JPH0381077A - Method and device for joining parts - Google Patents

Abstract

PURPOSE:To carry out two stages in parallel and to enable carrying out mass production by bringing two parts having metallic coating film into a vacuum vessel, irradiating the metallic coating film of each part with ion particles, electrons or neutral particles of rear gas elements and then, cladding the coating films of both parts CONSTITUTION:The parts 11 and 21 having the metallic coating films 12 and 22 are brought into the vacuum vessel 31 and the parts 11 and 21 are held by holders 38, 38', 39 and 39' of rotary plates 36 and 37. The rotary plates 36 and 37 are then rotated and the parts 11 and 21 are opposed to cold cathode type ion sources 40 and 40'. The ion particles and then emitted and the surfaces of the metallic coating films 12 and 22 of the parts 11 and 21 are irradiated with the ion particles and the metallic coating films 12 and 22 are cleaned and made in an activated state. The metallic coating films 12 and 22 of both parts 11 and 21 are then brought into contact with each other and both parts 11 and 21 are applied with the pressure and joined together by a part moving and pressurizing mechanism 44. In this way, since the two stages of the metallic coating film forming stage and the cladding stage can be carried out in parallel without exposing these to the air, the mass production can be carried out.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method and apparatus for joining two parts each having a metal coating on one surface via the metal coating on both parts.

[Prior art] Conventionally, as a method for joining this type of parts, the Japanese Patent Publication No. 61-4
A method disclosed in Japanese Patent No. 8135 is known. In this method, a metal coating film is formed on each surface of two parts in a vacuum vessel, and then the metal coating film of both parts is formed in the same vacuum vessel without exposing the metal coating film to the atmosphere. are brought into contact with each other, and in this state pressure is applied to both parts to press the metal coating membrane together.

This method of joining parts has the advantage that it is possible to join one part at room temperature, and that the two joined parts do not separate even after a long period of time, and can be joined with a joining strength that does not pose a practical problem. .

[Problem to be solved by the invention, I] However, in the conventional method of joining parts, a metal coating film is formed on each surface of two parts in a vacuum container, and the parts are joined in the same vacuum container. is an essential requirement. This is because when the metal coating film is exposed to the atmosphere, an oxide film or the like is formed on the surface of the metal coating film, and the surface of the metal coating film becomes inactive. Therefore, since the formation of the metal coating film and the pressure bonding of the metal coating film cannot be performed in separate atmospheres, there is a problem of lack of flexibility.

A first object of the present invention is to provide a highly flexible method and apparatus for joining parts, which can perform the formation of a metal coating film and the compression bonding of two parts in separate atmospheres.

A second object of the present invention is to provide a method and apparatus for joining parts in which the joining strength does not decrease even when a metal coating film formed on one part is exposed to the atmosphere.

A third object of the present invention is to provide a method and apparatus for joining parts that are suitable for mass production.

[Means for Solving the Problems] According to the present invention, two parts each having a metal coating film are introduced into a vacuum container, and ionic particles of a rare gas element,
After irradiating the metal coating films of each of the parts with electrons or neutral particles, the metal coating films of both parts are brought into contact with each other in the vacuum container without exposing the metal coating film to the atmosphere, A method for joining parts is obtained in which pressure is applied to both parts in this state and the metal coating film is crimped.

Furthermore, according to the present invention, there is provided a vacuum container, a component holding means provided in the vacuum container for holding two parts to be joined, and two parts held by the component holding means.
A particle irradiation means that irradiates the surfaces of two parts with ion particles, electrons, or neutral particles of a rare gas element, and a particle irradiation means that moves the two parts after being irradiated with particles by this particle irradiation means to irradiate the particles of both parts. the surfaces that have been exposed are in contact with each other, and.

A component joining device is obtained which is equipped with a component moving and pressurizing means that applies pressure to both components in this state.

[Operation] When the two parts are exposed to the atmosphere after forming the metal coating on the two parts, an oxide film or the like is formed on the surface of the metal coating. In the present invention, a component on which an oxide film or the like is formed is introduced into a vacuum container, and then ion particles, electrons, or neutral particles of a rare gas element are irradiated to form an oxide film on the metal coating film. etc. to activate the metal coating film. In this state, the metal coatings of both parts are brought into contact with each other.

Then, pressure is applied to both parts to crimp the metal coating membrane.

[Example] Next, embodiments of the present invention will be described in detail based on the drawings.

