JPS647320Y2 - - Google Patents

Description

[Detailed description of the invention] In an X-ray spectrometer, an optical spectrometer, etc., components such as an entrance slit, an exit slit, a spectroscopic element, a detector, etc. are attached to the component holding member of the spectrometer drive mechanism. A wavelength display means is coupled to the spectrometer drive mechanism. Due to the design of the spectrometer, when the spectrometer drive means is driven to an arbitrary wavelength position indicated by the wavelength display means, that is, when the spectrometer is set at one wavelength position, the wavelength that is the same as the displayed wavelength entered from the entrance slit is detected. X-rays or light
Each of the above components is attached to a respective component holding member so as to converge on the exit slit,
Due to manufacturing errors, the mounting position of each component to the holding member is slightly deviated from the correct position. The present invention relates to a device for adjusting the above-mentioned deviation in the mounting position of each component to its respective holding member.

The above adjustment involves making X-rays, etc. of a predetermined wavelength enter the detector through an entrance slit, driving the spectrometer to the predetermined wavelength position indicated by the wavelength display means of the spectrometer, and making the X-rays, etc. enter the detector through the exit slit. The position, inclination, etc. of one or more of the entrance slit, the spectroscopic element, and the exit slit relative to the respective holding means are adjusted so that the detection output is maximized.
The adjustment operation includes a peak detection operation. For this reason, the conventional adjustment method used a meter or recorder to record the output of the detector while turning the adjustment screw for the mounting position of the slit, spectroscopic element, etc. little by little, and find the position of the screw where the output peak was obtained. It was used. This method requires a meter or recorder with a wide measurement range or multi-stage switching range to display the output of the detector.
In addition, it takes time to make adjustments, and it is also a troublesome task for general operators whose duty is to carry out analytical operations.

Therefore, it is an object of the present invention to provide an adjustment device for an X-ray spectrometer or the like that can be easily and quickly adjusted and does not require a separate display meter or recorder.

The present invention provides an entrance slit, a spectroscopic element, an exit slit, a detector, and at least one of the entrance slit, the spectroscopic element, or the exit slit,
In a spectrometer equipped with a mounting position adjusting means for manually adjusting the mounting position, a sampling means is activated when the mounting position is adjusted by the mounting position adjusting means and samples the output of the detector at regular time intervals; , compares the data held in the memory with the data substantially obtained by adding a predetermined value to the latest data sampled by the sampling means, and stores the value of the added data in the memory. When the value of the added data is smaller than the value of the data stored in the memory, a signal is output and the contents of the memory are rewritten to the latest data, and when the value of the added data is smaller than the value of the data stored in the memory, the contents of the memory are updated. The present invention provides an adjustment device for a spectroscopic device, which includes a comparing means that operates so as not to be rewritten, and a display device that performs a display operation based on the above-mentioned signal emitted from the comparing means.

To adjust a spectrometer, set the spectrometer at one wavelength position, and when radiation of that wavelength enters the entrance slit, output will be obtained from the detector. The mounting position of one or more of the elements or the exit slits is adjusted with respect to the component holding means. The entrance slit, spectroscopic element, and exit slit should be placed at appropriate positions and inclinations for the spectral conditions.For example, the entrance slit, the spectroscopic element, and the exit slit are on the Rowland circle, and the inclination of the spectroscopic element is such that the perpendicular to the center of the element is the center of the Rowland circle. The detector output reaches its maximum value when the detector is in a position passing through the above-mentioned proper position, and if each component deviates from the above-mentioned proper position, the output decreases by the amount of deviation. Therefore, when the mounting position adjusting means described above is operated (for example, the position of the slit is moved in a direction perpendicular to the optical axis), the spectral conditions change and the detector output changes, but according to the above configuration,
If the detector output is increasing during this adjustment operation, the value N of the latest sampling data plus a predetermined value, for example, 5√N, is larger than the value of the previous sampling data, so the contents of the memory are When the above data is rewritten to the latest data and a display operation is performed, it is found that the detection output is increasing, and when the detection output exceeds the maximum value and begins to decrease to a certain extent, the latest sampling data N is set to a predetermined value of 5. √
When the value added by N becomes smaller than the memory content, the display stops, indicating that the detector output has exceeded the maximum value. If the direction of adjustment is now reversed, the display will be displayed again, and when the detector output exceeds the maximum value, the display will stop. Therefore, if the adjustment means is a screw, for example, the screw position at which the display stops can be found by turning the screw in the opposite direction, and it can be seen that the optimum adjustment position is exactly in the middle. The reason why we add a predetermined value to the latest sampling data is because the detector output contains noise, and if we directly compare the latest sampling data with the previous sampling data, the detector output will be maximized. In the vicinity, changes in the detector output due to adjustment operations are small, and the display stops frequently due to noise, making adjustment work difficult. Once the display stops, the direction of adjustment must be reversed. This is to stabilize the display operation by preventing re-display and to facilitate adjustment operations.

