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JPS5575905A - Ozone generating tube - Google Patents

Ozone generating tube

Info

Publication number
JPS5575905A
JPS5575905A JP14720778A JP14720778A JPS5575905A JP S5575905 A JPS5575905 A JP S5575905A JP 14720778 A JP14720778 A JP 14720778A JP 14720778 A JP14720778 A JP 14720778A JP S5575905 A JPS5575905 A JP S5575905A
Authority
JP
Japan
Prior art keywords
dielectric
ozone generating
electrode
space
ozone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14720778A
Other languages
Japanese (ja)
Inventor
Hideo Akagami
Kazumi Muramatsu
Kouzou Matsuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisin Takaoka Co Ltd
Takaoka Toko Co Ltd
Original Assignee
Takaoka Electric Mfg Co Ltd
Takaoka Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takaoka Electric Mfg Co Ltd, Takaoka Industrial Co Ltd filed Critical Takaoka Electric Mfg Co Ltd
Priority to JP14720778A priority Critical patent/JPS5575905A/en
Publication of JPS5575905A publication Critical patent/JPS5575905A/en
Pending legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE: To enhance the ozone yield of an ozone generating tube by arranging the inner electrode, the dielectric and the outer electrode of the tube in the form of a coaxial cylinder and by specifying the product of the distance between the outside of the inner electrode and the inside of the dielectric by the press. of air in the ozone generating space.
CONSTITUTION: The ozone generating tube is mainly composed of inner electrode 13, dielectric 12 and outer electrode 11 arranged in the form of a coaxial cylinder. By applying a high voltage between electrodes 13, 11 silent discharge is produced to ozonize air or oxygen flowing through ozone generating space 14 between electrode 13 and dielectric 12. At this time, the product of distance d of space 14, i.e. distance d between the inside of dielectric 12 and the outside of electrode 13 by press. P of air in space 14, Pd value is set within the range of 150W250cm.mmHg. this Pd value is a rational value supported by experiments, and thus the ozone yield can be enhanced stably.
COPYRIGHT: (C)1980,JPO&Japio
JP14720778A 1978-11-30 1978-11-30 Ozone generating tube Pending JPS5575905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14720778A JPS5575905A (en) 1978-11-30 1978-11-30 Ozone generating tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14720778A JPS5575905A (en) 1978-11-30 1978-11-30 Ozone generating tube

Publications (1)

Publication Number Publication Date
JPS5575905A true JPS5575905A (en) 1980-06-07

Family

ID=15424979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14720778A Pending JPS5575905A (en) 1978-11-30 1978-11-30 Ozone generating tube

Country Status (1)

Country Link
JP (1) JPS5575905A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325204A (en) * 1986-07-18 1988-02-02 Terukazu Suzuki Ozonizer
FR2692730A1 (en) * 1992-06-19 1993-12-24 Air Liquide Device for forming excited or unstable gas molecules and uses of such a device.
AU658532B1 (en) * 1993-09-24 1995-04-13 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Apparatus for the formation of excited or unstable gaseous molecules and uses of such an apparatus
EP0679608A3 (en) * 1994-04-28 1997-11-19 Mitsubishi Denki Kabushiki Kaisha Ozone generating apparatus
JP2014058424A (en) * 2012-09-18 2014-04-03 Kitz Corp Ozonizer, liquid cleaning apparatus and processing method using the same
JP2017515286A (en) * 2014-03-06 2017-06-08 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Capacitively coupled plasma source, mitigation system, and vacuum processing system with enhanced Hall effect

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110494A (en) * 1975-03-25 1976-09-30 Mitsubishi Electric Corp OZONHATSUSE ISOCHI

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110494A (en) * 1975-03-25 1976-09-30 Mitsubishi Electric Corp OZONHATSUSE ISOCHI

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325204A (en) * 1986-07-18 1988-02-02 Terukazu Suzuki Ozonizer
FR2692730A1 (en) * 1992-06-19 1993-12-24 Air Liquide Device for forming excited or unstable gas molecules and uses of such a device.
US5458856A (en) * 1992-06-19 1995-10-17 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Apparatus for the formation of excited or unstable gaseous molecules and uses of such an apparatus
AU658532B1 (en) * 1993-09-24 1995-04-13 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Apparatus for the formation of excited or unstable gaseous molecules and uses of such an apparatus
EP0679608A3 (en) * 1994-04-28 1997-11-19 Mitsubishi Denki Kabushiki Kaisha Ozone generating apparatus
EP1069071A3 (en) * 1994-04-28 2006-09-27 Mitsubishi Denki Kabushiki Kaisha Ozone generating apparatus
JP2014058424A (en) * 2012-09-18 2014-04-03 Kitz Corp Ozonizer, liquid cleaning apparatus and processing method using the same
JP2017515286A (en) * 2014-03-06 2017-06-08 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Capacitively coupled plasma source, mitigation system, and vacuum processing system with enhanced Hall effect

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