JPH11160717A - Liquid crystal cell and production thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress the number of times of patterning processing required for producing a liquid crystal cell to an irreducible minimum while properly keeping the alignment of liquid crystal or the role of an auxiliary electrode by effectively utilizing the constitutive member of plural stripe-shaped spacers or the like. SOLUTION: Plural pairs of partitions 20a and 20b are respectively erected on the inner surface of a glass substrate 21 inside mutually adjacent groove- shaped recessed parts 25 between respective both laminating parts S. The partition 20a is located at the left side part of the groove-shaped recessed part 25 and the partition 20b is located at the right side part of the groove-shaped recessed part 25 leaving a space to the partition wall 20a on the other hand. The partition 20a is composed of a contact metal part 26a, low resistance electrode 27a formed on this contact metal part 26a, and resist part 28 formed on this low resistance electrode 27a. The partition 20b is formed similarly to the partition 20a as well.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal cell using various liquid crystals such as a smectic liquid crystal such as an antiferroelectric liquid crystal or a ferroelectric liquid crystal, or a nematic liquid crystal, and a method of manufacturing the same.

[0002]

2. Description of the Related Art In recent years, application of a liquid crystal cell using an antiferroelectric liquid crystal or a ferroelectric liquid crystal to a display device has been studied by focusing on its wide viewing angle characteristics and high-speed response. The liquid crystal cell has a distance between 1 μm and 2 μm between both electrode substrates facing each other.
It is formed by injecting an antiferroelectric liquid crystal into a μm gap (hereinafter referred to as a cell gap).

Here, in order to realize a structure for reducing alignment defects of the liquid crystal, a plurality of stripe-shaped spacers are provided between the two electrode substrates in the longitudinal direction of one of the plurality of stripe-shaped transparent electrodes of the two electrode substrates. It is formed along. Further, in order to reduce the wiring resistance of each transparent electrode of the one electrode substrate, an auxiliary electrode made of a metal such as aluminum is formed on each of the transparent electrodes so as to be in contact with each other along the longitudinal direction. (Tokuhei 6-68589
Reference).

[0004]

By the way, in the above-mentioned liquid crystal cell, each auxiliary electrode is formed on the widthwise side end of each transparent electrode. Each spacer is formed between the adjacent transparent electrodes so as to overlap with each auxiliary electrode via the alignment film. On the other hand, when forming each spacer and each auxiliary electrode, it is necessary to perform a step of applying and exposing a photoresist as a photosensitive resin using a photolithography method.

Therefore, in the case of the above-mentioned liquid crystal cell, it is necessary to perform at least three times of the resist coating and exposing steps including the formation of the pattern of each transparent electrode. However, the application and exposure of the photoresist both increase the cost of the apparatus, and the more the number of times of performing the above-mentioned application and exposure process, the more the number of apparatuses and the installation area increase.

In order to address the above-mentioned problems, the present invention effectively utilizes a plurality of constituent members such as a plurality of stripe-shaped spacers in a liquid crystal cell and a method of manufacturing the same, thereby providing a liquid crystal alignment and an auxiliary electrode. The purpose of the present invention is to minimize the number of times of patterning processing required for manufacturing a liquid crystal cell while maintaining the role of properly.

[0007]

In order to solve the above problem, according to the first aspect of the present invention, at least one of the two electrode substrates (22) is in contact with the plurality of electrodes (22) in the longitudinal direction thereof. Among the plurality of electrodes, a plurality of stripe-shaped metal auxiliary electrodes (27a, 27b) formed in each gap (25) between both electrodes adjacent to each other, and the plurality of auxiliary electrodes and the other electrode substrate (10 And a plurality of stripe-shaped spacers (28a, 28b) formed along the longitudinal direction of the plurality of auxiliary electrodes and holding the cell gap between the two electrode substrates together with the plurality of auxiliary electrodes. Provided.

[0008] As described above, each of the plurality of spacers is
It is formed so as to be laminated on each auxiliary electrode. Therefore, each auxiliary electrode can be formed by patterning using a plurality of formed spacers as a mask. Therefore, in forming each auxiliary electrode, for example, it is not necessary to newly pattern by photolithography using a photoresist.

Therefore, the number of times of patterning required for manufacturing a liquid crystal cell can be suppressed to a necessary minimum, which helps to reduce the manufacturing cost of the liquid crystal cell. Further, as described above, since each auxiliary electrode is formed so as to be in contact with each electrode of one electrode substrate along its longitudinal direction, the resistance of each electrode of one electrode substrate can be reduced. In addition, since the two electrode substrates are overlapped via the laminated structure of the auxiliary electrode and the spacer, it is needless to say that the cell gap between the two electrode substrates can be maintained uniformly.

Further, as described above, since each of the plurality of spacers is formed together with the auxiliary electrode in the gap between the two electrodes on one electrode substrate, the spacer and the auxiliary electrode are formed on one side of the electrode substrate. It does not cover the electrodes of the electrode substrate. For this reason, there is no variation in the distance between the portions of the counter electrodes on both electrode substrates in the display region of the liquid crystal cell, and uniform alignment of the liquid crystal and uniform display can be ensured. At the same time, the transmittance of light passing through the liquid crystal cell (that is, the aperture ratio) is increased as compared with a liquid crystal cell in which the electrodes are partially covered with spacers and auxiliary electrodes, and a high-luminance display can be reliably secured. .

According to the second aspect of the present invention, each metal auxiliary member formed on each liquid crystal side surface of at least one of the plurality of electrodes (22) of the two electrode substrates so as to be in contact with the longitudinal direction thereof. A cell is formed between the electrode (27a) and each of the auxiliary electrodes and the other electrode substrate (10) so as to be sandwiched along the longitudinal direction of each of the auxiliary electrodes. There is provided a liquid crystal cell comprising each stripe-shaped spacer (28a) for maintaining a gap.

As described above, even when each of the plurality of spacers is laminated on each electrode of one of the electrode substrates together with the auxiliary electrode, the formation of each auxiliary electrode uses the formed spacer as a mask. This is made possible by the patterning process. Therefore, in forming each auxiliary electrode, for example,
It becomes unnecessary to newly pattern by photolithography using a photoresist.

Therefore, the number of times of patterning required for manufacturing a liquid crystal cell can be suppressed to a necessary minimum, which helps to reduce the manufacturing cost of the liquid crystal cell. Further, as described above, since each auxiliary electrode is formed so as to be in contact with each electrode of one electrode substrate along its longitudinal direction, the resistance of each electrode of one electrode substrate can be reduced. In addition, since the two electrode substrates are overlapped via the laminated structure of the auxiliary electrode and the spacer, it is needless to say that the cell gap between the two electrode substrates can be maintained uniformly.

According to the third aspect of the present invention, each of the plurality of electrodes (22) of at least one of the two electrode substrates is provided in each of the gaps (25) between the two adjacent electrodes. A pair of metal auxiliary electrodes (27a, 27b) formed so as to be in contact with the opposing side walls of both electrodes along the longitudinal direction thereof, and the pair of metal auxiliary electrodes and the other of the pair of metal auxiliary electrodes; Each pair of spacers (28a) formed between the electrode substrate (10) so as to be sandwiched along the longitudinal direction of each pair of auxiliary electrodes and holding the cell gap between both electrode substrates together with each pair of auxiliary electrodes. , 28b).

