JPH11262828A - Substrate holding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate holding device, which is applied to the process in the production of a flat display panel whose image quality is improved by preventing a transparent substrate from damaging and picture elements from shifting. SOLUTION: A substrate holding device for holding a substrate is provided with a first support plate 19a on which many suction holes 34 are formed and which has a substrate holding face 18a, which sucks and holds the substrate, a second support plate 19b arranged at a specified space to the first support plate 19a, and a stage 18 comprising a spacer 19c closing the space between the first support plate 19a and the second support plate 19b. The second support plate 19b of the stage 18 is fixed to the ball screw 102 of a travel mechanism 100, and the ball screw 102 is driven by a motor 104. When the stage 18 is pulled to the motor side by the travel mechanism 100, the center section of the stage 18 is bent by the work of a stopper 110.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate holding device for holding an array substrate and a counter substrate by vacuum suction in a manufacturing process when manufacturing a flat panel display such as a liquid crystal display device.

[0002]

2. Description of the Related Art Liquid crystal display devices are widely used as displays for notebook and subnotebook personal computers because of their advantages such as thinness and light weight and low power consumption. In recent years, as the performance of personal computers has improved, there has been a demand for an increase in the display capacity and display area of a display and an improvement in image quality.

A liquid crystal display device is constructed by bonding two glass substrates via a spacer and sealing liquid crystal molecules between these glass substrates. Usually, a liquid crystal display device is assembled by the following steps.

That is, first, a glass substrate is suction-held on a pair of upper and lower stages facing each other. In this case, a large number of electrodes are formed on the surface of the glass substrate held on the lower stage, a rectangular frame-shaped sealing material that defines a display area, and a gap between the two glass substrates. A spacer for holding is arranged. The glass substrate held on the upper stage is provided with a counter electrode, a color filter and the like.

In this state, after lowering the upper stage so that the two glass substrates face each other with a predetermined gap,
By moving the upper stage in the X and Y directions and rotating about the Z axis, the two glass substrates are aligned with respect to a predetermined alignment mark or the like.

Subsequently, the upper stage is lowered to a position where the upper glass substrate contacts the sealing material and the spacer on the lower glass substrate. In this case, the resistance when the two glass substrates come in contact with each other via the spacer or the sealing material, the rigidity of the vertical drive of the vertical stage, the degree of parallelism, and
Due to backlash etc. in the Y, θ drive mechanism,
Slight displacement occurs between the two glass substrates.

Therefore, in a state where the two glass substrates are in contact with each other via the sealing material and the spacer, the upper stage is moved again in the X, Y, and θ directions to perform positioning. After the alignment, pressure is applied so that the gap between the two glass substrates becomes a predetermined value, and liquid crystal molecules are sealed between the glass substrates.

[0008]

However, when positioning is performed by moving one glass substrate in a state where the two glass substrates are in contact with each other via the spacer as described above, the spacer is placed on the surface of the glass substrate. May be strongly rubbed and scratched, and may be sunk into a color filter layer or the like on the surface of the glass substrate.

As described above, in recent liquid crystal display devices, there is a strong demand for improvement in image quality. Therefore, even a slight flaw generated during the manufacturing process is raised as poor image quality, and the manufacturing yield is reduced. It is a factor to make it.

In order to solve this, as shown in FIG. 1A, a stage 310 for sucking a glass substrate 300 is used.
A method of making the shape of a concave shape has been considered. In this method, the space between the glass substrate 300 and the stage 310 is sucked by a vacuum pump 320 so that the glass substrate 300 is curved so as to be concave near the center, as shown in FIG. is there.

