JPH03234032A - Work storage equipment and transfer equipment - Google Patents

Abstract

PURPOSE:To generate no failures such as work deformation in such a design that the work storage jig is not slit, has a capacity for works in a number accordant with the height of works, and can be supplied with works by horizontal drop by equipping the mechanism for horizontally holding works with the mechanism for transferring works, which transfers works to the horizontally drops and store them into the work storing jig. CONSTITUTION:Works 13 are transferred by a transfer arm 1 along a transfer rail 2 from a sealing device, fed to a horizontally holding block 3 of the horizontally holding mechanism, which then holds them by the magnetic force of a magnet 15 built in a movable block 4. A work 13 once held horizontal by the holding block 3 is released from the magnetic force upon retreat of cylinders 5 connected to the respective movable blocks 4, dropped horizontally to a jig 6 provided below, sensed by a sensor fixed in the jig measurement station of a drive unit 9, and stored one after another.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a manufacturing apparatus for semiconductor devices, and particularly relates to a technique that is effective when used in a manufacturing apparatus for manufacturing a device that uses a flat lead frame for sealing. It is something.

[Conventional technology]

In manufacturing semiconductor devices, flat lead frames are often used. Among these, for single items, which may be used singly or in multiples, 1. For example, flat package glass (
FPG), and a multiple series type is used, for example, in a daily in-line package (DIP).

In the manufacture of semiconductor devices, lead frames are used to manufacture them, and deep bonding is used.

Products that have been sealed by wire bonding (hereinafter referred to as workpieces) are often subjected to a marking or plating process while remaining as a lead frame after sealing. For this reason, it is necessary to store the workpiece in a jig or the like and transport it, or to transport it after storing it in a jig or the like and then transporting the stored workpiece out.

Conventionally, in devices that use such flat lead frames, a jig with a groove formed in the jig is used due to the structure of the device that stores the jig. Generally, the lead frame is moved by the groove pitch and the lead frame is inserted. As an example of such a configuration, Japanese Patent Application Laid-Open No. 1-7
There is No. 5326.

[Problem to be solved by the invention]

However, in the above-mentioned products, since the lead frame is inserted into the structure, the grooves are formed in the frame storage jig with a certain pitch, so it is inevitable that Extra space is required between the grooves, and the number of storage spaces is limited.
There was a problem that the number of storage jigs increased.

Furthermore, although the above-mentioned known example is an improvement on insertion, in those that do not have a structure like the above-mentioned known example, it is difficult to insert the workpiece due to the structure of the groove,
There was also the problem that the workpiece would be bent or defective due to poor insertion.

The present invention aims to solve the above-mentioned problems and provide a storage device and a carry-out device that can accommodate and carry out jigs without problems.

[Means to solve the problem]

A summary of typical inventions disclosed in this application is as follows.

In other words, in the workpiece storage device, a workpiece storage jig without a groove is used (at the opening of the jig, a mechanism for holding the workpiece horizontally and a mechanism for transferring the workpiece to the horizontal holding mechanism) are used. The workpiece storage device is characterized in that the workpiece is transferred to a horizontal holding mechanism, then horizontally falls onto a jig for storing the workpiece, and is stored in the jig.

In addition, the workpiece unloading device similarly uses a workpiece storage jig that does not have grooves (), and uses a mechanism installed at the bottom of the jig to push up the stored workpiece and a mechanism to push it up to a predetermined position. This workpiece unloading device is characterized by comprising a mechanism for horizontally holding the arrived workpiece and a mechanism for transporting the horizontally held workpiece.

[Effect]

According to the above-mentioned means, the groove is formed in the workpiece storage jig, so that the number of workpieces corresponding to the height of the workpieces can be stored in the jig.

Further, since the workpiece can be fed into the jig by horizontally falling, a storage device can be provided that does not cause defects such as deformation of the workpiece.

Furthermore, stacked workpieces can be carried out without any problems.

[Embodiment 1] Fig. 1 is a perspective view showing a work storage device according to the first embodiment of the present invention, and Figs. 2 and 3 show the horizontal holding mechanism of the embodiment shown in Fig. 1. FIG. 3 is a cross-sectional view showing the operation.

