JPS60152949U - ceramic pressure sensor - Google Patents
ceramic pressure sensorInfo
- Publication number
- JPS60152949U JPS60152949U JP4092384U JP4092384U JPS60152949U JP S60152949 U JPS60152949 U JP S60152949U JP 4092384 U JP4092384 U JP 4092384U JP 4092384 U JP4092384 U JP 4092384U JP S60152949 U JPS60152949 U JP S60152949U
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- pressure
- pressure sensor
- diaphragm body
- detection sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図乃至第７図は本考案の第１の実施例を示すもので
あり、第１図は縦断面図、第２図は上面図、第３図は製
作過程を示す図、第４図は応力検知センサの電気的接続
図、第５図は圧力応動部の応力特性図、第６図は応力検
知センサの応力及び電気抵抗特性を示す図、第７図は応
力検知センサの出力信号特性図、第８図及び第９図は、
本考案の第２の実施例を示す平面図及び縦断面図、第１
０図及び第１１図は本考案の第３の実施例を示す平面図
及び縦断面図、第１２図及び第１３図は本考案の第４の
実施例を示す平面図及び縦断面図である。
図面中、１，１１，１４及び１５はセラミックダイアフ
ラム本体、２，１０，１２及び１３は台座部、３及び９
は圧力応動部、４〜７は応力検知センサである。
第８図
第１０図Figures 1 to 7 show the first embodiment of the present invention, in which Figure 1 is a longitudinal sectional view, Figure 2 is a top view, Figure 3 is a diagram showing the manufacturing process, and Figure 4 is a diagram showing the manufacturing process. is an electrical connection diagram of the stress detection sensor, Fig. 5 is a stress characteristic diagram of the pressure responsive part, Fig. 6 is a diagram showing the stress and electrical resistance characteristics of the stress detection sensor, and Fig. 7 is an output signal characteristic of the stress detection sensor. Figures 8 and 9 are
A plan view and a vertical sectional view showing a second embodiment of the present invention, the first
0 and 11 are a plan view and a longitudinal sectional view showing a third embodiment of the present invention, and Figs. 12 and 13 are a plan view and a longitudinal sectional view showing a fourth embodiment of the invention. . In the drawing, 1, 11, 14, and 15 are ceramic diaphragm bodies, 2, 10, 12, and 13 are pedestal parts, and 3 and 9.
1 is a pressure responsive section, and 4 to 7 are stress detection sensors. Figure 8 Figure 10
Claims (1)
加圧焼成により一体成形してなるセラミックダイアフラ
ム本体と、このセラミックダイヤフラム本体の圧力応動
部に付設された応力検知センサとを具備してなるセラミ
ック圧力センサ。 ２ セラミックダイアフラム本体は、圧力応動部に付設
された応力検知センサに直結されてその出力信号処理を
行う厚膜回路又は薄膜回路からなる電気回路を台座部に
有することを特徴とする実用新案登録請求の範囲第１項
に記載のセラミック圧力センサ。[Scope of Claim for Utility Model Registration] 1. A ceramic diaphragm body formed by integrally molding a thick pedestal part and a thin pressure-responsive part by pressurized firing of ceramic, and the stress attached to the pressure-responsive part of this ceramic diaphragm body. A ceramic pressure sensor comprising a detection sensor. 2. A request for registration of a utility model characterized in that the ceramic diaphragm body has an electric circuit in the pedestal part consisting of a thick-film circuit or a thin-film circuit that is directly connected to a stress detection sensor attached to a pressure-responsive part and processes its output signal. The ceramic pressure sensor according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4092384U JPS60152949U (en) | 1984-03-21 | 1984-03-21 | ceramic pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4092384U JPS60152949U (en) | 1984-03-21 | 1984-03-21 | ceramic pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60152949U true JPS60152949U (en) | 1985-10-11 |
Family
ID=30550270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4092384U Pending JPS60152949U (en) | 1984-03-21 | 1984-03-21 | ceramic pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60152949U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01321332A (en) * | 1988-06-17 | 1989-12-27 | Marelli Autronica Spa | Pressure converter |
| JPH03150432A (en) * | 1989-11-08 | 1991-06-26 | Masaki Esashi | Pressure sensor |
| JP2017058340A (en) * | 2015-09-18 | 2017-03-23 | Smc株式会社 | Pressure sensor and method for manufacturing the same |
| US10067021B2 (en) | 2015-09-18 | 2018-09-04 | Smc Corporation | Pressure sensor having resistive bodies |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53114690A (en) * | 1977-03-17 | 1978-10-06 | Yokogawa Hokushin Electric Corp | Thin film strain gauge convertor |
| JPS56162026A (en) * | 1980-05-16 | 1981-12-12 | Matsushita Electric Ind Co Ltd | Pressure detector |
-
1984
- 1984-03-21 JP JP4092384U patent/JPS60152949U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53114690A (en) * | 1977-03-17 | 1978-10-06 | Yokogawa Hokushin Electric Corp | Thin film strain gauge convertor |
| JPS56162026A (en) * | 1980-05-16 | 1981-12-12 | Matsushita Electric Ind Co Ltd | Pressure detector |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01321332A (en) * | 1988-06-17 | 1989-12-27 | Marelli Autronica Spa | Pressure converter |
| JPH03150432A (en) * | 1989-11-08 | 1991-06-26 | Masaki Esashi | Pressure sensor |
| JP2017058340A (en) * | 2015-09-18 | 2017-03-23 | Smc株式会社 | Pressure sensor and method for manufacturing the same |
| CN106546373A (en) * | 2015-09-18 | 2017-03-29 | Smc株式会社 | Pressure transducer and its manufacture method |
| US10048147B2 (en) | 2015-09-18 | 2018-08-14 | Smc Corporation | Pressure sensor including a thin-film diaphragm provided with plural resistive bodies printed in a straight line and manufacturing method therefor |
| US10067021B2 (en) | 2015-09-18 | 2018-09-04 | Smc Corporation | Pressure sensor having resistive bodies |
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