However, since the glass substrate 300 adsorbed on the stage 310 does not have sufficient rigidity, FIG.
FIG. 1C does not curve into the shape as shown in FIG.
As shown in (2), there is a possibility that the shape will be deformed along the stage 310. When the glass substrate 300 is deformed in this way, the deformation of the glass substrate 300 becomes non-uniform, and the pixel is shifted when combined with the other substrate. If the deviation generated at this time is large, there is a problem of a decrease in image quality such as a rough display screen or a decrease in contrast.
If the light-shielding portion is expanded to allow misalignment, the aperture ratio decreases, leading to a decrease in luminance and an increase in power consumption.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and an object of the present invention is to manufacture a flat display panel having improved image quality without damaging a transparent substrate and preventing pixel displacement. An object of the present invention is to provide a substrate holding device applied to a manufacturing process when performing the above.

[0013]

SUMMARY OF THE INVENTION The present invention has been made based on the above problem, and a substrate holding apparatus according to a first aspect of the present invention includes a stage having a substrate holding surface for holding a substrate, The stage includes a mechanism for sucking and holding the substrate on the substrate holding surface, and a mechanism for deforming the shape of the stage.

According to a second aspect of the present invention, in the substrate holding apparatus, the stage has the substrate holding surface, the first support plate having a plurality of holes for holding the substrate by suction, and the first support plate. And a second support plate disposed at a predetermined distance from the first support plate, and sucking a gap between the first support plate and the second support plate to remove the first support plate.
Suction means for adsorbing the substrate on the substrate holding surface of the support plate, and a mechanism for deforming at least a portion of the first support plate near the center of the substrate holding surface in a direction perpendicular to the substrate holding surface. It is a feature.

According to the substrate holding apparatus of the present invention, there are provided a mechanism for sucking and holding the substrate on the substrate holding surface for holding the substrate and a mechanism for deforming the shape of the stage. The substrate sucked and held on the substrate holding surface is deformed according to the deformation of the stage shape. At this time, by deforming at least the vicinity of the center of the substrate holding surface in a direction perpendicular to the substrate holding surface, even if the rigidity of the substrate held by suction on the substrate holding surface is insufficient, the center of the substrate itself may be deformed. The vicinity can be deformed into a concave or convex shape.

Therefore, when two substrates held by the stage are positioned close to each other, the problem that one substrate rubs strongly against the surface of the other substrate and scratches it is eliminated. In addition, a reduction in manufacturing yield can be prevented.

[0017]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a substrate holding apparatus according to an embodiment of the present invention. FIG. 2 is a view schematically showing a structure of an assembling apparatus 10 that includes the substrate holding device of the present invention and assembles a liquid crystal display device as a flat panel display. The assembling apparatus 10 includes a bonding mechanism unit 1 including a substrate holding device that bonds two glass substrates of a liquid crystal display device described later.
2 and a supply mechanism 14 for supplying a glass substrate to the bonding mechanism 12. The bonding mechanism 12 and the supply mechanism 14 are installed on the main body frame 16.

The bonding mechanism 12 has an upper stage 18 and a lower stage 20 which are arranged to face each other. These stages 18 and 20 are formed in a rectangular plate shape, and are arranged substantially horizontally. The lower stage 20 is fixedly provided on the main body frame 16. The main body frame 16 is provided with a first vacuum pump 32 for the lower stage functioning as a suction means, and a second vacuum pump 36 and a third vacuum pump 43 for the upper stage.

The upper stage 18 is attached to an XY-θ stage 22 functioning as a position adjusting mechanism.
The XY-θ stage 22 is movable in the X and Y directions in a horizontal plane, and is rotatable around a vertical axis. Also, the XY-θ stage 22
Is guided by a guide 25 provided on the main body frame 16.
It is supported and guided to be able to move up and down along the vertical direction, and is driven to move up and down by a driving mechanism 24 provided on the upper part of the main body frame 16.

The upper stage 18 can be adjusted in position with respect to the lower stage 20 by operating the XY-θ stage 22, and the drive mechanism 24 drives the XY-θ stage 22 up and down. By doing so, it is moved in a direction to approach and separate from the lower stage.

The supply mechanism 14 for supplying the glass substrate to the upper stage 18 and the lower stage 20 of the bonding mechanism 12 includes an XY table 44 provided substantially horizontally on the main body frame 16 and an X-Y table 44. And a support post 46 vertically erected on the Y table, and a movable table 48 that can move up and down in the vertical direction is attached to the support post. The movable base 48 is provided with a horizontally extendable and retractable and rotatable support arm 50, and a holding portion 52 for sucking and holding the glass substrate is provided at an extended end of the support arm.

