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JPH03239948A - Characteristic measuring method for sheet-like substance - Google Patents

Characteristic measuring method for sheet-like substance

Info

Publication number
JPH03239948A
JPH03239948A JP3805990A JP3805990A JPH03239948A JP H03239948 A JPH03239948 A JP H03239948A JP 3805990 A JP3805990 A JP 3805990A JP 3805990 A JP3805990 A JP 3805990A JP H03239948 A JPH03239948 A JP H03239948A
Authority
JP
Japan
Prior art keywords
voltage
ray tube
sheet
output
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3805990A
Other languages
Japanese (ja)
Inventor
Tetsuya Fujita
藤田 哲哉
Seiji Uehara
上原 誠治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP3805990A priority Critical patent/JPH03239948A/en
Publication of JPH03239948A publication Critical patent/JPH03239948A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To eliminate an error caused by a fluctuation of an X-ray tube applied voltage by deriving in advance in the correction quantity of an analytical curve related to the fluctuation of the X-ray tube applied voltage. CONSTITUTION:In a state that an X-ray tube applied voltage HV is stable, plural reference samples whose basis weight (weight per sheet unit area) BW is different are placed between an X-ray tube 1 and an X-ray detector 4, and an analytical curve in which the basis weight BW and an output I (intensity of transmission X rays) are taken in the horizontal axis and the vertical axis, respectively is generated. In such a state, the reference sample of the basis weight BW in a range used actually is placed between the X-ray tube 1 and the detector 4, and by fluctuating a voltage HV a little, the fluctuated voltage is led to an arithmetic means 8 through a voltage dividing circuit 6 and a voltage detecting means 7, and a relation of the voltage HV and an output fluctuation quantity DELTAI is derived by the arithmetic means 8, and stored in the arithmetic means 8 as the correction quantity of the analytical curve. In such a way, at the time of actual measurement, the fluctuation quantity from a set value is derived by always monitoring the voltage HV, and by adding the correction quantity of the analytical curve to the output I at that time, a correct measured value can be obtained.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、X線管を使用してシート状物質の特性を測定
するシート状物質の特性測定方法に関するものである6 〈従来の技術〉 X線管から放射されるX線を用いたシート状物質特性装
置には金属板等の厚さを測定する厚さ計や紙中の灰分量
を測定する灰分量等がある。ここで用いられるX線管を
用いたX!!発生手段は以下のようになっている。
[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a method for measuring properties of a sheet-like material using an X-ray tube.6 <Prior Art> Sheet material characteristic devices that use X-rays emitted from an X-ray tube include a thickness meter that measures the thickness of a metal plate, and an ash meter that measures the amount of ash in paper. X! using the X-ray tube used here! ! The means of generation is as follows.

以下、従来の技術を図面を用いて説明する。The conventional technology will be explained below with reference to the drawings.

第3図は従来のX線管を用いたX線発生手段の概要図で
ある。
FIG. 3 is a schematic diagram of an X-ray generating means using a conventional X-ray tube.

第3図において、1は熱電子を発生させる電子発生源の
フィラメントF1発生した熱電子を制御(収束)する電
子レンズG、熱電子の衝突によりX線を発生する金属(
ターゲット)及びこれ等を真空雰囲気内に収納するため
の管体B及び窓Wから成るX線管である。2はXIl管
1を駆動するX線管駆動回路であり、例えばフィラメン
トFの一端をカソードにとした時、カソードに/電子レ
ンズG間に直流電源Eが、カソードに/ターゲットT間
に例えば5〜8KeVの高電圧(X線管印加電圧又はタ
ーゲット印加電圧という)HVが夫々接続される構造か
ら成る。
In Fig. 3, reference numeral 1 indicates a filament F as an electron generation source that generates thermoelectrons, an electron lens G that controls (focuses) the generated thermoelectrons, and a metal (1) that generates X-rays by collision of thermoelectrons.
This is an X-ray tube consisting of a target), a tube body B, and a window W for housing the targets in a vacuum atmosphere. 2 is an X-ray tube drive circuit that drives the XIl tube 1. For example, when one end of the filament F is used as a cathode, a DC power supply E is supplied between the cathode and the electron lens G, and a DC power supply E is supplied between the cathode and the target T, for example. It has a structure in which high voltages (referred to as X-ray tube applied voltage or target applied voltage) HV of ~8 KeV are connected to each other.

