JPH11251634A - Led element - Google Patents
Led elementInfo
- Publication number
- JPH11251634A JPH11251634A JP4649398A JP4649398A JPH11251634A JP H11251634 A JPH11251634 A JP H11251634A JP 4649398 A JP4649398 A JP 4649398A JP 4649398 A JP4649398 A JP 4649398A JP H11251634 A JPH11251634 A JP H11251634A
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- electrode
- light
- grid
- emitting layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- Led Devices (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、発光層がシリコン
基板の一面に形成された面発光型のLED素子に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface-emitting type LED device in which a light-emitting layer is formed on one surface of a silicon substrate.
【0002】[0002]
【従来の技術】従来、この種のLED素子として、特開
平5−291620号に開示された図2に示す構成のも
のが存在する。このものは、シリコン基板A1の一面に
バッファ層A2を介して形成されて放出光を一面側へ放
出する発光層Aと、発光層Aに積層形成されて複数の開
口部B1を外囲する格子B2が設けられた格子状電極B
と、シリコン基板A1の他面に形成されて格子状電極B
に対面する対面電極Cとを備えている。2. Description of the Related Art Conventionally, as this kind of LED element, there is an LED element having a configuration shown in FIG. A light emitting layer A is formed on one surface of a silicon substrate A1 via a buffer layer A2 and emits emitted light to one surface side, and a grating laminated on the light emitting layer A and surrounding a plurality of openings B1. Grid electrode B provided with B2
And a grid electrode B formed on the other surface of the silicon substrate A1.
And a facing electrode C facing the front side.
【0003】さらに詳しくは、発光層Aで発光した放出
光は、格子B2によって外囲された複数の開口部B1か
ら、シリコン基板A1の一面側へ面状に放出される。ま
た、シリコン基板A1は一辺が5mm以上であり、格子
状電極Bは開口部B1が四角状に形成されて、一辺が
0.2mm乃至1.0mmに形成されるよう、格子B2
が所定の格子間間隔に形成される。More specifically, the emitted light emitted from the light emitting layer A is emitted from the plurality of openings B1 surrounded by the lattice B2 to the one surface side of the silicon substrate A1 in a planar manner. The silicon substrate A1 has a side of 5 mm or more, and the grid electrode B has a grid B2 such that the opening B1 is formed in a square shape and the side is formed in a range of 0.2 mm to 1.0 mm.
Are formed at a predetermined interstitial space.
【0004】[0004]
【発明が解決しようとする課題】上記した従来のLED
素子では、発光層Aで発光した放出光を複数の開口部B
1から面状に放出させて、薄型の面発光素子を得ること
ができる。The above-mentioned conventional LED
In the device, the emission light emitted from the light emitting layer A is transmitted to a plurality of openings B.
By emitting the light from the surface in a planar manner, a thin surface emitting element can be obtained.
【0005】しかしながら、発光層Aで発光した放出光
は格子状電極Bの格子B2が透明ではないので、その格
子B2によって遮蔽され、開口部B1からのみ放出され
て、単位面積当たりの放出光量で定義される光放出効率
が劣化する。また、光放出効率を向上させるために格子
B2の格子間間隔を広くすると、各格子B2の中央部にお
ける発光層Aは発光効率が減少して、同様に光放出効率
が劣化する。However, the emitted light emitted from the light emitting layer A is shielded by the grid B2 of the grid electrode B and is emitted only from the opening B1 because the grid B2 of the grid electrode B is not transparent. The defined light emission efficiency is degraded. Also, if the interstitial spacing of the lattices B2 is increased to improve the light emission efficiency, the light emission efficiency of the light emitting layer A at the center of each lattice B2 decreases, and the light emission efficiency similarly deteriorates.
【0006】本発明は、上記問題点に鑑みてなしたもの
で、その目的とするところは、単位面積当たりの放出光
量を多くできる面発光型のLED素子を提供することに
ある。The present invention has been made in view of the above problems, and an object of the present invention is to provide a surface-emitting type LED device capable of increasing the amount of emitted light per unit area.
