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JPS5674911A - Manufacture of multilayer thin film coil - Google Patents

Manufacture of multilayer thin film coil

Info

Publication number
JPS5674911A
JPS5674911A JP15226179A JP15226179A JPS5674911A JP S5674911 A JPS5674911 A JP S5674911A JP 15226179 A JP15226179 A JP 15226179A JP 15226179 A JP15226179 A JP 15226179A JP S5674911 A JPS5674911 A JP S5674911A
Authority
JP
Japan
Prior art keywords
layer
forming
holes
conductive layer
winding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15226179A
Other languages
Japanese (ja)
Other versions
JPS5935165B2 (en
Inventor
Katsuhiko Ishida
Toru Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Gakki Co Ltd
Original Assignee
Nippon Gakki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Gakki Co Ltd filed Critical Nippon Gakki Co Ltd
Priority to JP15226179A priority Critical patent/JPS5935165B2/en
Publication of JPS5674911A publication Critical patent/JPS5674911A/en
Publication of JPS5935165B2 publication Critical patent/JPS5935165B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H01F41/042—Printed circuit coils by thin film techniques

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Coils Or Transformers For Communication (AREA)

Abstract

PURPOSE:To intend the improvement of the integration together with the simplification of the process and the shortening of the working time by forming a winding portion with the aid of etching to each laminated layer with a selected mask and performing a necessary winding thereto after the formation of multilayers of a conductor and an insulator. CONSTITUTION:After the formation of an insulating film 21 on a substrate 20, a conductive layer 22 and an insulating layer 23 at the first layer are formed in order. Holes for contact forming 23a and 23b are formed. Further, a conductive layer 24, an insulating layer 25 and holes for contact forming 25a and 25b are also formed in the same way. And a conductive layer of the third layer is coated thereon, and further the desirable mask layer 27 having a winding pattern and a pattern for contact forming is formed thereon. Then, the laminated layer under the mask layer 27 is subjected to an etching treatment selectively using said masking layer 27 and a winding portion is formed in each conductive layer. After removing the masking layer 27, a protection film is formed covering the coil portion and then a necessary wiring layer is formed after forming contact holes on the protection film.
JP15226179A 1979-11-24 1979-11-24 Manufacturing method of multilayer thin film coil Expired JPS5935165B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15226179A JPS5935165B2 (en) 1979-11-24 1979-11-24 Manufacturing method of multilayer thin film coil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15226179A JPS5935165B2 (en) 1979-11-24 1979-11-24 Manufacturing method of multilayer thin film coil

Publications (2)

Publication Number Publication Date
JPS5674911A true JPS5674911A (en) 1981-06-20
JPS5935165B2 JPS5935165B2 (en) 1984-08-27

Family

ID=15536610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15226179A Expired JPS5935165B2 (en) 1979-11-24 1979-11-24 Manufacturing method of multilayer thin film coil

Country Status (1)

Country Link
JP (1) JPS5935165B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5898906A (en) * 1981-12-08 1983-06-13 Omron Tateisi Electronics Co Iron core
JPH0254903A (en) * 1988-08-19 1990-02-23 Murata Mfg Co Ltd Chip type coil and manufacture thereof
JP2009016504A (en) * 2007-07-03 2009-01-22 Shinko Electric Ind Co Ltd Multilayer wiring board with built-in inductor
JP2014027251A (en) * 2012-06-20 2014-02-06 Alps Green Devices Co Ltd Magnetic element and method for manufacturing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5898906A (en) * 1981-12-08 1983-06-13 Omron Tateisi Electronics Co Iron core
JPH0254903A (en) * 1988-08-19 1990-02-23 Murata Mfg Co Ltd Chip type coil and manufacture thereof
JP2009016504A (en) * 2007-07-03 2009-01-22 Shinko Electric Ind Co Ltd Multilayer wiring board with built-in inductor
JP2014027251A (en) * 2012-06-20 2014-02-06 Alps Green Devices Co Ltd Magnetic element and method for manufacturing the same

Also Published As

Publication number Publication date
JPS5935165B2 (en) 1984-08-27

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