The supply mechanism unit 14 raises and lowers the moving table 48 and expands and contracts and rotates the support arm 50 while holding the glass substrate by the holding unit 52, thereby moving the glass substrate to the upper stage 18 and the upper stage 18. Lower stage 2
0 respectively.

FIG. 3 is a perspective view schematically showing the structure of a stage applied to the substrate holding device. The stage illustrated in FIG. 3 is applied to, for example, the lower stage 20 of the bonding mechanism unit 12. The upper surface of the lower stage 20 forms a substrate holding surface 20a, and a rectangular recess 38 is formed at the center of the substrate holding surface 20a. The recess 38
It is formed in a shape and dimensions substantially corresponding to an effective area of a glass substrate described later. Also, on the lower stage 20,
Many suction holes 40 are formed. These suction holes 4
Numerals 0 are formed in the substrate holding surface 20 a and are provided side by side on the convex portions 39 formed along the peripheral edge of the concave portion 38. These suction holes 40 are provided in the suction tube 4.
2 is connected to the first vacuum pump 32.

FIG. 4 is a perspective view schematically showing the structure of a stage applied to the substrate holding device. The stage shown in FIG. 4 is applied to, for example, the upper stage 18 of the bonding mechanism unit 12. The lower surface of the upper stage 18 forms a substrate holding surface 18a, and a large number of suction holes 34 are formed in the substrate holding surface 18a. These suction holes 34
In order to make the suction force near the center of the substrate holding surface 18a stronger than that at the periphery, the suction holes 34 are formed near the center and the diameter of the suction holes 34 near the center is smaller than the suction holes at the periphery. The diameter is larger than 34. That is, FIG.
The suction hole 34 of the stage 18 shown in FIG. 4 is formed so that the hole diameter increases as it approaches the center from the periphery of the substrate holding surface 18a.
The holes are formed in a concentrated manner so as to increase the number of suction holes per unit area. This makes it possible to suck the substrate with a stronger suction force at the central portion than at the peripheral edge on the substrate holding surface 18a. These suction holes 34 are connected to a second vacuum pump 36 via a suction tube 35.

The arrangement example of the suction holes 34 is not limited to the example shown in FIG. 4, and the arrangement and the diameter of the suction holes can be changed as required. For example, as shown in FIG. 5, the suction holes 34 having the same diameter are formed on the entire surface of the substrate holding surface 18a.
May be formed and distributed so as to be concentrated only near the center, or as shown in FIG. 6, the number of the suction holes 34 per unit area is made substantially constant over the entire surface of the substrate holding surface 18a. The suction hole near the center may be formed so that the diameter of the suction hole is larger than that of the peripheral hole.

Even in the arrangement example shown in FIGS. 5 and 6, it is possible to improve the suction force in the vicinity of the central part from the peripheral part of the substrate holding surface 18a as in the example shown in FIG. Becomes As shown in FIG. 4, the stage 18 is a mechanism for deforming the shape of the stage, that is, the substrate holding surface 18.
As a mechanism for deforming a in a direction perpendicular to the main surface thereof, it is supported by a moving mechanism 100. Moving mechanism 100
Is a mechanism for moving the stage 18 up and down from a predetermined position, and includes a ball screw 102 that supports the vicinity of substantially the center of the stage 18 and a motor 104 that rotates the ball screw 102 to move the ball screw 102 up and down. . The moving mechanism 100 is attached to the XY-θ stage 22 and the driving mechanism 24.