【0007】[0007]
【課題を解決するための手段】上記した課題を解決する
ために、請求項1記載のものは、シリコン基板の一面に
形成されて放出光を一面側へ放出する発光層と、発光層
に積層形成された薄膜状の透明電極と、透明電極に積層
形成されて複数の開口部を外囲する金属格子が設けられ
た格子状電極と、シリコン基板の他面に形成されて格子
状電極に対面する対面電極とを備えた構成にしてある。According to a first aspect of the present invention, there is provided a light emitting layer which is formed on one surface of a silicon substrate and emits emitted light to one surface side, and is laminated on the light emitting layer. A transparent electrode in the form of a thin film formed, a grid electrode provided with a metal grid laminated around the transparent electrode and surrounding a plurality of openings, and formed on the other surface of the silicon substrate and facing the grid electrode. And a facing electrode.
【0008】請求項2記載のものは、請求項1記載のも
のにおいて、前記透明電極は酸化インジウムからなる構
成にしてある。According to a second aspect of the present invention, in the first aspect, the transparent electrode is made of indium oxide.
【0009】[0009]
【発明の実施の形態】本発明の一実施形態を図1に基づ
いて以下に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIG.
【0010】1はシリコン基板で、一面11及び他面1
2を有した薄板四角状に形成され、板厚が0.3mm乃
至0.8mm、一辺が約10mmで、導電性を有して、
強度、及び放熱性に優れる。Reference numeral 1 denotes a silicon substrate, one surface 11 and the other surface 1
2, having a thickness of 0.3 mm to 0.8 mm, a side of about 10 mm, and having conductivity.
Excellent strength and heat dissipation.
【0011】2は発光層で、第1導電型でp型のGaA
lAs層21、及び第2導電型でn型のGaAlAs層
22とで構成され、p型のGaAlAs層21及びn型
のGaAlAs層22が、シリコン基板1の一面11に
順次積層されて形成される。ここで、n型のGaAlA
s層22が薄膜状に形成されて、両層の界面で発光した
放出光が、n型のGaAlAs層22を透過してシリコ
ン基板1の一面11側へ放出される。Reference numeral 2 denotes a light emitting layer, which is p-type GaAs of the first conductivity type.
The p-type GaAlAs layer 21 and the n-type GaAlAs layer 22 are formed by sequentially laminating the p-type GaAlAs layer 21 and the n-type GaAlAs layer 22 on the one surface 11 of the silicon substrate 1. . Here, n-type GaAlA
The s layer 22 is formed in a thin film shape, and emitted light emitted at the interface between the two layers is transmitted to the one surface 11 side of the silicon substrate 1 through the n-type GaAlAs layer 22.
【0012】3は透明電極で、導電性を有した酸化イン
ジウムにより、透明性を有し、発光層2に薄膜状に積層
形成されて、発光層2によって発光した放出光を遮蔽す
ることなく、シリコン基板1の一面11側へ放出する。Reference numeral 3 denotes a transparent electrode, which is made of indium oxide having conductivity, has transparency, and is formed in a thin film on the light emitting layer 2 without blocking emission light emitted by the light emitting layer 2. It is released to the one surface 11 side of the silicon substrate 1.
【0013】4は格子状電極で、金属により、薄板状に
形成され、電気伝導度が透明電極3と比較して良好であ
り、格子状に形成された金属格子41が設けられて、四
角状に形成された複数の開口部42が開口し、その開口
部42を外囲して透明電極3に接触した状態で積層形成
される。ここで、金属格子41が約2mmの格子間間隔
をなすよう形成される。5は対面電極で、シリコン基板
1の他面12に形成されて格子状電極4に対面する。Reference numeral 4 denotes a grid-like electrode, which is formed of metal in a thin plate shape and has better electric conductivity than that of the transparent electrode 3. A metal grid 41 formed in a grid shape is provided, and A plurality of openings 42 are formed, and are laminated so as to surround the openings 42 and contact the transparent electrode 3. Here, the metal grids 41 are formed so as to form an inter-grating interval of about 2 mm. A facing electrode 5 is formed on the other surface 12 of the silicon substrate 1 and faces the grid electrode 4.
【0014】このものの動作を説明する。対面電極5か
ら格子状電極4へ電流を通電すると、発光層2は放出光
をシリコン基板1の一面11側へ放出する。放出光は透
明電極3が透明であるので遮蔽されることなく放出さ
れ、かつ金属格子41の格子間間隔が約2mmであって
従来と比較して広いので、金属格子41によって遮蔽さ
れる光量が少なく、単位面積当たりの放出光量で定義さ
れる光放出効率の劣化が少なくなる。The operation of this will be described. When a current is applied from the facing electrode 5 to the grid electrode 4, the light emitting layer 2 emits emitted light to the one surface 11 side of the silicon substrate 1. The emitted light is emitted without being shielded because the transparent electrode 3 is transparent, and the interstitial space of the metal grid 41 is about 2 mm, which is wider than the conventional one. The light emission efficiency, which is defined by the amount of emitted light per unit area, is reduced.