Thus, instead of the laminated structure in the gap between the spacer and the auxiliary electrode described in the first aspect of the present invention, a pair of laminated structures composed of the spacer and the auxiliary electrode in the gap is adopted. Can achieve the same effect as the first aspect. According to the fourth and fifth aspects of the present invention, the first electrode substrate (10) includes the alignment film (1).
A plurality of stripe-shaped first electrode substrate-side transparent electrodes (15) are provided inside 7).

The second electrode substrate (20) includes a transparent substrate (21) and a plurality of stripes formed on the liquid crystal side surface of the transparent substrate so as to intersect the plurality of first electrode substrate side transparent electrodes. A plurality of stripe-shaped second electrode substrate-side transparent electrodes (22), each of which is a second electrode substrate-side transparent electrode and forms a gap between each adjacent transparent electrode;
Each partition (20a, 20b) extending from each surface portion corresponding to each gap among the liquid crystal side surfaces of the transparent substrate through the gaps and holding a cell gap between the first and second electrode substrates.
And an alignment film (24) formed on the liquid crystal side surface of the transparent substrate via the respective partition walls and the respective second electrode substrate side transparent electrodes. Each partition wall has an auxiliary electrode (27a, 2
7b), and a spacer (28a, 28b) provided between each of the auxiliary electrodes and the liquid crystal side surface of the first electrode substrate. It is connected to one side wall on the gap side.

Thus, the same function and effect as the first aspect can be achieved. According to the fifth aspect of the present invention, each partition is laminated on each surface portion of the transparent substrate by the auxiliary electrode in each gap via the contact metal portions (26a, 26b). Further, each contact metal portion makes ohmic contact with one side wall of each gap side of each second electrode substrate side transparent electrode, thereby connecting each auxiliary electrode to each second electrode substrate side transparent electrode.

Thus, each of the plurality of auxiliary electrodes is in a good electrical connection state with the transparent electrode of the second electrode substrate through each contact electrode portion over the entire length of the auxiliary electrode. As a result, a reduction in the wiring resistance of the transparent electrode of the second electrode substrate can be satisfactorily ensured. Such a phenomenon is particularly remarkable in increasing the size and definition of the liquid crystal cell. Claims 6 and 7
According to the invention described in (1), the first electrode substrate has a plurality of stripe-shaped first electrode substrate-side transparent electrodes (15) inside the alignment film (17).

The second electrode substrate includes a transparent substrate (21) and a plurality of stripe-shaped second electrode substrate sides formed on the liquid crystal side surface of the transparent substrate so as to intersect the plurality of first electrode substrate side transparent electrodes. A plurality of stripe-shaped second electrode substrate-side transparent electrodes (22), each of which forms a gap (25) between each of the transparent electrodes adjacent to each other, and each gap of the liquid crystal side surface of the transparent substrate; A pair of partition walls (20a, 20b) extending from the respective surface portions corresponding to the above and extending through the respective gaps to maintain the cell gap between the first and second electrode substrates.
And an alignment film (2) formed on the liquid crystal side surface of the transparent substrate via the pair of partition walls and the second electrode substrate side transparent electrode.
4), wherein each pair of partition walls is located at an interval from each other in each of the gaps for each pair, and each pair of partition walls is provided with an auxiliary Electrodes (27
a, 27b) and spacers (28a, 28b) provided between each of the auxiliary electrodes and the liquid crystal side surface of the first electrode substrate. Each gap side is connected to one side wall.

According to this, the same operation and effect as the invention described in claim 3 can be achieved. According to the seventh aspect of the present invention, each pair of partition walls is provided with a contact metal portion (26a, 26b) in each gap between each partition wall and each surface portion of the transparent substrate by the auxiliary electrode. Are laminated through. Further, each contact metal portion makes ohmic contact with one side wall of each gap side of each second electrode substrate side transparent electrode, thereby connecting each auxiliary electrode to each second electrode substrate side transparent electrode.

Thus, the same function and effect as the fifth aspect of the invention can be achieved. Further, according to the invention described in claims 8 and 9, the first electrode substrate has the alignment film (17).
And a plurality of stripe-shaped first electrode substrate-side transparent electrodes (15) inside. The second electrode substrate includes a transparent substrate (21) and a plurality of stripe-shaped second electrode substrate-side transparent electrodes (22) formed on the liquid crystal side surface of the transparent substrate so as to intersect the plurality of first electrode substrate-side transparent electrodes. ) And these second
Each partition (20a, 20b) provided between each liquid crystal side surface of the electrode substrate side transparent electrode and the liquid crystal side surface of the first electrode substrate to maintain a cell gap between the first and second electrode substrates.
And an alignment film (24A) formed on the liquid crystal side surface of the transparent substrate via the respective partition walls and the respective second electrode substrate side transparent electrodes, and each partition wall is formed on the liquid crystal side of the respective second electrode substrate side transparent electrode. An auxiliary electrode (27a) provided on the surface and a spacer (2) provided between each auxiliary electrode and the liquid crystal side surface of the first electrode substrate.
8a).

According to this, the same operation and effect as the invention described in claim 2 can be achieved. According to the ninth aspect of the present invention, each of the partition walls is provided with a contact metal part (2) on the liquid crystal side surface of the second electrode substrate side transparent electrode at its auxiliary electrode.
6a). Also, each contact metal part is
Each auxiliary electrode is connected to each second electrode substrate side transparent electrode by making ohmic contact with the liquid crystal side surface of each second electrode substrate side transparent electrode.

The same function and effect as the invention described in claim 5 can be achieved. According to the eleventh to sixteenth aspects of the present invention, in the electrode substrate forming step, one of the plurality of electrodes (22) of the two electrode substrates and each of the gaps between the two adjacent electrodes among the electrodes are formed. (25) an auxiliary metal film forming step (S4) for forming an auxiliary metal film (A), a resist film laminating step (S4) for laminating a photoresist film (R) on the auxiliary metal film, A plurality of stripe-shaped spacers (28a, 2
8b) along the auxiliary metal film in a spacer forming step (S5, S6), and patterning the auxiliary metal film using a plurality of spacers as a mask to contact the plurality of electrodes of one electrode substrate in the longitudinal direction. In addition, a plurality of stripe-shaped auxiliary electrodes (27a, 27b) are formed so as to form a plurality of stripe-shaped partition walls (20a, 20b) together with a plurality of spacers.
b) forming an auxiliary electrode forming step (S7).

In the overlapping step, the two electrode substrates are overlapped with each other via a plurality of stripe-shaped partition walls. As described above, in patterning the auxiliary metal film for forming a plurality of stripe-shaped auxiliary electrodes, the plurality of spacers are used as they are as masks. Therefore,
In forming the plurality of stripe-shaped auxiliary electrodes, a step of performing patterning by photolithography using a new photoresist is not required.

Therefore, the number of patterning processes required for manufacturing a liquid crystal cell can be suppressed to a minimum. As a result, the number of facilities required for performing the photolithography method can be reduced, which helps to reduce the manufacturing cost of the liquid crystal cell. Further, as described above, since each auxiliary electrode is formed so as to be in contact with each electrode of one electrode substrate along its longitudinal direction, the resistance of each electrode of one electrode substrate can be reduced. In addition, since the two electrode substrates are overlapped via a plurality of stripe-shaped partition walls having a laminated structure of the auxiliary electrode and the spacer, it is needless to say that the cell gap between the two electrode substrates can be maintained uniformly.