The embodiments shown in FIGS. 1 to 3 have two different coefficients of thermal expansion.
It is used to join two parts (for example, glass and ceramic).

Reference numerals 11 and 21 in FIGS. 1 and 2 indicate parts, respectively. A metal coating 12.22 is formed on the surface of each component 11.21. Parts 11.2
When 1 is glass and ceramic, metal coating film 1
2.22 is made of, for example, chromium.

The surface of component 11.21 is first smoothed by a known polishing method and then cleaned, and then is coated with a known metal coating film forming method (for example, resistance heating vacuum evaporation method, electron beam heating vacuum evaporation method, sputtering method, etc.). ) by part 11.2
A metal coating film 12.22 is formed on the surface of 1.

FIGS. 3 and 4 show a component joining apparatus according to an embodiment of the present invention.

In FIG. 3, reference numeral 31 indicates a vacuum container. A vacuum pump 33 is connected to this vacuum container 31 via an exhaust pipe 32. The vacuum container 31 is evacuated by a vacuum pump 33.

A motor 34 is disposed at the upper center of the outside of the vacuum container 31. Directly below this motor 34.

A rotating shaft 35 is arranged vertically at the center inside the vacuum container 31 . A drive shaft of the motor 34 is connected to a rotating shaft 35. Rotating plates 36 and 37 are horizontally fixed to this rotating shaft 35 and are spaced apart from each other vertically.

Two holes 36a and 36b are formed in the rotating plate 36. The center of these holes 36a, 36b is the 9-rotation plate 36.
are located on a straight line passing through the center of , are angularly 180 degrees apart from each other, and .

They are equidistantly located in the radial direction. These holes 36a,
Holes 37a and 37b are also formed in the rotary plate 37 so as to face the rotary plate 36b in the vertical direction, respectively. Nine component holders 38° and 38' are placed on the rotary plate 36. The downwardly extending portions of the component holders 38, 38- are inserted into the holes 36a, 36b. Nine component holders 39 and 39' are also placed on the rotary plate 37 so as to be positioned above the holes 37a and 37b.

The four parts 11 and 21 having the metal coatings 12 and 22 shown in FIGS. 1 and 2, respectively, are introduced into the vacuum container 31 and the parts holder 3
8.38', 39. -39'. In this case, one component 11 is held in a component holder 38.degree. 38' with the metal coating 12 facing downward. On the other hand, one component 21 is held in a component holder 39.degree. 39' with the metal coating film 22 facing upward.

Inside the vacuum container 31, a single particle irradiator, for example, a cold cathode ion source 40.40' is placed between a rotary plate 36 and a rotary plate 37, and a component 1 held by two rotary plates 36,37.
1.21. These cold cathode ion sources 40, 40' can simultaneously emit ion particles upward (in the direction of arrow a) and downward (in the direction of arrow a). The cold cathode ion source 40.40' is connected to a cylinder 41 containing argon via two mass flow controllers 42.42'l). These mass flow controllers 42.42
' controls the amount of ion particles emitted from the cold cathode ion source 40, 40'.

Neutralizers 43 and 43' are arranged above and below the cold cathode ion sources 40 and 40', respectively. These neutralizers 43, 43' emit thermoelectrons to irradiate the metal coating film 12.22 of one component 11.21 with ion particles, which causes a phenomenon in which charges are accumulated (charge-up phenomenon). Preventing it from happening. Note that the neutralizers 43, 43 are not required when ion particles are irradiated onto a component 11.21 that has been treated so that this charge-up phenomenon does not occur.

Further, the vacuum container 31 is provided with a one-component moving and pressurizing mechanism 44 . As shown in FIG. 4, this component moving and pressing mechanism 44 moves the two components 11, 21 to bring the metal coatings 12.22 of both components 11.21 into contact with each other.
In this state, pressure is applied to both parts 11 and 21.

Specifically, the eight-component moving pressurizing mechanism 44 moves the vacuum container 3
Upper cylinder 44 disposed on the upper and lower sides of the exterior of 1
a and the lower cylinder 44b.

A part is located inside these and the other part is located in the vacuum container 3.
1, and a rod pressurizing mechanism (not shown) that applies pressure to these.

The upper cylinder 44a and the lower cylinder 44b are arranged so that their central axes coincide. Further, as shown in FIG. 3, when the cold cathode ion source 40.40' faces the holes 36a, 37a of the rotary plate 36.37, the upper cylinder 44a and the lower cylinder 44b are connected to the rotary plate 36.37. 37 holes 36b and 37b. The upper press rod 44c and the lower press rod 44d can be raised and lowered by changing the pressure applied thereto by the rod pressurizing mechanism.

