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JPS5740949A - Measurement of resistivity of semiconductor - Google Patents

Measurement of resistivity of semiconductor

Info

Publication number
JPS5740949A
JPS5740949A JP11633380A JP11633380A JPS5740949A JP S5740949 A JPS5740949 A JP S5740949A JP 11633380 A JP11633380 A JP 11633380A JP 11633380 A JP11633380 A JP 11633380A JP S5740949 A JPS5740949 A JP S5740949A
Authority
JP
Japan
Prior art keywords
measuring
correction factor
measurement
circuit
measuring position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11633380A
Other languages
Japanese (ja)
Inventor
Junichi Shimizu
Hidezo Kashiwa
Toshinori Konaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Priority to JP11633380A priority Critical patent/JPS5740949A/en
Publication of JPS5740949A publication Critical patent/JPS5740949A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To obtain a correct measured value, by a method wherein the measurement of resistivity is done after deciding a measuring position in accordance with a signal designating measuring position fed from a control circuit and the value is corrected by a correcting circuit. CONSTITUTION:A semiconductor sample 1 to be measured is placed on a measurement positioning mechanism 6 to move the positioned mechanism (so that) the sample is located at a predetermined measuring position by a designating signal fed from a control circuit 10 and a measuring probe 5 contacts with the sample 1 to perform the measurement of resistivity by a measuring circuit 7 containing a constant-current source and a voltage measuring circuit. And the measured result is sent to a measured value correcting circuit 8 and a memory stores the correction factor list on position. Therefore, a correction factor for the measuring position is read out from the correction factor list in accordance with measuring position information sent from the control circuit 10 and a correct measured value can be obtained by multiplying the correction factor by the measured result.
JP11633380A 1980-08-23 1980-08-23 Measurement of resistivity of semiconductor Pending JPS5740949A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11633380A JPS5740949A (en) 1980-08-23 1980-08-23 Measurement of resistivity of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11633380A JPS5740949A (en) 1980-08-23 1980-08-23 Measurement of resistivity of semiconductor

Publications (1)

Publication Number Publication Date
JPS5740949A true JPS5740949A (en) 1982-03-06

Family

ID=14684361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11633380A Pending JPS5740949A (en) 1980-08-23 1980-08-23 Measurement of resistivity of semiconductor

Country Status (1)

Country Link
JP (1) JPS5740949A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62149520A (en) * 1985-12-24 1987-07-03 Aisin Seiki Co Ltd Actuator using fluid pressure
US4725773A (en) * 1986-06-27 1988-02-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Cross-contact chain
JPS6447960A (en) * 1987-08-19 1989-02-22 Mitsubishi Petrochemical Co Method and apparatus for measuring resistivity
JP2009252976A (en) * 2008-04-04 2009-10-29 Hitachi Kokusai Denki Engineering:Kk Semiconductor wafer resistivity measuring apparatus
JP2011211060A (en) * 2010-03-30 2011-10-20 Hitachi Kokusai Denki Engineering:Kk Semiconductor wafer resistivity measuring apparatus
JP2017187439A (en) * 2016-04-08 2017-10-12 日置電機株式会社 Processing device, inspection device, and processing method
WO2023243578A1 (en) * 2022-06-14 2023-12-21 日置電機株式会社 Measurement device, measurement method, and measurement program

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62149520A (en) * 1985-12-24 1987-07-03 Aisin Seiki Co Ltd Actuator using fluid pressure
US4725773A (en) * 1986-06-27 1988-02-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Cross-contact chain
JPS6447960A (en) * 1987-08-19 1989-02-22 Mitsubishi Petrochemical Co Method and apparatus for measuring resistivity
JP2009252976A (en) * 2008-04-04 2009-10-29 Hitachi Kokusai Denki Engineering:Kk Semiconductor wafer resistivity measuring apparatus
JP2011211060A (en) * 2010-03-30 2011-10-20 Hitachi Kokusai Denki Engineering:Kk Semiconductor wafer resistivity measuring apparatus
JP2017187439A (en) * 2016-04-08 2017-10-12 日置電機株式会社 Processing device, inspection device, and processing method
WO2023243578A1 (en) * 2022-06-14 2023-12-21 日置電機株式会社 Measurement device, measurement method, and measurement program

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