According to the twelfth aspect of the present invention, in the spacer forming step, the patterning process of the photoresist film is performed by making each of the plurality of stripe-shaped spacers adjacent to each other among the plurality of electrodes of one electrode substrate. In the auxiliary electrode forming step, the patterning of the auxiliary metal film is performed so that each of the plurality of stripe-shaped auxiliary electrodes is formed in the gap between one of the two electrodes. It is performed so as to be in contact with one side wall.

As described above, since the auxiliary electrode is located so as to be in contact with one side wall on each gap side of one electrode of each of the two electrodes, the cell gap of the liquid crystal cell is not reduced and the auxiliary electrode is provided by the thickness of the electrode. The thickness of the auxiliary electrode can be increased. As a result, without causing dielectric breakdown of both electrode substrates and line defects on the display, which are likely to occur due to the reduction of the cell gap,
The resistance reduction by the auxiliary electrode can be further improved.

Therefore, when the degree of resistance reduction by the auxiliary electrode is made the same as in the conventional case, the width can be reduced by the increase in the thickness of the auxiliary electrode. Therefore, the aperture ratio of the liquid crystal cell is increased, and high-luminance display can be performed. Also,
According to the thirteenth aspect, in the spacer forming step, the patterning process of the photoresist film is performed such that each of the plurality of stripe-shaped spacers is located on the plurality of electrodes of one electrode substrate in the longitudinal direction. Do so,
In the auxiliary electrode forming step, patterning of the auxiliary metal film is performed such that each auxiliary electrode is in contact with each electrode of one electrode substrate in the longitudinal direction.

As described above, even if each of the plurality of spacers is formed on each electrode of one electrode substrate together with each auxiliary electrode, substantially the same operation and effect as the invention according to claim 11 can be achieved. it can. According to the fourteenth aspect of the present invention, the electrode substrate forming step includes a seal forming step (S13) of forming a belt-shaped seal (30) in a U shape along the outer peripheral portion of the inner surface of the other electrode substrate. Then, in the overlapping step, a plurality of partition walls are used to seal both parallel seal portions (30a, 3a).
0b), the two electrode substrates are overlapped along the two parallel seal portions and at right angles to the orthogonal seal portion (30c) with respect to the two parallel seal portions of the seal. A liquid crystal injection port (31) comprising a plurality of openings (31a) is formed by the tip of each partition and each inner surface of both electrode substrates, and in the liquid crystal injection step, liquid crystal is injected through the liquid crystal injection port.

Thus, the opening shape of each opening of the liquid crystal injection port between the two electrode substrates can be adjusted not only by each tip of the two-sided seal portion but also by the tip of each partition located between these two-sided seal portions. Specified by. For this reason, each opening is
In the shape of the opening, the region between the two partitions adjacent to each other is uniformly communicated with the region between the two partitions while maintaining the same shape as that formed in the longitudinal section.

Accordingly, the liquid crystal is smoothly injected from the liquid crystal injection port to between the two electrode substrates at a uniform speed along the longitudinal direction of each partition from the liquid crystal injection port side to the back side between the two electrode substrates. . As a result, there is no discontinuous portion in the liquid crystal layer of the liquid crystal, the orientation of the entire liquid crystal is made uniform, and good display can be uniformly secured over the entire display area of the liquid crystal cell. Such an effect is particularly remarkable when a smectic liquid crystal is used as the liquid crystal.

According to the fifteenth aspect of the present invention,
In the spacer forming step, a patterning process of the photoresist film is performed so that each of the plurality of stripe-shaped spacers extends to a position corresponding to each connection terminal portion (29) with an external circuit of the liquid crystal cell. Thereafter, the corresponding portions of the spacers corresponding to the respective connection terminal portions are removed such that the electrode portions of the respective auxiliary electrodes located immediately below the corresponding portions corresponding to the respective connection terminal portions are used as the respective connection terminal portions.

Thus, the electrode portion of the auxiliary electrode serving as the connection terminal portion is covered and protected by the corresponding portion of the spacer to the connection terminal portion after the liquid crystal is injected, that is, before connection with the external circuit. Therefore, in a process before connection of an external circuit, a defect rate due to scratching or disconnection of an electrode portion of an auxiliary electrode serving as a connection terminal portion can be reduced, and yield can be improved.

According to the sixteenth aspect of the present invention,
In the electrode substrate forming step, in forming one of the electrode substrates,
A conductive film forming step (S1) for forming a conductive film (I1) on the inner surface of the substrate; and a protective film forming step (S) for patterning and forming a plurality of stripe-shaped protective films (23) along the conductive film.
2) and an electrode forming step (S3) of forming a plurality of electrodes (22) by patterning the conductive film using the plurality of stripe-shaped protective films as masks.

As described above, in patterning the conductive film for forming a plurality of striped electrodes, the plurality of protective films are used as they are as masks. Therefore, in forming a plurality of striped electrodes, a step of performing a patterning process by photolithography using a new photoresist is not required.

As a result, the number of patterning processes required for manufacturing a liquid crystal cell can be further suppressed, and the cost of manufacturing a liquid crystal cell can be further reduced.

[0037]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIGS. 1 to 3 show one embodiment of a liquid crystal cell according to the present invention. In this liquid crystal cell, an upper electrode substrate 10 as a color filter substrate and a lower electrode substrate 20 as a counter substrate are opposed to each other, and an antiferroelectric liquid crystal is interposed between the two electrode substrates 10 and 20 via a seal 30. 40
Is enclosed.

The electrode substrate 10 has a plurality of striped color filters 12 (R) on the inner surface of a transparent glass substrate 11.
Layer, a G layer, and a B layer), a light shielding film 13, an overcoat film 14, a plurality of stripe-shaped transparent electrodes 15, a transparent insulating film 16, and a transparent alignment film 17 are sequentially laminated. The polarizing plate 1 is provided on the outer surface of the glass substrate 11.
1A is stuck.

On the other hand, the electrode substrate 20 includes a transparent glass substrate 21, a plurality of striped transparent electrodes 22, and a plurality of transparent striped insulating films 23. The plurality of stripe-shaped transparent electrodes 22 are formed at equal angular intervals on the inner surface of the glass substrate 21 so as to be positioned parallel to and perpendicular to the plurality of stripe-shaped transparent electrodes 15. Thereby, each transparent electrode 22 forms a plurality of matrix-shaped pixels together with each transparent electrode 15 and the antiferroelectric liquid crystal 40.

A plurality of transparent striped insulating films 2
3 are formed along the respective transparent electrodes 22 on the inner surface thereof, and the respective insulating films 23 together with the corresponding transparent electrodes 22 constitute the stacked portions S, respectively. Also,
The electrode substrate 20 includes a plurality of pairs of striped partition walls 20a,
0b and an alignment film 24.

Each of the plurality of pairs of partition walls 20a and 20b has a rectangular parallelepiped shape.
Is a gap 2 between each of the adjacent stacked portions S for each pair.
5 is provided on the inner surface of the glass substrate 21. Thereby, a plurality of pairs of partition walls 20a, 20b
Maintains the gap between the inner surface of the glass substrate 21 and the inner surface of the alignment film 17 (that is, the cell gap between the two electrode substrates 10 and 20) uniformly and appropriately via the alignment film 24. .