FIG. 7 is a view showing a cross section of the stage 18 taken along the line AA. As shown in FIG.
Reference numeral 8 denotes a first support plate 19a in which a substrate holding surface 18a and a large number of suction holes 34 are formed, a second support plate 19b arranged at a predetermined distance from the first support plate 19a, and a first support plate 19b. The support plate 19a and the second support plate 19b are attached to each other, and are configured by a spacer 19c that seals a gap formed between the first support plate 19a and the second support plate 19b. A communication hole 19d is formed in a part of the spacer 19c so as to communicate with the second vacuum pump 36 via the suction tube 35, and the second vacuum pump 36 allows the communication between the first support plate 19a and the second support plate 19b. The gas in the gap between them is sucked.

Further, in the stage 18, at a predetermined position where the substrate holding surface 18a is flat, the stopper 110 is located at a position for supporting the lower surface of the second support plate 19b.
Is provided. This stopper 110 is mounted on the stage 1
8 are arranged in parallel with the periphery.

As shown in FIG. 8, when the motor 104 of the moving mechanism 100 rotates and the ball screw 102 rotates and descends, the stage 18 fixed to the ball screw 102 also descends. That is, the stage 18 is drawn toward the motor 104 by driving the moving mechanism 100. At this time, the peripheral portion of the stage 18 does not descend because it is supported by the stopper 110, but descends near the center of the stage 18 fixed to the ball screw 102. As a result, the stage 18 can be curved into an arcuate shape.

On the other hand, the assembling apparatus 1 configured as described above
The liquid crystal display device assembled by using FIG.
As shown in FIG. 7, an array substrate 60 and a counter substrate 62 each functioning as a rectangular transparent substrate are provided. The array substrate 60 has a signal line 61 on a surface of a glass substrate.
It has a rectangular display area 60a formed by forming the scanning lines 63, the pixel electrodes 65, and the like. A seal material 64 is applied on the array substrate 60 so as to surround the display area 60a, and a large number of spherical spacers 66 are scattered on the display area 60a. The height of the sealing material 64 is, for example, 15 μm, and the diameter of the spacer is:
It is set to about 5 μm.

The opposing substrate 62 is made of a glass substrate, and a lower surface thereof is provided with a rectangular display area 62a on which an opposing electrode 68, a color filter 70 and the like are formed. The display area 62a has a size corresponding to the display area 60a on the array substrate 60 side.

The liquid crystal display device is constructed by bonding an array substrate 60 and a counter substrate 62 through a sealing material 64 and sealing liquid crystal molecules between these substrates.

Next, the assembling apparatus 1 configured as described above.
A method for assembling the liquid crystal display device using the reference numeral 0 will be described. As shown in FIG. 11A, first, the array substrate 60 formed in advance is supplied to the lower stage 20 of the bonding mechanism unit 12 by the supply mechanism 14, and the display area 60 is formed.
It is placed on the lower stage 20 with a facing upward. At this time, the array substrate 60 is placed so that the display area 60a faces the recess 38 of the lower stage 20 and the peripheral edge of the array substrate 60 contacts the substrate holding surface 20a. In this state, the first vacuum pump 32 is operated, and the peripheral portion of the array substrate 60 is held by the suction hole 40 on the substrate holding surface 20 of the lower stage 20.
a.

Subsequently, the counter substrate 62 is supplied to the upper stage 18 by the same process as described above, and is suction-held on the substrate holding surface 18a of the upper stage 18 with the display area 62a facing downward. In this case, while the opposing substrate 62 is in contact with the substrate holding surface 18a, the second vacuum pump 36 is operated to suck a gap formed between the first support plate 19a and the second support plate 19b. Thereby, the opposite substrate 62 is suction-held on the substrate holding surface 18a by the suction holes 34. As a result, the array substrate 60 and the counter substrate 62 are
0a and 62a are arranged so as to face each other.

Subsequently, as shown in FIG. 11B, the motor 104 of the moving mechanism 100 is driven to
By rotating the ball screw 102 to which is fixed, the upper stage 18 is moved so as to be pulled toward the motor 104 from a predetermined position. Thereby, the stopper 11
The action of 0 causes the upper stage 18 to bend in an arc shape. At this time, the opposing substrate 62, which is suction-held on the substrate holding surface 18a of the upper stage 18, also curves in an arc shape as the upper stage 18 is deformed. That is, the counter substrate 6
The second display area 62a bends in an arc shape in a direction away from the array substrate 60 as the upper stage 18 is deformed.
The amount of deflection of the counter substrate 62 is adjusted to a predetermined value, for example, about 50 μm by controlling the amount of movement of the ball screw 102.

