JPH0377068A - Probe card - Google Patents

Abstract

PURPOSE:To conduct a probe test even when a terminal to be measured is arranged nearby the intersection of two crossing sides by setting the positions of the curved part support part of a contactor to different heights on two adja cent sides. CONSTITUTION:In the internal wall surface of the contactor support part 2, 1st and 2nd recesses 5 and 6 are formed and the curved pats of 1st and 2nd contactors 11 and 13 are stored in the recesses 5 and 6. A guide part 4 is pro vided atop of the support part 2 and the tip part 12 of the contactor 11 and the tip part 14 of the contactor 13 are supported slidably along the guide part 4. Further, a fulcrum part 7 which supports the contactor 11 and a fulcrum part 8 which supports the contactor 13 are provided on the support part 2 and a ceramic support 1 is so formed that a support point 8 is fitted in the recess 5. Thus, the probe card is formed in this shape and then the contactors 11 and 13 can be arranged at four corner parts without falling, so even when the terminal to be measured is arranged at a secondary adjacent corner part, the probe test can easily be conducted.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to integrated circuit devices, flat panel disks, etc.
Regarding the probe card used for the brochure test such as Ray, in detail, it is an integrated circuit device with multiple bins and a minute distance between the terminals to be measured.

Concerning a probe card with a light structure used for testing flat panel displays, etc.

[Prior Art] Conventionally, as a probe card used for probe testing of integrated circuit elements, etc., for example, the
The test probe assembly disclosed in No. 4 is used. As shown in FIGS. 7 and 8, this test probe assembly has probe needles 72 fixed to a printed circuit board 71 in a conical radial manner by means of a support 74 and a fixing layer 75. Printed wiring 76 is on the printed circuit board 71
A probe needle 72 is connected to this printed wiring 76 with solder 77. The probe card is electrically connected to the test equipment, but this is through the through hole 7.
This is done by inserting a pin into 8 and electrically connecting this vial to the test equipment. During testing, the tip 73 of the probe needle 72 is pressed against the terminal to be measured.

Due to the structure of such a conventional probe card, it is difficult to reduce the distance between the probe needles (contactors), and this problem cannot be accommodated by recent multi-bin integrated circuits. Furthermore, since the probe needle of this conventional structure scratches the upper surface of the terminal to be measured with the tip of the probe, deep traces of the needle remain, which causes subsequent bonding failures. For this reason, it is particularly difficult to use the test terminal using a soft metal such as gold.

In order to solve these problems of the prior art, a blow 7 card, as disclosed in Japanese Patent Application No. 1-26948, was invented which has a contact whose tip part moves vertically.

FIG. 5 is an external view of an example of the blow 7 card, and FIG. 6 is a sectional view taken along the line E-F. The ceramic support 51 is for drawing out the wiring and supporting the probe card itself. This ceramic support 51 is provided with a contact support portion projecting downward, and a metallized layer 52 with a thickness of 200 μm is provided on the surface. On the part of the metallized layer 52 provided on the surface of the ceramic support 51, there are 100 layers protruding vertically by 2.0 mm at a pitch of 200 μm from the tip of the contact support portion.
One end of the contact 53 of a beryllium phase wire with a diameter of μm is welded. A recess 55 is provided on the inner wall surface of the contact support portion, the contact 53 is molded in a curved manner, and this curved portion is housed in the recess 55 . The contactor 53 is coated with an adhesive 54 in order to obtain sufficient adhesion to the ceramic support 51.
is firmly fixed by. The contact pressure during measurement is
When the contact 53 is pressed against a terminal to be measured (not shown), the curved portion housed in the two recesses 55 is elastically deformed, resulting in a reaction force of 20. With this probe card,
Since the contact portion 56 that comes into contact with the terminal to be measured does not slide unlike a conventional probe card, the terminal to be measured is hardly scratched. In this example, the maximum overdrive value of the probe card (the maximum stroke value that can be further pressed after the contact portion 56 first contacts the terminal under test) is approximately 500 μm, and under normal use, the overdrive value is approximately 500 μm. Since it is 50 μm or less, it can be used without any problem. Due to the contact pressure caused by this overdrive, the contact portion 56 of the contact and the terminal to be measured are brought into reliable niohmic contact. In this example, the number of contacts 53 is 100.
Since it is made of beryllium atS with a diameter of 44 μm, the contact force to the terminal under test is approximately 3 g per one wire.
This contact force makes it possible to obtain sufficient ohmic contact.

