JPH10253319A - Position measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a position measuring device by which the position of structure in a turbid water, etc., is measured remotely. SOLUTION: A spot light beam 9 and a slit light beam 10 are projected to an object 3 to be measured from a projector 1, and an irradiation point 11 and a bright line 12 are detected by a sensing device 2, both is overlapped with each other at a measuring point 4 by an overlapping device 21, the positional data of the measuring point 4 is computed according to the overlapping point by a position computing device 26 and a coordinate conversion device 27, and the result is indicated on a measuring result indicating monitor 26. Thus, the position of structure can be measured without being affected by scattering and absorbing phenomenon of light, in comparison with the conventional reciprocation of light beam.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position measuring device, and more particularly to an automatic and manual position measuring device for remotely measuring a position and a shape of a structure using a light beam.

[0002]

2. Description of the Related Art Conventionally, when remotely measuring the position, shape, displacement, and the like of a structure, for example, Japanese Patent Application Laid-Open No. Hei 7-208949.
As described in Japanese Patent Application Laid-Open Publication No. Hei 5-12665, a spot-shaped light beam is applied to a measurement target.
As described in Japanese Patent Publication No. 27, a measurement target is irradiated with a slit-shaped light beam. Diffuse reflection light from the measurement target of the irradiation light is received by a light receiving lens into one CCD,
An image is formed on a light-receiving element such as a PSD, and the formed image is subjected to image processing. , The coordinates of the three-dimensional position of the point irradiated with the light beam are obtained, and three-dimensional measurement is performed.

Further, as disclosed in, for example, Japanese Patent Application Laid-Open No. 5-120413, modulated light is projected onto a reflector mounted on a measuring object, and light is emitted between the measuring instrument and the object to be measured. The distance between the measuring instrument and the measurement target is measured based on the phase difference between the emitted light and the reflected light, and the three-dimensional position of the measurement target is determined by the firing direction angle and distance of the light obtained from the goniometer. Was required.

[0004]

In general, water, turbid water,
In a space where fine particles such as fog and smoke are suspended, light is scattered and absorbed, and the light intensity exponentially decreases in the process of propagating through the space. It is. The above-mentioned prior art is a method in which light is reflected by a measurement target or a reflection plate and reciprocated between a measurement device and a measurement target. In such a conventional technique, the intensity of light is reduced at the time of reflection, and is absorbed and scattered in the process of reciprocating in water, especially in turbid water, fog, smoke, and the like. For this reason, the intensity of light is remarkably reduced, and there has been a problem that reflected light cannot be detected by the light receiving device, or cannot be detected with high accuracy, and measurement over a long distance cannot be performed.

Further, in the distance measuring technique using the phase difference, it is necessary to install a reflecting plate on the object to be reflected in order to reflect light. There is a problem that it is necessary to accurately install the.

Also, in turbid water, fog, and smoke, the viewing distance that can be confirmed due to turbidity or the like becomes short. Therefore, when performing measurement remotely, the situation of the area surrounding the measurement target is determined by the position where the measuring instrument is installed. Could not be clearly observed with an imaging device such as a camera or with the naked eye. For this reason, there was a problem that it was not possible to easily align the irradiation light with the reflection plate and the measurement point.

The present invention has been made in order to solve the object of the prior art, and it has been proposed to use a light beam even in a place where fine particles float, such as in water, turbid water, fog, and smoke. It is an object of the present invention to provide a position measurement device capable of measuring a position from a distance and measuring a shape from a long distance using the position measurement technique.

[0008]

In order to achieve the above object, a position measuring apparatus according to the present invention comprises a position measuring apparatus for remotely measuring the position of an object to be measured. At least one first light beam generating means for emitting, at least one second light beam generating means for emitting a slit-like light beam for generating an emission line, and at least one imaging means for imaging the irradiation point and the emission line And controlling the first and second light beam generating means so as to generate the irradiation point and the bright line in the vicinity of the measurement target or the measurement target, and to detect the generated irradiation point and the bright line. Positioning means for controlling the imaging means, image processing means for recording the position and shape information of the irradiation point, bright line from the detected image, and the irradiation point based on the recording information. Superimposing means for superimposing bright lines on a measuring point, recording data of each emission position and each emission angle of a spot-like or slit-like light beam at the overlapping point, and calculating measurement point position data from the data. It is characterized by comprising position calculation means and coordinate conversion means for converting the position data into a reference coordinate system.

Another configuration of the position measuring device according to the present invention is as follows.
In the position measuring device as described above, the overlapping means overlaps the irradiation point and the bright line at a plurality of points on a measurement target based on the recording information, and forms a spot-like or slit-like light beam at the plurality of overlapping points. A plurality of data of each firing position and each firing angle are recorded, the position calculation means calculates a plurality of position data from the plurality of data, and the coordinate conversion means converts the plurality of position data into a reference coordinate system. And determining means for determining the shape of the measurement target from the plurality of conversion data.

According to still another aspect of the position measuring device of the present invention, in any of the position measuring devices described above, a manual operating means is provided to position the image pickup means with the spot light beam and the slit light beam. Generating the irradiation point and the luminescent line in the vicinity of the measurement target or the measurement target so that the imaging point and the emission line are detected by the imaging unit, and the irradiation point and the emission line based on the information obtained from the imaging unit by the overlapping unit. At least one or more points on the measurement object are overlapped, and at least one data of each emission position and each emission angle of the spot light beam and the slit light beam to the one or more overlap points is obtained. Wherein the data is input to the position calculating means. In order to achieve the above object, still another configuration of the position measuring device according to the present invention is the position measuring device according to the above, wherein the positioning control unit includes the first and second light beam generating units and The imaging means is supported by a support mechanism having multiple degrees of freedom provided on either the measurement object itself or a structural member located at a predetermined position from the measurement object, and the position of the imaging means, its posture, and the direction of each light beam And / or arbitrarily determine the launch point. In order to achieve the above object, still another configuration of the position measurement device according to the present invention is the position measurement device according to the above description, wherein the positioning control unit is configured to determine a position of the measurement target or a region surrounding the measurement target. And a database relating to the shape thereof is built in, and control is performed according to the database. Further, in order to achieve the above object, in still another configuration of the position measurement device according to the present invention, the imaging unit includes: an entire imaging unit that captures an image of a measurement target or the entire periphery of the measurement target; A local imaging means for imaging an arbitrary part of the range, wherein both of the imaging means are provided with a filter that transmits only near the emission wavelength of each light beam and a submersible propulsion mechanism. .