この様な構成において、フィラメントFに電流を流すと
、熱電子が発生する。この熱電子はカントに〜ターゲッ
トT間に印加されている高電圧Vによる電界で加速され
、電子レンズGで収束されてターゲットTに当たる。こ
の結果、特定のエネルギーの特性X線と連続したエネル
ギースペクトルを持つ制動放射X線が放出される。
In such a configuration, when a current is passed through the filament F, thermoelectrons are generated. These thermoelectrons are accelerated by an electric field caused by a high voltage V applied between the cant and the target T, are focused by an electron lens G, and hit the target T. As a result, bremsstrahlung X-rays having an energy spectrum continuous with a characteristic X-ray of a specific energy are emitted.

この様な構成によって得られるX線を用いたシート状物
質の特性測定装置としては第4図のようなものがある。
There is an apparatus as shown in FIG. 4 that uses X-rays obtained with such a configuration to measure properties of sheet-like materials.

第4図は第3図を用いて構成される従来のシート状物質
の特性測定装置の説明に供する図である。
FIG. 4 is a diagram for explaining a conventional sheet-like material characteristic measuring apparatus constructed using FIG. 3.

第5図は第4図の説明に供する図である。FIG. 5 is a diagram for explaining FIG. 4.

第4図乃至第5図において、3はX線を照射されその特
性が計られる被測定物であるシート状物質(以下「シー
ト」という)、4は透過X線を検出する例えば電離箱の
ようなX線検出器、5は増幅回路である。
In Figures 4 and 5, 3 is a sheet-like material (hereinafter referred to as "sheet") that is the object to be measured by irradiating X-rays and measuring its characteristics, and 4 is a material such as an ionization chamber that detects transmitted X-rays. 5 is an amplifier circuit.

これによれば、X線管1からのX線をシート3に照射し
て、透過したX線の1をX線検出器4で検出して増幅回
1i5を介して得ることで、シート3の特性を測定でき
る。
According to this, the sheet 3 is irradiated with X-rays from the X-ray tube 1, and the transmitted X-rays are detected by the X-ray detector 4 and obtained via the amplification circuit 1i5. Characteristics can be measured.

この時、透過X線の強度(X線検出器の出力)■と、シ
ートの単位面積当たりの重量(坪量)BWは、 1=Io −exp (−tt−BW)    −(1
)の関係がある。但し、μは吸収係数、Ioは透過X線
の強度最大時(透過前の強度)の値を表わす。
At this time, the intensity of transmitted X-rays (output of
). However, μ represents an absorption coefficient, and Io represents a value at the maximum intensity of transmitted X-rays (intensity before transmission).

第5図にこの関係からなるX線のエネルギー分布として
、槽軸に坪量BW、縦軸に出力Iをとった時の検量線を
図示する。
FIG. 5 shows a calibration curve with the basis weight BW on the tank axis and the output I on the vertical axis as an X-ray energy distribution based on this relationship.

ところで、前記出力Iは照射する制動放射X線のエイ・
ルギーによって変動する。即ち、X線管1のターゲラト
ルカソード間に印加しているX線管印加電圧か変動する
と、X線のエネルギー分布即ち検量線(第5図実線)が
破線α(印加電圧大)β(印加電圧小)のように変るこ
ととなる。
By the way, the output I is the rays of the bremsstrahlung X-rays to be irradiated.
It varies depending on the rugi. That is, when the X-ray tube applied voltage applied between the target cathode of the X-ray tube 1 changes, the X-ray energy distribution, that is, the calibration curve (solid line in Figure 5) changes from the broken line α (large applied voltage) to β (applied voltage voltage (low voltage).

〈発明か解決しようとする課題〉 このように従来の技術にあっては、実際のオンライン測
定時に、温度変動その池の理由により高電圧源の出力電
圧が変動することによる出力誤差があるため、これを防
ぐ手段として、必要に応じて温度調整をする必要がある
か、シート状物質の特性測定装置を設!する場所等の条
件等によってはこのような配慮をすることも大変であっ
たりして、場合によってはある程度の出力誤差のあるこ
とも見込まなければならない等使用上不利となることも
ある、という問題点があった。
<Problem to be Solved by the Invention> As described above, in the conventional technology, during actual online measurement, there is an output error due to fluctuations in the output voltage of the high voltage source due to temperature fluctuations. As a way to prevent this, it is necessary to adjust the temperature as necessary or install a device to measure the properties of the sheet material! Depending on the conditions of the location, etc., it may be difficult to take such considerations, and in some cases, it may be disadvantageous in use, such as having to expect a certain amount of output error. There was a point.

