JPS5954237A - Holder for substrate - Google Patents

Abstract

PURPOSE:To obtain the substrate holder of high reliability by arranging a sphere among a pair of conical recessed surfaces, a V-shaped groove and a parallel flat surface on a fixing base, supporting a substrate holding member and providing a rolling member being in contact horizontally with the holding member and a horizontal push means. CONSTITUTION:The substrate holding member 1 is supported at three points ABC through the sphere 10 on the fixing base 3. The conical concave surfaces 7 are used at the point A, V-shaped groove surfaces 8 at the point B and the parallel flat surfaces 9 at the point C. Three rolling bearings 11 to the substrate 4 are fitted brought into contact with outer circumferences at the holding positions of the substrate 4 in the substrate holding member 1, and the substrate 4 is pushed against the three bearings 11 by an energizing means 13. According to the constitution, the substrate 4 can be expanded thermally with excellent reproducibility without generating rotary displacement when the substrate is treated, and heat hardly flows out to the holding member 1 from the substrate in addition to the thermal expansion, thus accurately holding the substrate to a fixed reference, then also controlling the temperature of the substrate easily.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention (1) relates to a substrate holder for positioning and supporting a substrate in order to perform processes such as vapor deposition and nubuck treatment on the substrate.

Using a mask, align the table, substrate, and mask for evaporation and sputtering, and hold the substrate in the air.
[10t: Heating to ~400°C. At this time, thermal expansion
, f)'1 It is difficult to avoid the occurrence of misalignment, so conventionally, the misalignment is generally predicted using the J method and corrected in advance.
I'm so excited to be in the C position. For this reason, there is a need to heat the substrate and the mask with good reproducibility. FIG. 1 shows a conventional substrate holder configured to support the substrate at a reference point (X""l-(t'), and to restrain the thermal expansion of the substrate L). .

1. Hold the board 4 directly.
It is fixed to a fixed base 6 with screws 2.

Three r~'11 bars and a texture stopper 5 are fixed to the substrate holding part 1, and the substrate 4 is pressed against the alignment stopper 5 by a leaf spring 6 in a horizontal plane. In (X'l purpose is made] 1.a). to this"
The substrate 4 has a structure in which it can thermally expand and contract by bending the plate spring 6 while abutting the inner surface f111 of the positioning stopper 5 as a horizontal reference surface. Board 4'-
The downward positioning is such that the substrate retaining part 11 comes into contact with the soil surface.

The iE Yonesugi substrate holder constructed as described above has the following technical defects.

(f) If the substrate 4 does not slide against the substrate holding part 1 and the stopper 5 when it thermally expands and contracts, 1. However, the coefficient of friction in a vacuum is several times higher than in the case where it is large≦it, which prevents the circular side bends and c from moving and causes the substrate 4 to change in the rotational direction f\γ-J. Ru.

2p, Figure 2 is an explanatory diagram depicting the state of displacement in the rotational direction with an enlarged t7. Due to the displacement in the direction of rotation of the substrate 40, the identification reference 5 comes into contact with the base plate 4 at two places, and the substrate 4
j) cannot be held exactly at the fixed reference 5.

(B) The board 4 is brought into surface contact with the board holder 1, and the vertical position is adjusted by one position (J do C a). For this reason, the conduction heat 1.1 from the substrate 4 to the substrate 4p holding part B (material 1) is large. Therefore, as the substrate 4 is heated,
Af island, inner if, f'l yo nozu, 11+) Iko~
1) Includes 1-(-child measurement function change (IL).Ma,-1 board/I +;L;
Since the heat is absorbed by A), the lagoon Jft', flill Fll
(voice of embarrassment).

Misfire 11 (J, Toga 1 (mutual combination) (7j Rimi-(Tamesa J
l, IiN rotates without rotation [F'3-! ,lf
, f'l:,J,(,Qi,J(%'i; 1114
1. , son) 10, from the board to the board II the temple part old-\'s 轡! Japan II; llf'') Small F, ``Providing a suitable substrate 7j-rug.'' 4).

