JPS5761902A - Measuring device of displacement - Google Patents
Measuring device of displacementInfo
- Publication number
- JPS5761902A JPS5761902A JP13710780A JP13710780A JPS5761902A JP S5761902 A JPS5761902 A JP S5761902A JP 13710780 A JP13710780 A JP 13710780A JP 13710780 A JP13710780 A JP 13710780A JP S5761902 A JPS5761902 A JP S5761902A
- Authority
- JP
- Japan
- Prior art keywords
- sensors
- vibrations
- constitution
- error
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To greatly reduce the effect due to vibrations of an object to be measured to the error of measurement, by calculating the output signal obtained through a simultaneous and backward scan of a solid-state image pickup element and then delivering the mean value in the form of a displacement signal. CONSTITUTION:Two image sensors 21 and 22 are provided, and the sensor 22 receives the beams branched through a half mirror 9. These two sensors are scanned simultaneously in the same speed and in the opposite directions to each other by a clock oscilltor 31 and a clock driver 32. In such constitution, the light given from a light source is irradiated to a moving object A to be measured, and the output signals received at a time by the sensors 21 and 22 are amplified by amplifiers 51 and 52. The mean value of both signals is calculated through an arithmetic circuit 8 to be turned into an output signal. In such way, the error of measurement caused by the vibrations of the object A can be greatly reduced compared with the conventional circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13710780A JPS5761902A (en) | 1980-09-30 | 1980-09-30 | Measuring device of displacement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13710780A JPS5761902A (en) | 1980-09-30 | 1980-09-30 | Measuring device of displacement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5761902A true JPS5761902A (en) | 1982-04-14 |
| JPS611683B2 JPS611683B2 (en) | 1986-01-20 |
Family
ID=15191006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13710780A Granted JPS5761902A (en) | 1980-09-30 | 1980-09-30 | Measuring device of displacement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5761902A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6050408A (en) * | 1983-08-30 | 1985-03-20 | Ando Electric Co Ltd | Coordinate measuring machine wherein measuring errors due to vibration are made less |
| JPS62213945A (en) * | 1986-03-12 | 1987-09-19 | Toshiba Mach Co Ltd | Thermal displacement correcting device for machine tool |
-
1980
- 1980-09-30 JP JP13710780A patent/JPS5761902A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6050408A (en) * | 1983-08-30 | 1985-03-20 | Ando Electric Co Ltd | Coordinate measuring machine wherein measuring errors due to vibration are made less |
| JPS62213945A (en) * | 1986-03-12 | 1987-09-19 | Toshiba Mach Co Ltd | Thermal displacement correcting device for machine tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS611683B2 (en) | 1986-01-20 |
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