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JPS6424326U - - Google Patents

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Publication number
JPS6424326U
JPS6424326U JP11837387U JP11837387U JPS6424326U JP S6424326 U JPS6424326 U JP S6424326U JP 11837387 U JP11837387 U JP 11837387U JP 11837387 U JP11837387 U JP 11837387U JP S6424326 U JPS6424326 U JP S6424326U
Authority
JP
Japan
Prior art keywords
liquid crystal
display panel
crystal display
film
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11837387U
Other languages
Japanese (ja)
Other versions
JPH0717059Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987118373U priority Critical patent/JPH0717059Y2/en
Publication of JPS6424326U publication Critical patent/JPS6424326U/ja
Application granted granted Critical
Publication of JPH0717059Y2 publication Critical patent/JPH0717059Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図ａ，ｂは本考案の液晶表示パネル用電極
基板一実施例の要部平面図、及びＡ―Ａ′断面図
、第２図ａ，ｂは本考案基板一実施例の異なる要
部平面図、及びＡ―Ａ′断面図、第３図ａ〜ｅは
第１図ｂの本考案基板断面図に対応する製造工程
図、第４図はａ―Ｓｉ形成における放電パワーと
内部応力の関係図、第５図はＳｉＮｘ形成におけ
る混合ガス比と内部応力の関係図、第６図及び第
７図は夫々スリツトＳ形状と内部応力の方向との
関係を示す平面図である。 １…金属膜、２…絶縁薄膜、３…半導体薄膜、
４…上層金属配線膜、５…透明導電膜、Ｓ…スリ
ツト。 Figures 1a and b are a plan view of essential parts of an embodiment of an electrode substrate for a liquid crystal display panel of the present invention, and a sectional view taken along line A-A', and Figures 2a and b are different essential parts of an embodiment of an electrode substrate for a liquid crystal display panel of the present invention. The plan view and A-A' cross-sectional view, Figures 3 a to e are manufacturing process diagrams corresponding to the cross-sectional view of the substrate of the present invention in Figure 1 b, and Figure 4 shows the discharge power and internal stress during a-Si formation. FIG. 5 is a diagram showing the relationship between the mixed gas ratio and internal stress in SiNx formation, and FIGS. 6 and 7 are plan views showing the relationship between the slit S shape and the direction of internal stress, respectively. 1...Metal film, 2...Insulating thin film, 3...Semiconductor thin film,
4... Upper layer metal wiring film, 5... Transparent conductive film, S... Slit.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 絶縁基板上に電極膜、絶縁膜、あるいは半導体
膜を積層形成した液晶表示パネル用電極基板に於
いて、これ等の積層構造の少なくとも一層に、該
層を部分的に除去した除去部を多数分散配置せし
めた事を特徴とする液晶表示パネル用電極基板。 In an electrode substrate for a liquid crystal display panel in which an electrode film, an insulating film, or a semiconductor film is laminated on an insulating substrate, a large number of removed portions where the layer is partially removed are dispersed in at least one layer of these laminated structures. An electrode substrate for a liquid crystal display panel, characterized in that:
JP1987118373U 1987-07-31 1987-07-31 Electrode substrate for liquid crystal display panel Expired - Lifetime JPH0717059Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987118373U JPH0717059Y2 (en) 1987-07-31 1987-07-31 Electrode substrate for liquid crystal display panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987118373U JPH0717059Y2 (en) 1987-07-31 1987-07-31 Electrode substrate for liquid crystal display panel

Publications (2)

Publication Number Publication Date
JPS6424326U true JPS6424326U (en) 1989-02-09
JPH0717059Y2 JPH0717059Y2 (en) 1995-04-19

Family

ID=31362673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987118373U Expired - Lifetime JPH0717059Y2 (en) 1987-07-31 1987-07-31 Electrode substrate for liquid crystal display panel

Country Status (1)

Country Link
JP (1) JPH0717059Y2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0651349A (en) * 1992-06-04 1994-02-25 Nec Corp Liquid crystal display device and its manufacture
JPH07199223A (en) * 1993-12-30 1995-08-04 Nec Corp Production of liquid crystal display
JP2007012652A (en) * 2005-06-28 2007-01-18 Sony Corp Thin-film transistor substrate and manufacturing method thereof
JP2012099847A (en) * 2012-01-13 2012-05-24 Sony Corp Method for manufacturing thin film transistor substrate
JP2017116904A (en) * 2015-12-21 2017-06-29 株式会社ジャパンディスプレイ Display
JP2020170148A (en) * 2013-06-17 2020-10-15 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． Display device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5955786U (en) * 1982-10-06 1984-04-12 ホシデン株式会社 LCD display
JPS6155626A (en) * 1984-08-27 1986-03-20 Hitachi Ltd Liquid crystal display element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5955786U (en) * 1982-10-06 1984-04-12 ホシデン株式会社 LCD display
JPS6155626A (en) * 1984-08-27 1986-03-20 Hitachi Ltd Liquid crystal display element

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0651349A (en) * 1992-06-04 1994-02-25 Nec Corp Liquid crystal display device and its manufacture
JPH07199223A (en) * 1993-12-30 1995-08-04 Nec Corp Production of liquid crystal display
JP2007012652A (en) * 2005-06-28 2007-01-18 Sony Corp Thin-film transistor substrate and manufacturing method thereof
JP2012099847A (en) * 2012-01-13 2012-05-24 Sony Corp Method for manufacturing thin film transistor substrate
JP2020170148A (en) * 2013-06-17 2020-10-15 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． Display device
JP2017116904A (en) * 2015-12-21 2017-06-29 株式会社ジャパンディスプレイ Display

Also Published As

Publication number Publication date
JPH0717059Y2 (en) 1995-04-19

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