According to such a configuration, a probe card with excellent probe characteristics can be realized, but since the fulcrum and the curved portion of this contactor pivot in the opposite direction around the tip,
Near the intersection of the two intersecting sides, the distance between the contacts is defined by the minimum distance between the inwardly projecting portions. Therefore, depending on the pitch, it may not be possible to measure a terminal to be measured located at a corner.

An object of the present invention is to provide a probe card that can easily perform a probe test even when a terminal to be measured is arranged near the intersection of two intersecting sides.

[Means for Solving the Problems] That is, the probe card of the present invention is characterized in that the positions of the curved portion and the fulcrum portion of the contact are set at different heights on two adjacent sides. 6. Therefore, the means in the probe card of the present invention for achieving the above-mentioned object is such that the terminals to be measured are arranged in alignment with the first and second sides of the rectangle and are opposed to each other. In a probe card with multiple contacts, these contacts have a tip that contacts the terminal under test substantially perpendicularly, and a tip that is set off-axis with the length of this tip as an axis. the fulcrum, and a curved part provided between the tip and the fulcrum, the apex of the curved part is located on the opposite side of the axis from the fulcrum, and the first side has a The length of the tips of the plurality of contacts facing the terminals to be measured that are arranged in a row is the length of the tips of the plurality of contacts that face the terminals to be measured that are arranged and provided on the second side. It's longer than that.

In addition, if you want as many contacts as possible to have low resistance (low impedance), you can use multiple contacts that face the terminals to be measured that are aligned on the first side so that the length of their tips is A first contact whose tip length is longer than the length of the tip of the plurality of contacts facing the terminal to be measured that is aligned with the second side, and a first contact whose tip length is aligned with the second side. Consisting of two types of second contacts each having a length substantially equal to the length of the tips of the plurality of contacts facing the nibbed terminal to be measured, and a first contact only in the vicinity of an adjacent corner. All you have to do is place the .

In addition, if you want to make the resistance (impedance) of all contacts the same, align multiple contacts facing the terminal to be measured that are aligned on the first side and aligned on the second side. The total lengths of the plurality of contacts facing the terminal to be measured may be made equal. That is, from the curved portions of the plurality of contacts facing the terminals to be measured arranged in alignment on the second side,
The length to the metallized layer to which this contact is connected may be increased by the difference in length of the tip. If the curved portion is composed of a straight portion and a bent portion, a highly accurate contact can be easily realized.

Note that a springy metal such as beryllium copper wire is good for the contact, but if abrasion resistance is required, tungsten or titanium can also be used, and the tip that contacts the terminal under test Abrasion-resistant plated metal wire can also be used at the end of the section.

[Function] According to the present invention, even if the terminal to be measured is placed at any corner of two adjacent sides, a probe test can be easily performed on the terminal.

Therefore, it can be used for integrated circuit devices, etc., in which the distance between the terminals to be measured is 80 μm and 1000 bins or more of terminals are arranged evenly on the four sides of the chip, which was completely impossible with the conventional structure.

[Example] Hereinafter, an example of the probe card of the present invention will be described in detail using the drawings.

FIG. 1 is an external view of a first embodiment of the probe card of the present invention, and FIG. 2 is a sectional view taken along the line A-B.

The ceramic support 1 is used to draw out the wiring of the contacts and to support the probe card itself. This ceramic support 1 is provided with a contact support portion 2 projecting downward, and a metallized layer 3 with a thickness of 20 μm is provided on the main surface. The metallized layer 3 provided on the surface of the ceramic support 1 has a first contact 11 and a second contact drawn out in contact with the metallized layer 3 at a pitch of 200 μm from the tip of the contact support. One end of each contactor 13 is welded by a sporato welder.

