JPH10109284A - Micromanipulator and its driving method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To compatibly secure precise fine motion and faster coarse motion. SOLUTION: This micromanipulator has an upper arm 1 an upper end part 2 of which is connected to a fixed end, a lower arm 20 a lower end part 23 of which is connected to an end effector and a joint 10 to connect the upper arm 1 and the lower arm 20 to each other free to vary their angles. A flexible actuator 22 free to bending-deform is equipped on the lower arm 20, and a disc brake 100 using a piezoelectric element 15 is equipped on the joint 10. It is possible to extensively and speedily carry out coarse motion by an accelerating motion process to give an angular momentum to the lower arm 20 by bending-deforming the flexible actuator 22 by fixing the joint 10 by the disc brake 100, an inertial motion process to tilt the lower arm 20 around the joint 10 at angular velocity by loosening the disc brake 100 and an angle maintaining process to fix the joint 10 by applying the disc brake 100.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to the technical field of a manipulator for performing some kind of operation on an object, such as pinching and moving the object, and in particular, a micromanipulator that performs a precision operation on the order of micrometers or nanometers. Belongs to the technical field.

[0002]

2. Description of the Related Art A motion in which an inertial force is dominant due to an abrupt operation of an actuator and a motion in which the operation of the actuator is slow and a friction force acting on a joint or the like is dominant are alternately repeated. A driving method for moving or moving in a predetermined direction is referred to as “impact driving” in this specification.

[0003] Japanese Patent Publication No. 6-43040 discloses, as a prior art, an articulated portion which is supported by a predetermined frictional moment, and changes the axial direction of an arm-shaped member by impact driving or imparts rotational motion about the axis. A device that can be used is disclosed. In this device, an arm-shaped member is supported by a joint at a predetermined frictional moment, and a mass body (weight) is joined to the arm-shaped member via a plurality of piezoelectric actuators. This device can perform an impact drive by alternately using an inertial force generated as a reaction force due to a sudden expansion and contraction of a piezoelectric actuator and a frictional force of a joint, thereby roughly moving the arm-shaped member.

[0004]

However, in this apparatus, since the piezoelectric actuator and the mass body are provided separately from the arm-shaped members, it is difficult to reduce the size and weight. In addition, even if the device can perform coarse adjustment operation,
It is assumed that the fine movement operation is difficult. Because the frictional resistance of the joint is usually higher in the coefficient of static friction than in the coefficient of kinetic friction, if the sliding portion of the joint once shifts from the stationary state to the sliding state, the momentum comes on and the desired minuteness is reduced. This is because it is difficult to stop by moving a distance. Also,
The vibration generated by the impact drive is also inconvenient for the fine movement operation requiring fine operation on the order of micrometers or nanometers. Therefore, in the above-described apparatus of the related art, it was not possible to achieve both coarse movement for quickly and largely moving the distal end of the manipulator and fine movement for performing extremely precise operation with little vibration of the distal end.

On the other hand, the present inventors have developed a bending / stretching actuator capable of expanding and contracting and bending by utilizing the deformation of a piezoelectric unimorph veneer. And a micromanipulator capable of fine movement. According to the micromanipulator of the present invention, there is an effect that a fine movement operation with extremely high resolution and a coarse movement operation capable of moving quickly with a large dynamic range can be compatible. The invention has been filed as a prior art in Japanese Patent Application No. Hei 7-121365, and has been described in Japanese Society of Mechanical Engineers Ordinary General Meeting Lecture No.
96-1- (IV), pp. 458-459.

[0006] In the micromanipulator of this prior art, there is a demand that the coarse manipulator be moved more quickly even though the speed of the coarse movement is somewhat high by the impact drive by the operation of the bending / extension actuator incorporated in the arm member. In connection with this request, there is also a request to move a long distance by one coarse movement. In response to these requirements, prior art micromanipulators
Since the frictional force at the joint is constant, coarse movement can be performed only within the range of the inertial force, and it is difficult to respond sufficiently.

Further, in order to perform a complicated manipulation, a manipulator having a plurality of joints is constructed,
It is necessary to control each joint independently. However, as long as the operation is performed by the impact drive of the prior art or the prior art, it is difficult to independently move only a desired joint, and other undesired joints also move, and it is difficult to perform an accurate operation. . Because of such a coupling phenomenon in coarse motion control, it is difficult to set a plurality of joints at a desired angle and quickly perform accurate coarse motion without a very advanced decoupling control technology. .

Accordingly, it is a first object of the present invention to provide a micromanipulator capable of performing a fine movement at a high speed and a coarse movement at a high speed, and a driving method thereof. A second object of the present invention is to provide a micromanipulator capable of independently controlling the angular position of each joint of a micromanipulator having a plurality of joints, and a driving method thereof.

[0009]

Means for Solving the Problems and Their Functions / Effects To solve the above problems, the inventor has invented the following means. [Device Invention] (First Means) A first means of the present invention is a micromanipulator according to claim 1.

Here, in addition to the piezoelectric actuator using the piezo effect, the actuator includes an actuator using a shape memory alloy, an optical distortion actuator, an actuator using Coulomb force of static electricity, an actuator using an electromagnet, and the like. Can be adopted. As the actuator, an actuator capable of not only bending deformation but also expansion and contraction deformation and torsional deformation may be used.