本発明は、従来の技術の有するこのような間穎点に鑑み
てなされたものであり、その目的とするところは、特別
な温度調整を行なうことなく、簡単な回路千F2を追加
するだけで、X@管のターゲラトルカソード間に印加し
ているX線管印加電圧が変ることによって生じる出力誤
差を除くことかできるシート状物質の特性測定方法を提
供するものである。
The present invention was made in view of the shortcomings of the conventional technology, and its purpose is to simply add a simple circuit of 1,000 F2 without performing any special temperature adjustment. , provides a method for measuring characteristics of a sheet-like material that can eliminate output errors caused by changes in the voltage applied to the X-ray tube between the target cathode of the X@ tube.

く課題を解決するための手段〉 上記目的を達成するために、本発明は、シート状物質を
挟んで一方の側に設けられてこのシート状物質にX線を
照射するX線発生手段と、前記シート状物質の他方の側
に設けられてこのシート状物質を透過したX線を検出す
るX線検出器とを具備して透過X線量からシート状物質
の特性を測定する装置において、測定に先立って前記X
線発生手段のX線管印加電圧の設定値に対する変動量及
びこの変動量に係わる検量線の補1Ejiを測定する各
坪量に対して予め求め、測定時はX線管印加電圧をモニ
ターして設定値からの変動量を把握することでその都度
X線検出器出力における前記検量線の補正量を得、該検
量線の補正量を用いて前記その都度のX線検出器出力を
補圧して前記シート状物質の特性を測定するようにした
方法である。
Means for Solving the Problems> In order to achieve the above object, the present invention provides an X-ray generating means that is provided on one side of a sheet-like material and irradiates the sheet-like material with X-rays; In the apparatus for measuring the properties of the sheet-like material from the amount of transmitted X-rays, the apparatus includes an X-ray detector provided on the other side of the sheet-like material and detects the X-rays transmitted through the sheet-like material. Prior to the above
The amount of variation with respect to the set value of the voltage applied to the X-ray tube of the radiation generating means and the supplement 1Eji of the calibration curve related to this amount of variation are determined in advance for each basis weight to be measured, and the voltage applied to the X-ray tube is monitored during measurement. By understanding the amount of variation from the set value, the amount of correction of the calibration curve in the output of the X-ray detector is obtained each time, and the amount of correction of the calibration curve is used to compensate for the output of the X-ray detector each time. This is a method for measuring the characteristics of the sheet-like material.

く作用〉 (イ)まず、X線管のターゲラトルカソード間のX線管
印加電圧の当初の設定値に対する変動量と、この変動量
によって生じる検量線の補正量とを、測定する各坪量に
対して、予め求めておく。
(a) First, the amount of variation in the voltage applied to the X-ray tube between the target cathode of the X-ray tube with respect to the initially set value, and the amount of correction of the calibration curve caused by this amount of variation, are determined for each basis weight to be measured. Find it in advance.

(ロ)次に、このX線管印加電圧を常にモニタして前記
設定値からの変動量を求める。
(b) Next, the voltage applied to the X-ray tube is constantly monitored to determine the amount of variation from the set value.

(ハ)その上で、その都度の出力値に前記予め求めてお
いた検量線の補正量を加えて正しい測定値を求める。
(c) Then, the correct measured value is determined by adding the correction amount of the calibration curve determined in advance to each output value.

〈実施例〉 実施例について図面を参照して説明する。<Example> Examples will be described with reference to the drawings.

尚、以下の図面において、第3図乃至第5図と重複する
部分は同一番号を付してその説明は省略する。
In the following drawings, parts that overlap with those in FIGS. 3 to 5 are given the same numbers, and the explanation thereof will be omitted.

第1図は本発明のシート状物質の特性測定方法の説明に
供する装置の具体的実施例のプロlり系統図である。又
、第2図は第1図の説明に供する図て゛、りる。
FIG. 1 is a schematic diagram of a specific embodiment of an apparatus for explaining the method for measuring properties of sheet-like materials according to the present invention. Further, FIG. 2 is a diagram used to explain FIG. 1.