【0015】さらに、導電性を有した透明電極3が発光
層2に積層形成されているので、格子間間隔を広くして
も、各金属格子41の中央部における発光層2の発光効
率が減少することもない。したがって、放出光は光量の
多い状態で複数の開口部42から放出される。Further, since the transparent electrode 3 having conductivity is laminated on the light emitting layer 2, the luminous efficiency of the light emitting layer 2 at the central portion of each metal grid 41 is reduced even if the space between the lattices is widened. Nothing to do. Therefore, the emitted light is emitted from the plurality of openings 42 in a state where the amount of light is large.
【0016】また、格子状電極4は金属格子41の電気
伝導度が透明電極3と比較して良好であるので、対面電
極5間に大きな電流を流しても発熱量が少なく、したが
って放出光は大電流を流すことによって、さらに光量の
多い状態で開口部42から放出される。Since the grid electrode 4 has a good electrical conductivity of the metal grid 41 as compared with the transparent electrode 3, even if a large current flows between the facing electrodes 5, the calorific value is small, and the emitted light is small. By flowing a large current, the light is emitted from the opening 42 in a state where the light amount is further increased.
【0017】かかる一実施形態のLED素子にあって
は、上記したように、透明電極3を発光層2に積層形成
し、さらに格子状電極4が透明電極3に積層形成され
て、複数の開口部42を外囲する金属格子41を設けた
から、各金属格子41の中央部における発光層2の発光
効率を減少させることなく、格子間間隔を広くして単位
面積当たりの放出光を多くできるとともに、金属格子4
1の電気伝導度が透明電極3と比較して良好であって、
金属格子41の発熱量が少ないので、格子状電極4及び
対面電極5間に大電流を流して、光量の多い放出光を開
口部42から放出させることができる。In the LED element of this embodiment, as described above, the transparent electrode 3 is formed on the light emitting layer 2 and the grid electrode 4 is formed on the transparent electrode 3 to form a plurality of openings. Since the metal grids 41 surrounding the portion 42 are provided, the interval between the grids can be widened to increase the emission light per unit area without reducing the luminous efficiency of the light emitting layer 2 at the center of each metal grid 41. , Metal grid 4
1 has a better electrical conductivity than the transparent electrode 3,
Since the calorific value of the metal grid 41 is small, a large current can flow between the grid electrode 4 and the facing electrode 5 to emit a large amount of emitted light from the opening 42.
【0018】また、透明電極3が酸化インジウムからな
るから、成膜しやすく安価な酸化インジウムを用いて、
薄膜状の透明電極3を発光層2に容易に積層形成するこ
とができる。Further, since the transparent electrode 3 is made of indium oxide, it is easy to form a film and inexpensive indium oxide is used.
The thin-film transparent electrode 3 can be easily formed on the light emitting layer 2.
【0019】なお、本実施形態では、発光層2が第1導
電型をp型、及び第2導電型をn型にそれぞれ形成され
たが、第1導電型をn型、及び第2導電型をp型に形成
してもよく、限定されない。In this embodiment, the light emitting layer 2 is formed to have the first conductivity type of p-type and the second conductivity type of n-type. However, the first conductivity type is n-type and the second conductivity type is n-type. May be formed in a p-type and is not limited.
【0020】[0020]
【発明の効果】請求項1記載のものは、透明電極を発光
層に積層形成し、格子状電極が透明電極に積層形成され
て、複数の開口部を外囲する金属格子を設けたから、各
金属格子の中央部における発光層の発光効率を減少させ
ることなく、金属格子間間隔を広くして単位面積当たり
の放出光を多くできるとともに、金属格子の電気伝導度
が透明電極と比較して良好であって金属格子の発熱量が
少ないので、格子状電極及び対面電極間に大電流を流し
て、光量の多い放出光を開口部から放出させることがで
きる。According to the first aspect of the present invention, the transparent electrode is formed on the light emitting layer and the grid electrode is formed on the transparent electrode, and the metal grid surrounding the plurality of openings is provided. Without reducing the luminous efficiency of the light emitting layer at the center of the metal grid, the spacing between the metal grids can be widened to increase the emission light per unit area, and the electrical conductivity of the metal grid is better than that of the transparent electrode Since the calorific value of the metal grid is small, a large current can be passed between the grid electrode and the facing electrode, and a large amount of emitted light can be emitted from the opening.
