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JPS5354675A - Positioning detecting method - Google Patents

Positioning detecting method

Info

Publication number
JPS5354675A
JPS5354675A JP12885876A JP12885876A JPS5354675A JP S5354675 A JPS5354675 A JP S5354675A JP 12885876 A JP12885876 A JP 12885876A JP 12885876 A JP12885876 A JP 12885876A JP S5354675 A JPS5354675 A JP S5354675A
Authority
JP
Japan
Prior art keywords
detecting method
positioning detecting
positioning
bodies
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12885876A
Other languages
Japanese (ja)
Other versions
JPS5736602B2 (en
Inventor
Sunao Ishihara
Nobuyuki Takeuchi
Kazue Yoshida
Miyao Oda
Takashi Uchiyama
Akifumi Muto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP12885876A priority Critical patent/JPS5354675A/en
Publication of JPS5354675A publication Critical patent/JPS5354675A/en
Publication of JPS5736602B2 publication Critical patent/JPS5736602B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE: To perform positioning highly accurate, by detecting the quantity of light passing through positioning marks transmitting light set to two bodies.
COPYRIGHT: (C)1978,JPO&Japio
JP12885876A 1976-10-28 1976-10-28 Positioning detecting method Granted JPS5354675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12885876A JPS5354675A (en) 1976-10-28 1976-10-28 Positioning detecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12885876A JPS5354675A (en) 1976-10-28 1976-10-28 Positioning detecting method

Publications (2)

Publication Number Publication Date
JPS5354675A true JPS5354675A (en) 1978-05-18
JPS5736602B2 JPS5736602B2 (en) 1982-08-05

Family

ID=14995100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12885876A Granted JPS5354675A (en) 1976-10-28 1976-10-28 Positioning detecting method

Country Status (1)

Country Link
JP (1) JPS5354675A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109080A (en) * 1977-03-03 1978-09-22 Fujitsu Ltd Positioning device
JPS61100817A (en) * 1984-10-22 1986-05-19 Canon Inc Positioning method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4858476A (en) * 1971-11-24 1973-08-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4858476A (en) * 1971-11-24 1973-08-16

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109080A (en) * 1977-03-03 1978-09-22 Fujitsu Ltd Positioning device
JPS5854408B2 (en) * 1977-03-03 1983-12-05 富士通株式会社 Alignment method
JPS61100817A (en) * 1984-10-22 1986-05-19 Canon Inc Positioning method

Also Published As

Publication number Publication date
JPS5736602B2 (en) 1982-08-05

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