JPS6124192A - Thin film electroluminescent element - Google Patents
Thin film electroluminescent elementInfo
- Publication number
- JPS6124192A JPS6124192A JP14542384A JP14542384A JPS6124192A JP S6124192 A JPS6124192 A JP S6124192A JP 14542384 A JP14542384 A JP 14542384A JP 14542384 A JP14542384 A JP 14542384A JP S6124192 A JPS6124192 A JP S6124192A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- emitting layer
- light emitting
- insulating layer
- metal thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims description 32
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 5
- 238000004020 luminiscence type Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 101100348958 Caenorhabditis elegans smf-3 gene Proteins 0.000 description 1
- 229910021175 SmF3 Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は交流電界の印加によってエレクトロルミネッセ
ンスを呈する薄膜エレクトロルミネッセンス素子に関す
る。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a thin film electroluminescent device that exhibits electroluminescence upon application of an alternating current electric field.
(従来の技術)
従来、交流動作の薄膜エレクトロルミネッセンス素子(
以下薄膜EL素子という)においては、輝度と発光効率
を改善し、長時間にわたる動作の安定性を得るために、
発光中心として0.5〜3mobチのMnあるいはTb
F3. SmF3. PrF、等を添加したZn8.
Zn8e等の発光層を、Yt Os ;hるいはA40
B 、 Pb TiO@ + Ba Tl 0g +
81 B N4等の絶縁層で両側よシ挾んだ、いわゆ
る二重絶縁構造の薄膜EL素子が用いられていた。(Prior art) Conventionally, AC-operated thin film electroluminescent elements (
In order to improve the brightness and luminous efficiency of thin-film EL devices (hereinafter referred to as thin-film EL devices), and to obtain stable operation over long periods of time,
0.5 to 3 mobs of Mn or Tb as the luminescent center
F3. SmF3. Zn8. to which PrF, etc. were added.
A light-emitting layer such as Zn8e, YtOs;
B, Pb TiO@ + Ba Tl 0g +
A thin film EL element with a so-called double insulation structure, which is sandwiched between two insulating layers such as 81 B N4, was used.
従来の二重絶縁部薄膜11imL素子の基本構造の一例
を第1図に示す。An example of the basic structure of a conventional double insulator thin film 11imL element is shown in FIG.
第1図において、1はガラス基板、2は”t OB +
8nO,、ITO(Indium Tin 0xide
)あるいは金属薄膜等からなる基板側透明電極、3は
その上に電子ビームあるいはスバ、り蒸着法等により蒸
着されたY20B 、 AA20,1 、 PbTiO
3、BaTi0. 、51mN4等の絶縁層、4はその
上に蒸着されたMn、 TbF、 。In FIG. 1, 1 is a glass substrate, 2 is "t OB +
8nO, ITO (Indium Tin Oxide)
) or a transparent electrode on the substrate side made of a metal thin film, etc., and 3 is Y20B, AA20,1, PbTiO deposited thereon by electron beam or sputtering vapor deposition method.
3. BaTi0. , 51 mN4, etc., with Mn, TbF, etc. deposited on top of the insulating layer.
SmFl 、 PrF、等の発光中心を含むZn8から
なる発光層である。この発光層4も電子イーム蒸着法ち
るいはスバ、り蒸着法等によシ製造される。5は発光層
4の上に蒸着された絶縁層であり蒸着法及び材料は絶縁
43と同様でおる。6はさらにその上に蒸着されたBま
たはITO等よシなる電極であシ、7はEL素子を駆動
する交流電源で、電極2と電極6に接続されている。This is a light-emitting layer made of Zn8 containing luminescent centers such as SmFl and PrF. This light-emitting layer 4 is also manufactured by electron beam evaporation, submersible evaporation, or the like. Reference numeral 5 denotes an insulating layer deposited on the light emitting layer 4, and the deposition method and material are the same as those for the insulating layer 43. Reference numeral 6 is an electrode made of B or ITO, which is further deposited thereon, and 7 is an AC power source for driving the EL element, which is connected to the electrodes 2 and 6.
