JPS6145291B2 - - Google Patents
Info
- Publication number
- JPS6145291B2 JPS6145291B2 JP54160360A JP16036079A JPS6145291B2 JP S6145291 B2 JPS6145291 B2 JP S6145291B2 JP 54160360 A JP54160360 A JP 54160360A JP 16036079 A JP16036079 A JP 16036079A JP S6145291 B2 JPS6145291 B2 JP S6145291B2
- Authority
- JP
- Japan
- Prior art keywords
- recording
- film
- getter
- recording member
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004649 discoloration prevention Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002087 whitening effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
Landscapes
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
Description
【発明の詳細な説明】
本発明はビデオデイスク又はPCMオーデイオ
機器や事務用記録機等で情報を光学的に高密度に
記録し、再生する装置に於いて、高密度記録部材
の記録媒体の性能を長年月に互つて保持出来る構
造を有する光学的記録部材に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the performance of a recording medium of a high-density recording member in a device for optically recording and reproducing information at high density in a video disk, PCM audio equipment, office recording machine, etc. The present invention relates to an optical recording member having a structure that allows the recording medium to be held together for many years.
従来、光学的記録装置の記録部材は第1図に示
すようにガラス又はプラスチツクの円板状基板1
上にTeやSe等の記録媒体2の蒸着膜を形成した
ものである。これはレーザ光にて、約1μのビツ
ト6を無数に設けることにより、デジタル化した
信号を記録するものである。尚、5は中心軸穴を
示す。この記録部材を空気中に放置すると、ゴミ
が付着し、信号の書き込み読み出した障害を生じ
る。又腐食性ガスや湿気(H2O)やO2やCO2によ
り劣化し易い。例えば蒸着直後のTeは光の透過
率が5〜10%程度の金属光沢であつたものが、1
カ月室内に放置しただけで酸化又は水酸化物化し
て、50〜60%に増加し、レーザー光による記録・
読み出しのS/N比が悪くなる。この対策とし
て、第2図に示すように保護膜3をつけた記録部
材を検討されている。しかしこの方式はゴミの付
着による記録したピツト6への悪影響は除ける
が、書き込み時のレーザ光のエネルギーが多くな
る。例えば第1図の方式では4mW−500nsecでピ
ツトを形成出来たものが、第2図の方式では
8mW−500nsec必要である。これはTe蒸着膜に
約1μφのピツトを形成する場合、第1図の方式
では基板1へのみ熱伝導が生じたが、第2図の方
式では保護膜3へも熱が伝導するため、熱の逃げ
が多くなるためである。一方、記録媒体のTe蒸
着膜の白化等の劣化は、第1図方式の基板にくら
べて少しは改善されるが、これも完全ではない。 Conventionally, a recording member of an optical recording device has a disk-shaped substrate 1 made of glass or plastic, as shown in FIG.
A vapor deposited film of a recording medium 2 such as Te or Se is formed thereon. This uses a laser beam to record a digitized signal by providing an infinite number of bits 6 of about 1 .mu.m. Note that 5 indicates the center shaft hole. If this recording member is left in the air, dust will adhere to it, causing trouble in writing and reading signals. Also, it is easily deteriorated by corrosive gases, moisture (H 2 O), O 2 and CO 2 . For example, immediately after vapor deposition, Te had a metallic luster with a light transmittance of about 5 to 10%, but
If left indoors for a month, it will oxidize or turn into hydroxide, increasing to 50-60%, and recording with laser light.
The read S/N ratio deteriorates. As a countermeasure against this problem, a recording member provided with a protective film 3 as shown in FIG. 2 is being considered. However, although this method eliminates the adverse effect on the recorded pits 6 due to the adhesion of dust, the energy of the laser beam during writing increases. For example, the method shown in Figure 1 was able to form pits with 4mW-500nsec, but the method shown in Figure 2
8mW−500nsec is required. This is because when forming pits of approximately 1μφ in the Te vapor deposited film, heat was conducted only to the substrate 1 in the method shown in Figure 1, but heat was also conducted to the protective film 3 in the method shown in Figure 2. This is because more people run away. On the other hand, deterioration such as whitening of the Te vapor-deposited film on the recording medium is slightly improved compared to the substrate of the method shown in FIG. 1, but this is not perfect either.
これは、保護膜は有機物であるためにH2Oや
O2の気体分子を容易に通すため、Te等のような
活性な金属蒸着膜がO2やH2Oと反応するのを完
全に防ぐことが困難なためである。 This is because the protective film is an organic substance, so H 2 O and
This is because it is difficult to completely prevent an active metal vapor deposited film such as Te from reacting with O 2 or H 2 O because O 2 gas molecules easily pass through it.