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A configuration of an embodiment of a position measuring device according to the present invention will be described with reference to FIGS. [Embodiment 1] FIG. 1 is a schematic explanatory view of a position measuring apparatus according to an embodiment of the present invention, FIG. 2 is a schematic explanatory view of a light projecting device in the position measuring apparatus of FIG. FIG. 2 is a schematic explanatory view of a local camera in the position measuring device of FIG. 1. As shown in FIG. 1, the position measurement device includes a light projecting device 1 and an imaging device 2, and measures the position coordinates of a measurement point 4 on a measurement target 3. The light emitting device 1 includes X ₀ , Y ₀ , Z
_The moving mechanism 5 is attached to the distal end of a moving mechanism 5 having a degree of freedom in the translational direction of the ₀ axis and its rotation direction.
Is moved and positioned by the moving mechanism operating device 13 as shown by the arrow in the figure.

A light beam scanning mechanism 7 is mounted at one end of the light projecting device 1, and a spot-shaped light beam 9 is projected from the light beam scanning mechanism 7. Then, the light beam 9 forms a spot-shaped irradiation point 11 on the measurement target 3 and its periphery. A light beam scanning mechanism 8 is mounted on the other end of the light projecting device 1, and a slit-shaped light beam 10 is projected from the light beam scanning mechanism 8. The light beam 10 forms a slit-shaped bright line 12 around the measurement target 3 and its periphery.

The light beam 9 and the light beam 10 are projected by the light beam scanning control device 22 as shown by arrows in FIG. The light emitting reference position and angle of the light beam 9 and the light beam 10 are determined by changing the position and angle of the light emitting device 1 by the moving mechanism 5.

The light beam scanning mechanism 7 and the light beam scanning mechanism of the light projecting device 1 will be described with reference to FIG. As shown in FIG. 2, the light beam scanning mechanism 7 includes a galvanometer 101.
A mirror 102 rotated by a mirror 104, a mirror 104 rotated by a galvanometer 103,
And a light source 117 for projecting a light beam on the mirror 104.

The light beam projected from the light source 117 to the mirror 104 is reflected by the mirror 104 and the mirror 1.
02, the light projection direction is changed twice to become the light beam 9, and the irradiation point 11 is formed on the surface to be measured. The irradiation point 11 of the light beam 9 is
Scanning is performed in two directions, that is, in directions 113 and 114 indicated by arrows in FIG.

The light beam scanning mechanism 8 includes a cylindrical lens 110, a mirror 106 rotated by a galvanometer 105, and a light source 118 for projecting light on the cylindrical lens 110. The light projected from the light source 118 is converted into a slit-like light beam 10 by a cylindrical lens 112, and the light projection direction is changed only once by the mirror 106. The bright line 12 formed by irradiating the light beam 10 is scanned in a direction 115 that is not parallel to the bright line 12 and a direction that is not a direction in which the bright line extends.

As shown in FIG. 1, the imaging device 2 is attached to the distal end of an arm 6 having a movement function for translating the imaging device 2 and a multi-joint freedom of rotation. As shown in FIG. 1, the position and the posture of the arm 6 are controlled by an arm operation device 14, so that the imaging device 2 is positioned so as to be set at an arbitrary position and posture with respect to the measurement target 3.

The imaging device 2 is composed of a wide-area camera 15 and a local camera 16, and the wide-area camera 15 is composed of a television camera having a wide-angle zoom function lens. The situation of the entire object 3 and its surrounding area can be captured. Further, the wide area camera 15 displays the obtained image on a wide area monitor 17.
And the measurement person 19 can monitor the measurement target 3 and the surrounding area.

The local camera 16 is constituted by a CCD camera having a zoom function lens.
Fine adjustment of the imaging direction can be performed. The local camera 16 captures an image of a part of the imaging range of the wide area camera 15, and the irradiation point 11 of the light beam 9 radiated to the measurement target 3.
Then, the reflected light of the bright line 12 of the light beam 10 is detected in the vicinity of the measurement target 3.

The local monitor 18 is connected to the local camera 1.
6 and the image processed by the image processing device 20 are displayed, and the measurer 19
, And the positional relationship between the irradiation point 11 and the bright line 12 can be confirmed.

Next, referring to FIG.
The optical system will be described. As shown, the filter 131
And a light receiving lens 132 having an enlargement zoom function, and CC
It comprises a light receiving element 133 such as D and a switching mechanism 134 for switching the filter 131. As shown, the filter 131 is opened and closed by a switching mechanism 134, and the light source 117 is
In addition, only light near the wavelength of light generated from the light source 118 is transmitted, and other surrounding light is not transmitted. Therefore, noise such as disturbance light in the measurement target 3 and its surrounding area is removed.

When the local camera 16 monitors the measurement object 3 and the surrounding area, the local filter 16
Image without using. The irradiation point 11 and the emission line 12
Is detected, noise such as disturbance light is removed using the filter 131, and only the reflected light of the irradiation point 11 and the bright line 12 is imaged on the light receiving element 132. In this way, the reflected light of the irradiation point 11 and the bright line 12 can be accurately detected by image processing. here,
By using an element having high sensitivity to the wavelengths of the two light beams generated from the light sources 117 and 118 as the light receiving element 133, it is possible to more easily and accurately detect the irradiation point 11 and the bright line 12. it can.

As shown in FIG. 1, the coarse positioning device 23
The wide-area camera 15 and the local camera 16 of the imaging device 2 control the arm operation device 14 based on the structure position shape database 24 and the position information obtained from the input terminal 30 so that the measurement target 3 is imaged.

Further, the coarse positioning device 23 performs the irradiation point 11 and the bright line 1 based on the structure position / shape database 24 and the position information obtained from the input terminal 30.
The moving mechanism operating device 13 and the light beam scanning control device 22 are controlled so that 2 is generated near the measurement target 3.

The operation panel 29 sends the operation amount input by the measurer 19 to the arm operation device 14, the moving mechanism operation device 13 and the light beam scanning control device 22, respectively. The operation of the operation device 14, the movement mechanism operation device 13, and the light beam scanning control device 22 is performed.

When the spot-shaped light beam 9 is irradiated and the irradiation point 11 is generated, the image processing device 20 performs a binarization process on the luminance information obtained from the grayscale image of the local camera 16, The position of the center of gravity of an area having a higher luminance than the threshold value when the image is converted is obtained, the center of gravity is set as the representative position of the irradiation point 11, and the representative position of the irradiation point 11 is recorded as position information on the imaging surface.

In the state where the slit-shaped light beam 10 is irradiated and the bright line 12 is generated, the image processing device 20 sequentially performs the binarization processing based on the luminance information obtained from the grayscale image of the local camera 16. Perform thinning processing,
The representative position and shape of the bright line 12 are calculated, and the representative position and shape of the bright line 12 are recorded as position information on the imaging surface.

