JPS60143743A - Optoacoustic type gas analyzer - Google Patents
Optoacoustic type gas analyzerInfo
- Publication number
- JPS60143743A JPS60143743A JP58248203A JP24820383A JPS60143743A JP S60143743 A JPS60143743 A JP S60143743A JP 58248203 A JP58248203 A JP 58248203A JP 24820383 A JP24820383 A JP 24820383A JP S60143743 A JPS60143743 A JP S60143743A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- light
- chamber
- light receiving
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】 本発明は光音１型ガス分析針に関する。[Detailed description of the invention] The present invention relates to a Koson type 1 gas analysis needle.
試料ガス中の特定のガスの濃度を測定するものとして、
光音覇型ガス分析計があり、例えば特公昭５７−４８７
３２号公報に示されるものが知られている。このガス分
析計は特に、試料ガス内に含まれる干渉ガスの干渉影響
を有効に排除することができるところから、極めて高い
測定精度を有している。For measuring the concentration of a specific gas in a sample gas,
There is a light sound type gas analyzer, for example,
The one shown in Publication No. 32 is known. In particular, this gas analyzer has extremely high measurement accuracy because it can effectively eliminate the interference effects of interfering gases contained in the sample gas.
本発明は上述した光音１型ガス分析針を更に改良するも
ので、従来に比してその出力を大幅に増大させ、もって
Ｓ／Ｎ比の向上を図ることを目的とする。The present invention further improves the optical sound type 1 gas analysis needle described above, and aims to significantly increase its output compared to the conventional one, thereby improving the S/N ratio.
以下、本発明の一実施例を図面に基いて説明する。Hereinafter, one embodiment of the present invention will be described based on the drawings.
第１図において、（１）は測定ガスを封入して構成した
ガスフィルタ、＋２１ 、 ＋８１はこのガスフィルタ
ｉｌ）を間にはさんだ状態でその両側に互いに一直線状
となるように配置された一対の受光室である。そして、
前記受光室（２） 、 （Ｂ）にはそれぞれ試料ガスの
導入口（２ｍ）、（３ｍ）及び導出口（２ｂ）、（３ｂ
） カＲけられている。In Fig. 1, (1) is a gas filter constructed by sealing the measurement gas, and +21 and +81 are a pair of gas filters (il) placed between them, and arranged in a straight line on both sides of the gas filter. This is the light receiving chamber. and,
The light receiving chambers (2) and (B) have sample gas inlets (2m) and (3m) and outlet ports (2b) and (3b), respectively.
) It has been rejected.
（４）はニューマチック型検出器（以下、検出器という
）で、図示する側にあっては、隔室（４）の内部に張設
されたコンデンサマイクロホンや膜（以下、膜体という
） （４ａ）とこの膜体（４ｉ） ｉこ対向して設けら
れた固定極（４ｂ）とからなるコンデンサマイクロホン
検出器が用いられている。そして、前記膜体（４ａ）の
一方便と前記受光室の一方（２）とが、又、膜体（４ａ
）の他方側と受光室の他方（３）とがそれぞれ連通する
ように、連通路（５）、（６）が設けられている。（７
）は高インピーダンス増中器で、前記検出器（４）の出
力、即ち、膜体（４ａ）の変位に基づく電気信号を増幅
するものである。(4) is a pneumatic type detector (hereinafter referred to as a detector), and the side shown in the figure includes a condenser microphone and a membrane (hereinafter referred to as a membrane body) stretched inside the compartment (4). 4a) and a fixed pole (4b) provided opposite the membrane body (4i). And, one side of the membrane body (4a) and one side (2) of the light receiving chamber are also connected to the membrane body (4a).
) and the other side (3) of the light-receiving chamber are provided with communication paths (5) and (6), respectively. (7
) is a high impedance intensifier that amplifies the output of the detector (4), that is, the electrical signal based on the displacement of the membrane (4a).
（８）は試料ガスの供給管で、２又に分岐して、キャピ
ラリ（９１、（１０１を介して前記導入口（２ｍ）、（
３ａ）に接続されている。（１１） 、 （１２１ｉ１
試料ガスの排出管で、それぞれキャピラリＱ埼、 ０４
）を介して前記導出口（ｚｂ）、（３ｂ）に接続されて
いる。(8) is a supply pipe for the sample gas, which branches into two and passes through the capillary (91, (101) to the inlet (2 m), (
3a). (11) , (121i1
Sample gas discharge pipe, capillary Qsai, 04 respectively.