Here, the partition wall 20a is formed in the gap 25 shown in FIG.
Is located on the left side in the figure, while the partition wall 20b is
In FIG. 1, the gap 25 is located on the right side in FIG. 1 at a distance from the partition wall 20a. The partition wall 20a includes a contact metal part 26a, a low resistance electrode 27a formed on the contact metal part 26a, and a resist part 28a formed on the low resistance electrode 27a.

The contact metal part 26a is in ohmic contact with the corresponding transparent electrode 22 on the right side in FIG. 1 and the lower surface of the corresponding low-resistance electrode 27a on the left side in FIG. The low-resistance electrode 27a is formed of a low-resistance metal material such as aluminum.
a is electrically connected at the lower surface thereof to the corresponding right side surface of the corresponding transparent electrode 22 located on the left side surface of FIG. 1 of the contact metal portion 26a via the contact metal portion 26a. Thereby, the low-resistance electrode 27a plays a role as an auxiliary electrode of the corresponding transparent electrode 22.

The partition 20b is also formed in the same manner as the partition 20a.
It has a contact metal part 26b, a low resistance electrode 27b and a resist part 28b respectively corresponding to the low resistance electrode 27a and the resist part 28a. The contact metal portion 26b is in ohmic contact with the corresponding transparent electrode 22 on the left side in FIG. 1 and the lower surface of the corresponding low-resistance electrode 27b on the right side in FIG. Further, the low-resistance electrode 27b is
The low resistance electrode 27b is formed on the lower surface of the corresponding transparent electrode 22 located on the right side in FIG. 1 of the contact metal portion 26b via the contact metal portion 26b on the lower surface thereof. It is electrically connected to the surface. Thereby, the low-resistance electrode 27b plays a role as an auxiliary electrode of the corresponding transparent electrode 22.

In each of the plurality of pairs of partition walls 20a and 20b, the contact metal portions 26a and 26b and the low-resistance electrodes 27a and 27b are provided, as shown in FIGS.
The seals 30 extend outward from a liquid crystal injection port 31, which will be described later, integrally with each other as extension ends 26 and 27. Here, each extension end portion 26, 27 forms a connection terminal portion 29 connected to an external circuit on the extension plate portion of the glass substrate 21 from the glass substrate 11.

As shown in FIG. 1, the alignment film 24 is formed along the inner surface of each insulating film 23 and the surface of each of the pair of partition walls 20a and 20b that is not in contact with each laminated portion S. However, the space between each pair of partition walls 20a and 20b is filled with the alignment film 24. Note that a polarizing plate 21A is attached to the outer surface of the glass substrate 21. Seal 30
As shown in FIG. 2, the seal 30 is formed in a U-shape along the outer periphery of the alignment film 17 on the inner surface of the glass substrate 11. Is sealed.

Here, the seal 30 is a double parallel seal portion 3.
0a, 30b and these two parallel seal portions 30a, 30b
And an orthogonal seal portion 30c that is orthogonal to. The two parallel seal portions 30a, 30b are located along the longitudinal direction of each pair of partition walls 20a, 20b, and the orthogonal seal portion 30c is each pair of partition walls 20a, 20b.
b is opposite to the liquid crystal injection port 31 at a right angle.

As shown in FIG. 3B, the liquid crystal injection port 31 has a pair of partition walls 20a and 20b, both parallel seal portions 30a and 30b, and inner surfaces of both electrode substrates 10 and 20. And a plurality of openings 31a formed between them. Next, a method for manufacturing the liquid crystal cell will be described with reference to FIGS. First, in the counter substrate side ITO sputtering step S1 shown in FIG.
Indium-Tin-Ox on the inner surface of the glass substrate 21
Ide (hereinafter referred to as ITO) is formed as a 1500-nm-thick ITO film I1 by a sputtering method (FIG. 5).
(A)).

Next, in the insulating film printing / firing step S2, a plurality of stripes are formed by printing an insulating film material (silica-based inorganic coating material) on the inner surface of the ITO film I1 with a film thickness of 1500 ° by screen printing. An insulating film 23 is formed (see FIG. 5B). Specifically, as shown in FIG. 6, a plurality of stripe-shaped openings 51 corresponding to a plurality of stripe-shaped transparent electrodes 22 are formed at a predetermined interval (100 μm).
The mask plate 50 formed in m) is prepared. Here, each opening 51 has an opening width of 300 μm and the same length as the transparent electrode 22.

Then, I is placed on the printing table of the screen printing machine.
The glass substrate 21 is placed with the TO film I1 facing upward, and the mask plate 50 is placed on the ITO film I1. In such a state,
The above-mentioned insulating film material (indicated by reference numeral F in FIG. 6) is applied on the ITO film I1 through the mask plate 50 using a squeegee 50a, whereby a plurality of stripe-shaped insulating films 23 are formed by patterning.

After that, the ITO film I1 and the glass substrate 21 on which the respective insulating films 23 are formed are removed in an oven for 3 hours.
By heating at 00 ° C., each insulating film 23 is baked.
Next, in the ITO etching step S3, the insulating film 2
3 is immersed in a mixed solution of hydrochloric acid and ferric chloride, and a portion of the ITO film I1 exposed from between the insulating films 23 is removed by etching to thereby obtain a plurality of films. The stripe-shaped transparent electrode 22 is formed by patterning (see FIG. 5C).

In this case, the etching process of the ITO film I1 is performed by utilizing the printed and baked insulating films 23 as a mask. The process of patterning and forming each transparent electrode 22 becomes unnecessary. In other words, before printing the insulating film 23, a photoresist is applied to the entire inner surface of the ITO film I1 with a spinner or the like to form a photoresist film, and each transparent electrode 22 is exposed and developed in the photoresist film. After removing the portions that do not correspond to the above, baking the remaining photoresist film portions,
The step of removing the portion of the film I1 other than the portion corresponding to each transparent electrode 22 by etching, and then removing the remaining portion of the photoresist film with an alkali solution becomes unnecessary.

Therefore, the patterning and formation of each transparent electrode 22 is simplified, and equipment for forming by the photolithography method is not required. As a result, cost reduction can be ensured. Next, in the contact metal part / low-resistance electrode sputtering step S4, titanium was deposited at a thickness of 1500 ° to expose the inner surface of the glass substrate 21, the inner surface of each transparent electrode 22, and the inner surface of each insulating film 23. A titanium film T is formed thereon by sputtering (FIG. 5
(D)). Further, aluminum is formed as an aluminum film A with a thickness of 3000 ° on the inner surface of the titanium film T by a sputtering method (see FIG. 5D). Note that a film of chromium or molybdenum may be used instead of the titanium film T.

After this step, in a photoresist application / pre-bake step S5, the photoresist is removed to 1.35 μm.
A photoresist film R is formed by applying a thickness of m to the surface of the aluminum film A (see FIG. 5E). In addition,
The thickness of 1.35 μm is selected so that the cell gap of the liquid crystal cell is 1.5 μm. Further, the portion of the photoresist film R that overlaps the transparent electrode 22 is crushed in the later-described substrate heating / pressing step S16, and thus does not affect the cell gap.

