JPS6454363A - Manufacture of probe card - Google Patents
Manufacture of probe cardInfo
- Publication number
- JPS6454363A JPS6454363A JP62211579A JP21157987A JPS6454363A JP S6454363 A JPS6454363 A JP S6454363A JP 62211579 A JP62211579 A JP 62211579A JP 21157987 A JP21157987 A JP 21157987A JP S6454363 A JPS6454363 A JP S6454363A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- holding ring
- probe card
- controller
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To obtain a manufacturing method for such a probe card that respective probes are all constant in free length by forming a plate part whose center part is closed integrally with a probe holding ring previously, forming an opening part in the plate part by a laser beam cutting device, and adhering the holding ring to the respective probes. CONSTITUTION:The probe holding ring 3 before working is adhered to the center hole of the printed wiring substrate 2 of the probe card 1. A table 4, on the other hand, is driven by an X-Y controller 5 and displaced on horizontal X-Y coordinates. Further, the laser 6 and controller 5 are controlled by a computer 7. Then a laser beam traces the top surface of the center plate of the holding ring 3 according to the arithmetic result of the computer 7 to cut it. Then a jig 11 which has a stylus hole is arranged at the same position as that of the electrode array of a semiconductor chip to be tested and the probe 13 is arranged on a conic base 12 which has a mark at a prescribed point on a radius R; and an adhesive 15 is applied over the surface of the holding ring 14 after the working and applied onto the probe group. This is dried and the root of the probe is soldered to an electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62211579A JPS6454363A (en) | 1987-08-26 | 1987-08-26 | Manufacture of probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62211579A JPS6454363A (en) | 1987-08-26 | 1987-08-26 | Manufacture of probe card |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6454363A true JPS6454363A (en) | 1989-03-01 |
Family
ID=16608100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62211579A Pending JPS6454363A (en) | 1987-08-26 | 1987-08-26 | Manufacture of probe card |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6454363A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5758762U (en) * | 1980-09-24 | 1982-04-07 | ||
| JPS57201039A (en) * | 1981-06-03 | 1982-12-09 | Yoshie Hasegawa | Stationary probe board |
| JPS59144588A (en) * | 1983-02-07 | 1984-08-18 | Amada Co Ltd | Manufacture of laminated die by laser working |
| JPS6082288A (en) * | 1983-10-07 | 1985-05-10 | Matsushita Electric Ind Co Ltd | Laser working device |
| JPS6273794A (en) * | 1985-09-27 | 1987-04-04 | 日立電子エンジニアリング株式会社 | Pattern cutting system |
-
1987
- 1987-08-26 JP JP62211579A patent/JPS6454363A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5758762U (en) * | 1980-09-24 | 1982-04-07 | ||
| JPS57201039A (en) * | 1981-06-03 | 1982-12-09 | Yoshie Hasegawa | Stationary probe board |
| JPS59144588A (en) * | 1983-02-07 | 1984-08-18 | Amada Co Ltd | Manufacture of laminated die by laser working |
| JPS6082288A (en) * | 1983-10-07 | 1985-05-10 | Matsushita Electric Ind Co Ltd | Laser working device |
| JPS6273794A (en) * | 1985-09-27 | 1987-04-04 | 日立電子エンジニアリング株式会社 | Pattern cutting system |
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