JPS4973081A - - Google Patents
Info
- Publication number
- JPS4973081A JPS4973081A JP11404872A JP11404872A JPS4973081A JP S4973081 A JPS4973081 A JP S4973081A JP 11404872 A JP11404872 A JP 11404872A JP 11404872 A JP11404872 A JP 11404872A JP S4973081 A JPS4973081 A JP S4973081A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11404872A JPS4973081A (en) | 1972-11-14 | 1972-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11404872A JPS4973081A (en) | 1972-11-14 | 1972-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4973081A true JPS4973081A (en) | 1974-07-15 |
Family
ID=14627715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11404872A Pending JPS4973081A (en) | 1972-11-14 | 1972-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4973081A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5384169A (en) * | 1976-12-30 | 1978-07-25 | Fujitsu Ltd | Pattern inspecting device |
-
1972
- 1972-11-14 JP JP11404872A patent/JPS4973081A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5384169A (en) * | 1976-12-30 | 1978-07-25 | Fujitsu Ltd | Pattern inspecting device |
| JPS627481B2 (en) * | 1976-12-30 | 1987-02-17 | Fujitsu Ltd |