As a material for forming the photoresist film R, there are novolak, polyimide, acrylic, rubber and the like. Further, the printing material may be formed by printing instead of the photo material. As described above, the photoresist film R
The aluminum film A, the titanium film T, the insulating film 23, the transparent electrode 22, and the glass substrate 21 are formed in an oven, and the photoresist film R is pre-baked.

Next, exposure, development and post-baking steps S
In 6, the portion of the photoresist film R on the inner surface of each insulating film 23 and the portion corresponding to between the pair of partition walls 20a and 20b are removed through exposure and development, and the pair of resist portions 28a are removed. , 28b are formed by patterning (see FIG. 5F). Here, a plurality of pairs of partition walls 20a, 2
0b, the contact metal parts 26a, 26
b, low resistance electrodes 27a and 27b and resist portion 28a,
As shown in FIG. 3, 28b extend outwardly from the liquid crystal injection port 31 of the seal 30 as extending ends 26, 27 and 28 integrally with each other (see FIG. 5 (g)). .

Thereafter, each pair of resist portions 28a, 28
b formed aluminum film A, titanium film T, insulating film 2
3. The transparent electrode 22 and the glass substrate 21 are housed in an oven, and at 140 ° C., a pair of resist portions 28a and 28b
To post-bake. Then, in the contact metal portion / low resistance electrode etching step S7, portions of the aluminum film A that are exposed from the pair of resist portions 28a and 28b are etched with phosphoric acid. Next, portions of the titanium film T that are exposed from the pair of resist portions 28a and 28b are etched with a mixed solution of ammonia water and hydrogen peroxide solution.

Thus, the partition wall 20a in which the contact metal portion 26a, the low resistance electrode 27a, and the resist portion 28a are laminated.
And a plurality of pairs of the partition wall 20b in which the contact metal part 26b, the low resistance electrode 27b, and the resist part 28b are laminated (see FIGS. 5G and 5H). in this case,
The low resistance electrode 27a and the contact metal part 26a are in the resist part 2
8a is used as a mask, and the low-resistance electrode 27b and the contact metal portion 26b are patterned by etching as described above by using the resist portion 28b as a mask.

Therefore, similarly to the case of patterning formation of each transparent electrode 22 in the ITO etching step S3,
The patterning of the contact metal portions 26a and 26b and the low-resistance electrodes 27a and 27b is performed without depending on the photolithography method. Therefore, this patterning formation can be easily achieved with a reduced number of steps and a lower cost. Also,
A small amount of equipment for patterning and forming by photolithography is required, and the cost can be reduced.

The low-resistance electrodes 27a and 27b are respectively connected to contact metal portions 26a and 2m for ohmic connection.
Since each of the transparent electrodes 22 is connected to the corresponding transparent electrode 22 via 6b, the resistance of each transparent electrode 22 can be reduced. Thereafter, in the orientation film printing / firing step S8, the orientation film 24 is applied along the inner surface of each insulating film 23 and the outer walls of each of the pair of partition walls 20a, 20b with an orientation film material such as polyimide, and then fired.

The patterning of the alignment film 24 by screen printing allows the pair of partition walls 20a, 20b to be printed.
May not be covered with the alignment film 24 so that the adhesion between the alignment film 17 of the electrode substrate 10 and the front ends of the pair of partition walls 20a and 20b may be strengthened. Then
In the rubbing step S9, a rubbing process is performed on the alignment film 24, and in the scribe cutting step S10, the glass substrate 21 is cut. Thereby, the electrode substrate 20 is formed.

On the other hand, in step S 11 up to printing of the alignment film on the color filter substrate side, a plurality of stripe-shaped color filters 12 and the light shielding film 1 are formed on the inner surface of the glass substrate 11.
3. An overcoat film 14, a plurality of stripe-shaped transparent electrodes 15, a transparent insulating film 16, and a transparent alignment film 17 are sequentially laminated and formed. Then, in the rubbing step S12,
The alignment film 17 is rubbed.

Next, in the seal printing step S13,
The seal 30 is formed by screen printing on the inner surface of the glass substrate 11 along the outer periphery of the alignment film 17 using epoxy resin. Thereby, the electrode substrate 10 is formed. After this formation, in a superposition step S14, FIG.
Then, the electrode substrate 10 is overlaid on the electrode substrate 20 via the seal 30 so as to be in the state shown in FIG. 2 to form an empty cell.

Then, in the substrate heating / pressing step S15, the empty cell is subjected to a heating / pressing treatment using the heating / pressing device 60 shown in FIG. 7 as follows. That is, as shown in FIG. 7A, the empty cell is accommodated between both U-shaped pressing walls 61 and 62 of the heating and pressing device 60. Then, as shown in FIG. 7 (b), the pressure inside the pressure walls 61, 62 is reduced through the opening 65 so that the pressure walls 61, 62 are overlapped. While the empty cell is pressurized, the empty cell is heated at 200 ° C. by the heaters 63 and 64.

It is to be noted that both the pressure walls 61,
An air pressure may be applied through the opening 65 in the inside 62, and a pressing force may be applied to both the pressing walls 61 and 62 from the outside. Thereafter, in a scribe / cutting step S16, a scribe process and a cut process of the glass substrate of the empty cell are performed. Then, the liquid crystal injection step S1
7, the antiferroelectric liquid crystal 40 is injected into the empty cell through the liquid crystal injection port 31, and in the counter substrate terminal portion resist removing step S18, each pair of partition walls extending on the extension plate portion of the glass substrate 21 is formed. The resist portions 28a and 28b are removed from the extended portions of 20a and 20b. Thereby, each connection terminal portion 29 is formed (see FIG. 3B).

More specifically, with the display area of the liquid crystal cell protected by a stainless film or the like, a plurality of pairs of partition walls 20a,
Among the extending portions 20b (the extending portions 26 of the contact metal portions 26a and 26b, the extending portions 27 of the low-resistance electrodes 27a and 27b, and the extending portions 28 of the resist portions 28a and 28b), the resist portions 28a and 28b Is removed with a mixed gas of argon gas and oxygen in a plasma ashing apparatus comprising a parallel plate.

As a result, each of the connection terminal portions 29 is placed on the extension plate portion of the glass substrate 21 so that each of the pair of extension end portions 26, 2
7 (see FIG. 3B). In this case, up to the present stage, each connection terminal portion 29 is connected to the resist portions 28a, 28
Since the connection terminal portions 29 are covered with b, each connection terminal portion 29 can be reliably protected from disconnection and the like in the process up to its formation.

Thereafter, in a sealing step S19, the liquid crystal injection port 31 is sealed with a sealing material 32, and a polarizing plate attaching step S19 is performed.
At 20, the polarizing plates 11A and 21A are attached to the outer surfaces of both glass substrates 11 and 21, respectively. In the liquid crystal cell manufactured in this manner, the height of the resist portions 28a and 28b is 1.35 μm and the cell gap is fixed at 1.5 μm. However, the partition walls 20a and 20b are located in the gap 25 and the electrode It is sandwiched between the substrate 10 and the glass substrate 21.