In order to achieve the above object, the substrate holder of the present invention has a pair of internal pins facing each other on the part f4 holding each board f'+4 and the fixed base of the plate 7J-ruder. shaped concave surface and a pair of opposing F'? An IJt surface and a pair of opposing parallel Buet flat surfaces are formed, and 10N1. ': Fl
A plurality of rolling members are installed on the upper surface of the member that holds the board, and the rollers are inserted through the rolling parts A1 to The board is placed on the side where the board can be placed horizontally, and the board is placed horizontally against the board. 714, facing the rolling part side.
, +rv in the horizontal direction, and the above-mentioned E1 force means contacts the board via the rolling member to transmit the old force. do.

Next, an embodiment of the present invention will be described with reference to FIGS. 3 to 7.

Figure 803 is a plan view, and Figure 4 is an example of part A in Figure 3, indicated by arrow a.
111 side view when viewed in the direction, Figure 5 is the same. FIG. 7 is a sectional view of J) EF in FIG. 6.

A, Ij, C+'' shown in FIG. 3 are means for supporting the substrate holding means 1 relative to the fixed base.

As shown in the side view (FIG. 4), the supporting means A has a pair of conical concave surfaces 7 facing each other on the substrate holder 1 and the fixed base 6, and connects both concave surfaces through a ball 1°. The contact must be made k). This results in :! 1-1 Means A and board holding part 1] Hold a part of JKN of 1 and attach it.
・Turn the pair of cones, 11 and 7? It's like f'd(''ru).

Support means? (As shown in Figure 5) A pair of V-groove surfaces 8 facing each other are formed on the substrate holding part 1 and the fixed base 3, respectively, and the ball 1o is aligned with the groove surface 8. Both I' groove surfaces are brought into contact C2).The center line 8 of this vrpt surface 8
σ (J shown in Figure 6, ifC in the supporting means A) (,
・Nψ is determined so that it passes through. In this case, the supporting means l?
10m of board holding means: Move a part of FA4 to the support door, and move the board holding part towards and away from the support means A. πF accommodates. However, since the center point (σ) of the r-groove surface is in the direction passing through the center of the support means A, the substrate holding portion 1 is restrained from rotating around the substrate holding means A. .

As shown in FIG. 6, the supporting means C' forms a pair of parallel flat surfaces 9 facing the substrate holding part 1 and the identification base 3, respectively, and the two surfaces are brought into contact with each other via balls 1o. be. As a result, the supporting means 6' can be moved freely in the direction of the water 51' without restricting the movement of the base plate 1) □ and the striking part 11 in the direction of the water 51'.
Supports part of 1-J.

Above: On the X plate holding part 1, in the direction of water 1' with respect to the board 4? 11 (a plurality of rolling parts A4 are provided for th placement. In this embodiment, C is three rolling bearings as the above-mentioned plurality of rolling parts) 1 is used, and as shown in FIG. One of the six rolling bearings 11 is attached to the outer periphery of the holding position of the board 4.
The number is 3J7.ゎJsi' (as shown in this figure), the inner ring of the press 1 holder 11 is connected to the knob 4 and the temple member 1, and the outer ring is connected to the base plate 4. Tangent to the outer circumference of 17
411 are formed so that they abut and borrow each other in the horizontal direction.

A substrate 4 is placed on the surface of the striking member 1 via a plurality of rolling portions, and the vertical position of the substrate 4 is determined by γ1. In this embodiment, three balls 12 are interposed as a plurality of rolling parts.

Then, the force means 13 is installed so as to press the substrate 4 at the top %Q toward the three rolling bearings 11.

Adding to this example (= tjq configuration of J group means 1
Figure 1. 'C then 4 hoben). 22 Ke1, Tamotsu Iita 4
'R part moon IVX fixed again, this black l-ke, pivot 1111 + 234 pan β, turn lever 15 1ft + 1 white? 'I support you? -).

-l-, Ftl-: Brakut 22 [/par 15)
・Insert spring 14 between
5 is J Taeji Yukata lii mouth τ, i;'' Isao 4ro. 150 levers above and 1 pant? <1 (to 2 θ) Connect the -1iiA of lot 17 through the bin 1A'f1 l2, this θ) n
,,,Sendai fA of 17! b7-ko7) Hole bearing 1
The inner circle of 8 is 1lj (rele).

Afraid, Ni'', Su, 1 Tsuba - 15 Horns q Time * 1 direction + f
(1S power; 1. Set the board '17 and the roller bearing 1B to the board 1 (-C). 7) Press toward the bearing 11 in the CC hydraulic direction (3).