The driving mechanism 24 drives the XY-θ
The upper stage 18 is lowered together with the stage 22 to move the opposing substrate 62 in a direction approaching the array substrate 60. Subsequently, as shown in FIG.
In a state where 2 is bent by a predetermined amount, the upper stage 18 is further lowered to a position where the peripheral portion of the opposing substrate 62 contacts the sealing material 64 on the array substrate 60. At this time, since the display region 62a of the counter substrate 62 is bent in a direction away from the display region 60a of the array substrate 60, the display region 62a on the counter substrate 62 side contacts the spacer 66 on the array substrate. Is held without.

In this state, the XY-θ stage 22 is operated to move the upper table 18 and the opposite substrate 62 to X, Y,
The counter substrate 62 is moved in the θ direction to position the opposing substrate 62 at a predetermined position with respect to the array substrate 60.

After the alignment is completed, the motor 104 of the moving mechanism 100 is driven to return the upper stage 18 to the original predetermined position, as shown in FIG. Thereby, the opposing substrate 62 is returned to the original state, that is, the flat state, by removing the bending. As a result, the display region 62a of the opposing substrate 62 comes into contact with the spacer 66 on the array substrate 60, and the opposing substrate 62 and the array substrate 60 are attached with a predetermined gap, for example, 5 μm.

At this time, pressurized air is supplied from the suction tube 35 of the upper stage 18 into the gap between the first support plate 19a and the second support plate 19b, so that the array substrate 60 and the opposing substrate 62 The gap between them may be corrected.

After the bonding, the first and second vacuum pumps 32 and 36 are stopped to release the holding of the array substrate 60 and the opposing substrate 62 by suction.
It is raised together with the Y-θ stage 22. Subsequently, the bonded array substrate 60 and the counter substrate 62 are taken out of the lower stage by a transport mechanism (not shown) and transported to the next liquid crystal filling section.

According to the assembling method of the liquid crystal display device and the substrate holding device applied to the assembling device configured as described above, the display area 62a of the counter substrate 62 is bent in the direction away from the array substrate 60, and Since the alignment is performed in a state where only the peripheral edge of 62 is in contact with the array substrate 60 via the sealing material 64, the alignment is performed in a state where the display area 62 a of the counter substrate 62 is not in contact with the spacer 66. It can be performed. Also, the lower stage 20
Since the recesses 38 are also provided on the substrate holding surface 20a of the array substrate 6 due to dust or the like adhering to the substrate holding surface.
The zero effective region 60a can be prevented from bending toward the counter substrate 62, and at the same time, the effective region 60a of the array substrate 60 slightly bends toward the recess 38 by its own weight and separates from the counter substrate 62.

Accordingly, during the alignment, the display area 6 of the array substrate 60 and the counter substrate 62 is
0a and 62a can be prevented from being damaged, and as a result, the occurrence of poor alignment and poor image due to the damage can be prevented, and a liquid crystal display device with improved image quality can be provided. Furthermore,
By performing alignment in a state where the array substrate 60 and the opposing substrate 62 are not in contact with each other via the spacer 66,
High-accuracy alignment is possible, and image quality can be further improved.

Further, it is possible to solve the problem of the deterioration of the image quality such as the roughness of the display screen and the reduction of the contrast caused by the displacement of the pixels. The counter substrate 62
In order to align the glass substrates with each other in a state where is bent, when the bending of the opposing substrate 62 is removed after the alignment is completed, a position shift corresponding to the bending may be considered.
When the amount of deflection of the counter substrate is about 50 μm,
Even in the case of a glass substrate of 00 × 300 mm, the displacement amount is about 0.02 to 0.05 μm, and does not cause any problem in practical use.