Therefore, the resist portions 28a and 28b can be formed between the transparent electrode 22 and the electrode substrate 10 as well as a sufficient withstand voltage between the low resistance electrodes 27a and 27b and the electrode substrate 10 can be ensured. Compared to the case where the
The height of a, 27b can be increased. Therefore, the resistance of each transparent electrode 22 can be further reduced. Therefore, good display can be ensured without causing dullness in the voltage applied to each transparent electrode 22.

As understood from the above description,
An antiferroelectric liquid crystal 40 is provided between the electrode substrates 10 and 20.
The two parallel seal portions 30a, 30b, a plurality of pairs of partition walls 20
a, 20b are defined by resist portions 28a, 28b and low resistance electrodes 27a, 27b. For this reason,
The shape of the opening of the liquid crystal injection port 31 is specified by this section shape. As a result, the injection of the antiferroelectric liquid crystal 40 into the empty cell in the liquid crystal injection step S17 spreads over the entire empty cell at a uniform speed.

Accordingly, various ends which are likely to occur when the ends of the partition walls 20a and 20b on the side of the liquid crystal injection port 31 are separated from the liquid crystal injection port 31 and located inside the liquid crystal cell with respect to the liquid crystal injection port 31. The defect can be eliminated. That is, as described above, when the ends of the partition walls 20a and 20b on the side of the liquid crystal injection port 31 are located inside the liquid crystal cell with respect to the liquid crystal injection port 31, the area near the liquid crystal injection port 31 and the other area May cause a difference in the injection speed of the antiferroelectric liquid crystal 40,
The layer structure of the antiferroelectric liquid crystal 40 becomes discontinuous at the end of the liquid crystal injection port 31 at 0a and 20b, causing variations in alignment defects. As a result, display defects are caused.

On the other hand, in the present embodiment, as described above, the opening shape of the liquid crystal injection port 31 is specified by the partition shape, so that the orientation of the antiferroelectric liquid crystal 40 is controlled over the entire display area of the liquid crystal cell. To be uniform. As a result, a uniform display can be obtained. Further, as described above, a plurality of pairs of spacers 28a and 28b
a, 27b and a pair of contact metal parts 26a, 26b are laminated and formed in each gap 25 between both electrodes 22 of the electrode substrate 20, so that the spacers and auxiliary electrodes do not cover each electrode 22. .

Therefore, there is no variation in the distance between the opposing electrodes of the two electrode substrates 10 and 20 in the display area of the liquid crystal cell, and uniform orientation and uniform display of the antiferroelectric liquid crystal can be ensured. . At the same time, the transmittance of light passing through the liquid crystal cell (that is, the aperture ratio) is increased as compared with a liquid crystal cell in which the electrodes are partially covered with spacers and auxiliary electrodes, and a high-luminance display can be reliably secured. .

(Second Embodiment) Next, a second embodiment of the present invention will be described with reference to FIGS. This second
In the embodiment, as shown in FIG. 8, an electrode substrate 20A is employed instead of the electrode substrate 20 described in the first embodiment. The electrode substrate 20A is different from the electrode substrate 20 described in the first embodiment in that a plurality of pairs of partition walls 2 are provided.
0a and 20b, each partition 20b is eliminated, and the insulating film 23
And the orientation film 24, instead of the insulating film 23A and the orientation film 24.
A is adopted.

As shown in FIG. 8, each partition 20 a is provided upright on the center of the inner surface of each transparent electrode 22 in the width direction, and is sandwiched between each transparent electrode 22 and the alignment film 17. The insulating film 23A is formed via each transparent electrode 22 and each partition 20a,
It is formed on the inner surface of the glass substrate 21. The alignment film 24A is formed on the inner surface of the insulating film 23A.

The orientation film 24A and the insulating film 23A are
Both are removed at a portion corresponding to the tip end surface of each partition 20a. Other configurations are the same as those of the first embodiment. A method for manufacturing the liquid crystal cell thus configured will be described with reference to FIG. In the second embodiment, the processing in the ITO etching step S3 is performed in the same manner as in the first embodiment, without performing the processing in the insulating film / printing and firing step S2.

After the completion of this process, the contact metal part
In the low-resistance electrode sputtering step S4a, unlike the contact metal part / low-resistance electrode sputtering step S4, the titanium film is formed on the exposed portion of the inner surface of the glass substrate 21 and on the inner surface of each transparent electrode 22. You. Further, an aluminum film is formed on the inner surface of the titanium film thus formed in the same manner as in the first embodiment.

Thereafter, similarly to the first embodiment, the process of the photoresist application / pre-bake step S5 is performed. Next, in the exposure / development / post-bake step S6a instead of the exposure / development / post-bake step S6, portions of the photoresist film formed in the photoresist coating / pre-bake step S5 other than the portions corresponding to the respective partition walls 20a are exposed. And through the process of development, each resist part 28
a is formed by patterning.

Thereafter, the aluminum film, the titanium film, and the glass substrate 21 on which the respective resist portions 28a are formed by patterning are housed in an oven, and the respective resist portions 28a are post-baked at 140.degree. Then, in the contact metal part / low resistance electrode etching step S7a instead of the contact metal part / low resistance electrode etching step S7, each part of the aluminum film and the titanium film exposed from each resist part 28a is contacted with the contact part. Etching is performed in the same manner as the processing in the metal part / low resistance electrode etching step S7.

As a result, each partition wall 20a on which the contact metal portion 26a, the low resistance electrode 27a and the resist portion 28a are laminated is formed.
Are formed on the center of each transparent electrode 22 in the width direction by patterning. In this case, the low resistance electrode 27a and the contact metal part 2
6a is patterned by etching as described above by using the resist portion 28a as a mask.

Therefore, as in the case of the insulating film printing / firing step S2 described in the first embodiment, each partition 20a is formed by one process using the photolithography method. Therefore, the formation of the contact metal portion 26a and the low-resistance electrode 27a is simplified, and a small amount of equipment for forming the contact metal portion 26a and the photolithography method is required. As a result, cost reduction can be ensured.

In each partition 20a, the low resistance electrode 27
a is connected to the corresponding transparent electrode 22 via the contact metal part 26a for ohmic connection,
2 can be reduced. Next, the insulating film printing / firing step S
7b, the insulating film 23A is formed in the same manner as in the processing of the insulating film printing / firing step S2 described in the first embodiment.
Printing is performed over the inner surface of each transparent electrode 22, between each transparent electrode 22, and over the surface of each partition wall 20a.

Next, in the alignment film printing / firing step S8a instead of the alignment film printing / firing step S8, the alignment film 24A
By substantially the same processing as in the case of the alignment film 24,
It is formed on the inner surface of the insulating film 23A. After that, in the alignment film / insulating film polishing step S8b, the portions of the insulating film 23A and the alignment film 24A corresponding to the leading end surfaces of the respective partition walls 20a are removed by polishing the entire surface, thereby exposing the leading end surfaces of the respective partition walls 20a. Thereby, the adhesion between the alignment film 17 and the tip surface of each partition 20a can be strengthened.

The other steps are the same as in the first embodiment. Thereby, the same function and effect as the first embodiment can be achieved. FIG. 10 shows a modification of the second embodiment. In this modification, the insulating film 23A described in the second embodiment is abolished and the alignment film 24A is removed.
A is printed and formed on the inner surface of each transparent electrode 22, between the transparent electrodes 22, and on the outer surface of each partition 20a. Other configurations are the same as those of the second embodiment.