Next, the operation of the embodiment of the present invention will be explained based on FIGS. 3 and 4.

First, four parts 11 with metallization membranes 1.2.22
．． 21 are introduced into the interior of the vacuum vessel and these parts 11.21 are held in part holders 38.38'39.39' on the rotary plate 36.37, as shown in FIG. Next, the rotary plates 36 and 37 are rotated so that the component 11.21 held in the one-component holder 38.39 faces the cold cathode ion source 40.40'.

In this state, the cold cathode type ion source 40, 40' is activated to emit ion particles, and the surface of the metal coating film 12, 22 of the component 11.degree. 21 is irradiated with the ion particles. By irradiating the metal coating film 12.22 with ion particles in this manner, the metal coating film 12.22 is cleaned and brought into an active state. This means that when the metal coating film 12.22 is exposed to the atmosphere, an oxide film formed on the surface thereof can be removed.

Next, the motor 34 is operated only for a predetermined time and the rotary plate 36.3
7 is rotated 180 degrees to obtain the state shown in FIG. In this state, the metal coating film 12.22 is held in a component holder 38.39 and irradiated with ion particles.
The part 11.degree. 21 having a diameter of 11.degree. 21 faces the upper press rod 44c and the lower press rod 44d. On the other hand, the component 11.21 held in the one component holder 38-39'' and not yet irradiated with ion particles faces the cold cathode type ion source 40.40'.

The lower press rod 44d facing the component 21 on the component holder 39 is raised and inserted through the hole 37b of the rotary plate 37, and the lower press rod 44d presses the component holder 3.
9 and part 21 to raise it, and this part 21
After bringing the metal coating film 22 into contact with the metal coating film 12 of the component 11, the lower press rod 44d is further raised a little to separate the component holder 38 from the rotary plate 36. While the lower press rod 44d is rising, the upper press rod 44
The upper press rod 44c is lowered and brought into pressure contact with the component holder 38 separated from the rotary plate 36.
and the lower press rod 44d applies pressure on the parts 11.21 to compress these metallization membranes 12.22.

Next, raise the upper press rod 44c, and.

Lower press rod 44d is lowered to return each to its original position. When the lower press rod 44d descends, the component holder 38.39 and the joined integral component 11.21 also descend. These are integrally locked by placing the upper part of the component holder 38 on the edge of the hole 36a of the rotary plate 36.

In this way, two parts 1 are moved using the parts moving and pressing mechanism 44.
While performing the bonding of 1.21, the cold cathode ion source 40, 40' connects the metal coating 12 of the two parts 11.21 held in the one part holder 38-39-.
．． The surface of 22 is irradiated with ion particles.

Thereafter, by the above-mentioned operation, the part 11.21 irradiated with ion particles and the part holder 38'39' are made to face the upper press rod 44c and the lower press rod 44d, and the one-component moving and pressing mechanism 44 is used as described above. Similarly, the two parts 11.21 are joined by applying pressure.

Next, the joined and integrated parts 11.21, which are locked on the edges of the holes 38, 38' of the one-turn plate 36, are removed from the parts holders 38, 39, 38', 39'.

Note that the component holding mechanism for holding one component 11, 21 and the component moving and pressing mechanism 44 are not limited to the embodiment shown in FIG.

Further, a plurality of holes of three or more may be formed facing each other in one circumference in the one-rotation plate 36, 37, and component holders may be placed or locked in these holes.

Further, suitable metal materials for the metal coating film 12.22 include titanium, chromium, nickel, and nickel-chromium alloy.

Next, another embodiment of the present invention will be described based on FIGS. 5 and 6.

In FIG. 5, reference numeral 51 indicates a component.

A metal coating adhesion film 52 is formed on the surface of this component 51, and a metal coating bonding film 53 is formed on the surface thereof. Component 51 is an acousto-optic element made of lead molybdate. In this example, metallization adhesion film 52 is formed from a nickel-chromium alloy, and metallization bonding film 53 is formed from tin.

In FIG. 6, reference numeral 61 indicates a component.