The superposition device 21 operates the light beam scanning control device 22 and the image processing device 20 to synchronize the light projection timing of the spot light beam 9 and the slit light beam 10 with the imaging timing of the imaging device 2. To do. Then, the overlapping device 21 operates the light beam scanning control device 22 based on the position information of the irradiation point 11 and the bright line 12 obtained from the image processing device 20 and the position information of the measurement point 4 obtained from the input device 31. Then, the irradiation point 11 is superimposed on the measurement point 4 and the bright line 12 is superimposed on the irradiation point 11. Then, the overlapping device 21 records the angle information of the light beam scanning mechanism 7 and the light beam scanning mechanism 8 obtained from the light beam scanning control device 22 when the irradiation point 11 and the bright line 12 overlap.

The position calculating device 26 is provided with the overlapping device 2
Based on the angle information of the light beam scanning mechanism 7 and the light beam scanning mechanism 8 recorded in 1, the position coordinates of the point where the irradiation point 11 and the emission line 12 overlap are measured at the measurement point 4 using the principle of the triangulation intersection method. As position coordinate data. here,
The position coordinates of the measurement point 4 are calculated as data of a light projecting device coordinate system in which the origin and the coordinate axes are defined based on the light projecting device 1. In the light projecting device coordinate system, for example, the emission position 191 of the light beam 9 in FIG.
Y axis, so as to be parallel to the reference line L connecting 1 and 192.
The Z axis is defined on a plane passing through the origin O and perpendicular to the X axis.

The coordinate conversion device 27 is provided with the position calculation device 2
The position coordinate data in the light projecting device coordinate system calculated in step 6 is converted into the position coordinate data in the reference coordinate system common to the measurement system in FIG. 1 (Xo, Yo, Zo). The converted position coordinate data at the measurement point 4 is displayed on the measurement result display monitor 28.

The reference coordinate system (Xo, Yo, Zo)
Is a method in which a certain point in the measurement system is defined as an origin O, and three-dimensional axes mutually orthogonal to the origin O are defined as Xo axis, Yo axis, and Zo axis. The provision of the reference coordinate system as described above facilitates data comparison and the like if there is a reference coordinate system when measurement is performed while changing the position and orientation of the light projecting device.
In the above description, the processing is performed based on the structure position / shape database. However, the processing may be performed based on the structure position coordinate system database.

FIGS. 4 to 6 show the operation in this embodiment.
This will be described with reference to FIG. 4 is a flowchart showing an operation procedure of the position measuring device of FIG. 1, FIG. 5 is an image diagram of a wide area camera in the position measuring device of FIG. 1, and FIG. 6 is an image diagram of a local camera in the position measuring device of FIG. It is. In FIG. 4, in step 201, the measurer 19 specifies a measurement target point on a three-dimensional image on the monitor of the input terminal 30 created based on the structure position / shape database 24.

In step 202, the coarse positioning device 23 performs a process based on the structure position / shape database 24 and the position information of the measurement target point designated by the input terminal 30.
The movement amount of the arm 6 is calculated from the position and the posture of the imaging device 2 appropriate for performing the measurement. Then, based on the calculation result, the arm 6 is operated to perform coarse positioning of the imaging device 2 so that the wide area camera 15 can capture an image of a region surrounding the measurement target 3. The coarse positioning device 23 calculates the position and orientation of the light projecting device 1 appropriate for performing the measurement, and the appropriate light projecting directions of the spot light beam 9 and the slit light beam 10. On the basis of the calculation result, the moving mechanism operating device 13 and the light beam scanning control device 22 are controlled so that the spot light beam 9 and the slit light beam 10 are roughly positioned.

In step 203, the measurer 19
By operating the arm 6 using the operation panel 29 to change the position and orientation of the imaging device 2 and finely adjusting the imaging direction of the wide-area camera 15, the measurement target 3 and its surroundings can be captured by the wide-area camera 15. To fit in. FIG. 5 shows a state where the measurement target 3 and its surroundings are stored in the imaging range 141 of the wide area camera 15.

Next, fine adjustment of the imaging direction of the local camera 16 is performed, and the image of the local camera 16 is taken out of the imaging range of the wide area camera 15 so that the measurement target point falls within the imaging range of the local camera 16. Specify a range. For example, the imaging range 142 of the local camera 16 is designated within the imaging range 141 of the wide area camera 15 shown in FIG. Next, a captured image of the local monitor 18 as shown in FIG. 6 is obtained. Once the imaging range 142 is determined,
The measurer 19 finely adjusts the positions of the spot-shaped light beam 9 and the slit-shaped light beam 10 using the operation panel 29,
The irradiation point 11 and the bright line 12 are set to fall within the imaging range 142 of the local camera 16.

In step 204, the measurer 19
As shown in FIG. 6, the position of the measurement point 4 is designated using the cursor 138 on the local monitor 16 using the input device 31. The position of the measurement point 4 is displayed on the local monitor 18. The overlapping device 21 records the position of the designated measurement point 4 as position information on the imaging surface.

In step 205, the overlapping device 2
1 causes the image processing apparatus 20 to perform the binarization process by irradiating only the spot light beam 9 and calculate the representative position of the irradiation point 11. In addition, the overlapping device 21
Scans the irradiation point 11 and sequentially calculates the distance between the irradiation point 11 and the measurement point 4 from the position information of the irradiation point 11 obtained from the image processing device 20 during scanning and the recorded position information of the measurement point 4. I do. Further, the overlapping device 21 scans the irradiation point 11 in one direction, stops the scanning at the point where the distance between the measurement point 4 and the irradiation point 11 is the shortest, and then scans the irradiation point 11 from another direction. Is scanned, and the scanning is stopped at the point where the distance between the measurement point 4 and the irradiation point 11 is the shortest.

As described above, the scanning of the irradiation point 11 in two directions is repeated as described above, and the irradiation point 11 is brought closer to the measurement point 4. The state in which the distance between the irradiation point 11 and the measurement point 4 is the smallest is determined as the state in which the irradiation point 11 and the measurement point 4 overlap with each other. Record as Then, the projection of the spot light beam 9 is stopped.

In step 206, the overlapping device 2
Reference numeral 1 denotes irradiation with only the slit-shaped light beam 10 and scanning with the bright line 12 near the measurement target 3. The light beam scanning mechanism 8 has one degree of freedom, and the bright line 12 has only one direction that is not parallel to the bright line 12, that is, the bright line 12.
Are scanned in a direction intersecting the direction of extension of the line. In the process of scanning the bright line 12, the image processing device 20 sequentially detects the shape and the representative position on the bright line 12, and records the information as the position information of the imaging surface. The overlapping device 21
In the process of scanning the bright line 12, the irradiation point 11 recorded in advance and the bright line 12 sequentially calculated during the scanning are used.
From the position information of the upper point, the irradiation point 11 and the bright line 12
Is calculated, and the state in which the distance between the irradiation point 11 and the point on the bright line 12 becomes the smallest is determined as the state in which the irradiation point 11 and the bright line 12 overlap, and the light beam scanning in the overlapping state is determined. The angle information of the mechanism 7 and the light beam scanning mechanism 8 is recorded.

