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JPS5779173A - Etching method for chromium film and chromium oxide film - Google Patents

Etching method for chromium film and chromium oxide film

Info

Publication number
JPS5779173A
JPS5779173A JP15625380A JP15625380A JPS5779173A JP S5779173 A JPS5779173 A JP S5779173A JP 15625380 A JP15625380 A JP 15625380A JP 15625380 A JP15625380 A JP 15625380A JP S5779173 A JPS5779173 A JP S5779173A
Authority
JP
Japan
Prior art keywords
alcohol
chromium
film
oxide film
chromium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15625380A
Other languages
Japanese (ja)
Other versions
JPH0115152B2 (en
Inventor
Kunio Masumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP15625380A priority Critical patent/JPS5779173A/en
Publication of JPS5779173A publication Critical patent/JPS5779173A/en
Publication of JPH0115152B2 publication Critical patent/JPH0115152B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

PURPOSE: To eliminate the occurrence of a phenomenon leaving an island and to enhance the quality and formation yield of a hard mask by pretreating a chromium film or a chromium oxide film on a printed substrate with alcohol or an aqueous alcohol soln. prior to etching.
CONSTITUTION: A chromium film or a chromium oxide film formed on a printed substrate is pretreated with alcohol or an aqueous alcohol soln. prior to wet etching. The preferred alcohol is mono-, di- or trihydric alcohol, and the preferred substituent is ≤ about 10C alkyl or alkylene. For example, 1 or ≥2 kinds of alcohols such as methanol, ethanol and 1,2,3-propanetriol are used. The practical alcohol concn. is about 5W30%.
COPYRIGHT: (C)1982,JPO&Japio
JP15625380A 1980-11-05 1980-11-05 Etching method for chromium film and chromium oxide film Granted JPS5779173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15625380A JPS5779173A (en) 1980-11-05 1980-11-05 Etching method for chromium film and chromium oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15625380A JPS5779173A (en) 1980-11-05 1980-11-05 Etching method for chromium film and chromium oxide film

Publications (2)

Publication Number Publication Date
JPS5779173A true JPS5779173A (en) 1982-05-18
JPH0115152B2 JPH0115152B2 (en) 1989-03-15

Family

ID=15623736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15625380A Granted JPS5779173A (en) 1980-11-05 1980-11-05 Etching method for chromium film and chromium oxide film

Country Status (1)

Country Link
JP (1) JPS5779173A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986463A (en) * 1988-07-21 1991-01-22 Productech Inc. Flux effect by microexplosive evaporation
JP2005120477A (en) * 2003-10-10 2005-05-12 Asml Holding Nv Method to etch chrome deposited on calcium fluoride object

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861342A (en) * 1971-12-04 1973-08-28
JPS50765A (en) * 1973-05-04 1975-01-07
JPS5068332A (en) * 1973-10-19 1975-06-07

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861342A (en) * 1971-12-04 1973-08-28
JPS50765A (en) * 1973-05-04 1975-01-07
JPS5068332A (en) * 1973-10-19 1975-06-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986463A (en) * 1988-07-21 1991-01-22 Productech Inc. Flux effect by microexplosive evaporation
JP2005120477A (en) * 2003-10-10 2005-05-12 Asml Holding Nv Method to etch chrome deposited on calcium fluoride object

Also Published As

Publication number Publication date
JPH0115152B2 (en) 1989-03-15

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