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JPH0362529B2 - - Google Patents

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Publication number
JPH0362529B2
JPH0362529B2 JP19675782A JP19675782A JPH0362529B2 JP H0362529 B2 JPH0362529 B2 JP H0362529B2 JP 19675782 A JP19675782 A JP 19675782A JP 19675782 A JP19675782 A JP 19675782A JP H0362529 B2 JPH0362529 B2 JP H0362529B2
Authority
JP
Japan
Prior art keywords
workpiece
jig
hole
circumferential surface
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19675782A
Other languages
Japanese (ja)
Other versions
JPS5987109A (en
Inventor
Takashi Myatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP19675782A priority Critical patent/JPS5987109A/en
Publication of JPS5987109A publication Critical patent/JPS5987109A/en
Publication of JPH0362529B2 publication Critical patent/JPH0362529B2/ja
Granted legal-status Critical Current

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  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
  • Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、円筒状のセラミツク部品製作方法に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for manufacturing cylindrical ceramic parts.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

第1図に示すように例えば外径3mm及び内径
0.125mmの小型円筒状のセラミツク部品1を、外
周面及びその内周面の真円度並びに外周面と内周
面との同軸度をそれぞれ例えば1μm以内に精密
加工するには、従来においては、穴あけを金属加
工に用いられたドリル加工、放電加工、電解加工
等により行い、外径仕上げを研削加工により行つ
ている。この場合、穴あけと外径仕上げとの二つ
の加工法が用いられるので、通常、最初に外周面
を加工したのち、加工した外周面をチヤツクに把
持して加工基準とし、穴あけを行つている。この
場合、穴内周面の真円度及び外周面と内周面との
同軸度は、チヤツクによる外周面の把持のされ方
及び外周面の真円度により決定される。しかる
に、セラミツク部品を半焼成の状態でチヤツクに
把持させると、チヤツクの把握力によりセラミツ
ク部品が変形・破壊するので、高精度の芯出しが
不可能となる。また、セラミツク部品を本焼成後
に、外周面の加工を行うと、セラミツク部品は極
めて硬くなつているので、加工がすこぶる困難と
なるのみならず、加工精度も低下してしまう。し
たがつて、従来においては、セラミツク部品が半
焼成あるいは本焼成のいずれかの状態にあつて
も、円筒状のセラミツク部品を高精度で製作する
ことは困難であつた。
For example, as shown in Figure 1, the outer diameter is 3 mm and the inner diameter is 3 mm.
In order to precisely process a small 0.125 mm cylindrical ceramic component 1 to within 1 μm of the roundness of the outer circumferential surface and its inner circumferential surface, and the coaxiality of the outer circumferential surface and the inner circumferential surface, for example, the conventional method is as follows. Holes are drilled using metal processing techniques such as drilling, electrical discharge machining, and electrolytic machining, and the outer diameter is finished by grinding. In this case, two processing methods are used: drilling and finishing the outer diameter, so usually the outer peripheral surface is processed first, and then the processed outer peripheral surface is held in a chuck and used as a processing reference to perform drilling. In this case, the roundness of the inner circumferential surface of the hole and the coaxiality between the outer circumferential surface and the inner circumferential surface are determined by the way the outer circumferential surface is gripped by the chuck and the circularity of the outer circumferential surface. However, if a chuck grips a ceramic part in a semi-fired state, the gripping force of the chuck deforms and destroys the ceramic part, making highly accurate centering impossible. Further, if the outer circumferential surface of the ceramic part is machined after the main firing, the ceramic part is extremely hard, so it not only becomes extremely difficult to machine it, but also reduces the machining accuracy. Therefore, in the past, it has been difficult to manufacture cylindrical ceramic parts with high precision even when the ceramic parts are in either a semi-fired or fully fired state.

〔発明の目的〕[Purpose of the invention]

本発明は、上記事情を参酌してなされたもの
で、円筒状のセラミツク部品を高精度で製作する
ことのできるセラミツク部品製作方法を提供する
ことを目的とする。
The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a method for manufacturing ceramic parts that can manufacture cylindrical ceramic parts with high precision.

〔発明の概要〕[Summary of the invention]

加圧成形又は半焼成された円柱状のセラミツク
からなる被加工物の一端部を円筒状の治具に保持
させて、治具部分をチヤツクに把持させ外周面仕
上げ穴加工を行つたのち本焼成させるものであ
る。
One end of the workpiece made of pressure-formed or semi-fired cylindrical ceramic is held in a cylindrical jig, the jig is gripped by a chuck, the outer circumferential surface is finished and holes are machined, and then the final firing is performed. It is something that makes you

〔発明の実施例〕[Embodiments of the invention]

以下、本発明を図面を参照して、実施例に基づ
いて詳述する。
Hereinafter, the present invention will be described in detail based on examples with reference to the drawings.