In step 207, the position calculation device 2
In step 6, based on the measured angle information, the position coordinates of the point where the irradiation point 11 and the bright line 12 overlap are obtained based on the principle of the triangulation intersection method. The position coordinate calculation method of the triangulation intersection method will be described with reference to FIG. 7 and [Equation 1], [Equation 2], and [Equation 3]. FIG. 7 is an explanatory diagram of position coordinate calculation by the triangulation method in the position measuring device of FIG. 1, and [Equation 1], [Equation 2], and [Equation 3] are position coordinates (X, Y, Z) is a calculation formula in which a triangular function of the resection angle is displayed.

First, based on the measured angle information, the positional relationship of the spot light beam 9, the slit light beam 10, and the light projecting coordinate system whose origin is the emission position 191 of the spot light beam 9 is shown. Four parameters (horizontal angle H
A107, a zenith angle VA108, a horizontal angle HB109, and a base line distance L) between the emission position 191 of the spot light beam 9 and the emission position 192 of the slit light beam 10 are obtained.

Here, the horizontal angle HA107 is the firing position 1
Horizontal angle and zenith angle between the direction line between 91 and the point (X ', Y', Z ') perpendicular to the horizontal plane including the base line from the measurement point (X, Y, Z) and the base line VA 108 is an elevation angle between a direction line between the firing position 191 and the measurement point and a direction line between the firing position 191 and the point (X ′, Y ′, Z ′).
The horizontal angle HB109 is defined by the launch position 192 and the point (X ′,
Y ', Z') is the horizontal angle between the direction line between the base line and the direction line.

Next, the four parameters and the measurement point 1
The relationship of the position coordinates (X, Y, Z) of the light projecting device coordinate system 93 can be expressed by the following [Equation 1], [Equation 2], and [Equation 3].

(Equation 1)

(Equation 2)

(Equation 3)

As described above, the position coordinates (X, Y, Z) of the measurement point 193 are obtained in the light projecting device coordinate system. The position coordinate data obtained in the light projecting device coordinate system is obtained by the coordinate conversion device 27. Are converted into position coordinate data (Xo, Yo, Zo) in the reference coordinate system. The position coordinate data (Xo, Y) of the measurement point 4 in the converted reference coordinate system
o, Zo) are displayed on the measurement result display monitor 28.

As described above, in the present embodiment, in the position measurement based on the principle of the triangulation intersection method, since the light beam propagates only one way between the light projecting device 1 and the measuring object 3, the light projecting device and Compared to the conventional method in which the light beam is reciprocated between the light receiving device and the object to be measured, the measurement limit distance is longer and measurement is possible because it is less susceptible to light intensity attenuation due to light beam scattering and absorption. Range expands.

Further, since the measurement is performed with the imaging device 2 positioned near the measurement target 3, the conventional method in which the light beam diffuses and reflects on the surface of the measurement target and then propagates a long distance. In comparison, the propagation distance of the diffuse reflection light is short, and the irradiation point of the light beam and the intensity of the bright line do not decrease.
The irradiation point 11 and the bright line 12 can be easily detected. Further, in the present invention, since the imaging device 2 captures an image near the measurement target 3, noise, distortion, and the like of the captured image can be reduced, and the detection of the irradiation point 11 and the bright line 12 can be easily performed with high accuracy. It can be carried out.

Further, in the present invention, compared with the conventional method of arranging the imaging device 2 at a position far from the measurement target 3,
In the case where the imaging device 2 is arranged at a position close to the measurement target 3 and the irradiation point 11 and the bright line 12 of the light beam are enlarged and imaged, the positions of the irradiation point 11 and the bright line 12 are detected by image processing. The resolution can be increased, and the representative positions of the irradiation point 11 and the bright line 12 can be calculated with high accuracy.

Further, since the image pickup device 2 is used only as a means for superimposing two light beams, high accuracy is not required for mounting the image pickup device itself unlike the conventional measuring method. No calibration is required. Furthermore, the initial positioning of the imaging device 2 and the spot-shaped light beam 9 and the slit-shaped light beam 10 is performed using the coarse positioning device 23 based on the structure position / coordinate database 24, so that measurement can be performed quickly and easily. Can be.

Further, when detecting the irradiation point 11 and the bright line 12, the filter 131 is used to remove noise such as disturbance light.
2 can be detected accurately and accurately, and is particularly effective for detecting a bright line 12 having a low light intensity density obtained by transforming a light beam into a slit shape.

In this embodiment, the imaging device 2
Is positioned by the arm 6 and the arm operating device 14, but is mounted underwater by attaching a submersible propulsion mechanism such as a screw to the imaging device 2 and controlling the position, posture, and stationary of the imaging device by the propulsion mechanism operation device. Also, the position measurement can be performed by imaging the measurement target, detecting the irradiation point and the bright line. Also, by holding the imaging device 2 with a thread-like material such as a wire, and manually operating the wire from above,
Position measurement can be performed by controlling the position and orientation of the imaging device. By doing so, the position measuring device can be simplified.

In this embodiment, two light sources 117
And the light source 118 is used, but the light projected from one light source is split into two light beams by a beam splitter or the like, and the light is transmitted to the light beam scanning mechanism 7 and the light beam scanning mechanism 8 so as to send the light beams. The system can be configured.

Further, in the present embodiment, the light source 117 and the light source 118 are configured to be mounted on the light projecting device 1. The optical system may be configured such that the plurality of light sources and the light projecting device 1 are connected by a transmission system such as an optical fiber and the light beam emitted from the light source is transmitted to the light projecting device 1.
Thus, by installing the light source in another place, the light emitting device 1 can be reduced in size, and remote measurement can be further facilitated.

[Embodiment 2] Another embodiment of the present invention will be described with reference to FIG. FIG. 8 is a schematic explanatory view of a position measuring device according to another embodiment of the present invention. 8, the same reference numerals as those in FIG. 1 denote the same products having the same functions and the same configurations. In the present embodiment, FIG.
[Embodiment 1] performs the shape measurement of the measurement target 3 in contrast to the measurement of the position of the measurement target 3 performed. Therefore, the method for scanning and detecting the irradiation point 11 and the bright line 12 in [Embodiment 1] of FIG. 1 is different from those methods in this embodiment.

The superposition device 41 operates the light beam scanning control device 22 and the image processing device 20 to synchronize the projection timing of the spot light beam 9 and the slit light beam 10 with the imaging timing of the imaging device 2. Let it. Then, the irradiation point 11 obtained from the image processing device 20
The light beam scanning control device 22 is operated based on the position information of the bright line 12 to cause the irradiation point 11 to overlap the bright line 12. Further, the light beam scanning mechanism 7 and the light beam scanning mechanism 8 obtained by the light beam scanning control device 22 when the irradiation point 11 and the bright line 12 overlap.
Record the angle information of

The position calculating device 42 uses the angle information recorded in the overlaying device 41 by using the principle of the triangulation intersection method to calculate a plurality of points where the irradiation point 11 and the bright line 12 are overlapped. Find the position coordinates. The coordinate conversion device 43
The position coordinate data in the plurality of points and the plurality of light projecting device coordinate systems calculated by the position calculation device 42 are integrated and converted into position coordinate data in a reference coordinate system common to the measurement system.