第1図において−6は分圧回路、7は電圧検出+段、8
はi寅算手段である。分圧回i6及び電圧検出手段7は
X線管印加電圧を常時モニターする回路であり、この時
に分圧回路6はX線管印加電圧HVか前記したように数
KeVと高電圧であるので、電圧仕様に併せて適当に分
圧して検出するために設けられた(従ってこの回路は必
要に応じて設けられる)ものである。
In Figure 1, -6 is a voltage divider circuit, 7 is a voltage detection + stage, and 8
is an i-calculation means. The voltage dividing circuit i6 and the voltage detecting means 7 are circuits that constantly monitor the voltage applied to the X-ray tube, and at this time, the voltage dividing circuit 6 is a high voltage of several KeV as described above, so that the voltage applied to the X-ray tube is HV. This circuit is provided to appropriately divide and detect the voltage according to the voltage specifications (therefore, this circuit is provided as necessary).

以下にこの様なブロックの動作機能について第2図を併
せて用いながら説明する。
The operating functions of such blocks will be explained below with reference to FIG. 2.

■、X線管印加電圧HVが安定した状態で、X線管1と
X線検出器4との間に坪量BWが異なる複数の基準サン
プルを挟んで、その基準サンプルに対するX線管印加電
圧HVに基づく出力■の変化を、第2図(A)に示すよ
う、な横軸に坪量BWを取り縦軸に出力(透過X線の強
度)■をとった時の、検量線を作成する。
(2) When the X-ray tube applied voltage HV is stable, a plurality of reference samples with different basis weights BW are sandwiched between the X-ray tube 1 and the X-ray detector 4, and the X-ray tube applied voltage is applied to the reference samples. Create a calibration curve for changes in output (■) based on HV, as shown in Figure 2 (A), with basis weight BW on the horizontal axis and output (intensity of transmitted X-rays) on the vertical axis. do.

■1次に、実際に使用する範囲の坪量、即ち第2図(A
>の横軸坪量の中間付近“BW、””の基準サンプルを
X線管/X線検出器間に挟んで、X線管印加電圧HVを
少し変動とさせて、この変動電圧を分圧回路6.電圧検
出手段7を介して演算手段8に導き、そのときのX線検
出器4からの出力■の変動1ΔIとの関係を演算手段8
で求める。
■1st, the basis weight in the range actually used, that is, the basis weight in the range shown in Figure 2 (A
A reference sample of "BW," near the middle of the horizontal axis basis weight of Circuit 6. The voltage is guided to the calculation means 8 via the voltage detection means 7, and the relationship between the fluctuation 1ΔI of the output ■ from the X-ray detector 4 at that time is calculated by the calculation means 8.
Find it with

この関係は、第2図(B)に示すように、横軸をX線管
印加電圧Hv、6軸を出力の変動量ΔIとして表わすこ
とかできる。
This relationship can be expressed as the X-ray tube applied voltage Hv on the horizontal axis and the output variation ΔI on the 6th axis, as shown in FIG. 2(B).

これにより、X線管印加電圧HVの設定値に対する変動
量に対応した出力Iの変動量Δ■が求められる。この出
力の変動量か即ち出力Iによって生じる検量線の補正量
である。
As a result, the variation amount Δ■ of the output I corresponding to the variation amount with respect to the set value of the X-ray tube applied voltage HV is determined. This is the amount of variation in the output, that is, the amount of correction of the calibration curve caused by the output I.

このようにして求められるグラフを、例えばグラフ化し
た数値として或は関数の形で演算手段8の記憶要素に検
量線の補正量として記憶しておく。
The graph obtained in this manner is stored in the memory element of the calculation means 8 as a correction amount of the calibration curve, for example, as a graphed numerical value or in the form of a function.

■、実際の測定時においてX線管印加電圧を常にモニタ
ーして設定値からの変動量を把握することて゛その都度
出力値に検量線の補正量を加え、正しい測定値を得るた
めに、具体的に、X線検出器4/増幅回路5の出力Iと
同時にX線管印加電圧Hvf)電圧検出手段7の出力と
をもとに、演算手段8て゛X線管印加電圧変動量から検
量線の補正量を求め、出力値にこの補正量を加えて正し
い出力値を算出する。
■During actual measurements, it is necessary to constantly monitor the voltage applied to the X-ray tube and understand the amount of variation from the set value.In order to obtain correct measured values, the amount of calibration curve correction is added to the output value each time. Specifically, based on the output I of the X-ray detector 4/amplifying circuit 5 and the output of the X-ray tube applied voltage (Hvf) voltage detection means 7, the calculation means 8 calculates a calibration curve from the amount of variation in the X-ray tube applied voltage. The correct output value is calculated by calculating the correction amount and adding this correction amount to the output value.