更にこの対策として、第3図に示すように記録
層を内側に設けた中空式の記録部材が考えられて
いる。この方式によると記録媒体2は基板1とス
ペーサ4とで取り囲まれているため、ゴミの付着
による記録用ピツト穴6への影響は除き得、さら
に記録媒体2を保護膜3と基板1でサンドイツチ
することがないため熱伝導によるレーザー光線の
熱ロスを防ぐことが出来る。又中空部分に不活性
ガスのN2やArガスを充しておくことにより、Te
金属蒸着膜の劣化を防げる利点がある。しかし、
Arガスを充した場合でもTe金属蒸着膜の変色防
止効果は長期的に劣化する。たとえば初期透過
率、5〜10%のものが2カ月で20〜30%に劣化す
ることにより、数年又は10数年に互る長年月の記
録の保存には不適当であることが解る。 Furthermore, as a countermeasure to this problem, a hollow type recording member having a recording layer provided inside as shown in FIG. 3 has been considered. According to this method, since the recording medium 2 is surrounded by the substrate 1 and the spacer 4, the influence of dust adhesion on the recording pit hole 6 can be eliminated. This prevents heat loss of the laser beam due to heat conduction. In addition, by filling the hollow part with inert gas N2 or Ar gas, Te
This has the advantage of preventing deterioration of the metal vapor deposited film. but,
Even when filled with Ar gas, the discoloration prevention effect of the Te metal evaporated film deteriorates over a long period of time. For example, an initial transmittance of 5 to 10% deteriorates to 20 to 30% in two months, making it unsuitable for preserving records over many years or even over ten years.
本発明は上記の問題点すなわち長年月の劣化の
問題を解決するためになされたもので、蒸着薄膜
の特性を長期間保つことが出来るように真空状態
保ち且つゲツターを設置することにより、記録媒
体2の性能を保つようにしたものである。 The present invention was made in order to solve the above-mentioned problem, that is, the problem of deterioration over many years, and by maintaining a vacuum state and installing a getter, the characteristics of the deposited thin film can be maintained for a long period of time. This is designed to maintain the performance of 2.
以下図面を参照して本発明を説明する。 The present invention will be explained below with reference to the drawings.
第4図は本発明の光学的記録部材の断面形状を
示す図である。本図でもわかるように、ガラスで
構成された基板1の片側に金属薄膜等の記録膜2
を蒸着した後、スペーサー4,4′を取付け、更
にゲツター室10を形成するための隔壁13を設
置してその中心部にリング状のゲツター11を設
置する。このゲツター11には記録膜2への影響
を及ぼさぬように遮蔽板12を併置してある。こ
の製造方法は、スペーサ4,4′と孔14のあい
た融壁13をガラスで構成し、これらの接合には
インジユウム金属箔16を用いて圧接して、気密
構造とする。組立て前に各部品を真空中で加熱
し、十分に脱ガス処理を行う。記録膜用の例えば
金属蒸着は組立前に行う。真空排気は、外側のス
ペーサー4に取りつけた排気管15より行ない、
10-5Torr台に排気した後チツプオフし、ゲツタ
ーに高周波電界又は通電によつて、ゲツター支持
体を加熱して、ゲツター材料(Ba金属等)を真
空容器内壁の一部に蒸発する。通電によつてゲツ
ターを加熱する場合は基板の表面にリード線を取
り出した構造となつており、電源よりクリツプに
てつなぎ、通電してゲツター材を蒸発せしめる。 FIG. 4 is a diagram showing the cross-sectional shape of the optical recording member of the present invention. As can be seen in this figure, a recording film 2 such as a thin metal film is formed on one side of a substrate 1 made of glass.
After vapor deposition, spacers 4 and 4' are attached, and a partition wall 13 for forming a getter chamber 10 is installed, and a ring-shaped getter 11 is installed in the center thereof. A shielding plate 12 is placed alongside this getter 11 so as not to affect the recording film 2. In this manufacturing method, the spacers 4, 4' and the fusion wall 13 with the holes 14 are made of glass, and the indium metal foil 16 is used to press them together to form an airtight structure. Before assembly, each part is heated in a vacuum and thoroughly degassed. For example, metal vapor deposition for the recording film is performed before assembly. Vacuum evacuation is performed through the exhaust pipe 15 attached to the outer spacer 4,
After evacuating to a 10 -5 Torr table, the getter is tipped off, and the getter support is heated by applying a high frequency electric field or current to the getter to evaporate the getter material (Ba metal, etc.) onto a part of the inner wall of the vacuum container. When heating the getter by applying electricity, the structure is such that a lead wire is taken out from the surface of the board, connected to the power supply with a clip, and the getter material is evaporated by applying electricity.
これにより記録媒体であるTe蒸着膜と反応し
てTeの酸化物やTeの水酸化物となるO2ガスや
H2Oをゲツタで吸着する。ゲツター材が例えば
Ba金属の場合、O2,H2O,CO2との反応は次の
如く行われる。 As a result, O 2 gas and
Adsorbs H 2 O in the form of sticks. For example, getter material
In the case of Ba metal, the reaction with O 2 , H 2 O, and CO 2 is carried out as follows.