The shape judging device 44 associates the position coordinate data group with the three-dimensional structure and the three-dimensional curved surface using a large number of three-dimensional position coordinate data in the reference coordinate system, and measures the measured three-dimensional structure. The three-dimensional shape to which the position coordinate data belongs is determined. The determined three-dimensional shape is displayed on the measurement result display monitor 45.

The operation of this embodiment will be described with reference to the flowchart shown in FIG. FIG. 9 is a flowchart showing the operation procedure of the position measuring device of FIG. In step 301, the measurer 19 specifies a measurement target area on a three-dimensional image on the monitor of the input terminal 30 created based on the structure position / shape database 24.

In step 302, the coarse positioning device 23 performs an operation such that the wide area camera 15 captures an image of the situation near the measurement target 3 based on the information on the specified measurement target area.
By operating the arm 6, the rough positioning of the imaging device 2 is performed. Further, the coarse positioning device 23 causes the light beam scanning control device 22 to project the spot light beam 9 and the slit light beam 10. Then, based on the information on the designated measurement target area, the irradiation point 11 and the bright line 12 are determined.
The light beam scanning control device 22 is operated so that the spot-shaped light beam 9 and the slit-shaped light beam 10 are roughly positioned so that is generated near the measurement target 3.

In step 303, the measurer 19
From the image information of the measurement target 3 and its surroundings obtained from the wide area monitor 17, the arm 6 is operated using the operation panel 29 to finely adjust the position of the imaging device 2 and its posture,
The measurement object 2 and the vicinity thereof are set within the imaging range of the wide area camera 15. Then, the imaging direction of the local camera 16 is finely adjusted, and the imaging range of the local camera 16 is designated from the imaging range of the wide area camera 15 so that the measurement target point falls within the imaging range of the local camera 16.

The designation of the above-mentioned imaging range is shown in FIG. 10 and FIG.
This will be described with reference to FIG. FIG. 10 is an imaging diagram of a wide area camera in the position measurement device of FIG. 8, and FIG. 11 is an imaging diagram of a local camera in the position measurement device of FIG. First, as described above, as shown in FIG. 10, in step 303, the local camera 1 is moved with respect to the imaging range 145 of the wide area camera 15.
No. 6 imaging range 146 is designated. In step 304, the bright line 12 and the irradiation point 11 are overlapped while performing the fine scanning of the emission line 12 and the scanning of the irradiation point 11, and the position coordinate data on the imaging surface of the designated local monitor 16 is obtained. Is performed.

The operator 19 finely adjusts the positions of the spot light beam 9 and the slit light beam 10 by using the operation panel 29 so that the irradiation point 11 and the bright line 12
As shown in FIG. 11, the distance is set within the imaging range 146 of the local camera. Here, the bright line 12 and the irradiation point 1
1 are superimposed, and position coordinate data is obtained.

Next, the superposition method will be described.
A case where the position coordinates are measured over the entire surface of the measurement target 3 as the superposition method (a), and a case where only the position coordinates of a feature point such as an edge of the measurement target 3 are measured as the superposition method (b). There are two ways. First, the superposition method (a) will be described with reference to FIG. FIG. 12 is an explanatory diagram of an example of the overlapping procedure of the position measuring device in FIG. Each of FIGS. 12A to 12F shows a process of superimposing an image 146 captured by the local camera 16 shown in FIG.

In FIG. 12A, first, the overlapping device 41 causes the irradiation of only the slit-shaped light beam 10 and scans the slit-shaped light beam 10 to emit the bright line 1.
61 is set at a predetermined position. The image processing device 20 causes the shape and the representative position of the bright line 161 to be detected. The overlapping device 41 records the shape information and the representative position of the bright line 161 obtained from the image processing device 40 as positional information on the imaging surface.

In FIG. 12B, the irradiation of the slit light beam 10 is stopped, and the irradiation of the spot light beam 9 is performed. One scanning angle of the light beam scanning mechanism 7 is fixed, and the other scanning angle is largely moved, so that the irradiation point 11 is largely scanned in the direction 151 from one end of the imaging surface to the other. The irradiation point 11 moves on a locus 171. The overlapping device 41 is used by the image processing device 4 during the scanning process.
From the representative position information of the irradiation point 11 on the imaging surface sequentially detected from 0, the irradiation point 11 and the bright line 16 recorded in advance are used.
1 and the distance from the representative position is obtained.

In the process in which the irradiation point 11 moves on the trajectory 171, the state in which the distance between the irradiation point 11 and the point on the bright line 161 becomes the shortest is the state in which the irradiation point 11 and the bright line 161 overlap. Judge. The position of the overlap point 181 on the imaging surface and the angle information of the light beam scanning mechanism 7 and the light beam scanning mechanism 8 are recorded. Based on the angle information, the position calculation device 42 uses the principle of the resection method of triangulation described with reference to FIG.
Calculation of the three-dimensional position coordinates of the overlapping point 181 is performed.

In FIG. 12C, the irradiation point 11 is slightly moved in the direction 152 by slightly moving the light beam scanning mechanism 7 at a fixed scanning angle. Then, the other scanning angle of the light beam scanning mechanism 7 is largely moved, and the irradiation point 11 is largely scanned in the direction 151 from one end of the imaging surface to the other. The irradiation point 11 is a locus 1 on the imaging surface.
It moves on a locus 172 at a position slightly deviated from 71. In the scanning process, the overlapping device 41
The distance between the irradiation point 11 and the bright line 161 is calculated in the same manner as in FIG. The position calculating device 42 calculates the three-dimensional position coordinates of the overlapping point 182.

By repeating the fine scanning and the large scanning of the irradiation point 11 as described above over the entire imaging surface as shown in FIG. 12 (d), the irradiation points at a plurality of points on the bright line 161 are obtained. 11, and the three-dimensional position coordinates of the emphasis indicated by a circle on the bright line 161 in the division (d) of FIG. 12 can be obtained. After the position calculation for all the areas on the fixed bright line is completed, the projection of the spot-shaped light beam 9 is stopped as shown in FIG.
The slit-shaped light beam 10 is projected again, the scanning angle of the light beam scanning mechanism 8 is minutely moved, and the bright line 161 is minutely scanned from the position of the bright line 161 in the direction 153 to obtain the bright line 1.
62.