Construct the board as described above,
Support the substrate 4 in the atmosphere of (r! Near) -J
l) - Mu flood 3 Figure 1 tT - As shown in 1, 4 boards i, Iri Seite g + 3, Nitsu'C 3 Nirokari Tsukuda 1 Uke 71 and 4
1117E, and crosses the substrate holder A1 to a position A1. Position the center point 0 of the temporary holding part 1 (the support means AVrc) with respect to the fixed base.
%'tIncludes supporting means l? The direction of the center line 8σ with respect to the identification base], 11. be controlled.

As shown in FIG. 7, the mask 19 placed directly facing the substrate 7I is attached to the 1-11 constant base 3 at the 1-11 angle, and the evaporation source 2 is placed on the F side VC. At the same time, a vacuum atmosphere is created, and the substrate 4 is heated again by the substrate heater 21.

Since there is only contact between the board 4 and the board holder 1 through the rolling part side at the 'CC point, contact is made between the board 4 and the board holder 1. Therefore, the conduction from the board 4 to the board holder 1 is The heat (i) is very small. Since the amount of heat absorbed by conduction is very small, it is easy to control the temperature of the substrate 4.

In addition, since the amount of heat conducted to the substrate holder 1 is very small, the temperature increase and return of the substrate holder 10 is very small.

Ru. Due to this minute J71 temperature, the substrate holder 1 moves from the center line 8a of the support means B to the center point O of the support means A as a reference.
It is restrained while maintaining the direction of , and thermally expands by 1゛. The displacement of the substrate holding portion 1 due to this thermal expansion is minute, regular, and decayable, so it is easy to accurately correct it in advance.

7) A certain hole, 4 pieces, heated to 111% heat roux]. ) so Pr
'Dlj get t211P/? Is the friction force 1-? 1 to 1' once #V - small. Therefore, the 'C1 board 4 resists the biasing force of the biasing means 130 while making contact with the six rolling III receivers 11, and expands.

At this time, the force is constant, but the thermal expansion is re-evaluated, the property is 11<, and the force is constant.
7) Transmit the "C('J" force) through the bearing 18.
4a) Therefore, a change I'1 in the direction of rotation is generated in the substrate 4. For this reason - Jl (on board 4, heat 1, 1, ruku 6x, y) precision 1, month tili, ilt 4, it is easy to do).

Applying ``1'' described in detail above, ``a)'' does not cause any rotational displacement to the board, and ``2'' also reduces heat leakage from the board to the board holding part. It produces excellent practical effects such as
l, can be corrected.

4 Explanation of Fiti, Q', and BL of the drawings Figure 1 is a congratulatory diagram of the conventional substrate holder, and Figure 2 is a description of the malfunctions related to its operation, four times.

FIG. 3 is a 31' side view of one embodiment of the substrate holder manufactured by Kinoto Kazuaki. Figure 4 is a 1111 side view of the Δ part of the soil r++2'14 M'j example when viewed in the direction of the arrow a, Figure 5 is a side view of the B part similarly viewed in the direction of the arrow, and Figure 6 is the same view of the 6th part. Notch I
k) Side view seen in direction C. FIG. 7 is a sectional view of JJAlF in FIG. 1.

1 [] ... River ball 11 ... Rolling bearing 12 ... 7I (-ru 16 ... ... I")
... Spring 15 ... Lever 16 ... Bin 17 ... Rod 1B ... Rolling bearing 22 ...・・・・・・Plaque 1. 23... Lever pivot axis 1 Mouth ■ 3 Figure also 7 sections / 3

Claims (1)

[Claims] In a substrate holder for positioning and mounting a substrate, the member for holding the substrate has a pair of opposing conical concave surfaces and a pair of opposing V-grooves on the fixed base of the substrate boulder, respectively. A surface and a pair of parallel flat surfaces facing each other are formed, and the three pairs of opposing surfaces are brought into contact with each other through balls, and when the ground surface of the member holding the substrate is , a position where several rolling members are provided and the substrate can be placed through the rolling members, and the member holding the substrate is in contact with the substrate in a horizontal direction; In addition to providing a plurality of rolling rollers for rolling, a biasing means for horizontally pressing the board toward the rolling member is provided, and the force means in "A" in the description is applied to the board via the rolling member. 5. A substrate holder characterized in that the substrate holder is configured as follows.