JPS5614408A - Manufacture of solid electrolyte - Google Patents
Manufacture of solid electrolyteInfo
- Publication number
- JPS5614408A JPS5614408A JP8648179A JP8648179A JPS5614408A JP S5614408 A JPS5614408 A JP S5614408A JP 8648179 A JP8648179 A JP 8648179A JP 8648179 A JP8648179 A JP 8648179A JP S5614408 A JPS5614408 A JP S5614408A
- Authority
- JP
- Japan
- Prior art keywords
- torr
- substrate
- vapor deposition
- gas
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y02E60/12—
Landscapes
- Primary Cells (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To manufacture a lithium nitride thin film having superior electrical conductivity and suitable for use as a material for the electrolyte of a cell, various ion sensors, etc. by carrying out physical vapor deposition on a substrate in an N2- contg. atmosphere using metallic Li or lithium nitride as an evaporation source.
CONSTITUTION: The above-mentioned evaporation source and a substrate such as a quartz glass plate are placed in an evaporating device. At this state the device is evacuated to 10-7 Torr and adjusted to 10-3W10-4 Torr by introducing N2 gas. On the other hand, N2 gas and Ar gas are introduced into a sputtering device in the 1:1 ratio to adjust the device to 10-1W10-2 Torr. Electric power is then supplied to the evaporation source to form a lithium nitride thin film on the substrate by vapor deposition or physical vapor deposition due to sputtering. This film is relatively stable and can be applied to various uses such as the electrolyte of a lithium cell and a sensor.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8648179A JPS5614408A (en) | 1979-07-10 | 1979-07-10 | Manufacture of solid electrolyte |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8648179A JPS5614408A (en) | 1979-07-10 | 1979-07-10 | Manufacture of solid electrolyte |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5614408A true JPS5614408A (en) | 1981-02-12 |
Family
ID=13888157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8648179A Pending JPS5614408A (en) | 1979-07-10 | 1979-07-10 | Manufacture of solid electrolyte |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5614408A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62292318A (en) * | 1985-12-12 | 1987-12-19 | Japax Inc | Wire cut electric discharge machine |
| US5041708A (en) * | 1989-05-12 | 1991-08-20 | Peter Wehrli | Power supply apparatus for an electroerosion machine |
| GB2318127A (en) * | 1996-10-10 | 1998-04-15 | Gen Vacuum Equip Ltd | Deposition of lithium/lithium nitride on moving web |
| US9581875B2 (en) | 2005-02-23 | 2017-02-28 | Sage Electrochromics, Inc. | Electrochromic devices and methods |
-
1979
- 1979-07-10 JP JP8648179A patent/JPS5614408A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62292318A (en) * | 1985-12-12 | 1987-12-19 | Japax Inc | Wire cut electric discharge machine |
| US5041708A (en) * | 1989-05-12 | 1991-08-20 | Peter Wehrli | Power supply apparatus for an electroerosion machine |
| GB2318127A (en) * | 1996-10-10 | 1998-04-15 | Gen Vacuum Equip Ltd | Deposition of lithium/lithium nitride on moving web |
| GB2318127B (en) * | 1996-10-10 | 2001-03-07 | Gen Vacuum Equipment Ltd | A vacuum process and apparatus for depositing lithium/lithium nitride coating on flexiible moving web |
| US9581875B2 (en) | 2005-02-23 | 2017-02-28 | Sage Electrochromics, Inc. | Electrochromic devices and methods |
| US10061174B2 (en) | 2005-02-23 | 2018-08-28 | Sage Electrochromics, Inc. | Electrochromic devices and methods |
| US11567383B2 (en) | 2005-02-23 | 2023-01-31 | Sage Electrochromics, Inc. | Electrochromic devices and methods |
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