Next, another example of the substrate holding apparatus of the present invention will be described. FIG. 12 is a perspective view schematically showing a structure of a stage applied to a substrate holding device according to another embodiment of the present invention. Note that the same components as those of the stage shown in FIG. 4 are denoted by the same reference numerals, and detailed description thereof will be omitted.

The stage shown in FIG.
Is applied to the upper stage 18 of the bonding mechanism 12 of the assembling apparatus 10 shown in FIG. Many suction holes 34 are formed in the substrate holding surface 18a of the upper stage 18.
These suction holes 34 are formed near the center in order to make the suction force near the center of the substrate holding surface 18a stronger than the periphery, and the diameter of the suction holes 34 near the center is increased. Is larger in diameter than the suction holes 34 in the peripheral portion. These suction holes 34 are connected to a second vacuum pump 36 via a suction tube 35.

As shown in FIG. 12, the stage 18 has a mechanism for deforming the shape of the stage 18, that is,
The moving mechanism 200 is supported as a mechanism for deforming the substrate holding surface 18a in a direction perpendicular to the main surface.
The moving mechanism 200 is attached to the XY-θ stage 22 and the driving mechanism 24.

FIG. 13 is a view showing a cross section of the stage 18 taken along line AA. As shown in FIG. 13, the stage 18 includes a first support plate 19a in which a substrate holding surface 18a and a large number of suction holes 34 are formed, and a first support plate 19a arranged at a predetermined distance from the first support plate 19a. 2 support plate 19
b, the first support plate 19a and the second support plate 19b, and the first support plate 19a and the second support plate 19b.
And a spacer 19c that seals the gap formed between them. A communication hole 19d is formed in a part of the spacer 19c so as to communicate with the second vacuum pump 36 via the suction tube 35, and the second vacuum pump 36
The gas in the gap between the first support plate 19a and the second support plate 19b is sucked.

The lower part of the stage 18, that is, the second support plate 19b is held by the moving mechanism 200.
The moving mechanism 200 includes a stage 204 having a recess 202 formed in the center thereof, and a suction tube 37 communicated with a space between the recess 202 of the stage 204 and the second support plate 19b.
And a third vacuum pump 43 connected to the suction tube 37.
And is constituted by. The second support plate 19b is arranged on the periphery of the stage 204, and the recess 202 of the stage 204 is sealed by the second support plate 19b.
The stage 204 is formed under such a condition that the rigidity is higher than that of the second support plate 19b.

Then, as shown in FIG.
00, the third vacuum pump 43 is operated, and the closed recess 20 of the stage 204 is
By suctioning the gas in 2, the air pressure in the recess 202 decreases. At this time, since the rigidity of the stage 204 is higher than that of the second support plate 19b, the second support plate 19b is deformed. At this time, since only the peripheral portion of the second support plate 19b is disposed on the peripheral portion of the stage 204, the central portion can be curved in a state of being bent in an arc shape.

Such a stage is mounted on the assembling apparatus 1 described above.
By applying the present embodiment to the upper stage of the sticking mechanism 12 at 0, it is possible to obtain the same effects as those of the above-described embodiment.

That is, in the embodiment described above, FIG.
In the step shown in FIG. 1B, the stage was deformed by moving the stage by the moving mechanism 100. In this embodiment, the third vacuum pump 43 is used.
By sucking a space defined between the second support plate 19b of the upper stage 18 and the recess 202 of the stage 204, the counter substrate 62 is sucked and held on the substrate holding surface 18a of the upper stage 18. 62 effective areas 6
2a can be bent in a direction away from the effective area 60a of the array substrate 60. At this time, the amount of bending is controlled by the amount of suction by the third vacuum pump 43.

In this state, as shown in FIG. 11C, the peripheral portions of the opposing substrate 62 and the array substrate 60 are bonded together via a sealing material 64, and then the XY-θ stage 22 Alignment between substrates is performed.

