Nothing Special   »   [go: up one dir, main page]

JPS4532066Y1 - - Google Patents

Info

Publication number
JPS4532066Y1
JPS4532066Y1 JP3555167U JP3555167U JPS4532066Y1 JP S4532066 Y1 JPS4532066 Y1 JP S4532066Y1 JP 3555167 U JP3555167 U JP 3555167U JP 3555167 U JP3555167 U JP 3555167U JP S4532066 Y1 JPS4532066 Y1 JP S4532066Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3555167U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3555167U priority Critical patent/JPS4532066Y1/ja
Publication of JPS4532066Y1 publication Critical patent/JPS4532066Y1/ja
Expired legal-status Critical Current

Links

JP3555167U 1967-04-27 1967-04-27 Expired JPS4532066Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3555167U JPS4532066Y1 (ko) 1967-04-27 1967-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3555167U JPS4532066Y1 (ko) 1967-04-27 1967-04-27

Publications (1)

Publication Number Publication Date
JPS4532066Y1 true JPS4532066Y1 (ko) 1970-12-08

Family

ID=42860177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3555167U Expired JPS4532066Y1 (ko) 1967-04-27 1967-04-27

Country Status (1)

Country Link
JP (1) JPS4532066Y1 (ko)

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832998U (ko) * 1971-08-21 1973-04-20
JPS48106586U (ko) * 1972-03-13 1973-12-11
JPS48106587U (ko) * 1972-03-13 1973-12-11
JPS4959546U (ko) * 1972-08-30 1974-05-25
JPS5055698U (ko) * 1973-09-18 1975-05-26
JPS5144751U (ko) * 1974-09-30 1976-04-02
JPS51156099U (ko) * 1975-06-06 1976-12-13
JPS52116940U (ko) * 1976-03-03 1977-09-05
JPS52170394U (ko) * 1976-06-17 1977-12-24
JPS52170393U (ko) * 1976-06-17 1977-12-24
JPS55134826U (ko) * 1971-06-17 1980-09-25
JPS57194666U (ko) * 1981-06-08 1982-12-09
JPS58129125A (ja) * 1982-01-29 1983-08-02 Hitachi Ltd 清浄作業室
JPS58196731U (ja) * 1982-06-25 1983-12-27 日立プラント建設株式会社 ドラフトチヤンバ−の排気構造
JPS6048268A (ja) * 1983-08-24 1985-03-15 株式会社日立製作所 清浄作業台
JPS6160029U (ko) * 1984-09-27 1986-04-23
JPS61147030A (ja) * 1984-12-21 1986-07-04 Hitachi Ltd 清浄作業台
JPS61230850A (ja) * 1985-04-08 1986-10-15 Shibayama Kikai Kk 研削盤におけるウエハのエア−クリ−ン装置
JPH0248736U (ko) * 1988-09-27 1990-04-04
JP2001141273A (ja) * 1999-11-12 2001-05-25 Midori Anzen Co Ltd クリーンベンチ
JP2007170763A (ja) * 2005-12-26 2007-07-05 Hitachi Industrial Equipment Systems Co Ltd 卓上型クリーンベンチ
JP2013174375A (ja) * 2012-02-24 2013-09-05 Nippon Ika Kikai Seisakusho:Kk プッシュ・プル型換気装置
JP2015166646A (ja) * 2014-03-03 2015-09-24 三機工業株式会社 排気の循環利用型安全キャビネット及び排気の循環利用型安全キャビネットを備えるクリーンルームの空気循環システム
JP2015224819A (ja) * 2014-05-28 2015-12-14 ダイダン株式会社 コンタミネーション防止可能な安全キャビネット

Cited By (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134826U (ko) * 1971-06-17 1980-09-25
JPS4832998U (ko) * 1971-08-21 1973-04-20
JPS48106586U (ko) * 1972-03-13 1973-12-11
JPS48106587U (ko) * 1972-03-13 1973-12-11
JPS4959546U (ko) * 1972-08-30 1974-05-25
JPS5055698U (ko) * 1973-09-18 1975-05-26
JPS5144751U (ko) * 1974-09-30 1976-04-02
JPS51156099U (ko) * 1975-06-06 1976-12-13
JPS5440032Y2 (ko) * 1975-06-06 1979-11-27
JPS52116940U (ko) * 1976-03-03 1977-09-05
JPS52170394U (ko) * 1976-06-17 1977-12-24
JPS52170393U (ko) * 1976-06-17 1977-12-24
JPS57194666U (ko) * 1981-06-08 1982-12-09
JPS6345890Y2 (ko) * 1981-06-08 1988-11-29
JPH0223776B2 (ko) * 1982-01-29 1990-05-25 Hitachi Ltd
JPS58129125A (ja) * 1982-01-29 1983-08-02 Hitachi Ltd 清浄作業室
JPS58196731U (ja) * 1982-06-25 1983-12-27 日立プラント建設株式会社 ドラフトチヤンバ−の排気構造
JPS6048268A (ja) * 1983-08-24 1985-03-15 株式会社日立製作所 清浄作業台
JPS6160029U (ko) * 1984-09-27 1986-04-23
JPS61147030A (ja) * 1984-12-21 1986-07-04 Hitachi Ltd 清浄作業台
JPH0570051B2 (ko) * 1984-12-21 1993-10-04 Hitachi Ltd
JPS61230850A (ja) * 1985-04-08 1986-10-15 Shibayama Kikai Kk 研削盤におけるウエハのエア−クリ−ン装置
JPH0526423Y2 (ko) * 1988-09-27 1993-07-05
JPH0248736U (ko) * 1988-09-27 1990-04-04
JP2001141273A (ja) * 1999-11-12 2001-05-25 Midori Anzen Co Ltd クリーンベンチ
JP4518524B2 (ja) * 1999-11-12 2010-08-04 ミドリ安全株式会社 クリーンベンチ
JP2007170763A (ja) * 2005-12-26 2007-07-05 Hitachi Industrial Equipment Systems Co Ltd 卓上型クリーンベンチ
JP2013174375A (ja) * 2012-02-24 2013-09-05 Nippon Ika Kikai Seisakusho:Kk プッシュ・プル型換気装置
JP2015166646A (ja) * 2014-03-03 2015-09-24 三機工業株式会社 排気の循環利用型安全キャビネット及び排気の循環利用型安全キャビネットを備えるクリーンルームの空気循環システム
JP2015224819A (ja) * 2014-05-28 2015-12-14 ダイダン株式会社 コンタミネーション防止可能な安全キャビネット

Similar Documents

Publication Publication Date Title
AU425114B2 (ko)
AU416737B2 (ko)
AU2277767A (ko)
AU342066A (ko)
AU610966A (ko)
AU2528767A (ko)
AU2256867A (ko)
AU2116667A (ko)
AU3189468A (ko)
AU3151267A (ko)
AU2454867A (ko)
AU1677166A (ko)
BE609869A (ko)
AU3054676A (ko)
AU2406369A (ko)
AU23366A (ko)
AU1763766A (ko)
BE509738A (ko)
AU408412B2 (ko)
BE483855A (ko)
AU1614766A (ko)
AU459699A (ko)
BE692374A (ko)
BE710173A (ko)
AU97666A (ko)