In this means, the upper arm or the lower arm is equipped with an actuator which can be bent and deformed, and the upper arm and the lower arm are connected by a joint whose frictional resistance is variable by a signal so that the angle can be changed. Therefore, first, the angular momentum of the lower arm is stored by bending deformation of the actuator with the joint fixed, and the joint is rotatable with the angular velocity attached to the lower arm. At a speed of about the joint. When the lower arm is tilted to the desired angular position or the speed of the lower arm is sufficiently reduced due to the resistance of gravity, the joint is again fixed to stop the tilt of the lower arm. In this operation, since the lower arm tilts at an angular velocity with little frictional resistance of the joint, the angular displacement in one operation is much larger than that in the impact drive. Therefore, by repeating the above operation, the lower arm can be roughly moved quickly to a desired angular position.

In the case where the desired displacement direction is the same as the direction of the moment due to gravity acting on the lower arm,
By simply reducing the frictional resistance of the joint, the lower arm naturally tilts to a desired position by gravity. Therefore, if the frictional resistance of the joint is increased at a desired angular position, a desired displacement can be given to the lower arm. In addition, reduce the frictional resistance of the joints,
Swing the lower arm like a pendulum to the other side, relying on gravity and inertia, and fix the joint in that state, tilt the lower arm to the opposite side close to the position symmetrical to the original lower arm position It can also be done.

Therefore, according to this means, there is an effect that the lower arm can be roughly moved quickly to a desired angle position. (Second Means) A second means of the present invention is a micromanipulator according to claim 2. Here, as the brake actuator, in addition to the piezoelectric actuator using the piezo effect, an actuator using a shape memory alloy, an optical strain actuator, an actuator using Coulomb force of static electricity, an actuator using an electromagnet, and the like can be adopted. .

In this means, the brake disc is fixed to one of the upper arm and the lower arm, and the other holds the brake disc and the brake actuator. therefore,
By adjusting the frictional force acting between the brake actuator and the brake disk by the action of the brake actuator, the frictional resistance of the joint can be increased or decreased. Further, the disc brake having such a configuration can exert a large braking force while having a simple configuration and a relatively small size.

Therefore, according to this means, in addition to the effect of the above-mentioned first means, there is an effect that a joint having a brake having a large braking force can be realized while the structure of the joint is simple and relatively small. (Third Means) A third means of the present invention is a micromanipulator according to the third aspect.

In this means, since the brake actuator is constituted by a piezoelectric element (piezoelectric actuator),
Compared with a brake actuator having another configuration, the size and weight can be reduced and the reliability can be improved. Also, since there is no leakage of the working fluid and no discharge of wear powder, the surroundings of the micromanipulator are not contaminated. Therefore, according to this means, in addition to the effects of the above-described second means, there is an effect that reduction in size and weight, improvement in reliability, and prevention of contamination can be achieved.

(Fourth Means) A fourth means of the present invention is a micromanipulator according to the fourth aspect. In this means,
Since the through holes or gaps are formed so as to communicate from the upper arm to the lower arm through the joint, it is possible to pass the wiring to the end effector connected to the lower arm by passing through the through holes and the gap. Therefore, since the wiring does not contact the outer surface of the micromanipulator, the wiring does not become entangled or hinder the movement of the micromanipulator.

Therefore, according to this means, in addition to the effect of the above-described first means, there is an effect that the reliability can be further improved by passing the wiring inside the micromanipulator. In addition, there is no inconvenience that the aesthetic appearance is impaired by the exposed wiring, and there is an effect that the aesthetic appearance is improved. (Fifth Means) A fifth means of the present invention is a micromanipulator according to the fifth aspect.

In this means, since each joint of the multi-joint type micromanipulator is provided with a brake, an appropriate control signal is sent to each brake to substantially eliminate frictional resistance in only any joint to make it moment free. Other joints can be fixed by high frictional resistance. Therefore, only the joint whose angle is desired to be changed by the bending deformation of the actuator can be changed in angle as the moment-free state, and the other joints can be maintained at the original angle without being affected.

Therefore, according to this means, it is possible to selectively change the angle of only an arbitrary joint while having a plurality of joints, and it is possible to easily control a small and light multi-joint type micromanipulator. There is an effect that can be. (Sixth Means) A sixth means of the present invention is a micromanipulator according to the sixth aspect.

In this means, a signal line and a power supply line common to the microchip and the brake of each joint are wired, so that no matter how many joints are increased, the two signal lines and the power supply line are used. With the wiring, the entire multi-joint type micromanipulator can be controlled. The ground wire can be changed to a conductor portion of the body of the micromanipulator, and is not essential. Here, if a configuration is adopted in which a modulated electric signal is also carried on the power supply line, noise countermeasures will be required, but even the entire micromanipulator can be controlled with only one power supply line that also serves as a signal line. Is also possible.

Therefore, according to this means, in addition to the effect of the above-mentioned fifth means, even if the number of joints increases, the minimum number of wirings (for example, two lines of signal lines and power supply lines) is sufficient, and a large number of No wiring is required. Therefore, no matter how many joints are provided, there is no need to enlarge a through hole or a gap for passing a wiring, and the manufacturing is facilitated structurally. Also, the trouble of connecting a large number of wirings is eliminated, and connection mistakes are prevented,
Wiring assembly man-hours are saved. As a result, there is an effect that the manufacturing is facilitated, the number of processing steps and the number of assembling steps are reduced, the cost is reduced, and the reliability is improved by the elimination of erroneous wiring.

The signal line and the power supply line are not necessarily limited to the conductive lines, but may be other lines such as an optical fiber depending on the type of the microchip, the actuator and the brake actuator. [Method Invention] (Seventh Means) A seventh means of the present invention is a method for driving a micromanipulator according to claim 7.

In this means, first, in the process of acceleration movement, the actuator is bent and deformed in a state where the brake is applied and the joint is fixed, so that an angular momentum is given to the lower arm. In the next inertial motion process, the relative angle at the joint changes due to the lower arm rotating around the joint at an angular velocity by utilizing the above momentum while releasing the brake to make the joint rotatable (moment free). Go. In the final angle maintenance process,
The brake is applied again to stop the rotation of the lower arm and the new angular position of the lower arm is maintained.

In the process of inertial movement, the lower arm rotates at an angular velocity, causing a large angular displacement at the joint. During this time, since the brake is not applied, there is almost no frictional resistance at the joint, and a much larger angular displacement can be obtained in one stroke (one driving method) than in the impact drive corresponding to the state where the brake is applied. In addition, precise fine movement can be easily performed by deforming a predetermined actuator by a predetermined amount while fixing all the joints with brakes.

Therefore, according to this means, it is possible to provide a method of driving a micromanipulator capable of performing a fine movement at a high speed and a coarse movement at a high speed. (Eighth Means) An eighth means of the present invention is a method for driving a micromanipulator according to claim 8.

According to this means, in the acceleration motion process, the actuator is once bent and deformed in the reverse direction, and after the reaction is applied, the actuator is bent and deformed in the positive direction to bend the joint to maximize the angular momentum of the entire micromanipulator. . Here, assuming that only the actuator bends and deforms, and the other part of the micromanipulator does not bend and deform, the angular momentum of the micromanipulator is equivalent to the angular momentum of the part on the tip side of the actuator. When the actuator is provided only on the lower arm, it is equivalent to the angular momentum of the lower arm portion on the distal side from the actuator.

When the angular momentum is maximized, the process is switched from the acceleration motion process to the inertial motion process. Since the joint is moment-free and has little frictional resistance other than resistance due to gravity, the joint has a higher angular velocity. Is angularly displaced,
The lower arm tilts large and quickly. Therefore, the angular displacement of the lower arm in one stroke is greatly increased and multiplied as compared with the case where no recoil is applied.

Therefore, according to this means, in addition to the effect of the above-mentioned seventh means, there is an effect that a larger angular displacement can be obtained more quickly in one driving process (one stroke). (Ninth Means) A ninth means according to the present invention is a method for driving a micromanipulator according to the ninth aspect.

According to this means, the actuator is bent and deformed in the direction opposite to the direction of changing the angle of the joint during the inertial motion process, so that the angular displacement of the joint can be increased accordingly. Also, during the angle maintaining process, the bending deformation of the actuator is returned to the neutral state, so that the micromanipulator returns to the initial state (brake-on, actuator-neutral) at the new joint angular position and can prepare for the next drive. .

Therefore, according to this means, in addition to the effect of the above-described seventh means, there is an effect that a larger angular displacement can be obtained in one driving process (one stroke).

[0032]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the micromanipulator and the method of driving the same according to the present invention will be clearly and fully described in the following examples so that those skilled in the art can understand the present invention. Embodiment 1 (Overall Configuration of Embodiment 1) As shown in FIGS. 1A and 1B, a micromanipulator according to Embodiment 1 of the present invention has an upper end 2 at a fixed end (not shown). Upper arm 1 connected
A lower arm 20 having a lower end portion 23 connected to an end effector (not shown); and a joint 10 connecting the lower end portion 4 of the upper arm 1 and the upper end portion 21 of the lower arm 20 at variable angles to each other. . An intermediate portion of the lower arm 20 is provided with a bending / extension actuator 22 capable of bending and deforming in any direction and expanding and contracting in the axial direction.

Incidentally, the total length of the micromanipulator is about 21 mm, and the length of each part is approximately 8 mm for the upper arm 1, 8 mm for the joint 10, and 5 mm for the lower arm 20, respectively.
mm. Except for a control device not shown, the weight of the present micromanipulator is about 1.2 g.
The upper arm 1 is an integral member made of aluminum. A male screw is formed on the outer peripheral surface of the upper end 2 of the upper arm 1, and a flange 3 is formed in the middle part. The male screw is applied to a fixed end (not shown) of a gantry frame or the like. By screwing in until it touches, the upper arm 1 is rigidly fixed.

The joint 10 is equipped with a disc brake 100. As will be described in detail below, the control signal can be used to control two states, that is, a state in which the frictional resistance to a change in angle is large and a state in which the frictional resistance is small. It can be selectively implemented. (Joint of Embodiment 1) As shown in FIGS. 2A and 2B, the joint 10 includes a brake disk 12 and a pair of brake actuators 15 for restraining and releasing the rotation of the brake disk 12 by a control signal. The disk brake 100 is provided. That is, the upper end 2 of the lower arm 20
Reference numeral 1 is fitted and fixed to the outer peripheral portion of the brake disk 12 by bonding. On the other hand, the lower end 4 of the upper arm 1 rotatably supports a brake disk 12 via a brake housing 11 and the like, and holds a brake actuator 15.

The brake housing 11 has an upper end 11a.
And an integral member consisting of a main body 11b and a lower end 11c,
It is formed from aluminum. A fitting hole that opens upward is formed in the upper end portion 11a, and a fitting portion 4a that projects below the lower end portion 4 of the upper arm 1 fits into the fitting hole, and an adhesive is formed. It is fixed at. The main body 11b of the brake housing 11 is provided with a brake actuator 15
And a part of the brake disc 12 which is a rectangular parallelepiped member that is long in the front and rear direction, and has openings at both front and rear ends and below the center. Both front and rear ends of the main body 11b are sealed with a brake pressing member 16 made of epoxy resin, and a pair of brake actuators 15 whose base end surfaces are adhered to the brake pressing member 16 are stored in the main body 11b. I have.

The brake actuator 15 is a laminated type piezoelectric element, and its displacement is about several μm, but can generate a relatively large pressing force B. Brake pads 14 made of epoxy resin are adhered to the tip surfaces of the respective brake actuators 15, and the respective brake actuators 15 are in contact with the periphery of the brake disc 12 via the brake pads 14.

When no voltage is applied to the brake actuator 15, the brake actuator 15 is in an extended state, and the brake disk 12 is clamped from both sides with a pressing force B and is strongly fixed. Conversely, when the applied voltage is applied, the brake actuator 1
5 contracts and does not apply a pressing force to the brake disk 12, so that the brake disk 12 is almost free of moment (there is no frictional resistance) and can be freely rotated. Therefore, even if the power is turned off during the operation of the micromanipulator, the joint 10 of the micromanipulator is fixed, so that the lower arm 20 does not inadvertently swing and does not cause an accident.

Lower end 11c of brake housing 11
Is divided into two parts, a front part and a rear part, and the interval therebetween is slightly larger than the thickness of the brake disc 12. A through hole is formed in the lower end portion 11c in the front-rear direction, and a pair of shafts 13 are inserted into and fixed to the lower end portion 11c from both front and rear directions. The tip surfaces of both shafts 13 face each other with a predetermined gap 18 therebetween.
Is rotatably supported.

The brake disk 12 is an integral member made of an aluminum alloy (duralumin), and is shown in FIGS.
As shown in FIG. 5, a disc-shaped member having a shaft hole 120 penetrating in the center. The front and rear end faces of the brake disc 12
It is parallel and precise to each other. A slit-like gap 121 is formed from the shaft hole 120 to the upper half of the brake disc 12, and a through hole 122 is formed from the vicinity of the shaft hole 120 directly below. At the lower end of the through hole 122, a fitting hole 17 having an inner diameter larger than that of the through hole 122 is formed so as to open downward.

The gap 121 of the brake disc 12 and the fitting hole 17 communicate with each other through a through hole 122. The wiring L introduced from the brake housing 11 directly above the brake disk 12 is led downward through the gap 121, the through hole 122, and the fitting hole 17. Gap 1
As shown in FIG. 3 (c), even if the brake disk 12 is rotated, if the rotation is within about 90 degrees to the left and right, the wiring L is not subjected to a load such as tension. Don't worry about damaging it. The shaft hole 120 is provided with a gap 18 between a pair of opposed shafts 13.
Therefore, the movement of the wiring L is not hindered.

(Bending and Stretching Actuator of Embodiment 1) The lower arm 20 has a bending and stretching actuator 22 sandwiched between an upper end 21 and a lower end 23 as shown in FIG. In the bending / extension actuator 22, three sets of unimorph pairs 24 are connected by two connection members 28. Each unimorph pair 24 is composed of two unimorphs arranged and joined by a plurality of columns 27 at the outer edge, and each unimorph is joined by opposing electrostrictive material portions 26 and 26 ′ made of PZT. I have. Each unimorph includes a metal disk member 25 having a through hole in the center, and electrostrictive material portions 26 and 26 ′ formed by joining to one surface of the disk member 25. The electrostrictive material portions 26 and 26 'are divided into three fan-shaped portions divided every 120 degrees from the center of the disk member 25, and an applied voltage can be applied to each portion of the electrostrictive material independently. It is wired so that it can be.

Therefore, when an applied voltage is applied only to one or two sections 26 ', the electrostrictive material portion 26' contracts in the radial direction, and as shown in FIG. '
And bend in the opposite direction. As a result, the axis of the lower end 23 is deflected by the angle r with respect to the axis of the upper end 21 of the lower arm 20. In the configuration of this embodiment, the maximum applied voltage is 150 V
On the other hand, the deflection angle r is about 1 °. In addition, by appropriately distributing the applied voltage to the three sections of the electrostrictive material portions 26 and 26 ', the bending / extension actuator 22 can be bent in any direction. These displacements can be finely adjusted by adjusting the applied voltage, and can be operated with a resolution on the order of nanometers.

Incidentally, all the electrostrictive material portions 26, 26 '
When the same applied voltage is applied to the
2 is expanded, and when the applied voltage is returned to zero, it is reduced to the original length again. Therefore, the bending / extension actuator 22 is capable of bending displacement in all directions and expansion / contraction displacement in the axial direction. In addition, the through-hole 29 communicates over the entire length of the lower arm 20 so that the wiring L can pass therethrough.

(Wiring of Embodiment 1) In the micromanipulator of this embodiment, as shown in FIG. 2A again, various through holes and gaps for passing the wiring L are formed, and the top of the upper arm 1 is formed. A wiring space communicating from the lower arm 20 to the lower end surface of the lower arm 20 is formed. That is, in order from the top, the through hole 5 of the upper arm 1, the through hole 19 of the brake housing 11, the gap 121 of the brake disc 12, the gap 18 of the shaft 13, and the through hole 122 of the brake disc 12.
And a through hole 29 of the lower arm 20 communicates from the upper end to the lower end of the present micromanipulator. Each through hole 5, 1
9, 122, and 29 have an inner diameter of about 0.5 mm, and the width of each gap is also about 0.5 mm. The wiring L disposed therein is a covered lead wire having an outer diameter of 0.05 mm, and the number thereof is three for the bending / extension actuator 22, one for the brake actuator 15, and one for the common ground wire. There are a total of five.

These wirings L are connected to the through-hole 5 of the upper arm 1, the through-hole 19 of the joint 10, the gaps 121 and 18, and the through-hole 12
2, through the through-hole 29 of the lower arm 20, and is not exposed to the outside. Therefore, not only the aesthetic appearance is improved, but also the inconvenience that the wiring L interferes with the operation of the micromanipulator or the wiring L swings and disconnects from the outside where the operation of the micromanipulator is large is prevented.

(Driving Method of Embodiment 1) Since the micromanipulator of this embodiment is configured as described above, it can be driven by the driving method described below. When the micromanipulator is driven against gravity, an acceleration motion process for imparting angular momentum to the lower arm 20, an inertial motion process in which the joint 10 is moment-free and the lower arm 20 is swung at an angular velocity, and a disc brake 10
0, the joint 10 is fixed, and the lower arm 20 is stopped. That is, as shown in FIGS. 5 (a) to 5 (d), a large angular displacement (rotation angle) R can be applied to the lower arm 20 which faces vertically downward at a stroke to the right in the drawing by this driving method. it can.

First, in the initial state of the micromanipulator, as shown in FIG. 5A, the lower arm 20 is directed vertically downward a. The lower end 23 is shown with an end effector E attached for convenience of indicating the angle. On the other hand, the upper arm 1 is screwed into a fixed support portion G such as a gantry frame up to the flange portion 3 with a screw on the upper end portion 2 and is rigidly fixed.

In the acceleration movement process, the disc brake 10
With the joint 10 fixed, the bending / extension actuator 22 is once bent and deformed leftward at a predetermined applied voltage. The bending angle at which the bending / extension actuator 22 bends at the predetermined applied voltage and the lower end portion 23 of the lower arm 20 deflects to the left is defined as r. The static neutral position is b in FIG. 5 (b). Here, assuming that the applied voltage is rapidly applied in a stepwise manner, the bending / extension actuator 22 has spring elasticity with respect to bending. , The lower end portion 23 swings leftward past the deflection angle r to near the deflection angle 2r.

With the reaction thus applied, the polarity of the applied voltage is suddenly reversed in a step-like manner. Then, the static neutral position of the lower end portion 23 of the lower arm 20 under the new applied voltage is shifted rightward by the deflection angle r (FIG. 5).
(Equivalent to (c)). The actual position of the lower arm 20 at this time is in a state of being deflected to the left by about 2r, and is deviated to the left by a deflection angle of 3r from the above-described static neutral position. Elastic energy is stored.

Therefore, as shown in FIG. 5 (c), the lower end portion 23 of the lower arm 20 is swung to the rightward deflection angle r beyond the vertical lower portion c and the tip of the lower arm 20 is turned. The velocity V takes a maximum value, and the angular momentum also becomes maximum. At this point, the driving process shifts to the inertial motion process and the disc brake 10
When 0 is released and the joint 10 becomes moment free, the angular momentum is preserved for the entire lower arm 20 around the joint 10 and the entire lower arm 20 starts to swing rightward. Then, the joint 10 rotates at the angular velocity ω, and the entire lower arm 20 swings rightward. If the disc brake 100 is kept released, the lower arm 20 swings to the right until all the angular kinetic energy of the lower arm 20 and the brake disc 12 is converted into the energy of the height. I do.

If the desired rotation angle R (corresponding to d in the figure) is halfway, the disc brake 100 is applied at the time (or immediately before) the rotation angle R is obtained, and the angle maintaining process is started. Transition. In this way, by fixing the joint 10 and maintaining the rotation angle R of the lower arm 20, a desired rotation angle R is obtained for the lower arm 20, as shown in FIG. In this way, the bending and stretching actuator 2
By operating the actuator 2, the deflection angle r is larger than that of operating the bending / stretching actuator 22 only in the forward direction without any recoil.
Then, elastic energy is accumulated with a displacement of three times. Then, the elastic energy reaches 9 times as the square of 3 and the elastic energy is directly converted into angular kinetic energy, so that the potential energy obtained by the lower arm 20 and the brake disk 12 also becomes 9 times. As a result, the height at which the tip of the end effector is lifted is also nine times, and by applying a recoil, it is possible to make a movement almost one digit larger.

Even after the inertial motion process is completed (ie, even when the angular momentum of the lower arm 20 is lost and stopped), the desired rotation angle R
Is not reached, the above driving method is repeated again from the acceleration motion process, so that the desired rotation angle R of the lower arm 20 is obtained.
Is obtained. When the actuator is bent and deformed in a direction opposite to the angle changing direction of the joint 10 during the inertial motion process, that is, in a state where the joint 10 is freely rotatable, the upper end 21 of the lower arm 20 is correspondingly rotated. The angle R increases. That is, the bending / extension actuator 22 is bent in the reverse direction during the inertial motion process, and when the upper end 21 is fixed by the joint 10 in the angle maintaining process, the bending deformation of the bending / extension actuator 22 is returned to the neutral state. In this case, the larger rotation angle R of the lower arm 20 can be controlled by one driving method (one stroke).
Is obtained.

Contrary to the above-described driving method, when the joint 10 is rotated in a direction along gravity, the disc brake 10
The joint 10 can be rotated by loosening the angle 0 and leaving it to the desired angle by gravity, and the disc brake 100 can be applied again to fix it. (Effects of Embodiment 1) As described in detail above, according to the micromanipulator of this embodiment, the joint 10 can be fixed and precise fine movement can be performed, but very large and quick coarse movement can be performed by the aforementioned driving method. The effect is also possible.

Further, since the wiring L is built in, the appearance is improved, and the micromanipulator does not come into contact with the operating micromanipulator to hinder its operation, and problems such as disconnection and short-circuit are prevented. There is also an effect that. (Modification 1 of Embodiment 1) In Embodiment 1 described above, the lower arm 2
Although the bending / extension actuator 22 is provided at 0, a modified embodiment in which the lower arm 20 is provided with a bending / extension actuator similar to the bending / extension actuator 22 in the upper arm 1 is also possible. In this modification, the lower end of the upper arm, the joint 10, and the entire lower arm have a deflection angle r by the bending / extension actuator, and can be swung to roughly move the lower arm by a driving method similar to the driving method described above. . Therefore, according to this modified embodiment, substantially the same operation and effect as those of the first embodiment can be obtained.

(Modification 2 of Embodiment 1) Upper Arm and Lower Arm 20
A modification of the configuration having the bending / extension actuators 22 in both of them is also possible. Since this modification has the bending and stretching actuators 22 of both the first embodiment and the first modification, the speed of the coarse movement can be doubled by driving the two bending and stretching actuators 22 in synchronization. Further, the range of the fine movement can be doubled or more.

Embodiment 2 (Configuration of Embodiment 2) As shown in FIG. 6, a micromanipulator according to Embodiment 2 of the present invention includes a plurality of single manipulator elements M1, M2, M3 and a microhand 3
0 is a multi-joint type micromanipulator configured to be connected. That is, the micromanipulator of the present embodiment includes a micromanipulator main body M, a gantry frame 40 that stably supports the main body M, and a main body M.
And a control device 50 for controlling the

The gantry frame 40 includes a pedestal 41 having a platen shape.
And an upright column 42 fixed and supported from the center of the rear end of the pedestal 41, and a horizontal arm 43 fixed to the top of the upright column 42 and protruding horizontally forward and having extremely high rigidity. A control device 50 is fixed on the horizontal arm 43, and is connected to the micromanipulator main body M through many wires L. A through hole is formed in the front end of the horizontal arm 43, and the upper end (screw portion) 2 of the upper arm 1 of the single manipulator element M1 (micromanipulator of the first embodiment) is inserted from below. The upper end 2 of the upper arm 1 is a horizontal arm 43
From above, a nut 44 and the flange 3 sandwich the horizontal arm 43 to form a fixed end.

The wiring L is connected to the control device 50 through a through-hole 5 (see FIG. 2 (b)) which is open at the end face of the upper end 2 of the upper arm 1, and the micromanipulator body M
Is not exposed to the outside. Therefore, not only the appearance is improved, but also the inconvenience of interfering with the operation of the micromanipulator main body M, disconnection or short circuit is prevented.

The single manipulator element M1 is the same as the micromanipulator of the first embodiment. The single manipulator elements M2 and M3 remove the upper arm 1 of the micromanipulator of the first embodiment and connect it to the lower arm 20 above. It was done. That is, in the micromanipulator of the first embodiment, as shown in FIG. 2A again, the fitting portion 4a of the upper arm 1 and the fitting portion 23a of the lower arm 20 are manufactured according to the same standard. The upper end portion 11a of another joint 10 can be connected to the fitting portion 23a of the joint. Therefore, each single manipulator element M1, M2, M3 has a pair of the joint 10 with the disc brake 100 and the bending / extension actuator 22, respectively.

Joint 1 of single manipulator element M1, M3
0 has a rotation axis in the left-right direction, and the single manipulator element M2 has a rotation axis in the front-rear direction. Therefore, the micro hand 30 can move forward, backward, left and right on the pedestal 41 within a predetermined range. Micro hand 30
Are palm members 33 joined to the lower end of the lower arm of the single manipulator element M3, and finger actuators 31 respectively.
, And a pair of end effectors 32 supported through the end effector 32. The finger actuator 31 is obtained by reducing the size of the bending / extension actuator 22, and includes the end effector 3.
The object can be gripped or released at the tip of the second.

Each single manipulator element M1, M2, M3
The disc brake 100 and the bending / extension actuator 22 of each of the joints 10 and the finger actuators 31 of the micro hand 30 are independently controlled by control signals from the control device 50. (Effects of Embodiment 2) In the micromanipulator of this embodiment, the disc brakes 100 of each joint can be operated independently, and the bending / extension actuators 22 can also be operated independently. It is.

Therefore, it is possible to release the disc brake 100 with only one joint 10 to which an angular displacement is to be applied and to make it free of moment, and to arbitrarily create a state where the disc brake 100 is applied and fixed at all other joints 10. it can. In this case, the angle can be changed quickly by the same driving method as in the first embodiment, using only the joint 10 to which the angular displacement is to be applied. In addition, a plurality of bending / extension actuators 22 are provided so as to correspond to the first modification of the first embodiment.
By driving the joints more quickly, the joint 10
Can be changed.

Therefore, it is possible to change the angle only of any desired joint 10 and maintain the angle while the other joints 10 are fixed, and the plurality of joints 10 cause an angular displacement unintended by the operator. Is lost. As a result, the angle of each joint 10 can be independently changed,
There is an effect that control of the multi-joint type micromanipulator becomes extremely easy.

Since the two joints 10 whose rotation directions are orthogonal to each other also have independent bending moments received from the bending / extension actuator 22, the two joints 10 are simultaneously driven to make the manipulation more rapid. Can also be performed. Furthermore, if the interference mathematical model of the plurality of joints 10 can be built in the computer of the control device or fuzzy control or the like can be applied to allow the plurality of joints 10 that interfere with each other to be simultaneously displaced by a desired angle, a quicker manipulation is possible. Is possible.

Third Embodiment (Configuration of Third Embodiment) As shown in FIG. 7, the configuration of a micromanipulator as a third embodiment of the present invention is almost the same as that of the third embodiment. Different from Example 2. That is, in each joint 10, microchips 61 to 63 each having a built-in control circuit and a power amplifier for controlling and driving the bending and stretching actuators A1 to A3 and the disc brakes B1 to B3, respectively, are arranged. . Further, the micro hand 30 is provided with a micro chip 64 for controlling and driving each finger actuator 31 respectively. Each of the microchips 61 to 64 is connected with three common lines L in parallel. The wiring L is a power supply line for supplying power to each of the microchips 61 to 64, a signal line for transmitting a control signal from the control device 50 'to each of the microchips 61 to 64, and a common ground line. The microchips 61 to 64 are commonly connected.

A digital signal is supplied to the signal line from the control unit 50 ', and each microchip operates by picking up only the control signal addressed to itself. Each of the microchips 61 to 64 picks up a control signal addressed to itself by a control circuit, amplifies the control signal with a power amplifier, and respectively controls the bending and stretching actuators A1 to A3 and the finger actuator 3
1 and the disc brakes B1 to B3 are independently driven.
The control circuit and the power amplifier of each of the microchips 61 to 64 operate by receiving power supply from a power supply line, and each of the microchips 61 to 64 and each of the actuators A
1 to A3, 31 and each disc brake B1 to B3
Are grounded to a single common ground wire.

(Operation and Effect of Third Embodiment) As described above, in this embodiment, each single manipulator element M1 ', M2', M
3 ′ and the micro hand 30 are only three lines L
, And the same operation and effect as in the second embodiment can be obtained. In addition, according to the micromanipulator of the present embodiment, the following effects are obtained because the number of the wirings L is small. First, the wiring L can be passed through a small through-hole or gap, and there is an effect that the structure is not overloaded. Second, since the number of wirings L does not increase, there is an effect that there is no increase in weight or frictional resistance due to the increase in wirings. Third, there is an effect that the possibility of malfunction due to disconnection or short circuit is small and reliability is improved. Fourth, since the wiring L is simple, erroneous wiring hardly occurs, and there is an effect that manufacturing is facilitated. Fifth, since the number of the wirings L is small, there is an effect that the appearance of the wirings L near the control device 50 'is also improved.

These effects are exhibited without change even when the number of connected single manipulator elements or microhands is increased, and the effects become more clear.

[Brief description of the drawings]

FIG. 1 is a set diagram showing a shape of a micromanipulator as a first embodiment (a) Side view (b) Front view

FIG. 2 is a set diagram showing a configuration of a micromanipulator as a first embodiment (a) Side sectional view (b) Front perspective view

FIG. 3 is an assembled view showing the shape and operation of the brake disc according to the first embodiment. (A) Front sectional view (b) Side sectional view (c) Front view in an inclined state

FIG. 4 is a set diagram showing the configuration and operation of the bending and stretching actuator of the first embodiment. (A) Side sectional view of the lower arm when the bending and stretching actuator is not operated. (B) Side sectional view of the lower arm when the bending and stretching actuator is bent.

FIGS. 5A and 5B are schematic diagrams schematically illustrating a coarse movement method of the manipulator according to the first embodiment. FIG. 5A is a front view illustrating an initial state. FIG. 5B is a front view illustrating an accelerating motion process. d) Front view showing the angle maintaining process

FIG. 6 is a side view illustrating a configuration of a micromanipulator according to a second embodiment.

FIG. 7 is a side view showing a configuration of a micromanipulator as a third embodiment.

[Explanation of symbols]

1: Upper arm 1 2: Upper end (screw part) 3: Flange 4: Lower end 4a: Fitting part 5: Through hole (φ0.
5) 10: Joint 100: Disc brake 11: Brake housing 12: Brake disc 120: Shaft hole 121: Gap 122: Through hole 13: Shaft 14: Brake pad 15: Brake actuator 16: Brake holding member 17: Fitting hole 18 : Gap 19: Through hole 20: Lower arm 21: Upper end 21 a: Fitting part 22: Bending and stretching actuator 23: Lower end 23 a: Fitting part 30: Micro hand 31: Finger actuator (Bending and stretching actuator) 32: End effector 33: Palm member 40: gantry frame 40 41: Pedestal 42: Upright column 43: Horizontal arm 4
4: Nut 44 50, 50 ': Control device 61, 62, 63, 64: Microchip B: Brake pressing force E: End effector
G: Fixed support L: Wiring (lead wire, for example, signal line / power supply line / common ground line) V: Swing speed ω: Angular speed R: Rotation angle (tilt angle of disk and lower arm) r: Deflection angle ( M, M ', M ": Micromanipulator body M1, M2, M3, M1', M2 ', M3': Single manipulator element A1, A2, A3: Bending / extension actuator 22 B1, B2, B3: Disc brake 100 R1, R2, R3: rotation angle of each joint 10

Continuing from the front page (72) Inventor Naoki Mitsumoto 1-1-1, Showa-cho, Kariya-shi, Aichi, Japan Denso Co., Ltd. (72) Inventor Koji Iwaki 1-1-1, Showa-cho, Kariya-shi, Aichi pref.

Claims (9)

[Claims] An upper arm having one end connected to a fixed end, a lower arm having one end connected to an end effector, and the other end of the upper arm and the other end of the lower arm are variably connected to each other. In a micromanipulator comprising a joint, at least one of the upper arm and the lower arm is provided with an actuator capable of bending and deforming one of the upper arm and the lower arm, and the joint has a state in which frictional resistance against the change in the angle is large. A micromanipulator characterized in that at least two states, that is, a state in which the frictional resistance is small, can be selectively realized by a control signal. 2. The joint has a brake disk and a brake actuator for restraining and releasing the rotation of the brake disk by the control signal. The other end of one of the upper arm and the lower arm is provided at the other end. The brake disk is fixed, and the other end of the other of the upper arm and the lower arm rotatably supports the brake disk and holds the brake actuator. Item 7. The micromanipulator according to Item 1. 3. The micromanipulator according to claim 2, wherein said brake actuator is a piezoelectric element. 4. The joint, the upper arm and the lower arm,
The micromanipulator according to claim 1, wherein at least one of a through hole and a gap communicating with each other is formed, and wiring is passed through the through hole or the gap. 5. An upper arm, one end of which is connected to a fixed end, a lower arm, one end of which is connected to an end effector, and the other end of the upper arm and the other end of the lower arm are connected so that the relative angle can be changed. And at least one of the upper arm and the lower arm is provided with an actuator capable of bending and deforming one of the upper arm and the lower arm. The joint is provided with a brake for adjusting frictional resistance to the relative angle change by a control signal. A multi-joint type micromanipulator, wherein a plurality of single manipulator elements provided are connected to each other. 6. A microchip incorporating a control circuit for controlling the brake is provided in each of the joints, and at least a power supply line for supplying power to the microchip, and the microchip includes The micromanipulator according to claim 5, wherein a signal line for transmitting a control signal is commonly connected to each of the microchips. 7. An upper arm having one end connected to the fixed end, a lower arm having one end connected to the end effector, and the other end of the upper arm and the other end of the lower arm are variably connected to each other. A joint, and at least one of the upper arm and the lower arm is equipped with an actuator capable of bending and deforming one of the upper arm and the lower arm. The joint is provided with a brake for adjusting a frictional resistance to a change in the angle by a control signal. A method of coarsely moving a micromanipulator provided, comprising: accelerating an actuator to bend and deform the actuator while applying the brake to fix the joint to impart angular momentum to a lower arm; and releasing the brake to release the joint. In a state in which the arm is rotatable, the lower arm rotating around the joint at an angular velocity changes the inertial movement process in which the relative angle at the joint is changed, and the brake is reactivated. The driving method of the micro manipulator comprising: the angle maintaining step of retaining the angular position of the lower arms of the pivoting of the lower arm is stopped, the. 8. The accelerating process includes bending the actuator once in a direction opposite to the angle changing direction of the joint, accumulating energy due to elastic deformation of the upper arm and the lower arm, and then moving the actuator in the forward direction. The method of driving a micromanipulator according to claim 7, wherein the step is a step of maximizing the entire angular momentum by bending and deforming. 9. The inertial motion process is a process of bending and deforming the actuator in a direction opposite to a direction of changing the angle of the joint, and the angle maintaining process is a process of returning the bending deformation of the actuator to a neutral state. The driving method for a micromanipulator according to claim 7, wherein