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JPS57182452A - Multinozzle head - Google Patents

Multinozzle head

Info

Publication number
JPS57182452A
JPS57182452A JP6913981A JP6913981A JPS57182452A JP S57182452 A JPS57182452 A JP S57182452A JP 6913981 A JP6913981 A JP 6913981A JP 6913981 A JP6913981 A JP 6913981A JP S57182452 A JPS57182452 A JP S57182452A
Authority
JP
Japan
Prior art keywords
substrate
piezoelectric element
electrode
vibrating plate
vaporization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6913981A
Other languages
Japanese (ja)
Inventor
Haruhiko Koto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Epuson Kk
Seiko Epson Corp
Suwa Seikosha KK
Epson Corp
Original Assignee
Epuson Kk
Seiko Epson Corp
Suwa Seikosha KK
Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epuson Kk, Seiko Epson Corp, Suwa Seikosha KK, Epson Corp filed Critical Epuson Kk
Priority to JP6913981A priority Critical patent/JPS57182452A/en
Publication of JPS57182452A publication Critical patent/JPS57182452A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To make it possible to highly integrate a multinozzle head for an ink jet printer by such an arrangement wherein a vibrating plate and a piezoelectric element are arranged in sequence on a substrate and the piezoelectric element is also arranged so that it corresponds to more than 2 pressurizing chambers. CONSTITUTION:After a substrate 1 is adhered by melting to a vibrating plate 7, an MIM element 11 is formed, and a print head is composed by adhering a piezoelectric element 13 to the above. The substrate 1 is made of glass and a nozzle 2, a pressurizing chamber 3, a supply preparatory chamber 4, a filter 5 and a supply route are formed on it by etching. The vibrating plate 7 is of the same materials as that of the substrate 1 and it is pressurized and adhered by melting to the substrate, and on it a tantalum thin film 8 is formed by spattering, an insulation layer 9 is made by anodic oxidizing part of it and an aluminum electrode 10 is formed by vaporization and the MIM element 11 is composed by etching and corresponding films 8 are connected together. On the piezoelectric element 13, an electrode 14 corresponding to the element 11 is formed by thick film printing and on the upper surface, a common electrode 15 is made, and a thin film resistor 16 is formed between the electrode 14 and 15 by vaporization.
JP6913981A 1981-05-08 1981-05-08 Multinozzle head Pending JPS57182452A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6913981A JPS57182452A (en) 1981-05-08 1981-05-08 Multinozzle head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6913981A JPS57182452A (en) 1981-05-08 1981-05-08 Multinozzle head

Publications (1)

Publication Number Publication Date
JPS57182452A true JPS57182452A (en) 1982-11-10

Family

ID=13394009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6913981A Pending JPS57182452A (en) 1981-05-08 1981-05-08 Multinozzle head

Country Status (1)

Country Link
JP (1) JPS57182452A (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0145066A2 (en) * 1983-11-26 1985-06-19 Philips Patentverwaltung GmbH Microplanar ink jet print head
EP0511372A1 (en) * 1990-11-20 1992-11-04 Spectra Inc Piezoelectric transducers for ink jet systems.
WO1994007607A1 (en) * 1992-09-29 1994-04-14 Boehringer Ingelheim International Gmbh Atomising nozzle and filter and spray generating device
US5510819A (en) * 1992-02-24 1996-04-23 Rohm Co., Ltd. Ink jet printing head and electronic machine incorporating the same
US5552813A (en) * 1992-03-11 1996-09-03 Rohm Co., Ltd. Ink jet head with nozzle arrangement to reduce viscous drag
EP0768181A1 (en) * 1995-10-09 1997-04-16 Nec Corporation Ink jet recording device and method of producing the same
US5988800A (en) * 1991-12-27 1999-11-23 Rohm Co., Ltd. Ink jet printing head and apparatus incorporating the same
US6503362B1 (en) 1992-09-29 2003-01-07 Boehringer Ingelheim International Gmbh Atomizing nozzle an filter and spray generating device
KR100370638B1 (en) * 1999-07-13 2003-02-05 삼성전기주식회사 Membraneless piezoelectric/electrostrictive micro actuator and fabricating method thereof
KR100374591B1 (en) * 1998-12-30 2003-03-03 삼성전자주식회사 Printer head using shape memory alloy and method for manufacturing the same
US6582061B2 (en) * 2000-08-04 2003-06-24 Canon Kabushiki Kaisha Ink jet recording head and ink jet recording apparatus
US6846413B1 (en) 1997-09-26 2005-01-25 Boehringer Ingelheim International Gmbh Microstructured filter
KR100547975B1 (en) * 1998-08-06 2006-04-14 엘지전자 주식회사 Multihead and Correcting Methods Of Landing Error
US7350898B2 (en) 2004-07-12 2008-04-01 Samsung Electronics Co., Ltd. Nozzle tape used with inkjet cartridge
CN111016433A (en) * 2019-12-25 2020-04-17 西安交通大学 MEMS piezoelectric type ink-jet printing head with multiple ink jetting and mixing functions