【0021】請求項2記載のものは、請求項1記載のも
のの効果に加えて、透明電極が酸化インジウムからなる
から、成膜しやすく安価な酸化インジウムを用いて、薄
膜状の透明電極を発光層に容易に積層形成することがで
きる。According to the second aspect, in addition to the effect of the first aspect, since the transparent electrode is made of indium oxide, the thin film-shaped transparent electrode emits light by using inexpensive indium oxide which is easy to form a film. It can be easily formed into layers.
【図1】本発明の一実施形態を示す概念斜視図である。FIG. 1 is a conceptual perspective view showing an embodiment of the present invention.
【図2】従来例を示す概念斜視図である。FIG. 2 is a conceptual perspective view showing a conventional example.
1 シリコン基板 11 一面 12 他面 2 発光層 3 透明電極 4 格子状電極 41 金属格子 42 開口部 5 対面電極 Reference Signs List 1 silicon substrate 11 one surface 12 other surface 2 light emitting layer 3 transparent electrode 4 grid electrode 41 metal grid 42 opening 5 facing electrode
Claims (2)
を一面側へ放出する発光層と、発光層に積層形成された
薄膜状の透明電極と、透明電極に積層形成されて複数の
開口部を外囲する金属格子が設けられた格子状電極と、
シリコン基板の他面に形成されて格子状電極に対面する
対面電極とを備えたことを特徴とするLED素子。1. A light emitting layer formed on one surface of a silicon substrate and emitting emitted light to one surface side, a thin-film transparent electrode laminated on the light emitting layer, and a plurality of openings laminated on the transparent electrode. A grid electrode provided with a metal grid surrounding
An LED element comprising: a facing electrode formed on the other surface of the silicon substrate and facing the grid electrode.
ことを特徴とする請求項1記載のLED素子。2. The LED device according to claim 1, wherein said transparent electrode is made of indium oxide.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4649398A JPH11251634A (en) | 1998-02-27 | 1998-02-27 | Led element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4649398A JPH11251634A (en) | 1998-02-27 | 1998-02-27 | Led element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11251634A true JPH11251634A (en) | 1999-09-17 |
Family
ID=12748756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4649398A Withdrawn JPH11251634A (en) | 1998-02-27 | 1998-02-27 | Led element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH11251634A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003523636A (en) * | 2000-02-15 | 2003-08-05 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | Semiconductor device emitting radiation and method of manufacturing the same |
US7691656B2 (en) | 2000-10-17 | 2010-04-06 | Osram Gmbh | Method for fabricating a semiconductor component based on GaN |
WO2011118629A1 (en) * | 2010-03-23 | 2011-09-29 | 日亜化学工業株式会社 | Nitride semiconductor light emitting element |
US8866165B2 (en) | 2009-10-01 | 2014-10-21 | Oki Data Corporation | Light emitting apparatus |
JP2020191460A (en) * | 2016-12-22 | 2020-11-26 | シャープ株式会社 | Display device and manufacturing method |
-
1998
- 1998-02-27 JP JP4649398A patent/JPH11251634A/en not_active Withdrawn
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003523636A (en) * | 2000-02-15 | 2003-08-05 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | Semiconductor device emitting radiation and method of manufacturing the same |
US7691656B2 (en) | 2000-10-17 | 2010-04-06 | Osram Gmbh | Method for fabricating a semiconductor component based on GaN |
US8866165B2 (en) | 2009-10-01 | 2014-10-21 | Oki Data Corporation | Light emitting apparatus |
WO2011118629A1 (en) * | 2010-03-23 | 2011-09-29 | 日亜化学工業株式会社 | Nitride semiconductor light emitting element |
JP5633560B2 (en) * | 2010-03-23 | 2014-12-03 | 日亜化学工業株式会社 | Nitride semiconductor light emitting device |
JP2020191460A (en) * | 2016-12-22 | 2020-11-26 | シャープ株式会社 | Display device and manufacturing method |
US11289015B2 (en) | 2016-12-22 | 2022-03-29 | Sharp Kabushiki Kaisha | Display device |
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