The inner wall surface of the contact support part 2 has a first recess 5 and a second recess 5.
A recess 6 is provided, and the first contact 11 and the second contact 13 are each curved and molded, and the curved portions are stored in the first recess 5 and the second recess s, respectively. be done. Further, a guide portion 4 is provided at the tip of the contact support portion 2, and the tip portion 12 of the first contact and the tip portion 14 of the second contact are guided along the guide portion 4. Supported in a sliding manner. Moreover, a first fulcrum part 7 that supports the first contact 11 and a second fulcrum part 8 that supports the second contact 13 are provided on the upper part of the contact support part 2, and the ceramic support 1: A second fulcrum portion 8 is formed in the recess 5 of the second side. By making such a shape, the first contact 11 and the second
It becomes possible to arrange the contacts 13 at each of the four corners without any missing parts. Note that the first contact 11 and the second contact 13 are firmly fixed with an adhesive in order to obtain sufficient adhesive force with each ceramic support 1 . The contact pressure during measurement is obtained as a reaction force caused by elastic deformation of the curved portion of each contact when the contact is pressed against a terminal to be measured (not shown).

In the probe card according to the embodiment of the present invention, the contact portion 15 that comes into contact with the terminal to be measured does not slide unlike the conventional probe card, so the terminal to be measured is hardly scratched. In the case of this first embodiment, the maximum overdrive value of the probe card (the maximum stroke value that can be further pressed after the contact portion 15 first contacts the terminal under test) is approximately 500 μm, which is approximately 500 μm, which is normal for normal use. Since the Opert life value is 50 μm or less, it can be used without any problem. The contact pressure caused by this over J-' life ensures ohmic contact between the contact portion 15 of the contact and the terminal to be measured. In this example, the first contact 11 and the second contact 13 were each made of beryllium copper wire with a diameter of 100 μm, so the contact force to the terminal to be measured was approximately 3 g per wire, and this contact A sufficient ohmic contact can be obtained by applying force. Since the first contact 11 and the second contact 13 have the same developed length, the impedance of each contact is approximately constant. Therefore, differences in characteristics depending on the contact can be ignored.

In this embodiment, a beryllium copper wire is used for the contact, but a tungsten wire, a phosphor bronze wire, etc. can also be used. Furthermore, when the terminal to be measured is gold, good characteristics can be obtained by plating the surface of these wires with another metal. The contacts of this example were plated with platinum-palladium or platinum-rhodium, and their effectiveness against aging was confirmed. If there is a problem with the processing accuracy of the curved portion of each contact, there is no problem in terms of characteristics even if the curved portion is processed using a polygonal line approximation.

FIG. 3 is an external view of a second embodiment of the probe card of the present invention, and FIG. 4 is a sectional view taken along the CD plane.

In this embodiment, the inner wall surface of the contact support portion 22 includes a first
A recess 25 and a second recess 26 are provided, and a stepped portion having the same height as the second recess 26 is provided in the center of the first recess 25 . The second contactor 33 is molded in a curved manner, and this curved portion is housed within the stepped portion provided at the center of each of the first recesses 25 and the second recess 26 . The first contact 31 is curved and molded,
This curved portion forms both ends of the first recess 25 (the second contact 3
1 is not attached). A guide portion 24 is provided at the tip of the contact support portion 22.
A first contact tip 32 and a second contact tip 34 are supported to slide along this guide portion 24 .

Further, a first contact 31 is provided on the upper part of the contact support part 22.
A first fulcrum part 27 that supports the contactor 33 and a second fulcrum part 28 that supports the second contact 33 are provided, and the ceramic support 21 has a first recess 25 and a second fulcrum part 28 that are orthogonal to each other. The parts are shaped so that they fit together. By adopting such a shape, it is possible to arrange the first contact 31 and the second contact 33 without missing each of the four corners while keeping the impedance of each contact as small as possible. Become. Note that the first contact 31 and the second contact 33 are attached to the ceramic support 2, respectively.
It is firmly fixed with an adhesive in order to obtain a sufficient adhesive force of 1. The contact pressure during measurement is measured at the terminal under test (
(not shown), the curved portion of each contact is elastically deformed, and this is returned as a reaction force.