) is connected to the outlet ports (zb) and (3b).
（ｌｆｉ） 、 ＨＧｔ一対の光源（たとえば黒体輻射
光源）で、いずれの光源（ｌｆｉｌ 、 （Ｉｆｔｌか
ら発せられる光（例えば、赤外線）も受光室（２）（又
は（３））−ガスフィルタ＋１）−受光室（３）（又は
（２））の順で照射できるよう互いに対向配置されてい
る。(lfi), HGt A pair of light sources (for example, a black body radiation source), and the light (for example, infrared) emitted from either light source (lfil, (Iftl) is the light receiving chamber (2) (or (3)) - gas filter +1 ) - light receiving chamber (3) (or (2)) are arranged facing each other so that the light can be irradiated in this order.
そして、２つの受光室（２１、（８１とガスフィルタ＋
１１（以下、受光室等Ａという）を照射する光は、前記
光源０荀、α呻から交互に与えられるように構成されて
いる。すなわち、電源０７）と光源（＋５１ 、 Ｏｎ
との間に切換スイッチ輪を設け、この切換スイッチ幀を
切換操作することにより、いずれか一方の光源（＋５）
。Then, two light receiving chambers (21, (81 and gas filter +
The light irradiating the light receiving chamber 11 (hereinafter referred to as light receiving chamber A) is configured to be alternately applied from the light sources 0 and . That is, power supply 07) and light source (+51, On
A change-over switch ring is provided between the
.
（＋呻が点灯するように構成しである。（Ｉ鋳は電源ス
ィッチである。(It is configured so that the + button lights up. (The I button is the power switch.
なお、受光室等Ａを照射する光が２つの光源（Ｉｍ。Note that the light that irradiates A, such as the light receiving chamber, is from two light sources (Im.
Ｃｌ１ｌのうちいずれか一方から与えられ心ようにする
には、上述したものの他、第２図に示すように構成して
もよい。すなわち、同図（４）は受光室等Ａと両光源（
＋５） 、 Ｑｌｌｆ）との間に１つの開口部（２０ａ
）を備えた円筒チョッパー−を設けたものであり、同図
（Ｂ）は受光室等Ａと両光源＋１５） 、 Ｈとの間に
それぞれシャッターｆ２．１）、＠を設けたものである
。そして、この第２図（２）、＠）に示すものモは、両
光源（１５） 、 Ｈを同時に点灯しておき、円筒チョ
ッパー−を回転させたり（同図囚）、シャッター叫に（
２２を交互に開閉する（同図〕））ことにより、受光室
等Ａを照射する光が両光源（１５９、０６１から交互に
与えられるようにしている。In addition to the above-mentioned configuration, the configuration shown in FIG. 2 may be used in order to allow the signal to be supplied from either one of the Cl11 and Cl11. In other words, (4) in the same figure shows the light receiving chamber A and both light sources (
+5), Qllf) and one opening (20a
), and in the same figure (B), shutters f2.1) and @ are provided between the light receiving chamber A and both light sources +15) and H, respectively. The model shown in Figure 2 (2) @) turns on both light sources (15) and H at the same time, rotates the cylindrical chopper (see figure 2), and fires the shutter (
By alternately opening and closing the light receiving chamber 22 (see the same figure), the light irradiating the light receiving chamber etc. A is alternately provided from both light sources (159, 061).
また、上述の実施例においては、検出器（４）はコンデ
ンサマイクロホン検出器としているが、これをマイクロ
フローセンサで構成してあってもよし）。Furthermore, in the above-described embodiment, the detector (4) is a condenser microphone detector, but it may also be a micro flow sensor.
次に上述のガス分析計の動作について説明すると、例え
ば測定ガスとして所定濃度のＣ０（−酸化炭素）をガス
フィルタＴ１）に封入し、供給管（８）により試料ガス
を導入口（２ａ）、（３ａ）を介して受光室（２）、（
３）にそれぞれ供給する。前記試料ガスには測定対象で
あるＣＯの他、Ｃ０２（−酸化炭素）等の干渉ガスが含
まれている。Next, the operation of the above-mentioned gas analyzer will be explained. For example, a predetermined concentration of C0 (-carbon oxide) as a measurement gas is sealed in a gas filter T1), and a sample gas is introduced into the inlet (2a) through the supply pipe (8). (3a) through the light receiving chamber (2), (
3) respectively. In addition to CO, which is the object of measurement, the sample gas contains an interfering gas such as CO2 (-carbon oxide).