As shown in FIGS. 12 (a) to 12 (d), the fine scanning and the large scanning of the irradiation point 11 are repeated over the entire imaging surface of the bright line 162 as shown in FIGS. The three-dimensional position coordinates of the point shown by the triangle on the bright line 162 can be obtained. By repeating the fine scanning of the bright line and the scanning of the irradiation point over the entire imaging surface as described above, the three-dimensional position coordinates of points on the plurality of bright lines on the surface of the measurement target 3 as shown in FIG. Can be calculated.

Next, the superposition method (b) will be described with reference to FIG. FIG. 13 is an explanatory diagram of another example of another overlaying procedure in the position measuring device of FIG. FIG.
Each of FIGS. 3A to 3D shows a captured image of each process by the local camera in FIG. In FIG. 13A, only the slit light beam 10 is irradiated. The overlapping device 41 scans the slit light beam 10 to determine the bright line 261 at a predetermined position. The image processing device 20 causes the shape and the representative position of the bright line 261 to be detected. Next, detection of points 271 and 272 which are characteristic points such as edges of the bright line 261 in a portion surrounded by the small circles 267 and 268 is performed. The overlapping device 41 is a feature point obtained from the image processing device 20, that is, a point 271.
And the position information of the point 272 is recorded.

In FIG. 13B, the irradiation of the slit light beam 10 is stopped. Next, irradiation of the spot-shaped light beam 9 is performed. The image processing device 20 causes the representative position of the irradiation point 11 to be sequentially detected. The overlapping device 41 operates the light beam scanning mechanism 7 so that the distance between the irradiation point 11 and the point 271 is reduced, and sets the irradiation point 11 to the point 27.
Move so as to approach position 1. Then, the irradiation point 11 and the bright line 261 are overlapped. The overlapping device 41 records the angle information of the light beam scanning mechanism 7 and the light beam scanning mechanism 8 in the overlapping state. The position calculation device 42 calculates the three-dimensional position coordinates of the point 271 from the recorded angle information. Similarly, for the point 272, the irradiation point 11 is moved and overlapped, and the three-dimensional position coordinates are calculated.

Next, in FIG. 13C, the irradiation of the spot light beam 9 is stopped, and the irradiation of the slit light beam 10 is performed again. The scanning angle of the light beam scanning mechanism 8 is minutely moved, and the bright line 261 is minutely scanned in the direction 253 from the position of the bright line 261 to be positioned at the bright line 262. As for the bright line 262, the bright line 26 is used as shown in FIGS. 13 (a) and 13 (b).
Then, a feature point such as an edge of No. 2 is detected, and the irradiation point 11 and the bright line 262 are overlapped at the feature point.

By performing the overlap, the three-dimensional position coordinates of points 281 and 282, which are characteristic points, can be obtained. By performing the above-described fine scanning of the bright line and the operation of overlapping the irradiation point with the point on the bright line on the entire imaging surface, the surface of the measurement target 3 indicated by a circle in the diagram (d) of FIG. It is possible to calculate the three-dimensional position coordinates of a plurality of feature points such as edges.

As described above, the designation of the imaging range in steps 303 to 304 shown in the flowchart of FIG. 9 and the calculation of the three-dimensional position coordinates by overlapping the bright line and the irradiation point in the designated imaging range are repeated. The position coordinates in one designated imaging range can be calculated. By changing the position and angle of the light projecting device 1 with respect to the measurement target 3 and changing the light projecting reference position and the reference angle of the spot light beam 9 and the slit light beam 10, the irradiation point 11 and the bright line on the entire surface of the measurement area. 12 can be generated.

Further, by changing the positions and angles of the image pickup device 2 and the wide area camera 15 and the local camera 16 with respect to the measurement object 3 and changing the image pickup range, it is possible to detect the point where the irradiation point 11 and the bright line 12 overlap. By doing so, it is possible to calculate the three-dimensional position coordinates of the entire surface of the measurement area. For example, in FIG.
By calculating the three-dimensional position coordinates in the imaging range by changing the imaging range 146 to 149 of FIG. 6, position coordinate data of the surface of the measurement target 3 captured by the wide area camera 15 can be obtained. In FIG. 10, the position coordinates on the back side of the measurement target 3 that is not imaged by the wide area camera 15 cannot be calculated. It is the imaging device 2
This is because the irradiation point 11 and the bright line 12 cannot be detected because the irradiation point 11 and the bright line 12 are not generated on the surface of the measurement target 3 that is the imaging target.

However, the light projecting device 1 is largely moved by the moving mechanism 5 to change the light projecting reference position and the reference angle of the spot light beam 9 and the slit light beam 10, and the spot light beam 9 is turned from the opposite side. And projecting the slit-shaped light beam 10 onto the measurement target 3,
The irradiation point 11 and the bright line 12 can be generated. Then, the arm 6 is moved, the positions and angles of the imaging device 2, the wide area camera 15, the local camera 16, and the like are changed, the imaging range is changed, and the irradiation point 11 and the bright line 12 are detected. Can be calculated.

Step 3 in the flowchart of FIG.
At 05, the position coordinate data obtained in at least one or more light projecting device coordinate systems is
Thus, the data is integrated and converted into position coordinate data of a reference coordinate system common to the measurement systems. In step 306, the shape judging device 44 associates the position coordinate data group with the three-dimensional structure and the three-dimensional curved surface using a large number of three-dimensional position coordinate data in the reference coordinate system, and measures the measured three-dimensional structure. The three-dimensional shape to which the position coordinate data belongs is determined. In step 307, the determined three-dimensional shape is displayed on the measurement result display monitor 45, and the measurer 19 can grasp the three-dimensional shape of the measurement target 3.

In the above-described embodiment, in the shape measurement based on the principle of triangulation, the light beam propagates only one way between the light projecting device 1 and the object 3 to be measured. Compared to conventional methods such as the conventional light-section method, in which a light beam reciprocates between measurement objects, it is less susceptible to light intensity attenuation due to light beam scattering and absorption.
The measurement limit distance becomes longer, and the range in which shape measurement can be performed becomes larger.

In addition, since the measurement is performed with the imaging device 2 positioned near the measurement target 3, the conventional method of diffusing and reflecting the light beam on the surface of the measurement target and then propagating the light beam over a long distance is used. In comparison, the propagation distance of diffuse reflected light is shorter,
Because the irradiation point of the light beam and the intensity of the bright line do not drop much,
The irradiation point 11 and the bright line 12 can be easily detected. Further, in the present invention, since the imaging device 2 captures an image in the vicinity of the measurement target 3, noise, distortion, and the like of the captured image can be reduced, and the irradiation point 11 and the bright line 12 can be easily detected with high accuracy. .

Further, since the image pickup device 2 is used only as a means for superimposing two light beams, high accuracy is not required for mounting the image pickup device itself unlike the conventional measurement method, and the position of the image pickup device is not required. No calibration is required. further,
Since a plurality of points are measured using a spot-shaped or slit-shaped light beam, many points on the surface of the measurement target 3 can be measured in a relatively short time, and a plurality of points can be measured using only spot-shaped light. , The surface shape of the measurement target 3 can be measured more efficiently.

