JPS57149739A - Controller for annealing treatment - Google Patents
Controller for annealing treatmentInfo
- Publication number
- JPS57149739A JPS57149739A JP3590881A JP3590881A JPS57149739A JP S57149739 A JPS57149739 A JP S57149739A JP 3590881 A JP3590881 A JP 3590881A JP 3590881 A JP3590881 A JP 3590881A JP S57149739 A JPS57149739 A JP S57149739A
- Authority
- JP
- Japan
- Prior art keywords
- wave number
- annealing
- change
- raman
- bandwidth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
Landscapes
- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To grasp the end point of annealing accurately by obtaining the change of bandwidth from a detector mounted to wave number except the central wave number of Raman bandwidth corresponding to phonon peculiar to a semiconductor and acquiring the change of peak intensity from a detector at the position of the central wave number. CONSTITUTION:Raman beams R generated through the irradiation of laser beams L2 during the time when a sample 11 is annealed by laser beams L1 are projected to a spectroscope 17, and developed to spectra in response to shift wave number. Photomultiplier tubes 20 and 19, 21 are each arranged at the position of the central wave number of Raman bandwidth and the position of the half width of a spectrum wave-form A, the spectra are amplified 22-24 and counted 25-27 at every channel, output is differentiated 28-29, and a change is discriminated 31-33. When discriminating signals are obtained simultaneously from each channel, finsihing signals are given to a control circuit 36 through an AND circuit 35, and a sample base 12 is moved 37. According to this constitution, the spectrum wave-form changes in the order of A C with the advance of annealing, and kept at C, and the end point of annealing is grasped accurately without sweeping the spectroscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3590881A JPS5815943B2 (en) | 1981-03-12 | 1981-03-12 | Annealing processing control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3590881A JPS5815943B2 (en) | 1981-03-12 | 1981-03-12 | Annealing processing control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57149739A true JPS57149739A (en) | 1982-09-16 |
| JPS5815943B2 JPS5815943B2 (en) | 1983-03-28 |
Family
ID=12455122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3590881A Expired JPS5815943B2 (en) | 1981-03-12 | 1981-03-12 | Annealing processing control device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815943B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59149029A (en) * | 1983-02-16 | 1984-08-25 | Agency Of Ind Science & Technol | Evaluating device for compound semiconductor crystal substrate |
| US5155337A (en) * | 1989-12-21 | 1992-10-13 | North Carolina State University | Method and apparatus for controlling rapid thermal processing systems |
-
1981
- 1981-03-12 JP JP3590881A patent/JPS5815943B2/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59149029A (en) * | 1983-02-16 | 1984-08-25 | Agency Of Ind Science & Technol | Evaluating device for compound semiconductor crystal substrate |
| US5155337A (en) * | 1989-12-21 | 1992-10-13 | North Carolina State University | Method and apparatus for controlling rapid thermal processing systems |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5815943B2 (en) | 1983-03-28 |
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