この状態で、電源スィッチ（＋９）をＯＮにし、更に切
換スイッチ舖を操作して一方の光１ｎｉａが電源０７）
に接続されると、前記光源（Ｉ荀から赤外線が受光室等
Ａに向けて発せられる。前記赤外線はまず一方の受光室
（２）に入射し、この受光室（２）内の測定ガス及び干
渉ガスによって一定波長の赤外エネルギーが吸収され、
その結果前記受光室（２）内の温度が上昇し更に圧力が
上昇する。次に、前記赤外線はガスフィルタ（１）を通
過するが、この通過の際測定ガスの吸収波長の赤外線は
殆んど吸収される。更に、前記赤外線は他の受光室（８
）Ｉと入射し、主に干渉ガスによって赤外エネルギーが
吸収され、この吸収により前記受光室（３）内の温度上
昇が生じ、これによって圧力が上昇する。In this state, turn on the power switch (+9) and operate the selector switch to switch one light 1nia to power 07).
When connected to the light source (I), infrared rays are emitted from the light source (I) toward the receiving chamber A.The infrared rays first enter one of the receiving chambers (2), and the measurement gas and Infrared energy of a certain wavelength is absorbed by the interfering gas,
As a result, the temperature inside the light receiving chamber (2) rises, and the pressure further rises. Next, the infrared rays pass through the gas filter (1), but during this passage, most of the infrared rays having the absorption wavelength of the measurement gas are absorbed. Furthermore, the infrared rays are transmitted to another light receiving chamber (8
) I, and the infrared energy is mainly absorbed by the interference gas, and this absorption causes a temperature rise in the light receiving chamber (3), which increases the pressure.
前記両受光室＋２１ 、 （１１の圧力上昇は連通路ｔ
ｅｌ 、 ＋６１を介して直ちに検出器（４）の膜体（
４ａ）に伝えられるが、前記膜体（４ａ）は測定ガスに
よる赤外エネルギー吸収分だけＰ方向にふくらむよう変
位量Δｌだけ変位する。（即ち、干渉ガスの影響が除去
される。）そして、前記変位量Δｌに応じた電気信号Ｓ
が高インピーダンス増幅器（７）に出力される。Both light receiving chambers +21, (the pressure increase in 11 is due to the communication path t
el, via +61 immediately the membrane body of the detector (4) (
4a), the membrane body (4a) is displaced by a displacement amount Δl so as to swell in the P direction by the amount of infrared energy absorbed by the measurement gas. (That is, the influence of the interfering gas is removed.) Then, the electric signal S corresponding to the displacement amount Δl
is output to a high impedance amplifier (7).
次に切換スイッチ（１８１を操作して、他方の光源θ→
が電源αηに接続されるようにすると、今度は光源（Ｉ
ψから赤外線が受光室等Ａに向けて発せられ、上述と同
様の動作を行うが、膜体（４ａ）はＰ方向とは正反対の
Ｑ方向に向って変位量Δｌだけ変位し、同様に電気信号
Ｓが出力される。Next, operate the changeover switch (181) to select the other light source θ→
is connected to the power supply αη, then the light source (I
Infrared rays are emitted from ψ toward the light receiving chamber A, and the same operation as described above is performed, but the membrane body (4a) is displaced by the amount of displacement Δl in the Q direction, which is directly opposite to the P direction, and similarly generates electricity. A signal S is output.
而して、前記特公昭５７−４８７３２号公報に示すもの
においてもガスフィルタの両側に２つの受光室を設けて
いるが、両受光室の関係、すなわち測定側と比較側との
関係は固定されているため、膜体は一方向へのみΔｌだ
け変位する。In the device shown in Japanese Patent Publication No. 57-48732, two light-receiving chambers are provided on both sides of the gas filter, but the relationship between the two light-receiving chambers, that is, the relationship between the measurement side and the comparison side, is not fixed. Therefore, the membrane body is displaced by Δl only in one direction.
これに対して、上述の実施例においては受光室＋２１
、 ＋３１の測定側と比較側との関係は交互に入れかわ
り、膜体（４ａ）は正逆いずれの方向にもΔｌだけ変位
するから、実質的な変量は２Δｌとなる、すなわち従来
のこの種ガス分析計の出力の２倍もの電気信号を得るこ
とができるのである。On the other hand, in the above embodiment, the light receiving chamber +21
, +31, the relationship between the measurement side and the comparison side is alternately switched, and the membrane body (4a) is displaced by Δl in either the forward or reverse direction, so the actual variable is 2Δl, that is, compared to the conventional method of this type. It is possible to obtain an electrical signal that is twice the output of a gas analyzer.