In FIG. 1, 1 is the main body of the X-ray spectrometer, in which an entrance slit, a spectroscopic element, and an exit slit are mounted on a wavelength scanning mechanism. In the example, a mounting position adjusting screw is provided to adjust the mounting position of the spectroscopic element with respect to the spectroscopic element holding means in the wavelength scanning mechanism, but since the structure of the spectrometer is not directly related to the present invention, it can be used as a single block. It is shown. 2 is an X-ray detector, and 3 is a counter that counts output pulses from the detector. Reference numeral 4 denotes a counter control device which counts the output pulses of the detector at appropriate time intervals for a certain period of time and outputs the counted value to the display or printer 5. The above is the configuration of the X-ray spectrometer. In this embodiment, the above-mentioned counter 3
Use the counting output of The following sections are related to the present invention and are activated when an operator adjusts the spectroscopic device. For the above adjustment, when X-rays of a known constant wavelength are incident on the spectrometer and the spectrometer is set at the known wavelength position, each component of the spectrometer is attached to its respective holding member as described above. Since the detector 2 is installed in the correct position within the manufacturing error, some output can be obtained from the detector 2. This output is counted by counter 3. The output of the counter 3 is stored in the first memory 6.
The data is stored in the counter 3 and held until the next data is output from the counter 3, and then rewritten with the next output data. In the case of a visible light spectrometer, since the detector 2 is a photomultiplier tube, its output is sampled at regular time intervals, A/D converted, and stored in the first memory 6. Reference numeral 7 denotes an arithmetic unit that reads out the information stored in the memory 6 and performs the next arithmetic operation. Assuming that the count value currently stored in the memory 6 is N, the value obtained by subtracting a predetermined value Δ determined in consideration of the S/N ratio of the detection output from this N, in this embodiment, N-
Calculate the value 5×√N. With this formula, the second
The term √N is the standard deviation of the variation in the count value N, and five times the standard deviation is used as the predetermined value at the time of peak detection. The above calculation operations are completed during one sampling period of the detector output. The above calculation result is read into and stored in the second memory 8 every time there is an output signal from the comparator 9, which will be described later.
The stored value in memory 8 is applied to comparator 9. The output of the counter 3 is directly applied to the comparator 9. Since the stored value in the memory 8 is rewritten with a new value by the output signal from the comparator 9, it is based on the count value at least one time before the count value directly input to the comparator 9 from the counter 3. Therefore, if you slowly turn the mounting position adjustment screw of the spectroscopic crystal, the tilt of the spectroscopic crystal will change and the position where the X-rays from the input slit are concentrated will move on the output slit, causing a change in the X-ray concentration position. Since the amount of X-rays passing through the exit slit changes depending on the amount of radiation, the output of the counter 3 changes with each sampling operation, and the situation is generally depicted as shown in FIG. 2. Second
In the figure, the horizontal axis corresponds to the rotation angle of the mounting position adjustment screw. Point A corresponding to the peak apex of the curve in FIG. 2 is the inclination of the spectroscopic crystal at which the desired adjustment position, that is, the X-ray concentration position coincides with the center of the exit slit. Since the count value N has statistical fluctuations, the graph of the count value of the counter 3 is not a smooth curve like this, but a curve that rises and falls finely.