2Ba+O2 →2BaO
Ba+2H2O →2Ba(OH)2+H2
2Ba+2CO2+O2→2BaCO3
このようにしてBa膜が不純物ガスを長年月に
互つて吸着し、記録膜の劣化を防止するものであ
る。2Ba+O 2 →2BaO Ba+2H 2 O →2Ba(OH) 2 +H 2 2Ba+2CO 2 +O 2 →2BaCO 3In this way, the Ba film adsorbs impurity gases over many years and prevents the recording film from deteriorating. .
第5図は変形例で、ゲツター室10を円周部に
設置した場合を示す。これは第4図の方式より、
ゲツターの蒸着面積が増えるので、高真空度を保
持する時間が長くなり、より長寿命の記録部材を
作ることが可能である。 FIG. 5 shows a modification in which the getter chamber 10 is installed at the circumference. This is based on the method shown in Figure 4.
Since the area on which the getter is evaporated increases, the time for maintaining a high degree of vacuum becomes longer, making it possible to create a recording member with a longer life.
以上述べたように本発明によれば、記録膜の特
性を長年月に互つて保持出来る光学的記録部材を
提供することが出来る。 As described above, according to the present invention, it is possible to provide an optical recording member that can maintain the characteristics of a recording film for many years.
第1図は保護膜を設けない従来の記録部材の断
面図、第2図は保護膜を設けた従来の記録部材の
断面図、第3図は記録層を内側に設けた中空式の
従来の記録部材の断面図、第4図は真空管タイプ
の記録部材で中心部にゲツター室を有する本発明
の記録部材の断面図、第5図は本発明の他の実施
例で同じく真空管タイプで周辺部にゲツター室を
有する記録部材の断面図である。
1:基板、2:記録莚、4,4′:スペーサ、
5:中心軸穴、10:ゲツター室、11:ゲツタ
ー材、12:遮蔽板、13:ゲツター室隔壁、1
4:通気孔、15:真空排気管、16:接合面
(インジウム箔)。
Figure 1 is a cross-sectional view of a conventional recording member without a protective film, Figure 2 is a cross-sectional view of a conventional recording member with a protective film, and Figure 3 is a conventional hollow type recording member with a recording layer provided inside. 4 is a sectional view of a recording member of the present invention which is a vacuum tube type recording member and has a getter chamber in the center; FIG. 5 is a sectional view of a recording member of the present invention which is also a vacuum tube type and has a peripheral portion. FIG. 3 is a cross-sectional view of a recording member having a getter chamber at the center thereof. 1: Substrate, 2: Recording plate, 4, 4': Spacer,
5: central shaft hole, 10: Getter chamber, 11: Getter material, 12: shielding plate, 13: Getter chamber partition, 1
4: Vent hole, 15: Vacuum exhaust pipe, 16: Joint surface (indium foil).
Claims (1)
壁に記録膜を設け、且つ前記基板内の中空部を真
空にすると共にゲツター材を内蔵させたことを特
徴とする光学的記録部材。 2 前記ゲツター材は、前記円板状基板の中心部
又は周辺部に設けられたことを特徴とする特許請
求の範囲第1項記載の光学的記録部材。 3 前記記録膜は、記録用金属薄膜であることを
特徴とする特許請求の範囲第1項記載の光学的記
録部材。[Claims] 1. A disk-shaped transparent substrate is hollow inside and a recording film is provided on the inner wall thereof, and the hollow portion inside the substrate is evacuated and a getter material is incorporated therein. Optical recording member. 2. The optical recording member according to claim 1, wherein the getter material is provided at the center or the periphery of the disc-shaped substrate. 3. The optical recording member according to claim 1, wherein the recording film is a recording metal thin film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16036079A JPS5683852A (en) | 1979-12-12 | 1979-12-12 | Optical recording material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16036079A JPS5683852A (en) | 1979-12-12 | 1979-12-12 | Optical recording material |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5683852A JPS5683852A (en) | 1981-07-08 |
JPS6145291B2 true JPS6145291B2 (en) | 1986-10-07 |
Family
ID=15713284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16036079A Granted JPS5683852A (en) | 1979-12-12 | 1979-12-12 | Optical recording material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5683852A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4074282A (en) * | 1976-05-13 | 1978-02-14 | North American Philips Corporation | Radiation-sensitive record with protected sensitive surface |
FR2524186B1 (en) * | 1982-03-23 | 1989-02-24 | Thomson Csf | PROTECTED OPTICAL DISC COMPRISING A FLEXIBLE CLOSING ELEMENT |
FR2528216B1 (en) * | 1982-06-08 | 1988-01-08 | Thomson Csf | PROTECTED OPTICAL DISC WITH FREE LAYER |
JPS5987635A (en) * | 1982-11-11 | 1984-05-21 | Sharp Corp | Optical storage element |
JPS59124891A (en) * | 1982-12-31 | 1984-07-19 | Tdk Corp | Optical recording medium |
-
1979
- 1979-12-12 JP JP16036079A patent/JPS5683852A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5683852A (en) | 1981-07-08 |
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