contact with the substrate cylindrical body, and having gas inlets and outlets near both ends. An ozonizer device using the ceramic according to claim (15). (17) A corona discharge electrode is disposed on the inner wall surface of the substrate cylinder to allow gas to be oxidized to flow inside the substrate cylinder and to allow cooling fluid to flow outside the substrate cylinder. An ozonizer device using the ceramic according to claims (13) and (14). (18) An ozonizer device using the ceramic described in claims (1) to (17), wherein the corona discharge electrode is made of a corrugated metal plate. (19) An ozonizer device using the ceramic described in claims (1) to (17), wherein the corona discharge electrode is made of a metal wire. (20) An ozonizer device using the ceramic described in claims (1) to (17), wherein the corona discharge electrode is made of a spiral metal wire. (21) An ozonizer device using ceramic according to claims (1) to (17), wherein the corona discharge electrode is made of a metal pipe. (22) An ozonizer device using the ceramic described in claims (1) to (17), wherein the corona discharge electrode is made of a metal wire mesh. (23) An ozonizer device using the ceramic described in claims (1) to (17), wherein the corona discharge electrode is made of a metal grid. (24) From claim (1) to (1), wherein the corona discharge electrode is made of a helical metal spring.
7) An ozonizer device using the ceramic described above. (25) The ceramic according to claims (1) to (17) is used, wherein the corona discharge electrode is composed of an elongated metal strip with one edge bent to form a non-sharp discharge part. ozonizer device. (26) An ozonizer using the ceramic described in claims (1) to (17), characterized in that the corona discharge electrode is made of the U-shaped channel-shaped metal described in the main text and FIG. Device. (27) The base of the U-shaped channel-shaped metal is fixed to the outer surface of a supporting metal cylinder disposed coaxially within a substrate cylinder through which a cooling fluid flows,
An ozonizer device using the ceramic according to claim (17). (28) An ozonizer device using ceramic according to claims (1) to (27), wherein the AC high voltage power source is a high frequency AC high voltage power source with a frequency of 5 KHz or more. (29) An ozonizer device using the ceramic described in claims (1) to (27), characterized in that the AC high voltage power source is a high voltage pulse power source. (30) Claims (29) characterized in that the high voltage pulse power source is an extremely short high voltage pulse power source that generates an extremely short high voltage pulse voltage with a pulse width of 1 microsecond or less.
) An ozonizer device using the ceramic described in ).