JPS60264036A - Analyzer deivce for emission gas - Google Patents
Analyzer deivce for emission gasInfo
- Publication number
- JPS60264036A JPS60264036A JP59121335A JP12133584A JPS60264036A JP S60264036 A JPS60264036 A JP S60264036A JP 59121335 A JP59121335 A JP 59121335A JP 12133584 A JP12133584 A JP 12133584A JP S60264036 A JPS60264036 A JP S60264036A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- gas
- analyzer
- analysis
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、真空計測分野で、陰極線管、螢光表示管等の
画像表示装置中の分圧測定及び残留ガスの定性・定量分
析を行なう放出ガス分析装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is used in the field of vacuum measurement to measure emitted gas for partial pressure measurement and qualitative and quantitative analysis of residual gas in image display devices such as cathode ray tubes and fluorescent display tubes. This relates to an analytical device.
従来例の構成とその問題点
従来の画像表示装置中の分圧測定及び残留ガスの分析装
置は、磁場タイプの質量分析計を用いるものが主流であ
り、オメガトロン型、トロコイド型が代表的なものであ
る。これらの欠点としては、分析装置が大型となり、ま
た、価格が高く、更に分析感度も悪い等の問題があった
。従来の磁場タイプの質量分析計を用いて、陰極線管内
の放出ガスを分析する方法は、第１図にその具体的構成
を示すように、オメガトロン型質量分析計本体１は、フ
ランジ２を介して、十字形のガラス管３と接続され、更
に、接着剤４によって、陰極線管６に接続されている。Configuration of conventional examples and their problems Conventional partial pressure measurement and residual gas analysis devices in image display devices mainly use magnetic field type mass spectrometers, with Omegatron type and Trochoid type being typical. It is something. These disadvantages include the large size of the analyzer, high price, and poor analytical sensitivity. In the method of analyzing gas emitted from a cathode ray tube using a conventional magnetic field type mass spectrometer, as shown in FIG. It is connected to a cross-shaped glass tube 3, and further connected to a cathode ray tube 6 with an adhesive 4.
前記ガラス管３中には、金属棒６を内蔵しているオモリ
７と、これを支えるストッパー８が収納されており、前
記ガラス管３中を前記陰極線管５よりも少なくとも１桁
高い真空度になったのをＢ−Ａ型真空計１０によって確
認した後、前記ストッパー８を外部よりマグネットにて
、横方向に移動させ前記オモリ７を落下させ、超音波加
工によって加工した凹部９を破壊する。そして、前記陰
極線管５中のガスを前記質量分析計本体１へ導入して分
析する構成となっている。しかしながら上記のような構
成では、複雑な形状を有するガラス細工が必要上あり、
信頼性９分析効率が悪いと言う欠点を有していた。A weight 7 containing a metal rod 6 and a stopper 8 supporting the weight are housed in the glass tube 3, and the vacuum level in the glass tube 3 is at least one order of magnitude higher than that in the cathode ray tube 5. After confirming with the B-A type vacuum gauge 10, the stopper 8 is moved laterally using a magnet from the outside, the weight 7 is dropped, and the recess 9 processed by ultrasonic processing is destroyed. Then, the gas in the cathode ray tube 5 is introduced into the mass spectrometer main body 1 and analyzed. However, the above configuration requires glasswork with a complicated shape,
Reliability 9 It had the disadvantage of poor analytical efficiency.
発明の目的
本発明は上記従来の欠点を解消するものであり、画像表
示装置中のガス分析の信頼性を向上させるものである。OBJECTS OF THE INVENTION The present invention eliminates the above-mentioned conventional drawbacks and improves the reliability of gas analysis in image display devices.
発明の構成
本発明は、マスフィルター型質量分析計本体と、回転運
動を上下運動に変換できる直線導入端子と、前記直線導
入端子の変位を伝える金属棒と、分析対象の画像表示装
置と接続できるｏリングが入っている接続部とからなり
、前記画像表示装置の一側面に丸型ガラス部を有するチ
ップ管を確実に破壊してガス分析の信頼性を高めること
ができ、画像表示装置の寿命確保上きわめて有利である
。Structure of the Invention The present invention provides a mass filter type mass spectrometer main body, a linear introduction terminal capable of converting rotational motion into vertical motion, a metal rod that transmits displacement of the linear introduction terminal, and can be connected to an image display device of an analysis target. The chip tube, which has a round glass part on one side of the image display device, can be reliably destroyed, increasing the reliability of gas analysis and extending the lifespan of the image display device. This is extremely advantageous in terms of security.