以上により、温度変動等に基因する印加電圧変動を常に
補正した形での正しい坪量を求めることができる。
As described above, it is possible to obtain the correct basis weight in a form that always corrects applied voltage fluctuations caused by temperature fluctuations and the like.

尚、最初に作成しておく補正量は、測定範囲の中間付近
だけでなく、いくつかの坪量について予め求めておけば
、より正しい補正ができる。
It should be noted that more accurate correction can be achieved if the correction amounts that are created first are calculated in advance for several basis weights, not just those near the middle of the measurement range.

〈発明の効果〉 本発明は、以上説明したように測定するので、実際のオ
ンライン測定においては、誤差要因の1つであったX線
管印加電圧の変動による誤差の影響を除くことができる
から、実用上十分の効果を得ることができる。
<Effects of the Invention> Since the present invention performs measurements as described above, it is possible to eliminate the influence of errors caused by fluctuations in the voltage applied to the X-ray tube, which was one of the error factors in actual online measurements. , sufficient practical effects can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明のシート状物質の特性測定方法を説明す
るための装置である具体的実施例のブロック系統図、第
2図は第1図の説明に供する図、第3図は従来のX線管
を用いたX線発生手段の概要図、第4図は第3図を用い
て構成される従来のシート状物質の特性測定装置の説明
に供する図、第5図は第4図の説明に供する図である。 1・・・X線管、2・・・X線管駆動回路、3・・・シ
ート 状物質(シ ト)、 ・・検出器、 ・・増幅回路、 ・・分圧回路、 ・・電圧検出手段、 ・・演算手段。
FIG. 1 is a block system diagram of a specific embodiment of the device for explaining the method for measuring properties of sheet-like materials according to the present invention, FIG. 2 is a diagram used to explain FIG. 1, and FIG. A schematic diagram of an X-ray generating means using an X-ray tube, FIG. 4 is a diagram used to explain a conventional property measuring device for sheet-like materials configured using FIG. 3, and FIG. It is a figure provided for explanation. DESCRIPTION OF SYMBOLS 1...X-ray tube, 2...X-ray tube drive circuit, 3...sheet-like material (sheet), ...detector, ...amplification circuit, ...voltage dividing circuit, ...voltage detection means , ... calculation means.

Claims (1)

【特許請求の範囲】 シート状物質を挟んで一方の側に設けられてこのシート
状物質にX線を照射するX線発生手段、前記シート状物
質の他方の側に設けられてこのシート状物質を透過した
X線を検出するX線検出器を具備して透過X線量からシ
ート状物質の特性を測定する装置において、測定に先立
って前記X線発生手段のX線管印加電圧の設定値に対す
る変動量及びこの変動量に係わる検量線の補正量を測定
する各坪量に対して予め求め、 測定時はX線管印加電圧をモニターして設定値からの変
動量を把握することでその都度X線検出器出力における
前記検量線の補正量を得、該検量線の補正量を用いて前
記その都度のX線検出器出力を補正して前記シート状物
質の特性を測定するシート状物質の特性測定方法。
[Claims] An X-ray generating means provided on one side of the sheet-like material to irradiate the sheet-like material with X-rays, and an X-ray generating means provided on the other side of the sheet-like material to irradiate the sheet-like material In an apparatus that is equipped with an X-ray detector that detects the transmitted X-rays and measures the characteristics of a sheet material from the amount of transmitted X-rays, prior to the measurement, the setting value of the voltage applied to the X-ray tube of the X-ray generating means is The amount of variation and the correction amount of the calibration curve related to this amount of variation are determined in advance for each basis weight to be measured, and during measurement, the voltage applied to the X-ray tube is monitored to understand the amount of variation from the set value. Obtaining the correction amount of the calibration curve in the X-ray detector output, and using the correction amount of the calibration curve to correct the X-ray detector output each time to measure the characteristics of the sheet-like material. Characteristic measurement method.
JP3805990A 1990-02-19 1990-02-19 Characteristic measuring method for sheet-like substance Pending JPH03239948A (en)

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Application Number Priority Date Filing Date Title
JP3805990A JPH03239948A (en) 1990-02-19 1990-02-19 Characteristic measuring method for sheet-like substance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3805990A JPH03239948A (en) 1990-02-19 1990-02-19 Characteristic measuring method for sheet-like substance

Publications (1)

Publication Number Publication Date
JPH03239948A true JPH03239948A (en) 1991-10-25

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JP3805990A Pending JPH03239948A (en) 1990-02-19 1990-02-19 Characteristic measuring method for sheet-like substance

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JP (1) JPH03239948A (en)

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