Nothing Special   »   [go: up one dir, main page]

JPS6418043A - Method and apparatus for measuring fine particle in liquid - Google Patents

Method and apparatus for measuring fine particle in liquid

Info

Publication number
JPS6418043A
JPS6418043A JP62173991A JP17399187A JPS6418043A JP S6418043 A JPS6418043 A JP S6418043A JP 62173991 A JP62173991 A JP 62173991A JP 17399187 A JP17399187 A JP 17399187A JP S6418043 A JPS6418043 A JP S6418043A
Authority
JP
Japan
Prior art keywords
mask
flow
sample liquid
liquid
condensed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62173991A
Other languages
Japanese (ja)
Other versions
JPH0786457B2 (en
Inventor
Akihiro Fujita
Hitoshi Wakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kowa Co Ltd
Original Assignee
Kowa Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kowa Co Ltd filed Critical Kowa Co Ltd
Priority to JP62173991A priority Critical patent/JPH0786457B2/en
Publication of JPS6418043A publication Critical patent/JPS6418043A/en
Publication of JPH0786457B2 publication Critical patent/JPH0786457B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To enable measurement of a fine particle in a liquid with a different refractive index on the optimum conditions, by controlling the movement in the direction vertical to the surface of a mask maintaining a relative position between the mask and a light receiving lens constantly. CONSTITUTION:A measuring cell 10 is provided with an inflow pipe 12 for inflow of a sample liquid 22 such as pure water containing fine particles 23 and an outflow pipe 13 for discharge of the sample liquid 22. Then, an incident laser beam 21 with an oval cross-section is generated from a laser light source to be condensed through a condenser lens 40 so that particles pass at the condensed point 21a in the vertical way to the optical axis of the laser to form a uniform flow of the sample liquid as indicated by the arrow A. The uniform flow can be achieved by stabilizing a flow velocity of a flow into a measuring cell 10 from the input pipe 12. Scattered light 24 from fine particles passing at the condensed point 21a on the flow forms an image on a mask 26 through a light receiving lens 25 and the scattered light 24 limited by an opening 26a of the mask reaches a photoelectric detector 27 to perform a measurement.
JP62173991A 1987-07-14 1987-07-14 Method and apparatus for measuring fine particles in liquid Expired - Fee Related JPH0786457B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62173991A JPH0786457B2 (en) 1987-07-14 1987-07-14 Method and apparatus for measuring fine particles in liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62173991A JPH0786457B2 (en) 1987-07-14 1987-07-14 Method and apparatus for measuring fine particles in liquid

Publications (2)

Publication Number Publication Date
JPS6418043A true JPS6418043A (en) 1989-01-20
JPH0786457B2 JPH0786457B2 (en) 1995-09-20

Family

ID=15970742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62173991A Expired - Fee Related JPH0786457B2 (en) 1987-07-14 1987-07-14 Method and apparatus for measuring fine particles in liquid

Country Status (1)

Country Link
JP (1) JPH0786457B2 (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002296170A (en) * 2001-03-29 2002-10-09 Sysmex Corp Flow sight meter
JP2003004625A (en) * 2001-06-15 2003-01-08 Sysmex Corp Flow sight meter
JP2012002713A (en) * 2010-06-18 2012-01-05 Hitachi High-Technologies Corp Detector for liquid chromatograph
US8634072B2 (en) 2004-03-06 2014-01-21 Michael Trainer Methods and apparatus for determining characteristics of particles
CN107941664A (en) * 2017-12-20 2018-04-20 天津博宜特科技有限公司 Liquid particle detector
WO2018135488A1 (en) * 2017-01-20 2018-07-26 東京エレクトロン株式会社 Foreign matter detection device, foreign matter detection method and storage medium
JP2018121075A (en) * 2018-04-06 2018-08-02 東京エレクトロン株式会社 Substrate processing device, and substrate processing method
CN110121643A (en) * 2016-07-15 2019-08-13 美国艾森生物科学公司 Systems for optical inspection, flow cytometer systems and its application method for flow cytometer
WO2020026378A1 (en) * 2018-08-01 2020-02-06 株式会社島津製作所 Light scattering detection device and light scattering detection method
WO2020240755A1 (en) * 2019-05-29 2020-12-03 株式会社島津製作所 Light-scattering detection device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4912504B1 (en) * 2010-09-16 2012-04-11 キヤノン株式会社 Refractive index measurement method and measurement apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112034A (en) * 1985-11-11 1987-05-23 Canon Inc Particle analyzing instrument

