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JPS5322786A - Combined analyzer - Google Patents

Combined analyzer

Info

Publication number
JPS5322786A
JPS5322786A JP9708276A JP9708276A JPS5322786A JP S5322786 A JPS5322786 A JP S5322786A JP 9708276 A JP9708276 A JP 9708276A JP 9708276 A JP9708276 A JP 9708276A JP S5322786 A JPS5322786 A JP S5322786A
Authority
JP
Japan
Prior art keywords
specimen
combined analyzer
analysis
analyzer
combined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9708276A
Other languages
Japanese (ja)
Inventor
Toru Ishitani
Hifumi Tamura
Michiyasu Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9708276A priority Critical patent/JPS5322786A/en
Publication of JPS5322786A publication Critical patent/JPS5322786A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To make possible analusis for element of lower concentration, by simultaneously carrying out elementary analysis for specimen depending on principle of analysis for each of utilized secondary ion and reflected ion both being emitted from surface of specimen.
JP9708276A 1976-08-16 1976-08-16 Combined analyzer Pending JPS5322786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9708276A JPS5322786A (en) 1976-08-16 1976-08-16 Combined analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9708276A JPS5322786A (en) 1976-08-16 1976-08-16 Combined analyzer

Publications (1)

Publication Number Publication Date
JPS5322786A true JPS5322786A (en) 1978-03-02

Family

ID=14182709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9708276A Pending JPS5322786A (en) 1976-08-16 1976-08-16 Combined analyzer

Country Status (1)

Country Link
JP (1) JPS5322786A (en)

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