実施例の説明
以下に、本発明の一実施例を第２図〜第３図にもとづい
て説明する。第２図において、１１は分析対象の画像表
示装置、１３は丸型ガラス部１２を有し、結晶質フリッ
ト１４によってシールされているガス分析用のチップ管
、１６は前記画像表示装置を封じ切るためのチップ管で
ある。一方、第３図において、１６はマスフィルター型
質量分析計本体で、フランジ２とパルプ１７を介してス
テンレス製の管１８と接続されており、前記管１８に取
付けである直線導入端子１９を回転すると、先端に取付
けである金属棒２ｏを上下することができる。以上のよ
うに構成された分析対象の画像表示装置１１と、マスフ
ィルター型質量分析計１６について、以下動作を説明す
る。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 2 and 3. In FIG. 2, 11 is an image display device to be analyzed, 13 is a chip tube for gas analysis that has a round glass part 12 and is sealed by a crystalline frit 14, and 16 is a seal for the image display device. This is a tip tube for. On the other hand, in FIG. 3, 16 is a mass filter type mass spectrometer body, which is connected to a stainless steel tube 18 via a flange 2 and a pulp 17, and a linear introduction terminal 19 attached to the tube 18 is rotated. Then, the metal rod 2o attached to the tip can be moved up and down. The operations of the image display device 11 to be analyzed and the mass filter type mass spectrometer 16 configured as described above will be described below.
先ず、０リング入ジの接続部２１中に第２図で説明した
ガス分析用チップ管１３を接続した後、ガラス製のガス
分析用のチップ管１３と金属製の管１８の中を、ともに
前記の分析対象の画像表示装置１１の真空度よりも少な
くとも１桁高い真空度に達したことをＢ−Ａ型真空計２
２で確認し、前述のように、直線導入端子１９を回転し
、先端の金属棒２０を下げて、丸型ガラス部１２を破壊
して、前記Ｂ−Ａ型真全真空計で真空度の変化から総ガ
ス量を計測することができる。次に、パルプ１７をゆっ
くシ開き、前記マスフィルター型質量分析計本体１６ヘ
ガスを導きガス成分を定量分析することができる。以上
のように本実施例によれば、直線導入端子１９を設ける
ことにより、丸型ガラス部１２を確実に破壊することが
できる。First, after connecting the gas analysis chip tube 13 explained in FIG. The B-A vacuum gauge 2 indicates that the degree of vacuum has reached at least one order of magnitude higher than the degree of vacuum of the image display device 11 to be analyzed.
2, as mentioned above, rotate the linear introduction terminal 19, lower the metal rod 20 at the tip, break the round glass part 12, and check the degree of vacuum using the B-A type true vacuum gauge. The total amount of gas can be measured from the change. Next, the pulp 17 is slowly opened and the gas is introduced into the mass filter type mass spectrometer body 16 for quantitative analysis of gas components. As described above, according to this embodiment, by providing the linear introduction terminal 19, the round glass portion 12 can be reliably broken.
発明の効果
このように本発明では、対象となる画像表示装置中の総
ガス量及びガス成分が分析でき、前記画像表示装置の製
造プロセスの改善が容易に進めることができ、その実用
的効果は大なるものがある０Effects of the Invention As described above, according to the present invention, the total gas amount and gas components in the target image display device can be analyzed, and the manufacturing process of the image display device can be easily improved, and the practical effects thereof are as follows. There is something big 0
第１図は従来の陰極線管中のガス分析システムの概略図
、第２図は本発明の実施例における画像表示装置の構成
を説明する概略図、第３図は本発明の実施例におけるヤ
スフィルター型質量分析計とガス導入系のシステムの概
略図である。
１・・・・・オメガトロン型質量分析計本体、１２・・
・・・・・・・丸型ガラス部、１３・・・・・・ガラス
分析用チップ管、１６・・・・・・マスフィルター型質
量分析計本体、′１９・・・・・・直線導入端子−２１
・・・・・・０リング入りの接続部。Fig. 1 is a schematic diagram of a conventional gas analysis system in a cathode ray tube, Fig. 2 is a schematic diagram illustrating the configuration of an image display device in an embodiment of the present invention, and Fig. 3 is a Yass filter in an embodiment of the present invention. 1 is a schematic diagram of a mass spectrometer and a gas introduction system. 1... Omegatron mass spectrometer body, 12...
......Round glass part, 13...Glass analysis chip tube, 16...Mass filter type mass spectrometer body, '19...Linear introduction Terminal-21
...Connection with 0 ring.