In the present embodiment, the measurement is performed using one imaging device 2 having the wide area camera 15 and the local camera 16, but the measurement is efficiently performed by using two or more imaging devices. be able to. For example, when the irradiation point 11 and the bright line 12 are generated, but cannot be imaged by one imaging device, the imaging device is moved by performing imaging from another imaging direction using another imaging device. Measurement can be performed without the need, and measurement efficiency can be improved.

[Embodiment 3] Another embodiment of the position measuring apparatus according to the present invention will be described with reference to FIG. FIG. 14 is a schematic explanatory view of a position measuring device according to still another embodiment of the present invention. In the drawing, members having the same reference numerals as those in FIG. 1 are equivalent products having the same function and the same configuration.
Further, [Embodiment 1] and [Embodiment 1]
In the embodiment described in 2], the spot-shaped light beam 9 and the slit-shaped light beam 1
Changing the light emitting reference position and the reference angle of 0,
The spot light beam 9 and the slit light beam 10 were projected on the entire surface of the measurement target 3.
The measurement system can be configured by using a plurality of devices.

[Embodiment 3] is a position measuring device for measuring the shape of a measurement target 3 using two light projecting devices. The light projecting device 1 projects a spot-shaped light beam 9 and a slit-shaped light beam 10, and the light projecting device 50 projects a spot-shaped light beam 55 and a slit-shaped light beam 56. In the plurality of light projecting device coordinate systems, the position of a point on the surface of the measurement target 3 is measured. Floodlight device 5
0 is attached to the tip of the moving mechanism 51, the moving mechanism 51 is operated by the moving mechanism operating device 52,
Positioned. A spot-shaped light beam 55 and a slit-shaped light beam 56 emitted from the light projecting device 50
Is controlled and scanned by the light beam scanning control device 53.

The operation panel 54 sends the operation amount input by the measurer 19 to the moving mechanism operation device 52 and the light beam scanning control device 53, and the control of the moving device operation device 52 and the light beam scanning control device 53 is performed. . In the present embodiment, measurement of points on the surface of the measurement target 3 is basically performed according to the flowchart shown in FIG. When measurement is performed with only one light projecting device 1, there is a portion where the spot-shaped light beam 9 and the slit-shaped light beam 10 do not generate the irradiation point 11 and the bright line 12 on the surface of the measurement target 3. However, there has been a problem that measurement cannot be performed in all the parts. In addition, even if the irradiation point 11 and the bright line 12 are generated on the surface of the measurement target 3, the image cannot be captured by the imaging device 2, so that there is a problem that the measurement cannot be performed on all portions of the surface of the measurement target 3. .

In the present embodiment, these two problems are solved by using the two light projecting devices, the light projecting device 1 and the light projecting device 50, so that the irradiation point 11 and the bright line 12 are not generated by the light projecting device 1 alone. The irradiation of the part can be performed by the light projecting device 50. In addition, as in the case where measurement is performed by only one light emitting device, the position of the light emitting device and its attitude are not largely moved, and the imaging range of the imaging device 2 is changed, so that the entire surface of the measurement target 3 can be measured. Position measurement can be performed efficiently over a long period of time.

In this embodiment, one imaging device 2 is used, and the imaging range is changed by moving the imaging device 2. However, without using a plurality of imaging devices,
And without significant movement of the imaging device and no change in the imaging range,
Position measurement of a point on the surface of the measurement target 3 can be performed easily and at high speed.

[Fourth Embodiment] The configuration of another embodiment of the position measuring device according to the present invention will be described with reference to FIG.
FIG. 15 is a schematic explanatory view of a position measuring device according to still another embodiment of the present invention. In FIG. 15, FIG.
The members denoted by the same reference numerals are equivalent products having the same function and the same configuration. In the present embodiment, the measurement point 4 on the measurement target 3
This is a case where the measurer 19 manually measures the position coordinates of. The image captured by the local camera 16 is directly displayed on the local monitor 71. The measurer 19 grasps the surrounding situation of the measurement target 3 from the display on the local monitor 71, and specifies the position of the measurement point 4 using the input device 73. The specified location information is
The image is processed by the image processing device 72, and the position of the measurement point 4 is displayed on the local monitor 71.

The operation of the present embodiment will be described with reference to the flowchart shown in FIG. FIG. 16 is a flowchart showing an operation procedure of the position measuring device of FIG. In step 401, the measurer 19 uses the operation panel 29 to position the imaging device 2 and adjust the imaging range of the wide-area camera 15 to specify the imaging range. Measurement point 4
Is specified in the field of view of the local camera 16.

In step 402, the measurer 19
The light beam scanning control device 22 is operated using the operation panel 29 based on the captured image obtained from the wide area monitor 17. Then, the spot-shaped light beam 9 and the slit-shaped light beam 10 are largely scanned. Next, at the point where the irradiation point 11 and the bright line 12 enter the field of view of the wide area monitor 17, the scanning is stopped, and the spot light beam 9 and the slit light beam 10 are roughly positioned.

In step 403, the measurer 19
Using the input device 73, the same operation as described with reference to FIG. 6 is performed to specify the position of the measurement point 4 on the local monitor 71 using the cursor 138. The designated position information is processed by the image processing device 72, and the position of the measurement point 4 is displayed on the local monitor 71 with a cursor.

In step 404, the measurer 19 refers to the images captured by the wide area monitor 17 and the local monitor 18, moves the irradiation point 11 to the position of the measurement point 4, and overlaps the irradiation point 11 with the measurement point 4. Match. In step 405, the measurer 19 sets the wide area monitor 17 and the local
The bright line 12 is moved to the position of the irradiation point 11 with reference to the captured image of FIG. As a result, at the measurement point 4, the irradiation point 11 and the bright line 12 overlap. Further, the position calculating device 26 can obtain the position and angle information of the light beam scanning mechanism 7 and the light beam scanning mechanism 8 in a state where the irradiation point 11 and the bright line 12 overlap. The obtained position and angle information is input to a position calculation device, and the calculation of the point where the irradiation point 11 and the bright line 12 overlap, that is, the calculation of the position coordinate of the measurement point 4 is described with reference to FIG. 7 and [Equation 1]. It is based on the principle of the triangulation resection method.

As described above, the obtained position coordinate data of the measurement point 4 is in the light projecting device coordinate system, and is thus converted by the coordinate conversion device 27 into position coordinate data in the reference coordinate system. Then, the converted position coordinate data of the measurement point 4 in the reference coordinate system is displayed on the measurement result display monitor 28.

In the above embodiment, since the measurer 19 manually operates the measuring device, the entire system of the position measuring device can be simplified. In addition, since a structure position / shape database that records the structure data of the measurement target 3 and its surroundings is not premised, it is possible to measure even before the situation near the measurement target 3 is unknown or there is no database. .