まず、セラミツク粉体を加圧成形することによ
り円柱状の被加工物2を得る。この被加工物2の
一端部には、テーパ部2aが形成されている。こ
の被加工物2は長さはチヤツキング代、また外径
は本焼成時における縮み代及び加工代を見込んで
大きめに成形する。つぎに、この加圧成形した被
加工物2を1000℃以下の低い温度で半焼成する。
ただ、この半焼成工程は省略してもよい。しかし
て、上記被加工物2のテーパ部2aが嵌合するテ
ーパ穴3aが設けられた円筒状の治具3のテーパ
穴3aに被加工物2のテーパ部2aを嵌合すると
ともに例えば接着剤などにより両者を一体的に接
合する(第2図参照)。この治具3のテーパ部3
aの内周面は真円度がきわめて高精度になるよう
に加工されている。つぎに、被加工物2が嵌合さ
れている治具3をチヤツク4に把持させる(第3
図参照)。そして、切削加工又は研削加工により
被加工物2の外周面5を加工するとともに、同一
のチヤツク4で把持したままドリル加工により穴
6をあける(第4図参照)。このとき、外径及び
内径とも、本焼成にともなう縮み代分及び仕上げ
代分(例えばラツピング加工分)は残しておく。
つぎの治具3を被加工物2から外し、被加工物2
だけを本焼成する。本焼成後再度テーパ部2aを
治具3にテーパ穴3aを基準にして接着剤等で接
合する。テーパなので治具3と被加工物2の軸心
が確実に一致して、成形後あるいは仮焼成で行な
つた前加工の精度が再現される。そして治具3を
チヤツクし外周の研削仕上げと穴のラツピングを
完了させる。つぎに被加工物2が所要の長さにな
るように例えば第4図A−A′線位置で切断砥石
で切断する。
First, a cylindrical workpiece 2 is obtained by pressure-molding ceramic powder. A tapered portion 2 a is formed at one end of the workpiece 2 . This workpiece 2 is formed to have a large length in consideration of the chucking allowance and an outer diameter taking into consideration the shrinkage allowance and processing allowance during the main firing. Next, this pressure-formed workpiece 2 is semi-baked at a low temperature of 1000°C or less.
However, this semi-baking step may be omitted. Thus, the tapered part 2a of the workpiece 2 is fitted into the tapered hole 3a of the cylindrical jig 3 provided with the tapered hole 3a into which the tapered part 2a of the workpiece 2 is fitted, and at the same time, for example, an adhesive is applied. For example, the two are integrally joined (see Fig. 2). Tapered part 3 of this jig 3
The inner circumferential surface of a is processed so that its roundness is extremely accurate. Next, the chuck 4 is made to grip the jig 3 into which the workpiece 2 is fitted (the third
(see figure). Then, the outer circumferential surface 5 of the workpiece 2 is processed by cutting or grinding, and a hole 6 is made by drilling while the workpiece 2 is held in the same chuck 4 (see FIG. 4). At this time, an allowance for shrinkage and an allowance for finishing (for example, wrapping) due to the main firing are left for both the outer diameter and the inner diameter.
Remove the next jig 3 from the workpiece 2, and
Only the final firing is performed. After the main firing, the tapered portion 2a is again bonded to the jig 3 using an adhesive or the like using the tapered hole 3a as a reference. Because of the taper, the axes of the jig 3 and the workpiece 2 are reliably aligned, and the accuracy of the pre-processing performed after molding or during pre-baking can be reproduced. Then, the jig 3 is turned on to finish grinding the outer periphery and wrapping the hole. Next, the workpiece 2 is cut to a required length using a cutting whetstone, for example, along line A-A' in FIG.

このように、本実施例のセラミツク部品製作方
法は、治具3を介して外径加工及び穴加工を同一
のチヤツクに把持させて連続的に行うようにして
いるので、被加工物2を加圧成形後または半焼成
後の軟い状態で加工することができ、高精度加工
が可能となる。たとえば、外径3mm、長さ5mm、
穴径0.125mmのセラミツク部品の本実施例の方法
を適用した場合、外周面及び内周面の真円度は
1μm、外周面と内周面との同軸度は1μm及び表
面粗さは2μmRnaxの精度で加工することができ
た。
As described above, in the method for manufacturing ceramic parts of this embodiment, the outer diameter machining and hole machining are continuously performed using the jig 3 while being gripped by the same chuck. It can be processed in a soft state after pressure forming or semi-baking, allowing high precision processing. For example, outer diameter 3mm, length 5mm,
When applying the method of this example to a ceramic part with a hole diameter of 0.125 mm, the roundness of the outer and inner circumferential surfaces is
It was possible to process with an accuracy of 1 μm, a coaxiality of 1 μm between the outer circumferential surface and the inner circumferential surface, and a surface roughness of 2 μm R nax .

