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JPS51120355A - Process for making diaphragm by photoetching - Google Patents

Process for making diaphragm by photoetching

Info

Publication number
JPS51120355A
JPS51120355A JP4546575A JP4546575A JPS51120355A JP S51120355 A JPS51120355 A JP S51120355A JP 4546575 A JP4546575 A JP 4546575A JP 4546575 A JP4546575 A JP 4546575A JP S51120355 A JPS51120355 A JP S51120355A
Authority
JP
Japan
Prior art keywords
photoetching
diaphragm
making diaphragm
making
variety
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4546575A
Other languages
Japanese (ja)
Inventor
Kenji Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP4546575A priority Critical patent/JPS51120355A/en
Publication of JPS51120355A publication Critical patent/JPS51120355A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Diaphragms And Bellows (AREA)

Abstract

PURPOSE: Process for making diaphragm by photoetching in which a wide variety of selection of material used for diaphragm may be provided compared with that of the conventional limited material of diaphragm and further a variety of pressure transducers may be provided.
COPYRIGHT: (C)1976,JPO&Japio
JP4546575A 1975-04-15 1975-04-15 Process for making diaphragm by photoetching Pending JPS51120355A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4546575A JPS51120355A (en) 1975-04-15 1975-04-15 Process for making diaphragm by photoetching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4546575A JPS51120355A (en) 1975-04-15 1975-04-15 Process for making diaphragm by photoetching

Publications (1)

Publication Number Publication Date
JPS51120355A true JPS51120355A (en) 1976-10-21

Family

ID=12720109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4546575A Pending JPS51120355A (en) 1975-04-15 1975-04-15 Process for making diaphragm by photoetching

Country Status (1)

Country Link
JP (1) JPS51120355A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541754A (en) * 1977-06-07 1979-01-08 Matsushita Electric Ind Co Ltd Diaphragm for pressure convertor and its preparation
DE4238571C1 (en) * 1992-11-16 1994-06-01 Kernforschungsz Karlsruhe Process for the production of membranes spanned by a frame

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541754A (en) * 1977-06-07 1979-01-08 Matsushita Electric Ind Co Ltd Diaphragm for pressure convertor and its preparation
DE4238571C1 (en) * 1992-11-16 1994-06-01 Kernforschungsz Karlsruhe Process for the production of membranes spanned by a frame

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