As in this modification, even if the insulating film 23A is eliminated, the same operation and effect as in the second embodiment can be achieved. The present invention is not limited to a liquid crystal cell having a substrate with a color filter, but may be applied to a liquid crystal cell using an electrode substrate without a color filter.

In the practice of the present invention, the processing of the transparent electrode may be performed by wet etching or dry etching, and the insulating film may be formed by mask sputtering. Further, in carrying out the present invention, the liquid crystal of the liquid crystal cell is not limited to an antiferroelectric liquid crystal, and may be implemented by adopting various liquid crystals such as a smectic liquid crystal such as a ferroelectric liquid crystal or a nematic liquid crystal. .

In implementing the present invention, each pair of partitions 20a and 20b described in the first embodiment may be implemented by eliminating one partition of each pair. The pair of contact metal portions 26a and 26b may be omitted to be implemented.

[Brief description of the drawings]

FIG. 1 is a sectional view taken along line 1-1 in FIG.

FIG. 2 is a plan view showing a first embodiment of a liquid crystal cell according to the present invention.

3 (a) is a partially enlarged plan view of the liquid crystal cell of FIG. 2, and FIG. 3 (b) is a cross-sectional view taken along line 3b-3b in FIG. 3 (a).

FIG. 4 is a process chart showing a method for manufacturing the liquid crystal cell of FIG.

5 (a) to 5 (g) are views showing processing states in main steps in FIG. 4, and FIG. 5 (h) is a cross-sectional view along line 5h-5h in FIG. 5 (g). .

FIG. 6 is a perspective view showing a state where an ITO film I1 is screen-printed by a screen printer.

FIG. 7A is a schematic cross-sectional view showing a state where an empty cell is accommodated in a pressurizing and heating device, and FIG. 7B is a schematic diagram showing a state where an empty cell is pressurized and heated by a pressurizing and heating device. FIG.

FIG. 8 is a sectional view showing a main part of a second embodiment of the liquid crystal cell according to the present invention.

FIG. 9 is a main part process view showing the manufacturing method of the second embodiment.

FIG. 10 is a cross-sectional view of a principal part showing a modification of the second embodiment.

[Explanation of symbols]

10, 20: electrode substrate, 11, 21: glass substrate, 1
5, 22: transparent electrode, 17, 24, 24A: alignment film, 1
4, 23, 23A: insulating film, 20a, 20b: partition, 2
6a, 26b: contact metal part, 27a, 27b: low resistance electrode, 28a, 28b: resist part, 29: connection terminal part,
30: seal, 31: liquid crystal injection port.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Tadashi Hattori 1-1-1, Showa-cho, Kariya-shi, Aichi Prefecture Inside Denso Corporation (72) Inventor Masaaki Ozaki 1-1-1, Showa-cho, Kariya-shi, Aichi Prefecture Denso Corporation Inside

Claims (16)

