JPS5221332Y2 - - Google Patents
Info
- Publication number
- JPS5221332Y2 JPS5221332Y2 JP6285172U JP6285172U JPS5221332Y2 JP S5221332 Y2 JPS5221332 Y2 JP S5221332Y2 JP 6285172 U JP6285172 U JP 6285172U JP 6285172 U JP6285172 U JP 6285172U JP S5221332 Y2 JPS5221332 Y2 JP S5221332Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6285172U JPS5221332Y2 (en) | 1972-05-30 | 1972-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6285172U JPS5221332Y2 (en) | 1972-05-30 | 1972-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4922117U JPS4922117U (en) | 1974-02-25 |
| JPS5221332Y2 true JPS5221332Y2 (en) | 1977-05-16 |
Family
ID=27953441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6285172U Expired JPS5221332Y2 (en) | 1972-05-30 | 1972-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5221332Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0397479U (en) * | 1990-01-26 | 1991-10-07 |
-
1972
- 1972-05-30 JP JP6285172U patent/JPS5221332Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4922117U (en) | 1974-02-25 |