Claims (1)
上下運動に変換できる直線導入端子と前記直線導入端子
の変位を伝える金属棒と、分析対象の画像表示装置と接
続できるＯリングが入っている接続部とからなる放出ガ
ス分析装置。(1) Contains a mass filter type mass spectrometer body, a linear introduction terminal that can convert rotational motion into vertical motion, a metal rod that transmits the displacement of the linear introduction terminal, and an O-ring that can be connected to an image display device to be analyzed. Emitted gas analyzer consisting of a connecting part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59121335A JPS60264036A (en) | 1984-06-13 | 1984-06-13 | Analyzer deivce for emission gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59121335A JPS60264036A (en) | 1984-06-13 | 1984-06-13 | Analyzer deivce for emission gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60264036A true JPS60264036A (en) | 1985-12-27 |
Family
ID=14808709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59121335A Pending JPS60264036A (en) | 1984-06-13 | 1984-06-13 | Analyzer deivce for emission gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60264036A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001349870A (en) * | 2000-06-07 | 2001-12-21 | Matsushita Electric Ind Co Ltd | Method and apparatus for analyzing pdp panel sealed gas |
-
1984
- 1984-06-13 JP JP59121335A patent/JPS60264036A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001349870A (en) * | 2000-06-07 | 2001-12-21 | Matsushita Electric Ind Co Ltd | Method and apparatus for analyzing pdp panel sealed gas |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Robinson et al. | Determination of scandium, yttrium and rare earth elements in rocks by high resolution inductively coupled plasma‐mass spectrometry | |
| Prosser et al. | High-precision determination of 2H/1H in H2 and H2O by continuous-flow isotope ratio mass spectrometry | |
| Gratuze | Obsidian characterization by laser ablation ICP-MS and its application to prehistoric trade in the Mediterranean and the Near East: sources and distribution of obsidian within the Aegean and Anatolia | |
| Yang et al. | Precise and accurate determination of Sm, Nd concentrations and Nd isotopic compositions in geological samples by MC-ICP-MS | |
| Chiappini et al. | Development of a high-sensitivity inductively coupled plasma mass spectrometer for actinide measurement in the femtogram range | |
| Zurhaar et al. | Characterisation of forensic glass samples using inductively coupled plasma mass spectrometry | |
| Uzonyi et al. | Realization of the simultaneous micro-PIXE analysis of heavy and light elements at a nuclear microprobe | |
| Ardini et al. | Conversion of rare earth elements to molecular oxide ions in a dynamic reaction cell and consequences on their determination by inductively coupled plasma mass spectrometry | |
| US3102952A (en) | X-ray fluorescence analysis of multi-component systems | |
| JPS60264036A (en) | Analyzer deivce for emission gas | |
| Makishima et al. | Precise elemental and isotopic analyses in silicate samples employing ICP-MS: Application of hydrofluoric acid solution and analytical techniques | |
| Mazzucotelli et al. | Determination of trace amounts of lanthanides in rocks and minerals by high-performance liquid chromatography | |
| Sortino et al. | A new method for sampling fumarolic gases: Analysis of major, minor and metallic trace elements with ammonia solutions | |
| Jain et al. | Determination of the REE in geological reference materials DTS‐1 (dunite) and PCC‐1 (peridotite) by ultrasonic and microconcentric desolvating nebulisation ICP‐MS | |
| Bédard et al. | A comparison of N-type semi-planar and coaxial INAA detectors for 33 geochemical reference samples | |
| Dafydd | Adaptation of a glow discharge mass spectrometer in a glove-box for the analysis of nuclear materials | |
| Pepelnik et al. | Comparative study of multi-element determination using inductively coupled plasma mass spectrometry, total reflection X-ray fluorescence spectrometry and neutron activation analysis | |
| Pin et al. | Isotope dilution inductively coupled plasma mass spectrometry: a straightforward method for rapid and accurate determination of uranium and thorium in silicate rocks | |
| CN112835089A (en) | High concentration tritium gas on-line measuring device | |
| Pettitt et al. | A new calibration technique for quantitative gas analyses of fluid inclusions using a quadrupole mass spectrometer | |
| RU2065179C1 (en) | SELF-QUENCHING GAS-DISCHARGE DETECTOR OF β AND g RADIATION | |
| CN214540064U (en) | High concentration tritium gas on-line measuring device | |
| Liezers et al. | Ultra-low level (pg/L) actinide determinations and superior isotope ratio precisions by quadrupole ICP-MS | |
| Betti et al. | Glow discharge mass spectrometry in nuclear research | |
| Takahashi et al. | The new technique for the measurement of isotope abundance of 143Nd without chemical removal of other rare earth elements |