ところでこのような二重絶縁構造ではどうしても動作電
圧が増加する。そこで、よシ低電圧で動作する片絶縁型
薄膜EL素子が用いられるようになった。片絶縁fiE
L素子の基本構造の一例を第2図に示す。However, such a double insulation structure inevitably increases the operating voltage. Therefore, single-insulated thin film EL elements that operate at a much lower voltage have come into use. Single insulation fiE
An example of the basic structure of an L element is shown in FIG.
第2図に示すEL素子は絶縁層3が除かれている。その
他は第1図に示すEL素子と同じである。In the EL element shown in FIG. 2, the insulating layer 3 is removed. The rest is the same as the EL element shown in FIG.
次にEL素子の発光原理を第2図に示す構造のBL素子
について説明する。Next, the light emission principle of the EL element will be explained with respect to the BL element having the structure shown in FIG.
発光層4は発光開始前は単純なコンデンサと考えられる
。電極2と6の間に電源7の交流電圧を印加すると、発
光層4及び絶縁層5には各々の静電容量に応じた電圧が
加えられる。発光層4に加えられる電界が十分高くなる
と(約106V/l:m以上)、発光層4の伝導帯に電
子が励起される。この電子は電界によシ十分加速され発
光中心に衝突する。これにより適当な励起状態に上った
発光中心の電子が基底状態へ戻る際に、発光中心に固有
なエネルギー値を持った光が放出される。実際には、結
晶格子との相互作用等によ9発光スペクトルはある程度
の拡がシを持つ。前にあげた発光中 心であるMn
、 TbF、 、 SmF、 、 PrFB等はその発
光エネルギーが可視領域にあるため強い発光が観測され
ることになる。The light emitting layer 4 is considered to be a simple capacitor before the start of light emission. When an AC voltage from a power source 7 is applied between the electrodes 2 and 6, a voltage is applied to the light emitting layer 4 and the insulating layer 5 according to their respective capacitances. When the electric field applied to the light emitting layer 4 is sufficiently high (approximately 106 V/l:m or more), electrons are excited in the conduction band of the light emitting layer 4. These electrons are sufficiently accelerated by the electric field and collide with the luminescent center. As a result, when the electrons in the luminescent center that have risen to an appropriate excited state return to the ground state, light with an energy value unique to the luminescent center is emitted. In reality, the emission spectrum has a certain degree of broadening due to interaction with the crystal lattice and the like. Mn, the luminescent center mentioned earlier
, TbF, , SmF, , PrFB, etc., have emission energy in the visible range, so strong light emission is observed.
(従来技術の問題点)
EL素子において、印加電圧に対する輝度の立上シを急
峻にすることは、マトリ、クス型のパネルを作製する場
合非常に重要である。急峻であるほどパネルの画素を点
灯または消灯するに要する電圧(以下変調電圧という)
、従って電力が減少し、また全画面を点灯した場合の発
光輝度の均一性が増すとともに、小さな変調電圧で大き
なコントラストが得られる。しかるに、従来の片絶縁屋
EL素子では絶縁層に接する側の発光層の発光開始電圧
とITO等の電極に接する側の発光開始電圧が異なる。(Problems with the Prior Art) In an EL element, it is very important to make the rise of brightness relative to an applied voltage steep when manufacturing a matrix-type or box-type panel. The steeper the voltage, the more the voltage required to turn on or off the pixels of the panel (hereinafter referred to as modulation voltage)
Therefore, the power consumption is reduced, and the uniformity of the luminance when the entire screen is lit is increased, and a large contrast can be obtained with a small modulation voltage. However, in the conventional single-insulator EL element, the emission start voltage of the light emitting layer on the side in contact with the insulating layer is different from the emission start voltage on the side in contact with the electrode such as ITO.
このため、片絶縁型EL素子では印加電圧に対する輝度
の立上シが鈍いという欠点を有していた。For this reason, the single-insulation type EL element has the disadvantage that the brightness rises slowly with respect to the applied voltage.