Now, the comparator 9 outputs an output and sounds the buzzer 10 while the count value directly sent from the counter 3 is greater than the output from the memory 8. This output is also sent to the control device 4 as a memory rewrite signal, and the control device 4 rewrites the contents of the memory 8 with new count values. Therefore, when the count value directly sent from the counter 3 becomes smaller than the output of the memory 8, the buzzer 10 stops. In this case, memory 8
The contents of are unchanged. This buzzer stop position is
In the diagram, this is point B. The difference between point A and point B is B
This is because the count value at the point is lower than that at point A by the amount of the dead width described above. Listen to the sound of the buzzer 10 while turning the fine adjustment screw, and when the buzzer stops sounding, slowly turn the fine adjustment screw back and the buzzer 10 will start sounding again, and this time, when it returns to point C, the buzzer will stop sounding. Therefore, by turning the fine adjustment screw back and forth several times in this vicinity, the width of the position where the buzzer stops sounding can be automatically determined, and the fine adjustment screw can ultimately be set extremely close to point A.

The reason for setting the insensitivity width when detecting a peak in the above configuration is that the actual count value N does not show a smooth change as shown in Figure 2 but fluctuates finely due to statistical fluctuations, as mentioned above. If the width is not set, the buzzer will stop operating frequently, which is very troublesome, and it will be difficult to find the true peak apex. Therefore, a dead band corresponding to the above dead width is provided in the response of the buzzer 10 to ensure that the position of the fine adjustment screw is true. This is to ensure that the buzzer continues to sound until it passes the peak corresponding position, and continues to not sound after this point.

The timing of rewriting the contents of the memory 8 is delayed from that of the detection output sampling, and while the count value of the counter 3 in the current sampling is input to the comparator 9, the memory 8 is rewritten based on the count value in the previous sampling. The calculated value is held and applied to the comparator 9. The control device 4 is in charge of controlling these timings.

In the above embodiment, the dead width is included in the previous sampling value, but this order is arbitrary.The previous sampling value and the current sampling value plus the dead width value are compared, and the current sampling value is It goes without saying that it is also possible to search for a point where the value plus the dead width is lower than the previous sampling value.

The adjustment device of the present invention has the above-mentioned configuration, and there is no need to connect a meter or recorder to the spectrometer.
In addition, there is no need to visually check the display while performing the work, and the adjuster can focus on making minute turns of the fine adjustment screw while listening to the activation and deactivation of the buzzer, making adjustment operations easy and even for inexperienced people. 1,2
Adjustments can be completed in minutes.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing the configuration of an apparatus according to an embodiment of the present invention, and FIG. 2 is a graph showing the relationship between the counted value of the counter and the rotation angle of the fine adjustment screw. 1...X-ray spectrometer, 2...detector, 3...counter, 6...memory, 9...comparator, 10...buzzer.

Claims (1)

[Claims for Utility Model Registration] An entrance slit, a spectroscopic element, an exit slit, and a detector are provided as constituent elements, and at least one of the entrance slit, the spectroscopic element, or the exit slit is attached to a component holding member. In a spectrometer equipped with a mounting position adjustment means for manually adjusting the mounting position, the operation is started when the mounting position adjustment means adjusts the mounting position of the component, and the detector output is adjusted at fixed time intervals. The sampling means for sampling and the memory compare the data held in the memory with the data obtained by adding a predetermined value to the latest data sampled by the sampling means, and the value of the added data is determined. When the value of the data stored in the memory is greater than the value of the data stored in the memory, a signal is output and the contents of the memory are rewritten to the latest data, and when the value of the added data is smaller than the value of the data stored in the memory. An adjusting device for a spectroscopic device, comprising a comparing means that operates so as not to rewrite the contents of the memory, and a display device that performs a display operation based on the signal emitted from the comparing means.