なお、上記実施例においては、本焼成をさかい
にして2回加工を行つているが、本焼成の後の加
工を省略できる場合には、被加工物2の切断加工
は、本焼成前に行つてもよい。またこの場合、治
具3の穴はテーパ穴3aでなく等径の穴であつて
もよい。そして、この等径穴への被加工物2の締
着は、圧入、焼ばめを利用するのが好ましい。
In the above example, the processing is performed twice after the main firing, but if the processing after the main firing can be omitted, the cutting process of the workpiece 2 can be performed before the main firing. It's good to wear. Moreover, in this case, the hole of the jig 3 may be a hole of equal diameter instead of the tapered hole 3a. It is preferable to use press fitting or shrink fitting to fasten the workpiece 2 into this equal diameter hole.

〔発明の効果〕〔Effect of the invention〕

本発明のセラミツク部品製作方法は、セラミツ
クからなる被加工物を加圧成形状態又は仮焼成状
態において、同一のチヤツクで外径加工と穴加工
を行なうようにしているので加工が容易になると
ともに、加工精度が顕著に向上する。
In the method for manufacturing ceramic parts of the present invention, outer diameter machining and hole machining are performed using the same chuck while a workpiece made of ceramic is in a pressure-formed state or in a pre-sintered state, so that machining is facilitated, and Machining accuracy is significantly improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はセラミツク部品の外観図、第2図は本
発明の一実施例における治具による被加工物の保
持を示す要部断面図、第3図は同じく被加工物の
チヤツクによる把持を示す図、第4図は同じく被
加工物の外径加工と穴加工を示す図である。 1:セラミツク部品、2:被加工物、3:治
具、4:チヤツク。
Fig. 1 is an external view of a ceramic part, Fig. 2 is a sectional view of a main part showing how a workpiece is held by a jig in an embodiment of the present invention, and Fig. 3 is also a diagram showing how a workpiece is held by a chuck. FIG. 4 is a diagram showing the outer diameter machining and hole machining of the workpiece. 1: ceramic parts, 2: workpiece, 3: jig, 4: chuck.

Claims (1)

【特許請求の範囲】[Claims] 1 円筒状のセラミツク部品を製作するセラミツ
ク部品製作方法において、円柱状に加圧成形又は
半焼成された被加工物の一端部を円筒状の治具に
保持させる工程と、上記治具をチヤツクに把持さ
せ上記被加工物の外周面加工及びこの外周面と同
軸の穴あけ加工を上記同一のチヤツクに把持させ
たまま行う工程と、上記外周面加工及び上記穴あ
け加工を行つた被加工物を本焼成する工程とを具
備することを特徴とするセラミツク部品製作方
法。
1. In a ceramic parts manufacturing method for manufacturing cylindrical ceramic parts, there is a step of holding one end of a cylindrical pressure-formed or semi-fired workpiece in a cylindrical jig, and a step of holding the above jig in a chuck. Processing the outer peripheral surface of the workpiece by gripping it and drilling a hole coaxially with the outer peripheral surface while the same chuck grips the workpiece, and firing the workpiece that has been subjected to the outer peripheral surface processing and the hole drilling. A method for manufacturing ceramic parts, comprising the steps of:
JP19675782A 1982-11-11 1982-11-11 Manufacture of ceramic part Granted JPS5987109A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19675782A JPS5987109A (en) 1982-11-11 1982-11-11 Manufacture of ceramic part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19675782A JPS5987109A (en) 1982-11-11 1982-11-11 Manufacture of ceramic part

Publications (2)

Publication Number Publication Date
JPS5987109A JPS5987109A (en) 1984-05-19
JPH0362529B2 true JPH0362529B2 (en) 1991-09-26

Family

ID=16363105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19675782A Granted JPS5987109A (en) 1982-11-11 1982-11-11 Manufacture of ceramic part

Country Status (1)

Country Link
JP (1) JPS5987109A (en)

Also Published As

Publication number Publication date
JPS5987109A (en) 1984-05-19

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