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112034A (en) * 1985-11-11 1987-05-23 Canon Inc Particle analyzing instrument

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002296170A (en) * 2001-03-29 2002-10-09 Sysmex Corp Flow sight meter
JP2003004625A (en) * 2001-06-15 2003-01-08 Sysmex Corp Flow sight meter
US8634072B2 (en) 2004-03-06 2014-01-21 Michael Trainer Methods and apparatus for determining characteristics of particles
JP2012002713A (en) * 2010-06-18 2012-01-05 Hitachi High-Technologies Corp Detector for liquid chromatograph
CN110121643A (en) * 2016-07-15 2019-08-13 美国艾森生物科学公司 Systems for optical inspection, flow cytometer systems and its application method for flow cytometer
CN110121643B (en) * 2016-07-15 2022-04-19 安捷伦科技有限公司 Optical detection system for flow cytometer, flow cytometer system and method of using the same
WO2018135488A1 (en) * 2017-01-20 2018-07-26 東京エレクトロン株式会社 Foreign matter detection device, foreign matter detection method and storage medium
CN107941664A (en) * 2017-12-20 2018-04-20 天津博宜特科技有限公司 Liquid particle detector
JP2018121075A (en) * 2018-04-06 2018-08-02 東京エレクトロン株式会社 Substrate processing device, and substrate processing method
WO2020026378A1 (en) * 2018-08-01 2020-02-06 株式会社島津製作所 Light scattering detection device and light scattering detection method
WO2020240755A1 (en) * 2019-05-29 2020-12-03 株式会社島津製作所 Light-scattering detection device
JPWO2020240755A1 (en) * 2019-05-29 2021-11-11 株式会社島津製作所 Light scattering detector

Also Published As

Publication number Publication date
JPH0786457B2 (en) 1995-09-20

Similar Documents

Publication Publication Date Title
MY100374A (en) Improved optical features of flow cytometry apparatus
JPS6418043A (en) Method and apparatus for measuring fine particle in liquid
DE69319184D1 (en) Liquid contamination sensor
US4876458A (en) Apparatus for measuring particles in liquid
MY102913A (en) Flow cytometry apparatus with improved light beam adjustment.
FR2445959A1 (en) METHOD AND DEVICE FOR MEASURING LIGHT DISPERSION IN PARTICLE DETECTION SYSTEMS AND COMPOSITE MIRROR FOR USE THEREIN
US5033851A (en) Light scattering method and apparatus for detecting particles in liquid sample
EP0383460A3 (en) Apparatus for measuring particles in liquid
KR960702606A (en) Apparatus and method for determining the size of particles using light scattering
JPH0346777B2 (en)
GB1271172A (en) An arrangement for measuring the refractive index of liquids
JPS554575A (en) Method and apparatus for measuring flow velocity distribution and flow rate by laser doppler method
GB1124144A (en) A through-flow photometer
JPS5737251A (en) Optical system of measuring device of grain density in suspension liquid
JPS57184920A (en) Powder passage detector
JPS63292039A (en) Particulate particle detection device in liquid
JPS56501539A (en)
JPH06241974A (en) Grain size distribution measuring device
JPS57118176A (en) Detector for shielding material in front of moving body detector using space filter
JPS5779472A (en) Optical fiber probe for laser doppler velocimeter
SU930119A1 (en) Device for determination of fat and protein in milk and dairy
JPS5552932A (en) Head for sludge concentration meter
SU1078283A1 (en) Device for measuring size of particles suspended in liquid
SU1427247A1 (en) Flow-type non-contacting liquid media turbidity meter
JPS6491036A (en) Measuring apparatus of particles in liquid

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees