JPH0394188A - Multi-element radiation detector - Google Patents
Multi-element radiation detectorInfo
- Publication number
- JPH0394188A JPH0394188A JP22918789A JP22918789A JPH0394188A JP H0394188 A JPH0394188 A JP H0394188A JP 22918789 A JP22918789 A JP 22918789A JP 22918789 A JP22918789 A JP 22918789A JP H0394188 A JPH0394188 A JP H0394188A
- Authority
- JP
- Japan
- Prior art keywords
- pda
- spacer
- dead zone
- adhesive
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 title claims description 12
- 125000006850 spacer group Chemical group 0.000 claims abstract description 22
- 239000012790 adhesive layer Substances 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000004026 adhesive bonding Methods 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 239000000853 adhesive Substances 0.000 abstract description 21
- 101100123718 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) pda-1 gene Proteins 0.000 abstract 5
- 230000001070 adhesive effect Effects 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000004005 microsphere Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- BJDCWCLMFKKGEE-CMDXXVQNSA-N chembl252518 Chemical compound C([C@@](OO1)(C)O2)C[C@H]3[C@H](C)CC[C@@H]4[C@@]31[C@@H]2O[C@H](O)[C@@H]4C BJDCWCLMFKKGEE-CMDXXVQNSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
Landscapes
- Measurement Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はＸＩＸＣＴ装置、Ｘ線手荷物検査装置、Ｘ線ま
たはγ線などを用いた非破壊検査装置に使用する多素子
放射線検出器の構造に関する。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to the structure of a multi-element radiation detector used in an XIXCT device, an X-ray baggage inspection device, a non-destructive inspection device using X-rays or γ-rays, etc. .
放射線またはＸ線を光に変換するシンチレー夕とその光
を電気信号に変換する光電変換素子で構戊される多素子
放射線検出器においては、シンチレータの光を光電変換
素子であるフオ１〜ダイオードアレーに損失なく完全に
入射させ感度低下を防ぐためにシンチレータ板とフォト
ダイオードの表面が密着するように光学グリースや光学
的に透明な接着剤によって接着して使用される。In a multi-element radiation detector consisting of a scintillator that converts radiation or The scintillator plate and photodiode are used by adhering them with optical grease or an optically transparent adhesive so that the surface of the photodiode is in close contact with the surface of the scintillator plate in order to allow complete incidence without loss and prevent a decrease in sensitivity.
本発明の利用分野の一つであるＸ線ＣＴ用の多素子検出
器においては、１素子内および素子間において感度ばら
つきがあると、再構成した断層画像に影響が生じるため
、多素子検出器の感度ばらつきは極度に小さくする必要
があり、その許容値は３％程度である。この感度ばらつ
きの要因としては、シンチレー夕板とフォトダイオート
との接着層の状態が関係し、その接着層の状態が感度ば
らつきに寄与する割合は、接着剤の種類や気泡の発生状
況によって変る。そのために、正確に規定することは困
難であるが、アクリル系光学接着剤の例では、接着層の
厚さが１−５μｍ±５μｍの範囲にあれば感度ばらつき
は３％以下にすることができることが判った。また、接
着層内の気泡は目視で確認できない状態であれば感度ば
らつきに影響がないことを確認した。In multi-element detectors for X-ray CT, which is one of the fields of application of the present invention, if there are variations in sensitivity within one element or between elements, it will affect the reconstructed tomographic image. It is necessary to make the sensitivity variation extremely small, and its permissible value is about 3%. The cause of this sensitivity variation is related to the condition of the adhesive layer between the scintillator plate and the photodiode, and the rate at which the condition of the adhesive layer contributes to sensitivity variation varies depending on the type of adhesive and the state of bubble generation. . For this reason, it is difficult to specify accurately, but in the case of acrylic optical adhesives, if the thickness of the adhesive layer is within the range of 1-5 μm ± 5 μm, the sensitivity variation can be reduced to 3% or less. It turns out. It was also confirmed that air bubbles in the adhesive layer do not affect sensitivity variations as long as they cannot be visually confirmed.
しかしながら、従来の技術では面積の大きなシンチレー
タ板とフォトダイオードアレーの面との接着層の厚さを
常に高精度に均一に保つための積極的な手段が講しられ
ていないために、上記の如く１５μｍ±５μｍで安定に
管理し、かつ接着層内の気泡を完全に除去して特性の揃
った多素子放射線検出器を得るのが困難であった。However, in the conventional technology, active measures are not taken to always keep the thickness of the adhesive layer between the large-area scintillator plate and the surface of the photodiode array highly accurate and uniform. It was difficult to stably control the thickness of 15 μm±5 μm and completely remove air bubbles in the adhesive layer to obtain a multi-element radiation detector with uniform characteristics.
本発明は多素子放射線検出器の接着層の厚さを一定に保
つための構造を提供し，さらに接着層内の気泡を除去す
る手段を提供することを目的とする。It is an object of the present invention to provide a structure for keeping the thickness of the adhesive layer of a multi-element radiation detector constant, and also to provide a means for removing air bubbles in the adhesive layer.
上記目的を達或するために、本発明はフォトダイオード
アレーの素子を分離する不感帯部に、接着層の厚さを所
定値にするためのスペーサを設置したもので、接着層の
厚さを１０〜２０μｍとする場合にはスペーサの高さは
ｌ５μｍ±５μｍとすることによって達威される。In order to achieve the above object, the present invention installs a spacer in a dead zone separating the elements of a photodiode array to make the thickness of the adhesive layer a predetermined value. In the case of ~20 μm, the height of the spacer can be achieved by setting the height of the spacer to 15 μm±5 μm.
さらに接着層内の気泡を完全に除去するために、スペー
サの２本の帯によって形威される溝内を接着剤を流し、
余分な接着剤とともに気泡を流出する出口を設ける。面
積の小さい場合にはエケ所の出口でもよいが、面積の広
い場合には淀み部分が生じないように２ケ所以上設ける
ことが有効である。Furthermore, in order to completely eliminate air bubbles in the adhesive layer, the adhesive was poured into the groove formed by the two strips of the spacer.
Provide an outlet for air bubbles to flow out along with excess adhesive. If the area is small, it may be the outlet of the outlet, but if the area is large, it is effective to provide two or more outlets to prevent stagnation.
フオ１・ダイオードアレーの素子を分離するための不感
帯部に設けられた所定の高さのスペーサはシンチレー夕
板とフォトダイオードアレーを接合させた時に接着層の
厚さを所定値に保つもので、接合面の面積が２ ０ Ｉ
ＩｆＩＩＸ ３ ０ ｍｍ以上の大型のものでも所定値
に対し±５μｍの変化範囲内で接合可能である。A spacer of a predetermined height provided in the dead zone to separate the elements of the photo 1 diode array is used to maintain the thickness of the adhesive layer at a predetermined value when the scintillator plate and the photodiode array are bonded. The area of the joint surface is 20 I
IfIIX Even large objects of 30 mm or more can be bonded within a variation range of ±5 μm with respect to a predetermined value.
また、接着層内の気泡は接着剤を流出口の方向に流動さ
せて余分な接着剤とともに押し流し出す−３−
ことによって完全に除去することができる。Moreover, air bubbles in the adhesive layer can be completely removed by flowing the adhesive in the direction of the outlet and flushing out the excess adhesive together with the adhesive.
以下、本発明の一実施例を第１図および第２図を用いて
説明する。An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
第１図は本発明の一実施例である多素子放射線検出器の
平面図で、左下部は部分的な断面を示したものである。FIG. 1 is a plan view of a multi-element radiation detector which is an embodiment of the present invention, and the lower left part shows a partial cross section.
また、第２図は第１図のＩ−１線断面を拡大したもので
ある。フォトダイオードアレー１は面積が２ ０ ＋ｏ
ｍ Ｘ ３ ０ ｍｍで、素子数は２０本である。フォ
トダイオードアレーの各素子は第工図に示す如く縦に並
んでおり、素子ピッチは１ｍである。フォトダイオード
素子の各境界部には不感帯部が存在し、その幅は０．２
冊である。フォトダイオードアレー１は、端部に電極の
ボンデイング部があり、これを除いた部分の長さは２９
ｍである。シンチレータ板２はフォトダイオードアレー
１と同じ面積を持ち、両者は接着剤の薄いＭ４により均
一な厚さで接着される。スペーサ３は、シンチレータ板
２とフォトダイオードアレーエとの間隔、すなわち接着
Ｎ４の厚さを所定の値−４−
に保つために設けるものである。接着層４の厚さを１０
〜２０μｍとする場合には、スペーサ３の高さは工５μ
ｍ±５μｍにすればよい。また，スペーサ３は、フォト
ダイオードアレー１の不感帯部に配置することにし、そ
の幅も０．２ｎｏ として不感帯部の幅と同じにする。Moreover, FIG. 2 is an enlarged view of the cross section taken along line I-1 in FIG. 1. The area of photodiode array 1 is 2 0 +o
The size is m x 30 mm, and the number of elements is 20. Each element of the photodiode array is arranged vertically as shown in the drawing, and the element pitch is 1 m. A dead zone exists at each boundary of the photodiode element, and its width is 0.2
It is a book. The photodiode array 1 has an electrode bonding part at the end, and the length of the part excluding this part is 29
It is m. The scintillator plate 2 has the same area as the photodiode array 1, and both are bonded with a thin adhesive M4 with a uniform thickness. The spacer 3 is provided to maintain the distance between the scintillator plate 2 and the photodiode array, that is, the thickness of the adhesive N4, to a predetermined value -4-. The thickness of adhesive layer 4 is 10
~20μm, the height of the spacer 3 should be 5μm.
It may be set to m±5 μm. Furthermore, the spacer 3 is arranged in the dead zone of the photodiode array 1, and its width is set to 0.2 no, which is the same as the width of the dead zone.
これにより、スペーサ３を設けたことによるＸ線変換効
率の低下を防ぐことができる。Thereby, it is possible to prevent a decrease in X-ray conversion efficiency due to the provision of the spacer 3.
スペーサ３の作或方法としては、スクリーン印刷法を用
いることができる。すなわち、エポキシ接着剤の中に直
径工５〜２０μｍの樹脂製微細球（例えば、商品名ミク
ロパール）を混入し、高さ１５〜２０μｍで幅０．２ｍ
ｍの帯状のスペーサをスクリーン印刷によって印刷し、
固化する。スペーサ３の高さは樹脂製微細球の直径によ
り一定値に保たれる。上記の印刷によりフォトダイオー
ドアレイーエは帯状のスペーサ３によって素子ごとに区
分され、両端が開放された溝構造のものとなる。A screen printing method can be used to create the spacer 3. That is, resin microspheres (for example, trade name Micro Pearl) with a diameter of 5 to 20 μm are mixed into an epoxy adhesive, and a height of 15 to 20 μm and a width of 0.2 m is formed.
m strip-shaped spacers are printed by screen printing,
solidify. The height of the spacer 3 is kept constant depending on the diameter of the resin microspheres. By the above-described printing, the photodiode array is divided into elements by band-shaped spacers 3, and has a groove structure with both ends open.
次に、上記の溝構造をもつフォトダイオードアレー］−
の溝部の中央に接着剤を滴下した後、接着剤のアクチベ
ータを塗布・乾燥したシンチレータ面を静かに接着剤の
上にのせ、加圧する。上記の如く溝構造を形成したこと
により、中央部にあった接着剤は溝に沿って押し流され
、余剰の接着剤は開放端から流れ出る。このため、フォ
トダイオードアレイー１とシンチレータ板２の間の空気
は接着剤に巻き込まれることもなく、接着層４に気泡が
残ることもなくなる。上記の溝構造の開放端の設置と気
泡の残留との関係では、溝部の長さが短い場合には片側
のみでも気泡の問題はないが、満部の長さが長い場合ま
たは、溝部の面積が広い場合には両端を開放にしておく
ことにより気泡の残留を除くことができる。Next, a photodiode array with the above groove structure]-
After dropping the adhesive into the center of the groove, apply an adhesive activator and gently place the dried scintillator surface onto the adhesive and apply pressure. By forming the groove structure as described above, the adhesive in the center part is swept away along the groove, and the excess adhesive flows out from the open end. Therefore, the air between the photodiode array 1 and the scintillator plate 2 will not be caught up in the adhesive, and no air bubbles will remain in the adhesive layer 4. Regarding the relationship between the installation of the open end of the groove structure and the remaining air bubbles, if the length of the groove part is short, there is no problem with air bubbles even if only one side is left, but if the length of the full part is long or the area of the groove part is If the area is wide, leaving both ends open can eliminate residual air bubbles.
また、シンチレータ材２とフォトダイオードアレイーエ
とを接着剤としては耐放射線性があり、光学的に透明で
あり、屈折率が大きく、さらに適度の流動性のあるもの
が好ましい。一例としては、好気性アクリル系接着剤で
ダイナマックス８２８（商品名）が使用できる。粘度は
２５℃で約５００。ｐｓで、流動性も良好である。Further, as an adhesive between the scintillator material 2 and the photodiode array, it is preferable to use an adhesive that is radiation resistant, optically transparent, has a large refractive index, and has appropriate fluidity. As an example, Dynamax 828 (trade name) can be used as an aerobic acrylic adhesive. Viscosity is approximately 500 at 25°C. ps, and the fluidity is also good.
上記の如く構成された多素子放射線検出器では、シンチ
レータ面がフォトダイオード面上に形威されたスペーサ
と接するため、スペーサの高さに相当する接着層厚さが
確保され、厚さのばらつきが作業の状態によって発生す
ることはない。In the multi-element radiation detector configured as described above, since the scintillator surface is in contact with the spacer formed on the photodiode surface, the thickness of the adhesive layer corresponding to the height of the spacer is ensured, and variations in thickness are reduced. This does not occur due to work conditions.
本発明によれば、接着層の厚さを一定にすることができ
るので素子間の感度ばらつきと一素子内の感度分布の変
化は小さくなり一様になる。さらに接着層内の気泡は完
全に除去できるので二の原因による感度ばらつきは無く
することができる。According to the present invention, since the thickness of the adhesive layer can be made constant, variations in sensitivity between elements and changes in sensitivity distribution within one element become small and uniform. Furthermore, since air bubbles in the adhesive layer can be completely removed, sensitivity variations due to the second cause can be eliminated.
第１図は本発明の一実施例の平面図、第２図は第工図の
１−１線断面の拡大図である。
１・ フォトダイオードアレー、２・・・シンチレー夕
板、３・・スペーサー、４・・接着層。
ー７
−８ーFIG. 1 is a plan view of an embodiment of the present invention, and FIG. 2 is an enlarged cross-sectional view taken along line 1-1 of the construction drawing. 1. Photodiode array, 2.. scintillator plate, 3.. spacer, 4.. adhesive layer. -7 -8-
Claims (1)
ータ光を電気に変換する光電変換素子とを接着して構成
した多素子放射線検出器において、多素子光電変換素子
の素子間を分離している不感帯部に、シンチレータ板と
光電変換素子との接着層の厚さに相当する高さの帯状の
スペーサを設け、かつ前記多素子光電変換素子と前記ス
ペーサとで形成された溝部の端部の少なくとも一方を接
着剤の流出開口としたことを特徴とする多素子放射線検
出器。1. In a multi-element radiation detector constructed by gluing together a scintillator plate that emits light due to radiation and a photoelectric conversion element that converts the scintillator light into electricity, a dead zone separating the elements of the multi-element photoelectric conversion element is , a strip-shaped spacer with a height corresponding to the thickness of the adhesive layer between the scintillator plate and the photoelectric conversion element is provided, and at least one end of the groove formed by the multi-element photoelectric conversion element and the spacer is bonded. A multi-element radiation detector characterized by having an outflow opening for the agent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22918789A JPH0394188A (en) | 1989-09-06 | 1989-09-06 | Multi-element radiation detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22918789A JPH0394188A (en) | 1989-09-06 | 1989-09-06 | Multi-element radiation detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0394188A true JPH0394188A (en) | 1991-04-18 |
Family
ID=16888168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22918789A Pending JPH0394188A (en) | 1989-09-06 | 1989-09-06 | Multi-element radiation detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0394188A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5276329A (en) * | 1991-07-15 | 1994-01-04 | U.S. Philips Corporation | Image detector |
| NL9400855A (en) * | 1993-05-27 | 1994-12-16 | Hitachi Medical Corp | Radiation detection device and method for the manufacture thereof. |
| US5828122A (en) * | 1996-03-12 | 1998-10-27 | U.S. Philips Corporation | Semiconductor body with a substrate glued to a support body |
| EP1217387A3 (en) * | 2000-12-21 | 2006-11-15 | Philips Intellectual Property & Standards GmbH | Scintillation detector for electromagnetic radiation |
| JP2011033562A (en) * | 2009-08-05 | 2011-02-17 | Konica Minolta Medical & Graphic Inc | Radiation image detector |
-
1989
- 1989-09-06 JP JP22918789A patent/JPH0394188A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5276329A (en) * | 1991-07-15 | 1994-01-04 | U.S. Philips Corporation | Image detector |
| NL9400855A (en) * | 1993-05-27 | 1994-12-16 | Hitachi Medical Corp | Radiation detection device and method for the manufacture thereof. |
| US5506409A (en) * | 1993-05-27 | 1996-04-09 | Hitachi Medical Corporation | Radiation detecting device and the manufacture thereof |
| US5828122A (en) * | 1996-03-12 | 1998-10-27 | U.S. Philips Corporation | Semiconductor body with a substrate glued to a support body |
| JPH11505672A (en) * | 1996-03-12 | 1999-05-21 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Semiconductor body having a substrate adhered to a support |
| EP1217387A3 (en) * | 2000-12-21 | 2006-11-15 | Philips Intellectual Property & Standards GmbH | Scintillation detector for electromagnetic radiation |
| JP2011033562A (en) * | 2009-08-05 | 2011-02-17 | Konica Minolta Medical & Graphic Inc | Radiation image detector |
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