(発明の目的)
本発明の目的は、上記従来の欠点を除去し、よシ急峻な
輝度の立上9を有する片絶縁型の薄膜エレクトロルミネ
ッセンス素子を提供することにある0
(発明の構成)
本発明の薄膜エレクトロルミネッセンス素子は、透明な
基板上に透明電極1発光層、絶縁層、対向電極を順次積
層して成る薄膜エレクトロルミネッセンス素子において
、前記発光層と絶縁層との間に金属薄膜を設けたことを
特徴として構成される。(Object of the Invention) An object of the present invention is to eliminate the above-mentioned conventional drawbacks and to provide a single-insulation type thin film electroluminescent device having a sharp rise in luminance. The thin film electroluminescent device of the present invention is a thin film electroluminescent device in which a transparent electrode, a light emitting layer, an insulating layer, and a counter electrode are sequentially laminated on a transparent substrate, and a metal thin film is provided between the light emitting layer and the insulating layer. It is configured with the following features.
本発明は、発光層と絶縁層との間に金属薄膜を設け、発
光層の両側の界面を金属と同様の性質を持つ界面とする
ことによシ、輝度の立上シが急峻な片絶縁型薄膜El、
素子が得られるようにしたものである。The present invention provides a thin metal film between a light-emitting layer and an insulating layer, and by making the interfaces on both sides of the light-emitting layer interfaces with properties similar to those of metal, the brightness rises sharply. Type thin film El,
The device was designed so that the device could be obtained.
金属薄膜の材料は特に制限はなく何を用いてもよいが金
属の拡散が少いTi 、 W、 Or、 Mo 、 M
nなどの高融点金属が望ましい。また、金属薄膜の膜厚
は数Xから数百Xの範囲が望ましい。この理由としては
(1)この程度の膜厚で十分な急峻さが得られる、(2
)あまシ膜厚が厚いと素子の絶縁破壊部に金属薄膜を通
して電流が集中し、破壊部の大きさが大きくなシ、素子
の信頼性が低下する。といったことがあげられる。There are no particular restrictions on the material of the metal thin film, and any material may be used, but Ti, W, Or, Mo, and M, which have low metal diffusion, can be used.
A high melting point metal such as n is preferable. Further, the thickness of the metal thin film is desirably in the range of several X to several hundred X. The reasons for this are (1) sufficient steepness can be obtained with this film thickness, and (2)
) If the thickness of the film is too thick, current will concentrate through the metal thin film at the dielectric breakdown part of the element, which will increase the size of the breakdown part and reduce the reliability of the element. Things like this can be mentioned.
なお、本発明による金属薄膜はEL素子の発光部のみに
設ければよい。従って、金属薄膜をマトリ、クス型電極
を有するELパネルに適用する場合は上下の電極が交わ
る発光部のみにこの金属薄膜を設ければよく、これによ
多画素間のクロスト′−りなしに輝度の立上りが急峻な
りL素子を得ることができる。また、金属薄膜を100
A以下の非常に薄い膜とした場合は金属薄膜自体が高抵
抗であり、表示素子全体に金属薄膜を設けても画素間の
クロストークをなくすることができる。Note that the metal thin film according to the present invention may be provided only on the light emitting part of the EL element. Therefore, when applying a metal thin film to an EL panel having matrix or box type electrodes, it is sufficient to provide the metal thin film only in the light emitting part where the upper and lower electrodes intersect, thereby eliminating cross-over between multiple pixels. The brightness rises steeply and an L element can be obtained. In addition, 100% of the metal thin film
In the case of a very thin film of A or less, the metal thin film itself has a high resistance, and crosstalk between pixels can be eliminated even if the metal thin film is provided over the entire display element.
(実施例) 次に、本発明の実施例について図面を用いて説明する。(Example) Next, embodiments of the present invention will be described using the drawings.
第3図は本発明の一実施例の断面図である。FIG. 3 is a sectional view of one embodiment of the present invention.