[Claims] 1. A liquid crystal comprising: two electrode substrates (10, 20) each having a plurality of stripe-shaped electrodes (15, 22) positioned intersecting each other; and a liquid crystal (40) provided between the two electrode substrates. A plurality of electrodes (2) of at least one of the two electrode substrates.
2) A plurality of stripe-shaped metal auxiliary electrodes (27a, 27a, 22b) formed in the respective gaps (25) between the two adjacent electrodes among the plurality of electrodes so as to be in contact with the longitudinal direction.
27b), formed between the plurality of auxiliary electrodes and the other electrode substrate (10) along the longitudinal direction of the plurality of auxiliary electrodes, and together with the plurality of auxiliary electrodes, a cell gap between the two electrode substrates is formed. The plurality of striped spacers (28a, 2
8b). 2. A liquid crystal comprising: two electrode substrates (10, 20) each having a plurality of striped electrodes (15, 22) positioned intersecting each other; and a liquid crystal (40) provided between the two electrode substrates. A plurality of electrodes (2) of at least one of the two electrode substrates.
2) each metal auxiliary electrode (27a) formed so as to be in contact with each liquid crystal side surface in the longitudinal direction thereof, and each auxiliary electrode between each auxiliary electrode and the other electrode substrate (10). A liquid crystal cell comprising: a plurality of stripe-shaped spacers (28a) formed so as to be sandwiched along the longitudinal direction of the device and holding a cell gap between the electrode substrates together with the auxiliary electrodes. 3. A liquid crystal comprising: two electrode substrates (10, 20) each having a plurality of striped electrodes (15, 22) positioned intersecting each other; and a liquid crystal (40) provided between the two electrode substrates. A plurality of electrodes (2) of at least one of the two electrode substrates.
2) Each gap between both electrodes adjacent to each other (25)
A pair of metal auxiliary electrodes (27a, 27b) formed so as to be in contact with the opposing side walls of the two electrodes along the longitudinal direction thereof. Between the auxiliary electrode and the other electrode substrate (10) along the longitudinal direction of the pair of auxiliary electrodes, and together with the pair of auxiliary electrodes, reduce the cell gap between the two electrode substrates. Each pair of spacers (2
8a, 28b). 4. A first and a second electrode substrate facing each other, and a liquid crystal provided between the first and the second electrode substrates.
Wherein the first electrode substrate (10) has a plurality of stripe-shaped first electrode substrate-side transparent electrodes (15) inside the alignment film (17); The second electrode substrate (20) includes a transparent substrate (21), and a plurality of stripe-shaped first electrodes formed on the liquid crystal side surface of the transparent substrate so as to intersect with the plurality of first electrode substrate side transparent electrodes. A plurality of stripe-shaped second electrode substrate-side transparent electrodes (22), each of which is a two-electrode substrate-side transparent electrode and forms a gap between each adjacent transparent electrode; and the liquid crystal-side surface of the transparent substrate Among the partition walls (20a, 20b) extending from the respective surface portions corresponding to the respective gaps and extending through the respective gaps and holding the cell gap between the first and second electrode substrates; Via each second electrode substrate side transparent electrode Alignment film formed on the liquid crystal side surface of said transparent substrate (2
4), and each of the partition walls is provided with an auxiliary electrode (27) provided on each of the surface portions.
a, 27b) and spacers (28a, 2b, 2b) provided between each of these auxiliary electrodes and the liquid crystal side surface of the first electrode substrate.
8b), wherein each of the auxiliary electrodes is connected to each of the gap side and the side wall of each of the second electrode substrate side transparent electrodes. 5. Each of said partition walls is laminated on said respective surface portions of said transparent substrate via said contact metal portions (26a, 26b) by said auxiliary electrodes in said respective gaps. Wherein each of the auxiliary electrodes is connected to each of the second electrode substrate-side transparent electrodes by making ohmic contact with each of the gap-side one side walls of each of the second electrode substrate-side transparent electrodes. Item 6. A liquid crystal cell according to item 4. 6. A liquid crystal cell comprising: first and second electrode substrates (10, 20) facing each other; and a liquid crystal (40) provided between the first and second electrode substrates. The first electrode substrate has a plurality of stripe-shaped first electrode substrate-side transparent electrodes (15) inside the alignment film (17), and the second electrode substrate has a transparent substrate (21) and a transparent electrode. A plurality of stripe-shaped second electrode substrate-side transparent electrodes formed on the liquid crystal side surface of the transparent substrate so as to intersect with the plurality of first electrode substrate-side transparent electrodes; A plurality of stripe-shaped second electrode substrate-side transparent electrodes (2) each forming a gap (25) between the electrodes.
2) and a pair of the liquid crystal side surfaces of the transparent substrate extending from the respective surface portions corresponding to the respective gaps and extending through the respective gaps to maintain a cell gap between the first and second electrode substrates. Partition walls (20a, 20b), and an alignment film (24) formed on the liquid crystal side surface of the transparent substrate via the pair of partition walls and the second electrode substrate side transparent electrode. Are located at intervals in each of the gaps for each pair, and each pair of the partitions is provided with an auxiliary electrode (27a, 27b) provided on each surface portion for each partition. And a spacer (28a, 28b) provided between each of these auxiliary electrodes and the liquid crystal side surface of the first electrode substrate, wherein each of the auxiliary electrodes is formed of the second electrode substrate side transparent electrode. Liquid crystal cells connected to one side wall on each gap side. 7. Each of the pair of partition walls is laminated on each surface portion of the transparent substrate via the contact metal portions (26a, 26b) in each of the gaps by the auxiliary electrode at each surface portion of the transparent substrate. The contact metal portions are in ohmic contact with the gap side walls of the respective second electrode substrate side transparent electrodes, thereby connecting the respective auxiliary electrodes to the respective second electrode substrate side transparent electrodes. The liquid crystal cell according to claim 6, wherein: 8. A first and second electrode substrate (10, 20) facing each other, and a liquid crystal (40) provided between the first and second electrode substrates.
Wherein the first electrode substrate has a plurality of stripe-shaped first electrode substrate-side transparent electrodes (15) inside the alignment film (17); The electrode substrate includes: a transparent substrate (21); and a plurality of stripe-shaped second electrode substrate-side transparent electrodes formed on the liquid crystal side surface of the transparent substrate so as to intersect with the plurality of first electrode substrate-side transparent electrodes. 22), provided between each liquid crystal side surface of the second electrode substrate side transparent electrode and the liquid crystal side surface of the first electrode substrate to maintain a cell gap between the first and second electrode substrates. Partition walls (20a, 20b) to be formed, and an alignment film (24) formed on the liquid crystal side surface of the transparent substrate via the respective partition walls and the respective second electrode substrate side transparent electrodes.
A), wherein each of the partition walls includes an auxiliary electrode (27a) provided on the liquid crystal side surface of each of the second electrode substrate side transparent electrodes, and each of these auxiliary electrodes and the liquid crystal side surface of the first electrode substrate. And a spacer (28a) provided between the liquid crystal cell and the liquid crystal cell. 9. Each of said partition walls is laminated on said liquid crystal side surface of said second electrode substrate side transparent electrode via said contact metal part (26a) by an auxiliary electrode thereof, and said each said contact metal part is 9. The method according to claim 8, wherein each of the auxiliary electrodes is connected to each of the second electrode substrate-side transparent electrodes by making ohmic contact with the liquid crystal side surface of each of the second electrode substrate-side transparent electrodes. The liquid crystal cell of the above. 10. The liquid crystal cell according to claim 1, wherein each of the spacers comprises a photoresist portion, and the liquid crystal is a smectic liquid crystal. 11. A plurality of striped electrodes (15, 2).
Electrode substrate forming steps (S1 to S9, S11 to S1) for forming both electrode substrates (10, 20) each having 2)
3) and a superposing step (S1) of superposing the two electrode substrates so that the plurality of stripe-shaped electrodes cross each other.
4) and a liquid crystal cell injection step (S17) of injecting a liquid crystal (40) between the two electrode substrates, wherein the electrode substrate formation step includes one of the two electrode substrates. An auxiliary metal film forming step (S4) of forming an auxiliary metal film (A) over the plurality of electrodes (22) and the gaps (25) between each of the electrodes adjacent to each other; A resist film laminating step (S4) for laminating a photoresist film (R) on the film; and a spacer for patterning the photoresist film to form a plurality of stripe-shaped spacers (28a, 28b) along the auxiliary metal film. Forming process (S5, S6)
Patterning the auxiliary metal film using the plurality of spacers as a mask, and making contact with the plurality of electrodes of the one electrode substrate in the longitudinal direction thereof, and a plurality of stripe-shaped partitions (20a, 20b) together with the plurality of spacers. To form a plurality of stripe-shaped auxiliary electrodes (27a, 27b).
And an auxiliary electrode forming step (S7) of forming a liquid crystal cell. The method of manufacturing a liquid crystal cell, comprising: in the overlapping step, overlapping the two electrode substrates via the plurality of striped partition walls. 12. The method of patterning the photoresist film in the spacer forming step, wherein each of the plurality of stripe-shaped spacers is disposed between two adjacent transparent electrodes among the plurality of electrodes of the one electrode substrate. In the auxiliary electrode forming step, the auxiliary metal film is patterned so that each of the plurality of stripe-shaped auxiliary electrodes is one side wall of one of the two electrodes on the gap side. The method for manufacturing a liquid crystal cell according to claim 11, wherein the method is performed so as to be in contact with the liquid crystal cell. 13. In the step of forming a spacer, the patterning of the photoresist film is performed such that each of the plurality of stripe-shaped spacers is positioned on a plurality of electrodes of the one electrode substrate in a longitudinal direction thereof. The method according to claim 11, wherein, in the auxiliary electrode forming step, the auxiliary metal film is patterned such that the auxiliary electrodes are in contact with the respective electrodes of the one electrode substrate in the longitudinal direction. A method for manufacturing a liquid crystal cell. 14. An electrode substrate forming step, wherein a band-shaped seal (3) is formed along the outer peripheral portion of the inner surface of the other electrode substrate.
0) in a U-shape (S13), and in the overlapping step, the plurality of partition walls are located between the parallel seal portions (30a, 30b) of the seal. The two electrode substrates are overlapped so as to be at right angles to the orthogonal seal portion (30c) of the seal with respect to the two parallel seal portions along the portion, and each tip of the two parallel seal portions and the tip of each partition wall are overlapped. A liquid crystal injection port (31) comprising a plurality of openings (31a) is formed by the portion and the inner surfaces of both electrode substrates, and in the liquid crystal injection step, the liquid crystal is injected through the liquid crystal injection port. A method for manufacturing a liquid crystal cell according to claim 11. 15. In the spacer forming step, the patterning process of the photoresist film is extended to a position where each of the plurality of stripe-shaped spacers corresponds to each connection terminal portion (29) with an external circuit of the liquid crystal cell. After the liquid crystal injecting step, an electrode portion of each of the auxiliary electrodes located immediately below a corresponding portion of each of the spacers with respect to each of the connection terminal portions is set as each of the connection terminal portions.
The method according to any one of claims 11 to 14, wherein a portion corresponding to each of the connection terminal portions in each of the spacers is removed. 16. The electrode substrate forming step includes: forming one electrode substrate; forming a conductive film (I1) on an inner surface of the substrate; and forming a plurality of stripes along the conductive film. Forming a protective film (23) by patterning a protective film (23); and forming an electrode (22) by patterning the conductive film using the plurality of stripe-shaped protective films as a mask. The method of manufacturing a liquid crystal cell according to any one of claims 11 to 15, comprising: (S3).