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JPS5311576A - Method of forming thin film by vapourrgrowth - Google Patents

Method of forming thin film by vapourrgrowth

Info

Publication number
JPS5311576A
JPS5311576A JP8584676A JP8584676A JPS5311576A JP S5311576 A JPS5311576 A JP S5311576A JP 8584676 A JP8584676 A JP 8584676A JP 8584676 A JP8584676 A JP 8584676A JP S5311576 A JPS5311576 A JP S5311576A
Authority
JP
Japan
Prior art keywords
vapourrgrowth
thin film
forming thin
forming
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8584676A
Other languages
Japanese (ja)
Other versions
JPS5636564B2 (en
Inventor
Jiyunichi Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP8584676A priority Critical patent/JPS5311576A/en
Publication of JPS5311576A publication Critical patent/JPS5311576A/en
Publication of JPS5636564B2 publication Critical patent/JPS5636564B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP8584676A 1976-07-19 1976-07-19 Method of forming thin film by vapourrgrowth Granted JPS5311576A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8584676A JPS5311576A (en) 1976-07-19 1976-07-19 Method of forming thin film by vapourrgrowth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8584676A JPS5311576A (en) 1976-07-19 1976-07-19 Method of forming thin film by vapourrgrowth

Publications (2)

Publication Number Publication Date
JPS5311576A true JPS5311576A (en) 1978-02-02
JPS5636564B2 JPS5636564B2 (en) 1981-08-25

Family

ID=13870224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8584676A Granted JPS5311576A (en) 1976-07-19 1976-07-19 Method of forming thin film by vapourrgrowth

Country Status (1)

Country Link
JP (1) JPS5311576A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190296A (en) * 1983-04-12 1984-10-29 Agency Of Ind Science & Technol Growth of crystal in vapor of organometallic compound
JPS59190297A (en) * 1983-04-12 1984-10-29 Agency Of Ind Science & Technol Crystal growth in vapor of organometallic compound
US4649859A (en) * 1985-02-19 1987-03-17 The United States Of America As Represented By The United States Department Of Energy Reactor design for uniform chemical vapor deposition-grown films without substrate rotation
US4748135A (en) * 1986-05-27 1988-05-31 U.S. Philips Corp. Method of manufacturing a semiconductor device by vapor phase deposition using multiple inlet flow control
US4945856A (en) * 1988-06-23 1990-08-07 Jeffrey Stewart Parylene deposition chamber
US5078091A (en) * 1988-06-23 1992-01-07 Jeffrey Stewart Parylene deposition chamber and method of use
US5167718A (en) * 1988-06-23 1992-12-01 Jeffrey Stewart Parylene deposition chamber and method of use
JPH04131656U (en) * 1991-05-15 1992-12-03 日本酸素株式会社 Thin film manufacturing equipment
US5275686A (en) * 1991-09-25 1994-01-04 University Of New Mexico Radial epitaxial reactor for multiple wafer growth
US5488833A (en) * 1994-09-26 1996-02-06 Stewart; Jeffrey Tangential flow cold trap
US5882725A (en) * 1997-07-01 1999-03-16 Para Tech Coating, Inc. Parylene deposition chamber including eccentric part tumbler
US6406544B1 (en) 1988-06-23 2002-06-18 Jeffrey Stewart Parylene deposition chamber and method of use
US6737224B2 (en) 2001-04-17 2004-05-18 Jeffrey Stewart Method of preparing thin supported films by vacuum deposition

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4325497Y1 (en) * 1966-03-02 1968-10-25
JPS49110562U (en) * 1973-01-19 1974-09-20

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4325497Y1 (en) * 1966-03-02 1968-10-25
JPS49110562U (en) * 1973-01-19 1974-09-20

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190296A (en) * 1983-04-12 1984-10-29 Agency Of Ind Science & Technol Growth of crystal in vapor of organometallic compound
JPS59190297A (en) * 1983-04-12 1984-10-29 Agency Of Ind Science & Technol Crystal growth in vapor of organometallic compound
US4649859A (en) * 1985-02-19 1987-03-17 The United States Of America As Represented By The United States Department Of Energy Reactor design for uniform chemical vapor deposition-grown films without substrate rotation
US4748135A (en) * 1986-05-27 1988-05-31 U.S. Philips Corp. Method of manufacturing a semiconductor device by vapor phase deposition using multiple inlet flow control
US5167718A (en) * 1988-06-23 1992-12-01 Jeffrey Stewart Parylene deposition chamber and method of use
US5078091A (en) * 1988-06-23 1992-01-07 Jeffrey Stewart Parylene deposition chamber and method of use
US4945856A (en) * 1988-06-23 1990-08-07 Jeffrey Stewart Parylene deposition chamber
US6406544B1 (en) 1988-06-23 2002-06-18 Jeffrey Stewart Parylene deposition chamber and method of use
JPH04131656U (en) * 1991-05-15 1992-12-03 日本酸素株式会社 Thin film manufacturing equipment
US5275686A (en) * 1991-09-25 1994-01-04 University Of New Mexico Radial epitaxial reactor for multiple wafer growth
US5488833A (en) * 1994-09-26 1996-02-06 Stewart; Jeffrey Tangential flow cold trap
US5882725A (en) * 1997-07-01 1999-03-16 Para Tech Coating, Inc. Parylene deposition chamber including eccentric part tumbler
US6737224B2 (en) 2001-04-17 2004-05-18 Jeffrey Stewart Method of preparing thin supported films by vacuum deposition

Also Published As

Publication number Publication date
JPS5636564B2 (en) 1981-08-25

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