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JPS5688246A - Electron beam device - Google Patents

Electron beam device

Info

Publication number
JPS5688246A
JPS5688246A JP16604479A JP16604479A JPS5688246A JP S5688246 A JPS5688246 A JP S5688246A JP 16604479 A JP16604479 A JP 16604479A JP 16604479 A JP16604479 A JP 16604479A JP S5688246 A JPS5688246 A JP S5688246A
Authority
JP
Japan
Prior art keywords
pole
tetra
deflection
electron beam
octa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16604479A
Other languages
Japanese (ja)
Inventor
Toshinori Goto
Teruo Someya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP16604479A priority Critical patent/JPS5688246A/en
Publication of JPS5688246A publication Critical patent/JPS5688246A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To enable increase of the deflection without the increase of astigmation by transferring field centers of tetra-pole lenses and octa-pole lenses depending on the deflection of the electron beam caused by a deflecting means. CONSTITUTION:A deflecting means D1, tetra-pole lens Q1, octa-pole lens S1, tetra- pole lens Q2, octa-pole lens S2, tetra-pole lens Q3, deflecting means D2 are provided along the optical axis Z alternately. When a deflection source 8 is adjudted manually, an output signal is applied to an axis adjusting controlling circuit 9 corresponding to the direction and extent of the deflection, and a signal which makes field centers of the tetra-pole lenses Q1, Q2, Q3 to coincide with the center of the electron beam is provided to a focus controlling circuit 6.
JP16604479A 1979-12-20 1979-12-20 Electron beam device Pending JPS5688246A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16604479A JPS5688246A (en) 1979-12-20 1979-12-20 Electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16604479A JPS5688246A (en) 1979-12-20 1979-12-20 Electron beam device

Publications (1)

Publication Number Publication Date
JPS5688246A true JPS5688246A (en) 1981-07-17

Family

ID=15823903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16604479A Pending JPS5688246A (en) 1979-12-20 1979-12-20 Electron beam device

Country Status (1)

Country Link
JP (1) JPS5688246A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06103946A (en) * 1992-07-16 1994-04-15 Internatl Business Mach Corp <Ibm> Variable-shaft stigmator
JP2016219432A (en) * 2013-10-29 2016-12-22 ヴァリアン メディカル システムズ インコーポレイテッド X-ray tube having planar emitter with tunable emission characteristics and performing magnetic steering and magnetic focusing
JPWO2021100172A1 (en) * 2019-11-21 2021-05-27

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06103946A (en) * 1992-07-16 1994-04-15 Internatl Business Mach Corp <Ibm> Variable-shaft stigmator
JP2016219432A (en) * 2013-10-29 2016-12-22 ヴァリアン メディカル システムズ インコーポレイテッド X-ray tube having planar emitter with tunable emission characteristics and performing magnetic steering and magnetic focusing
JPWO2021100172A1 (en) * 2019-11-21 2021-05-27
WO2021100172A1 (en) * 2019-11-21 2021-05-27 株式会社日立ハイテク Charged particle beam device and aberration correction method
US20220415605A1 (en) * 2019-11-21 2022-12-29 Hitachi High-Tech Corporation Charged Particle Beam Device and Aberration Correction Method

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