JPS5537298U - - Google Patents
Info
- Publication number
- JPS5537298U JPS5537298U JP12145278U JP12145278U JPS5537298U JP S5537298 U JPS5537298 U JP S5537298U JP 12145278 U JP12145278 U JP 12145278U JP 12145278 U JP12145278 U JP 12145278U JP S5537298 U JPS5537298 U JP S5537298U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12145278U JPS5537298U (de) | 1978-09-04 | 1978-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12145278U JPS5537298U (de) | 1978-09-04 | 1978-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5537298U true JPS5537298U (de) | 1980-03-10 |
Family
ID=29078609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12145278U Pending JPS5537298U (de) | 1978-09-04 | 1978-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5537298U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014502784A (ja) * | 2010-12-20 | 2014-02-03 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | ウェハの装着用受け取り手段 |
| JP2015038982A (ja) * | 2013-07-18 | 2015-02-26 | Ｎｓｋテクノロジー株式会社 | 基板の保持装置及び密着露光装置並びに近接露光装置 |
-
1978
- 1978-09-04 JP JP12145278U patent/JPS5537298U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014502784A (ja) * | 2010-12-20 | 2014-02-03 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | ウェハの装着用受け取り手段 |
| JP2015038982A (ja) * | 2013-07-18 | 2015-02-26 | Ｎｓｋテクノロジー株式会社 | 基板の保持装置及び密着露光装置並びに近接露光装置 |