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0145066A2 (en) * 1983-11-26 1985-06-19 Philips Patentverwaltung GmbH Microplanar ink jet print head
EP0511372A1 (en) * 1990-11-20 1992-11-04 Spectra Inc Piezoelectric transducers for ink jet systems.
US5988800A (en) * 1991-12-27 1999-11-23 Rohm Co., Ltd. Ink jet printing head and apparatus incorporating the same
US5510819A (en) * 1992-02-24 1996-04-23 Rohm Co., Ltd. Ink jet printing head and electronic machine incorporating the same
US5552813A (en) * 1992-03-11 1996-09-03 Rohm Co., Ltd. Ink jet head with nozzle arrangement to reduce viscous drag
EP0860210A3 (en) * 1992-09-29 1998-11-25 BOEHRINGER INGELHEIM INTERNATIONAL GmbH A nozzle assembly for use in a spray generating device
EP0860210A2 (en) * 1992-09-29 1998-08-26 BOEHRINGER INGELHEIM INTERNATIONAL GmbH A nozzle assembly for use in a spray generating device
EP1611958A1 (en) * 1992-09-29 2006-01-04 Boehringer Ingelheim International GmbH A nozzle assembly for use in a spray generating device
CN1093006C (en) * 1992-09-29 2002-10-23 泊灵格英格尔海姆国际有限公司 Nozzle device, method for manufacturing the same, and spray generating device including the same
US6503362B1 (en) 1992-09-29 2003-01-07 Boehringer Ingelheim International Gmbh Atomizing nozzle an filter and spray generating device
US7246615B2 (en) 1992-09-29 2007-07-24 Boehringer International Gmbh Atomising nozzle and filter and spray generating device
WO1994007607A1 (en) * 1992-09-29 1994-04-14 Boehringer Ingelheim International Gmbh Atomising nozzle and filter and spray generating device
EP0839656A1 (en) * 1995-10-09 1998-05-06 Nec Corporation Method of producing an ink-jet recording device
EP0768181A1 (en) * 1995-10-09 1997-04-16 Nec Corporation Ink jet recording device and method of producing the same
US7645383B2 (en) 1997-09-26 2010-01-12 Boehringer Ingelheim International Gmbh Microstructured filter
US6846413B1 (en) 1997-09-26 2005-01-25 Boehringer Ingelheim International Gmbh Microstructured filter
US6977042B2 (en) 1997-09-26 2005-12-20 Klaus Kadel Microstructured filter
KR100547975B1 (en) * 1998-08-06 2006-04-14 엘지전자 주식회사 Multihead and Correcting Methods Of Landing Error
KR100374591B1 (en) * 1998-12-30 2003-03-03 삼성전자주식회사 Printer head using shape memory alloy and method for manufacturing the same
KR100370638B1 (en) * 1999-07-13 2003-02-05 삼성전기주식회사 Membraneless piezoelectric/electrostrictive micro actuator and fabricating method thereof
US6582061B2 (en) * 2000-08-04 2003-06-24 Canon Kabushiki Kaisha Ink jet recording head and ink jet recording apparatus
US7350898B2 (en) 2004-07-12 2008-04-01 Samsung Electronics Co., Ltd. Nozzle tape used with inkjet cartridge
CN111016433A (en) * 2019-12-25 2020-04-17 西安交通大学 MEMS piezoelectric type ink-jet printing head with multiple ink jetting and mixing functions
CN111016433B (en) * 2019-12-25 2021-01-15 西安交通大学 MEMS piezoelectric type ink-jet printing head with multiple ink jetting and mixing functions

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