Thereafter, as shown in FIG.
By stopping the third vacuum pump 43 and returning the inside of the recess 202 to the atmospheric pressure, the bending of the counter substrate 62 is removed. As a result, the opposing substrate 62 and the array substrate 60 come into contact with each other via the spacer 66 and are adhered with a predetermined gap.

In the other embodiment configured as described above, the same operation and effect as those of the above-described embodiment can be obtained, and the stage can be bent without providing a complicated moving mechanism such as a ball screw or a motor. Will be possible.

The present invention is not limited to the above-described embodiments and modified examples, but can be variously modified within the scope of the present invention. For example, in the above-described embodiment, the upper stage is bent, but the lower stage may be bent, or the upper and lower stages may be bent. The shape and size of the recess formed in the stage and the size of the glass substrate can be variously modified as needed. Further, the present invention is not limited to the liquid crystal display device having a spherical spacer, but is also applicable to the assembly of a liquid crystal display device having a columnar spacer erected on an effective area.

Further, the first support plate, the second support plate, and the stage having the recess constituting the substrate holding device may be formed of metal or resin as long as predetermined rigidity can be secured.

[0057]

As described above, according to the present invention, a flat display panel with improved image quality can be manufactured without damaging the transparent substrate and preventing pixel shift. An applied substrate holding device can be provided.

[Brief description of the drawings]

FIGS. 1A to 1C are cross-sectional views showing a conventional substrate holding device.

FIG. 2 is a side view showing the entire assembling apparatus to which the substrate holding device of the present invention is applied;

FIG. 3 is a perspective view showing a lower stage applied to a bonding mechanism of the assembling apparatus shown in FIG. 2;

FIG. 4 is a perspective view showing an upper stage applied to a bonding mechanism of the assembling apparatus shown in FIG. 2;

FIG. 5 is a perspective view showing a modification of the upper stage shown in FIG. 4;

FIG. 6 is a perspective view showing a modification of the upper stage shown in FIG. 4;

FIG. 7 is a cross-sectional view when the upper stage shown in FIG. 4 is broken along line AA.

FIG. 8 is a diagram for explaining deformation of the upper stage shown in FIG. 7 in a direction perpendicular to the substrate holding surface.

FIG. 9 is an exploded perspective view of the liquid crystal display device assembled by the assembling apparatus shown in FIG. 2;

FIG. 10 is a side view of the liquid crystal display device shown in FIG.

FIGS. 11A to 11D are views showing steps of assembling a liquid crystal display device using the assembling apparatus shown in FIG. 2;

FIG. 12 is a perspective view showing another upper stage applied to the bonding mechanism of the assembling apparatus shown in FIG. 2;

FIG. 13 shows the upper stage shown in FIG.
It is sectional drawing at the time of fracture | rupture by A line.

FIG. 14 is a view for explaining deformation of the upper stage shown in FIG. 13 in a direction perpendicular to the substrate holding surface.

DESCRIPTION OF SYMBOLS 10 ... Assembling device 12 ... Lamination mechanism 14 ... Supply mechanism 18 ... Upper stage 18a ... Substrate holding surface 19a ... First support plate 19b ... Second support plate 19c ... Spacer 20 ... Lower stage 20a ... Substrate holding surface 22 XY-Θ stage 32 first vacuum pump 34 suction hole 36 second vacuum pump 43 third vacuum pump 100 moving mechanism 102 ball screw 104 motor 200 moving mechanism 202 concave Place 204 ... Stage

Claims (2)

[Claims] 1. A stage having a substrate holding surface for holding a substrate, the stage comprising: a mechanism for sucking and holding the substrate on the substrate holding surface; and a mechanism for deforming the shape of the stage. A substrate holding device. 2. The stage, comprising: a first support plate having the substrate holding surface and having a plurality of holes for sucking and holding the substrate; and a stage disposed at a predetermined distance from the first support plate. A second support plate, suction means for sucking a gap between the first support plate and the second support plate and sucking the substrate on the substrate holding surface of the first support plate; The substrate holding device according to claim 1, further comprising: a mechanism configured to deform a portion near a center of the substrate holding surface in a direction perpendicular to the substrate holding surface.