A metal coating adhesion film 62 is formed on the surface of this component 61, and a metal coating bonding film 63 is formed on this surface. Component 61 is a piezoelectric crystal made of lithium niobate. In this example, metallization adhesion film 62 is formed from a nickel-chromium alloy, and metallization bonding film 63 is formed from tin. The metallization bonding film 52.62 is a metallization film for increasing the adhesion strength of the metallization bonding film 53.63 to the component 51.61. The metal coating bonding films 53 and 63 are metal coating films that serve as a bonding material for bonding the components 51 and 61 and also serve as electrodes.

In addition, the metal material of the metal coating film 52.62 is as follows:
Titanium, chromium, nickel and nickel-chromium alloys are suitable. Further, the metal material of the metal coating bonding film 53.63 includes gold, platinum, silver, copper, aluminum,
Indium, tin, lead and alloys of these metals are suitable.

Metallic deposit film 52.62 and metallized bonding film 53.
63 parts 51.61 respectively.

It is introduced into the vacuum container 31 shown in FIGS. 3 and 4 and bonded in the same manner as described above. In addition.

The present invention has been explained based on FIGS. 3 to 6.

It can be applied not only to the production of acousto-optic elements, but also to the mounting of windows made of quartz glass, filter glasses or crystals on glass-ceramic or metal surfaces, and to the joining of diaphragms with containers or measuring bodies in pressure measuring devices. It can also be applied when

In addition, as a method for forming a metal coating film on the surfaces of parts 11, 21, 51, and 61 shown in FIGS. 1, 2, 5, and 6, the parts are placed in a vacuum container. The present invention is not limited to the method of forming a metal coating film on the surface of the component, and methods such as the CVD method can also be used.

In addition, in the above-described embodiment, the single particle irradiator is not limited to the cold cathode ion sources 40 and 40' shown in the two figures, but may also be a hot cathode ion source, an ECR ion source, or the like. Further, the particles emitted by the particle irradiator are not limited to argon ion particles, but ion particles of rare gas elements such as neon, xenon, electrons, or neutral particles are suitable.

Furthermore, in the embodiments described above, the one-component moving pressure mechanism 44 preferably has a power of 200 N/cd to 3500 N/cd.
/cd pressure is applied to the two parts. The pressure applied to the two parts by the parts moving pressure mechanism 44 is 200 N.
/c- or less, the adhesive strength decreases, and
If this pressure exceeds 350 ON/c-, it will damage the brittle material.

Furthermore, in the embodiments described above, the crimping of the two metallization films is preferably carried out at a temperature from room temperature to 70°C. This increases the bonding strength between the two parts.

[Effects of the Invention] According to the present invention, the metal coating films of two parts can be bonded together separately from the process of forming the metal coating films on the two parts.

Further, according to the present invention, even if the metal coating film formed on nine parts is exposed to the atmosphere, it will not dissociate after a long period of time, and two parts can be joined with a joining strength that does not pose a practical problem.

Furthermore, in the present invention, the process of forming metal coating films on two parts and the process of press-bonding the two metal coating films can be performed separately, so these two processes can be performed in parallel. Therefore, it is suitable for mass production.

[Brief explanation of drawings]

FIGS. 1 and 2 are enlarged front views showing one embodiment of the parts used in carrying out the present invention, and FIGS. 3 and 4 are partially cutaway front views showing one embodiment of the parts joining apparatus of the present invention. The drawings and FIGS. 5 and 6 are enlarged front views showing other embodiments of parts used in carrying out the present invention. 11.21.51.61...Parts, 12.22...
Metal coating film, 52.53...Metal coating adhesion film, 53゜63...Metal coating bonding film, 31...Vacuum container, 38
゜38'39.39'...Parts holder, 40.
40'...cold cathode ion source, 44...component movement pressurization mechanism. Figure 5 Figure Figure 5,, 63 /===ko\62

Claims (2)

[Claims] (1) Two parts each having a metal coating are introduced into a vacuum container, and after irradiating the metal coating of each part with ion particles, electrons, or neutral particles of a rare gas element, the metal coating is The metal coating films of both parts are brought into contact with each other in the vacuum container without exposing the coating films to the atmosphere, and pressure is applied to both parts in this state to compress the metal coating films. How to join parts. (2) A vacuum container, a component holding means provided in the vacuum container for holding two parts to be joined, and rare gas element ion particles on the surfaces of the two parts held by the component holding means. , a particle irradiation means for irradiating electrons or neutral particles; and two parts irradiated with particles by the particle irradiation means are moved to bring the particle irradiated surfaces of both parts into contact with each other, and 1. A device for joining parts, comprising a part moving and pressurizing means for applying pressure to both parts in this state.