第3図において、8は発光層4と絶縁層5の間に設けた
金属薄膜である。金属薄膜としてはTiを用い、その厚
さは20Aとした。また、発光層4としてはMnを発光
中心として添加したZnSを用いた。このようにして作
製したEL素子を200Hzの正弦波で駆動したところ
、その輝度がlcd/n!から100Cd/♂に増加す
るのに要する電圧が、金属薄膜8のない従来の片絶縁型
EL素子に比較して、数チから十数チ減少した。In FIG. 3, 8 is a metal thin film provided between the light emitting layer 4 and the insulating layer 5. Ti was used as the metal thin film, and its thickness was 20A. Further, as the light-emitting layer 4, ZnS doped with Mn as a light-emitting center was used. When the EL element thus prepared was driven with a 200Hz sine wave, its luminance was lcd/n! The voltage required to increase from 100 Cd/♂ to 100 Cd/♂ was reduced from several inches to more than ten inches compared to the conventional single insulation type EL element without the metal thin film 8.
(発明の効果)
以上に説明したことから明らかなように、本発明によれ
ば、従来よシ輝度の立上シが急峻でかつ輝度が約10チ
改善された高輝度のEL素子を得ることができる。(Effects of the Invention) As is clear from the above explanation, according to the present invention, it is possible to obtain a high-luminance EL element in which the rise in luminance is steeper and the luminance is improved by about 10 degrees compared to the conventional one. I can do it.
第1図は従来の二重絶縁型薄膜BL素子の断面図、第2
図は従来の月給縁型薄膜EL素子の断面図、第3図は本
発明の=実施例の断面図である。
1・・・・・・ガラス基板、2・・・・・・透明電極、
3・・・・・・絶縁 層、4・・・・・・発光層、5・
・・・・・絶縁層、6・・・・・・電極、7・・・・・
・交流電源、8・・・・・・金属薄膜。
721. \
代理人 弁理士 内 原 普
″、−/′
へ −Figure 1 is a cross-sectional view of a conventional double-insulated thin film BL element;
The figure is a cross-sectional view of a conventional monthly edge type thin film EL element, and FIG. 3 is a cross-sectional view of an embodiment of the present invention. 1...Glass substrate, 2...Transparent electrode,
3...Insulating layer, 4...Light emitting layer, 5...
...Insulating layer, 6...Electrode, 7...
- AC power supply, 8... Metal thin film. 721. \ Agent Patent Attorney Fu Uchihara ″, −/′ −
Claims (1)
を順次積層して成る薄膜エレクトロルミネッセンス素子
において、前記発光層と絶縁層との間に金属薄膜を設け
たことを特徴とする薄膜エレクトロルミネッセンス素子
。A thin film electroluminescent device comprising a transparent electrode, a light emitting layer, an insulating layer and a counter electrode successively laminated on a transparent substrate, characterized in that a metal thin film is provided between the light emitting layer and the insulating layer. Luminescence element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14542384A JPS6124192A (en) | 1984-07-13 | 1984-07-13 | Thin film electroluminescent element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14542384A JPS6124192A (en) | 1984-07-13 | 1984-07-13 | Thin film electroluminescent element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6124192A true JPS6124192A (en) | 1986-02-01 |
Family
ID=15384903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14542384A Pending JPS6124192A (en) | 1984-07-13 | 1984-07-13 | Thin film electroluminescent element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6124192A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63214189A (en) * | 1987-03-04 | 1988-09-06 | Asahi Chem Ind Co Ltd | Novel glutamic acid-producing coryneform bacteria and production of l-glutamic acid using said bacteria |
JPH0410392A (en) * | 1990-04-26 | 1992-01-14 | Fuji Xerox Co Ltd | Thin film electroluminescent element |
JPH04213508A (en) * | 1990-05-22 | 1992-08-04 | Juki Corp | Hanger conveyance device |
-
1984
- 1984-07-13 JP JP14542384A patent/JPS6124192A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63214189A (en) * | 1987-03-04 | 1988-09-06 | Asahi Chem Ind Co Ltd | Novel glutamic acid-producing coryneform bacteria and production of l-glutamic acid using said bacteria |
JPH0410392A (en) * | 1990-04-26 | 1992-01-14 | Fuji Xerox Co Ltd | Thin film electroluminescent element |
JPH04213508A (en) * | 1990-05-22 | 1992-08-04 | Juki Corp | Hanger conveyance device |
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