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JPS5377489A - Static holder - Google Patents

Static holder

Info

Publication number
JPS5377489A
JPS5377489A JP15386776A JP15386776A JPS5377489A JP S5377489 A JPS5377489 A JP S5377489A JP 15386776 A JP15386776 A JP 15386776A JP 15386776 A JP15386776 A JP 15386776A JP S5377489 A JPS5377489 A JP S5377489A
Authority
JP
Japan
Prior art keywords
static holder
static
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15386776A
Other languages
Japanese (ja)
Other versions
JPS5758872B2 (en
Inventor
Tadashi Ooya
Tetsuo Itou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taihei Chemicals Ltd
Original Assignee
Taihei Chemicals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taihei Chemicals Ltd filed Critical Taihei Chemicals Ltd
Priority to JP15386776A priority Critical patent/JPS5377489A/en
Publication of JPS5377489A publication Critical patent/JPS5377489A/en
Publication of JPS5758872B2 publication Critical patent/JPS5758872B2/ja
Granted legal-status Critical Current

Links

JP15386776A 1976-12-21 1976-12-21 Static holder Granted JPS5377489A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15386776A JPS5377489A (en) 1976-12-21 1976-12-21 Static holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15386776A JPS5377489A (en) 1976-12-21 1976-12-21 Static holder

Publications (2)

Publication Number Publication Date
JPS5377489A true JPS5377489A (en) 1978-07-08
JPS5758872B2 JPS5758872B2 (en) 1982-12-11

Family

ID=15571827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15386776A Granted JPS5377489A (en) 1976-12-21 1976-12-21 Static holder

Country Status (1)

Country Link
JP (1) JPS5377489A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6395644A (en) * 1986-10-13 1988-04-26 Nippon Telegr & Teleph Corp <Ntt> Electrostatic chuck
JPS6363491U (en) * 1986-10-16 1988-04-26
JPH0197994U (en) * 1987-12-21 1989-06-29
JPH01303079A (en) * 1988-05-30 1989-12-06 Abisare:Kk Electrostatic adsorbing plate having flexible plug-in terminal
JPH0351237A (en) * 1989-07-20 1991-03-05 Taihei Kagaku Seihin Kk Electrostatic attracting device
JPH043956A (en) * 1990-04-20 1992-01-08 Fujitsu Ltd Electrostatic chuck equipment
WO2021117817A1 (en) 2019-12-13 2021-06-17 三井化学株式会社 Pellicle demounting method, and pellicle demounting device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441892U (en) * 1977-08-25 1979-03-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441892U (en) * 1977-08-25 1979-03-20

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6395644A (en) * 1986-10-13 1988-04-26 Nippon Telegr & Teleph Corp <Ntt> Electrostatic chuck
JPS6363491U (en) * 1986-10-16 1988-04-26
JPH0197994U (en) * 1987-12-21 1989-06-29
JPH01303079A (en) * 1988-05-30 1989-12-06 Abisare:Kk Electrostatic adsorbing plate having flexible plug-in terminal
JPH0351237A (en) * 1989-07-20 1991-03-05 Taihei Kagaku Seihin Kk Electrostatic attracting device
JPH043956A (en) * 1990-04-20 1992-01-08 Fujitsu Ltd Electrostatic chuck equipment
WO2021117817A1 (en) 2019-12-13 2021-06-17 三井化学株式会社 Pellicle demounting method, and pellicle demounting device

Also Published As

Publication number Publication date
JPS5758872B2 (en) 1982-12-11

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