JPS5420926A - Formation of electrode - Google Patents
Formation of electrodeInfo
- Publication number
- JPS5420926A JPS5420926A JP8425777A JP8425777A JPS5420926A JP S5420926 A JPS5420926 A JP S5420926A JP 8425777 A JP8425777 A JP 8425777A JP 8425777 A JP8425777 A JP 8425777A JP S5420926 A JPS5420926 A JP S5420926A
- Authority
- JP
- Japan
- Prior art keywords
- formation
- electrode
- plated layer
- mask
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroplating Methods And Accessories (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent a deterioration in step coverage of a passivating film on an Au plated layer in formation of a three phase electrode consisting of Ti, Pt and Au on a ground layer such as a semiconductor, by using a polyimide resin mask at the time of Au plating and leaving the part of the mask contacting with the Au plated layer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8425777A JPS5420926A (en) | 1977-07-15 | 1977-07-15 | Formation of electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8425777A JPS5420926A (en) | 1977-07-15 | 1977-07-15 | Formation of electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5420926A true JPS5420926A (en) | 1979-02-16 |
Family
ID=13825392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8425777A Pending JPS5420926A (en) | 1977-07-15 | 1977-07-15 | Formation of electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5420926A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7117583B2 (en) * | 2002-03-18 | 2006-10-10 | International Business Machines Corporation | Method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure |
-
1977
- 1977-07-15 JP JP8425777A patent/JPS5420926A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7117583B2 (en) * | 2002-03-18 | 2006-10-10 | International Business Machines Corporation | Method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure |
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