JPS5188181A - - Google Patents
Info
- Publication number
- JPS5188181A JPS5188181A JP50007767A JP776775A JPS5188181A JP S5188181 A JPS5188181 A JP S5188181A JP 50007767 A JP50007767 A JP 50007767A JP 776775 A JP776775 A JP 776775A JP S5188181 A JPS5188181 A JP S5188181A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP776775A JPS5421711B2 (xx) | 1975-01-20 | 1975-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP776775A JPS5421711B2 (xx) | 1975-01-20 | 1975-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5188181A true JPS5188181A (xx) | 1976-08-02 |
| JPS5421711B2 JPS5421711B2 (xx) | 1979-08-01 |
Family
ID=11674819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP776775A Expired JPS5421711B2 (xx) | 1975-01-20 | 1975-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5421711B2 (xx) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5334641A (en) * | 1976-09-13 | 1978-03-31 | Northern Telecom Ltd | Method of and apparatus for controlling terminal point of plasma etching |
| JPS5355471U (xx) * | 1976-10-13 | 1978-05-12 | ||
| JPS5591829A (en) * | 1979-01-02 | 1980-07-11 | Motorola Inc | Plasma producing process controller |
| JPS5759332A (en) * | 1980-09-27 | 1982-04-09 | Fujitsu Ltd | Method for detecting finishing time of dry etching reaction |
| JPS5839781A (ja) * | 1981-09-02 | 1983-03-08 | Toshiba Corp | 反応性イオンエツチング装置 |
| JPS58140126A (ja) * | 1982-02-16 | 1983-08-19 | Matsushita Electric Ind Co Ltd | ドライエツチング方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS492482A (xx) * | 1972-04-18 | 1974-01-10 |
-
1975
- 1975-01-20 JP JP776775A patent/JPS5421711B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS492482A (xx) * | 1972-04-18 | 1974-01-10 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5334641A (en) * | 1976-09-13 | 1978-03-31 | Northern Telecom Ltd | Method of and apparatus for controlling terminal point of plasma etching |
| JPS6013072B2 (ja) * | 1976-09-13 | 1985-04-04 | ノ−ザン・テレコム・リミテツド | プラズマエツチングの終点制御方法および装置 |
| JPS5355471U (xx) * | 1976-10-13 | 1978-05-12 | ||
| JPS5591829A (en) * | 1979-01-02 | 1980-07-11 | Motorola Inc | Plasma producing process controller |
| JPS63191628U (xx) * | 1979-01-02 | 1988-12-09 | ||
| JPS5759332A (en) * | 1980-09-27 | 1982-04-09 | Fujitsu Ltd | Method for detecting finishing time of dry etching reaction |
| JPS5839781A (ja) * | 1981-09-02 | 1983-03-08 | Toshiba Corp | 反応性イオンエツチング装置 |
| JPS58140126A (ja) * | 1982-02-16 | 1983-08-19 | Matsushita Electric Ind Co Ltd | ドライエツチング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5421711B2 (xx) | 1979-08-01 |