本発明の光音＠ｑガス分析計は、測定ガスを封入したガ
スフィルタを間にはさんだ状態で、試料ガスを充填する
ための一対の受光室を設け、前記両受光室とニューマチ
ック型検出器とを連通せしめるとともに、前記両受光室
に試料ガスの導入口及び導出口をそれぞれ設け、前記両
光源から交互に与えられるように構成しているので、そ
の出力は従来の光音響型ガス分析針の２倍となり、従っ
てドリフト、指示誤差が小さくなり、ＳｌＮ比が大幅に
向上する。The photoacoustic@q gas analyzer of the present invention is provided with a pair of light receiving chambers for filling the sample gas with a gas filter filled with the measurement gas sandwiched between them, and a pair of light receiving chambers and a pneumatic type detection chamber are provided. In addition, both the light receiving chambers are provided with an inlet and an outlet for the sample gas, and the light is supplied alternately from the two light sources, so that the output is equal to that of conventional photoacoustic gas analysis. The number of needles is twice that of the needle, so drift and indication error are reduced, and the SIN ratio is greatly improved.
図面は本発明の一実施例を示すもので、第１図は光音響
型ガス分析計の構成図、第２図（Ａ）（Ｂ）は、夫々、
光源の切換手段を示す説明図である。
（１１−・・ガスフィルタ、＋２１ 、 ＋３１・・・
受光室、（ｚａ）、（３ａ）・・・導入口、（２ｂ）、
（３ｂ）・・・導出口、（４）・・・ニューマチック検
出器、（ＩＬα６）・・・光源。
第１図
第２図
（Ａ）
２１ ２１ ３The drawings show one embodiment of the present invention; FIG. 1 is a configuration diagram of a photoacoustic gas analyzer, and FIGS. 2(A) and (B) are respectively,
FIG. 3 is an explanatory diagram showing a light source switching means. (11-...Gas filter, +21, +31...
Light receiving chamber, (za), (3a)...inlet, (2b),
(3b)... Outlet, (4)... Pneumatic detector, (ILα6)... Light source. Figure 1 Figure 2 (A) 21 21 3
Claims (1)
、試料ガスを充填するための一対の受光室を設け、前記
両受光室とニューマチック型検出器とを連通せしめると
ともに、前記両受光室に試料ガスの導入口及び導出口を
それぞれ設け、前記両受光室を照射するための一対の光
源を対向配置し、前記両受光室を照射する光が前記両光
源から交互に与えられるように構成したことを特徴とす
る光音響型ガス分析計。A pair of light receiving chambers for filling the sample gas are provided with a gas filter filled with the measurement gas sandwiched between them, and both the light receiving chambers and the pneumatic detector are communicated with each other. An inlet and an outlet for the sample gas are respectively provided, a pair of light sources for irradiating both the light receiving chambers are arranged opposite each other, and the light for irradiating both the light receiving chambers is alternately provided from the two light sources. A photoacoustic gas analyzer characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58248203A JPS60143743A (en) | 1983-12-31 | 1983-12-31 | Optoacoustic type gas analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58248203A JPS60143743A (en) | 1983-12-31 | 1983-12-31 | Optoacoustic type gas analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60143743A true JPS60143743A (en) | 1985-07-30 |
| JPS6356489B2 JPS6356489B2 (en) | 1988-11-08 |
Family
ID=17174725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58248203A Granted JPS60143743A (en) | 1983-12-31 | 1983-12-31 | Optoacoustic type gas analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60143743A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09512629A (en) * | 1994-04-15 | 1997-12-16 | アメリカン・スタンダード・インコーポレイテッド | Indoor air quality sensor and indoor air quality detection method |
| US8848191B2 (en) | 2012-03-14 | 2014-09-30 | Honeywell International Inc. | Photoacoustic sensor with mirror |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03779U (en) * | 1989-02-10 | 1991-01-08 | ||
| JPH0337573U (en) * | 1989-08-18 | 1991-04-11 |
-
1983
- 1983-12-31 JP JP58248203A patent/JPS60143743A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09512629A (en) * | 1994-04-15 | 1997-12-16 | アメリカン・スタンダード・インコーポレイテッド | Indoor air quality sensor and indoor air quality detection method |
| US8848191B2 (en) | 2012-03-14 | 2014-09-30 | Honeywell International Inc. | Photoacoustic sensor with mirror |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6356489B2 (en) | 1988-11-08 |
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