In the example, a 100 μm metal wire with a circular cross section was used as the contact, but the wire may have a rectangular cross section. In the case of thin contacts of 50 μm or less, highly accurate contacts can be made by photo-etching a metal plate.

[Effects of the Invention] As can be understood from the above explanation, this invention has the following effects:
Since the contacts can be arranged at a pitch equal to the four sides of the rectangle, there are no special restrictions on the pad placement of the integrated circuit device. Furthermore, since each contact is displaced only in the direction perpendicular to the surface of the terminal to be measured, the position of each contact in the direction along the surface of the terminal to be measured is maintained accurately during measurement, and even if the contact is minute, Also, adjacent contacts will not be short-circuited. Therefore, it can be used for integrated circuit elements having a distance between terminals to be measured of 80 μm and a number of terminals of 1000 bins or more, which was difficult to achieve with conventional structures. Hence, multi-bin integrated circuit devices.

This will greatly contribute to the advancement of flat panel displays.

[Brief explanation of drawings]

FIG. 1 is an external view of a first embodiment of the probe card of the present invention, FIG. 2 is a cross-sectional view taken along plane A-B, and FIG. 3 is an external view of the second embodiment of the probe card of the present invention. 4 is a sectional view taken along the CD plane, FIG. 5 is an external view of an example of a probe card before the present invention is applied, and FIG. 6 is a sectional view taken along the E-F plane. Figure 7 is a plan view of the conventional blow 7 card (
FIG. 8 is a sectional view thereof. 1.21.51...Ceramic support, 2゜22...
・Contact support part, 3, 23.52...Metallized layer, 4
．． 24...Guide part, 5 degrees 25...First recess, 6
, 26... second recess, 7, 27... first fulcrum part, 8, 28... second fulcrum part, 11.31... first contact, 12.32... 13. the tip of the first contact;
33...Second contact, 14,34...Tip of second contact, 15,35°56...Contact portion, 53...
...Contact, 54...Adhesive, 55...Dent, 71.
・・）. Lint substrate, 72... Probe needle, 73... Probe needle tip, 74... Support, 75... Fixed layer, 7
6...Printed wiring, 77...Solder, 78...Through hole.

Claims (4)

[Claims] (1) In a probe card in which a plurality of contacts are arranged so as to face terminals to be measured that are arranged on adjacent first and second sides of a rectangle, the contacts are connected to the terminals to be measured. a tip that contacts substantially perpendicularly, a fulcrum set at a position offset from the axis with the longitudinal direction of the tip as an axis, and a curved portion provided between the tip and the fulcrum; the apex of the curved portion is located on the opposite side of the fulcrum across the axis, and a plurality of contacts facing the terminals to be measured aligned and provided on the first side; The probe card is characterized in that the length of the tip portion of the probe is longer than the length of the tip portions of the plurality of contacts facing the terminals to be measured that are aligned and provided on the second side. (2) The plurality of contacts facing the terminals to be measured arranged in alignment with the first side are arranged such that the length of the tip ends of the plurality of contacts facing the terminals to be measured arranged in alignment with the second side. A first contact whose tip length is longer than the length of the tip of the contact, and a second contact whose tip length is longer than the length of the tip of the contact.
2. A second contact element having a length substantially equal to a length of a tip end of a plurality of contact elements facing the terminal to be measured which are arranged in line with the sides of the second contact element. probe card. (3) The plurality of contacts facing the terminals to be measured that are aligned on the first side and the multiple contacts facing the terminals to be measured that are aligned and provided on the second side are The probe card according to claim 1, wherein the probe card has the same overall length. (4) The probe card according to claim 1, wherein the curved portion is composed of a straight portion and a bent portion.