[0093]

As described in detail above, according to the structure of the present invention, when performing operations such as assembly, repair, inspection, etc. in dirty water, fog, smoke, etc. By measuring the position and shape of the existing structure, the situation of the working environment can be accurately grasped, and the work of assembling, repairing and inspecting the structure can be performed accurately. In addition, by measuring the position and shape of the structure existing in the working environment and the position and posture of the working device with respect to the structure in turbid water, fog, and smoke, the working environment condition and the working device are measured. Position of the device,
Remote positioning and positioning during work can be performed accurately and efficiently, and as a result, work time can be shortened. Furthermore, according to the configuration of the present invention, there is a situation in which the actual size of the structure under the environment such as turbid water, fog, smoke, etc., and the drawing size are different, or there is no drawing size data of the structure. In the situation, the position and shape data of the structure can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view of a position measuring device according to an embodiment of the present invention.

FIG. 2 is a schematic configuration diagram of a light projecting device in the position measuring device of FIG.

FIG. 3 is a schematic configuration diagram of a local camera in the position measuring device of FIG. 1;

FIG. 4 is a flowchart showing an operation procedure of the position measuring device of FIG.

FIG. 5 is an imaging diagram of a wide area camera in the position measuring device of FIG. 1;

6 is an imaging diagram of a local camera in the position measuring device of FIG.

FIG. 7 is an explanatory diagram of position coordinate calculation by the triangulation method in the position measuring device of FIG. 1;

FIG. 8 is a schematic explanatory view of a position measuring device according to another embodiment of the present invention.

FIG. 9 is a flowchart showing an operation procedure of the position measuring device of FIG.

10 is an imaging diagram of a wide area camera in the position measuring device of FIG.

11 is an imaging diagram of a local camera in the position measuring device of FIG.

FIG. 12 is an explanatory diagram of an example of an overlapping procedure in the position measuring device of FIG. 8;

FIG. 13 is an explanatory diagram of another example of the overlapping procedure in the position measuring device of FIG. 8;

FIG. 14 is a schematic explanatory view of a position measuring device according to still another embodiment of the present invention.

FIG. 15 is a schematic explanatory view of a position measuring device according to still another embodiment of the present invention.

FIG. 16 is a flowchart showing an operation procedure of the position measuring device of FIG.

[Explanation of symbols]

1, 50: light projecting device, 2: imaging device, 3: measuring object, 4
… Measurement points, 5, 51… Movement mechanism, 6… Arm, 7, 8…
Light beam scanning mechanism, 9, 10, 55, 56 ... light beam,
11, 57 ... irradiation point, 12, 58 ... bright line, 13, 52 ...
Moving mechanism operating device, 14: arm operating device, 15: wide area camera, 16: local camera, 17: wide area monitor, 18,
71: Local monitor, 19: Measurer, 20, 72: Image processing device, 21, 41: Overlay device, 22, 53: Light beam scanning control device, 23: Coarse positioning device, 24: Structure position shape database, 26, 42 ... position calculation device,
27, 43: coordinate conversion device, 28, 45: measurement result display monitor, 29, 54: operation panel, 30: input terminal, 31,
73 input device, 44 shape determining device, 101, 10
3, 105 ... galvanometer, 102, 104, 106
... mirror, 107 ... horizontal angle HA, 108 ... zenith angle VA,
109: horizontal angle HB, 110: cylindrical lens,
117, 118 light source, 131 filter, 132 light receiving lens, 133 light receiving element, 134 switching mechanism,
138: Cursor, 161, 162: Bright line, 171, 1
72: locus, 181, 182 ... overlapping point, 191, 1
92: launch position, 193: measurement point

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shinya Omori 3-1-1, Sachimachi, Hitachi-shi, Ibaraki Pref. Hitachi, Ltd. Hitachi Plant (72) Inventor Nobuo Tada 3-1-1 Sachimachi, Hitachi-shi, Ibaraki No. 1 Inside Hitachi, Ltd. Hitachi Plant

Claims (6)

[Claims] 1. A position measuring device for remotely measuring the position of a measurement object, wherein at least one first light beam generating means for emitting a spot light beam for generating an irradiation point, and a slit light beam for generating a bright line At least one second light beam generating unit that emits light, at least one imaging unit that images the irradiation point and the bright line, and the measurement object or the irradiation point and the bright line are generated in the vicinity of the measurement object. Positioning means for controlling the first and second light beam generating means and controlling the imaging means so as to detect the generated irradiation point and the bright line; and positions of the irradiation point and the bright line from the detected image. And an image processing means for recording the shape information and the irradiation point and the bright line on the measurement point based on the recorded information, and a spot-shaped or slit-shaped light beam to the overlap point. A stacking means for recording data of each firing position and each firing angle of the system, a position calculating means for calculating measurement point position data from the data, and a coordinate conversion means for converting the position data into a reference coordinate system. A position measuring device characterized by the above-mentioned. 2. The position measuring device according to claim 1, wherein the superimposing unit superimposes the irradiation point and the bright line at a plurality of points on a measurement target based on the recording information, and A plurality of data of each launch position and each launch angle of the spot-like and slit-like light beams are recorded, the position calculating means calculates a plurality of position data from the plurality of data, and the coordinate converting means reads the plurality of positions. A position measuring device, comprising: converting data into a reference coordinate system; and determining means for determining a shape of a measurement target from the plurality of converted data. 3. The position measuring device according to claim 1, further comprising a manual operation unit, positioning the imaging unit and the spot-shaped light beam or the slit-shaped light beam, and setting the measurement target or the measurement target. Generated in the vicinity, the irradiation point and the emission line are detected by the imaging unit, and the irradiation point and the emission line are at least one or more on the measurement target based on information obtained from the imaging unit by the overlapping unit. And at least one data of each emission position and each emission angle of the spot light beam and the slit light beam to the one or more overlap points is obtained, and the one or more data are obtained. Is input to the position calculating means. 4. The position measuring device according to claim 1, wherein said positioning control means controls said first and second light beam generating means and said imaging means from said measuring object itself or said measuring object. It is supported by a support mechanism having multiple degrees of freedom provided on any of the structural members at predetermined positions, and arbitrarily determines the position and orientation of the imaging means and the direction and / or launch point of each light beam. Characteristic position measuring device. 5. The position measuring device according to claim 4, wherein the positioning control means has a built-in database relating to the position and shape of the measurement target or a region surrounding the measurement target, and performs control according to the database. A position measuring device characterized by the above-mentioned. 6. The position measuring device according to claim 4, wherein said imaging means captures an image of the whole of the measurement target or the periphery of the measurement target, and captures an arbitrary part of an imaging range of the whole imaging means. A position measuring device, comprising: a local imaging unit that performs a filtering operation; and both of the imaging units each include a filter that transmits only the vicinity of the emission wavelength of each of the light beams and an underwater propulsion mechanism.