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JPS5614903A - Interpolation method in digital length measuring or angle measuring system - Google Patents

Interpolation method in digital length measuring or angle measuring system

Info

Publication number
JPS5614903A
JPS5614903A JP9028679A JP9028679A JPS5614903A JP S5614903 A JPS5614903 A JP S5614903A JP 9028679 A JP9028679 A JP 9028679A JP 9028679 A JP9028679 A JP 9028679A JP S5614903 A JPS5614903 A JP S5614903A
Authority
JP
Japan
Prior art keywords
signals
signal
phase
detection signals
pitch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9028679A
Other languages
Japanese (ja)
Other versions
JPS6057011B2 (en
Inventor
Susumu Makinouchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=13994272&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS5614903(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP9028679A priority Critical patent/JPS6057011B2/en
Publication of JPS5614903A publication Critical patent/JPS5614903A/en
Publication of JPS6057011B2 publication Critical patent/JPS6057011B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE: To obtain necessary division with accuracy by varying amplification gain of detection signals having different phases to obtain the interpolation value of the lattice stripe pitch from a combined signal when the phase of the combined signal is varied.
CONSTITUTION: The quantity of shift of a glass scale 1 or the like having lattice stripes of a predetermined pitch is detected by detectors 2 disposed at an interval of 1/4 of the pitch, for example, to obtain detection signals S1 and S2 having different phases. These signals S1 and S2 are subjected to waveform shaping 3 and 4 to be shaped into square wave pulses, and the shifting direction of the scale 1 is discriminated by a direction discriminator 5 and the result of the discrimination is supplied to a forward and back space counter 6. Signals S1' and S2' obtained by amplifying 7 and 8 detection signals S1 and S2 by variable gains are combined to obtain a combined signal S3. The phase shift of the detection signal S1 at the time of stoppage is compared with that of the signal S3 varied in various phases by a computer 11 to determine the phase dirrerence, and the phase shift is obtained by the integration of pitches and the pitches are integrated to obtain the position distortion and the value obtained is added to the value obtained from the counter 6, and displayed 12.
COPYRIGHT: (C)1981,JPO&Japio
JP9028679A 1979-07-18 1979-07-18 Internal massage device in displacement measuring device Expired JPS6057011B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9028679A JPS6057011B2 (en) 1979-07-18 1979-07-18 Internal massage device in displacement measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9028679A JPS6057011B2 (en) 1979-07-18 1979-07-18 Internal massage device in displacement measuring device

Publications (2)

Publication Number Publication Date
JPS5614903A true JPS5614903A (en) 1981-02-13
JPS6057011B2 JPS6057011B2 (en) 1985-12-12

Family

ID=13994272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9028679A Expired JPS6057011B2 (en) 1979-07-18 1979-07-18 Internal massage device in displacement measuring device

Country Status (1)

Country Link
JP (1) JPS6057011B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643506A (en) * 1979-09-17 1981-04-22 Mitsutoyo Mfg Co Ltd Multidivided circuit of length measuring machine
JPS60170710A (en) * 1984-02-15 1985-09-04 Asahi Optical Co Ltd Correcting device for error in measured angle
JPS6350719A (en) * 1986-08-20 1988-03-03 Shicoh Eng Co Ltd Electronic absolute encoder

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62171110U (en) * 1986-04-22 1987-10-30

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643506A (en) * 1979-09-17 1981-04-22 Mitsutoyo Mfg Co Ltd Multidivided circuit of length measuring machine
JPS6233527B2 (en) * 1979-09-17 1987-07-21 Mitsutoyo Seisakusho
JPS60170710A (en) * 1984-02-15 1985-09-04 Asahi Optical Co Ltd Correcting device for error in measured angle
JPS6350719A (en) * 1986-08-20 1988-03-03 Shicoh Eng Co Ltd Electronic absolute encoder

Also Published As

Publication number Publication date
JPS6057011B2 (en) 1985-12-12

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