In this embodiment, the workpiece 13 to be stored is a single iron lead frame sealed with a ceramic base and a cap.

This embodiment includes a transport mechanism that horizontally transports a workpiece 13 sealed by a sealing device (not shown), a horizontal holding mechanism provided on an extension of the transport mechanism, and a storage mechanism provided below the horizontal holding mechanism. It consists of

The transport mechanism consists of a transport rail 2 for horizontally transporting a workpiece 13 sealed with a cap by a sealing device (not shown), and a transport arm 1 for transporting the workpiece 13 on the transport rail 2. A horizontal holding mechanism for holding the workpiece is provided on the extension of the transport mechanism.

The horizontal holding mechanism consists of a horizontal holding block 3 and a movable block 4 provided inside the horizontal holding block 3. Movable block 4
A permanent magnet 15 is provided inside, and the oJ moving block 3 is configured to be moved back and forth by a cylinder 5 connected to the rear thereof.

The storage mechanism consists of a jig receiver 7 that holds the jig 6, a pedestal 11 attached to a movable plate 14 that holds the jig receiver 7, and a cylinder 10 that drives the movable plate 14. 1 A movable part 12 is attached to the pedestal 11,
The jig 6 can be brought down and taken out. The pedestal 11 and the jig receiver 7 are provided on two sides, respectively, and when a certain number of workpieces are stored in the jig, the cylinder 10 is driven and the jig is immediately removed. Inside the jig 6 provided at the bottom of the horizontal block 3, there is a work table 8 for holding the work within the jig, which can be moved up and down by the operation of a drive unit 9. A stopper (not shown) is attached to the jig 6 to prevent the stored work 13 from falling even when the work table 8 is finally lowered to the lower part of the jig.

The operation of this embodiment will be explained below.

A workpiece 13 to be stored in this embodiment is transported from a sealing device (not shown) on a transport rail 2 by a transport arm 11C, and is sent to a horizontal holding block 3 of a horizontal holding mechanism.

The horizontal holding block 3 is extended at a position close to the workpiece 13 with a cylinder 5 operating therein. Therefore, the workpiece 13 is held within the horizontal holding block 3 by the magnetic force of the magnet 15 provided inside the movable block 4. At this time, in order to keep the magnetic forces of the magnets inside the movable block 4 on the left and right sides of the workpiece 13 almost the same, the workpiece 13 is held horizontally without contacting the movable block 4.

The workpiece 13, which has been held horizontally by the holding block 3, is simultaneously released from the magnetic force by the cylinders 5 connected to the movable block 4 retracting, and the workpiece 13 is released from the magnetic force by the jig provided at the bottom. Fall horizontally to 6. A work table 8 is installed inside a jig 7 provided at the bottom of the horizontal holding block 3 by the operation of a drive unit 9.

The structure is such that the workpiece 13 that falls horizontally from the horizontal holding block 3 falls down about one side. This drive unit 9 detects the workpiece 13 by a sensor attached to the jig measuring section (not shown), and detects the workpiece 13.
As the workpieces 13 are stored one after another, the falling width of the workpieces 13 stored inside the horizontal holding block 3 and the jig 7 is constantly adjusted to maintain a constant distance (so that the workpieces 13 gradually descend downwards). It became (・ru.

In this way, when a certain number of works 13 are stored in the jig 6, the cylinder 10 is activated and replaced with an empty jig placed next to it. Thereafter, the work table 8 is lifted up and removed from the inside of the replaced jig to a predetermined position, and preparations are made for storing the work. With such a configuration, workpieces can be continuously stored in the jig.

According to the non-example, the cap-sealed workpiece can be stored in the jig without any trouble.

[Embodiment 2] FIG. 4 is a partially sectional perspective view showing the main parts of a workpiece storage device according to a second embodiment of the present invention.
The work 19 to be stored is sealed using a flat multi-lead frame. The storage apparatus in this embodiment is related to work storage in an apparatus in which, for example, a marking process after sealing a lead frame is carried out on an extension of a transport rail (not shown).

In this embodiment, in order to carry out the marking process for each sealing part of a semiconductor device, the workpiece 19 is pitch-fed for each individual sealing part, and finally the entire workpiece 19 is held horizontally. sent in block 16.

The pitch-fed workpiece 19 is held horizontally by the magnetic force of the magnet 20 attached to the movable block 18.

When the workpiece 19 is entirely held horizontally by the horizontal holding block 16, the iiJ moving block 18 is moved back, released from the magnetic force, and dropped horizontally, similarly to the SGL embodiment described above. Although the jig 21 for horizontally dropping the work 19 is not shown, a jig similar to that shown in the first embodiment can be formed to fit the work 19 and used.

According to this embodiment, a workpiece using a multiple lead frame can be fitted! Can be stored in an INK jig.

[Embodiment 3] FIG. 5 is a partially sectional perspective view showing the main part of a third embodiment of the present invention.

In this embodiment, the work to be carried out is as follows.

This is almost the same as that shown in the first embodiment. Further, the apparatus of this embodiment is used to supply a workpiece to an apparatus for a marking process, a cutting process, or the like.

In this embodiment, the conveyance rail 27 is attached to the front stage of a marking device (not shown). Furthermore, the jigs, work tables, etc. used can be the same as those shown in the first embodiment. In the device of this embodiment, the horizontal holding block 24 is integrated and has a magnet 26 attached inside. The work table 30 provided inside the jig 25 is configured to rise to a height where it is held by the magnetic force of a magnet 26 provided inside the horizontal holding block 24. When the workpiece 13 is held by the horizontal holding block 24, the workpiece 130
The distal end of the carry-out arm 28 is hooked to the frame and the paper is conveyed on the conveyance rail 27 by pulling it.

According to this embodiment, the workpiece 13 stored in the jig can be carried out by using a simple structure carrying mechanism.

The present invention has been described above in terms of its use in manufacturing a semiconductor device, which is the background of the present invention. However, the present invention is not limited to the above-described embodiments, and without departing from the scope of the present invention. Needless to say, it can be changed (・.

For example, the magnet used in the horizontal holding block 9 may be an electromagnet. Using an electromagnet eliminates the need for a movable block. Further, by changing the horizontal holding block for the unloading device, it is also possible to use a work unloading device similar to the workpiece shown in the second embodiment.

[BRIEF DESCRIPTION OF THE DRAWINGS] Fig. 1 is a partially sectional perspective view of a workpiece storage device which is an embodiment of the present invention, and Figs. 2 and 3 are horizontal views of the workpiece storage device shown in Fig. 1. FIG. 4 is a sectional view of a main part to explain the operation of the holding block; FIG. 4 is a schematic perspective view of a main part to show a second embodiment of the present invention. FIG. 5 is a partially sectional perspective view showing a third embodiment of the present invention. l, 23...Transportation arm, 2.22.2'7...Transportation rail, 3,16...Horizontal holding block (storage device), 4.18...Movable block, 5.17...・Cylinder, 6.21...Jig, 7...Jig receiver, 8,3
0... Work table, 9... Drive unit, 10
...Cylinder (for movable plate drive), 12...Movable part,
13... Work (single item), 14... Movable plate, 15,
20.26...Magnet, 24...Horizontal holding block (
unloading device). Figure 1

Claims (1)

[Scope of Claims] 1. In an apparatus for storing a work in a jig for storing the work, a mechanism for holding the work horizontally, a mechanism for transferring the work to the horizontal holding mechanism, and a mechanism for transferring the work to the horizontal holding mechanism, and a A workpiece storage device characterized by having a mechanism for storing a workpiece. 2. A device for carrying out a workpiece from a jig in which the workpiece is stored, a mechanism provided at the bottom of the jig for pushing up the stored workpiece; a mechanism for horizontally holding the workpiece that has reached a predetermined position by the pushing up mechanism; A workpiece unloading device comprising: a mechanism for transporting a horizontally held workpiece.