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JPH03169559A - Manufacture of ink jet head - Google Patents

Manufacture of ink jet head

Info

Publication number
JPH03169559A
JPH03169559A JP30820189A JP30820189A JPH03169559A JP H03169559 A JPH03169559 A JP H03169559A JP 30820189 A JP30820189 A JP 30820189A JP 30820189 A JP30820189 A JP 30820189A JP H03169559 A JPH03169559 A JP H03169559A
Authority
JP
Japan
Prior art keywords
head substrate
plastic
nozzle
nozzle plate
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30820189A
Other languages
Japanese (ja)
Inventor
Nobuaki Okazawa
宣昭 岡沢
Takahiro Naka
隆廣 中
Kazuhiko Hara
和彦 原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP30820189A priority Critical patent/JPH03169559A/en
Publication of JPH03169559A publication Critical patent/JPH03169559A/en
Pending legal-status Critical Current

Links

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To prevent a failure in ink flying caused by the misregistration of a nozzle plate to a substrate and the clogging of nozzle holes with an adhesive by a method wherein after a plastic or metallic nozzle plate is bonded to a plastic head substrate provided with a base of a polymeric resin, the nozzle holes are made by a laser or drill. CONSTITUTION:Firstly, a plastic head substrate 1 is injection molded with a plurality of flow paths 3 using a base of a polymeric resin, such as polysulfone. On the other hand, a nickel plate 4 provided with a line of psi50-psi60mum nozzle machining holes 4a is electroformed. After that, a plastic nozzle plate 2, the material of which is not particularly limited, is bonded on the head substrate 1 on the opposite side to the flow paths 3. The nickel plate 4 is brought into close contact with the plastic nozzle plate 2 bonded on the head substrate 1. Nozzle holes 3a are made through the plastic nozzle plate 2 and the adhesive layer 7 by a laser beam 6 so that the head substrate 1 is perforated. After the nozzle holes 3a are made, the flow paths 3 are washed, and a diaphragm 8 made of the same material as the head substrate 1 is bonded on the head substrate 1 on the opposite side to the front of the nozzle.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、インク滴を飛翔させて記録9某体上を,画像
を形成するインクジェットヘッドの製造方法に関するも
のである. 〔従来の技術〕 プラスチック基板でインクジェットヘッドのノズルに使
用できる程度の極小径穴を開けることは、射出成形法で
は不可能なため、従来は予め穴開けされた金属ノズル板
を基板に接着することによってインクジェットヘッドを
製造していた。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method of manufacturing an inkjet head that forms an image on a recording medium by ejecting ink droplets. [Prior art] Since it is impossible to make holes in a plastic substrate with a diameter small enough to be used for the nozzles of an inkjet head using the injection molding method, conventionally, a metal nozzle plate with pre-drilled holes is glued to the substrate. manufactured inkjet heads.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、上述の方法ではノズル板と基板との間で
位置ずれが生じ、また接着剤によるノズルの目づまりが
生じてインク滴の飛翔を著しく悪化させるという問題が
あった. 〔課題を解決するための手段〕 このような問題を解決するために本発明の方法では、高
分子樹脂を基材とするプラスチック製ヘッド基板にプラ
スチック製あるいは金属製ノズルプレートを接合した後
、前記ノズルプレートに対し、レーザあるいはドリルで
前記ヘッド基板の流路に連通ずるノズル穴を加工するよ
うにした.〔作用〕 ノズルプレートを接着した後、ノズルの穴開け加工を化
す事により、ノズルプレートと基板の位置ずれによるイ
ンクの飛翔不良と、接着剤によるノズル穴づまりが防止
される. 〔実施例〕 以下に本発明方法の実施例にっレ\て図而を参照して説
明する。
However, the above-mentioned method has the problem that misalignment occurs between the nozzle plate and the substrate, and the nozzle is clogged by the adhesive, which significantly worsens the flight of ink droplets. [Means for Solving the Problems] In order to solve such problems, in the method of the present invention, after a plastic or metal nozzle plate is bonded to a plastic head substrate whose base material is a polymer resin, A nozzle hole that communicates with the flow path of the head substrate is machined on the nozzle plate using a laser or a drill. [Function] By drilling holes in the nozzle after bonding the nozzle plate, it is possible to prevent ink from flying poorly due to misalignment between the nozzle plate and the substrate, and from clogging the nozzle hole due to adhesive. [Examples] Examples of the method of the present invention will be described below with reference to the drawings.

第1図は特許請求の範囲(1)に記載した発明に関する
第l実施例の説明図である。本実施例では、まず射出成
形により、流路3が複数成形されている、ポリサルフォ
ン、ポリエーテルサルフォン、ポリカーボネート等の高
分子樹脂を基材としたプラスチック製ヘッド基板1を成
形する。また、φ50〜φ60μmのノズル加工用穴4
aを列状に配したニッケル製プレート4を電紡しておく
.その後、材質は特に限定しないプラスチック製ノズル
プレート2を接着剤7でヘッド基板1の流路3のない側
に接着する(第1図(a))。次いで、ヘッド基板1に
接着したプラスチック製ノズルブレート2の上にニッケ
ル製プレート4を密着させ、レーザ光(例えば、エキシ
マレーザー)6により、ヘッド基板1に連通ずるように
プラスチック製ノズルプレート2および接着層7にノズ
ル穴3aを開ける(第1図(b))。なお、ニッケル製
プレート4はノズルプレート位置決め用ダボ5により位
置決めする.ノズル穴3aを開けた後、流路3を洗浄し
、ヘッド基板1と同材質の振動板8をノズル前面と反対
側に接合する(第1図(C))。
FIG. 1 is an explanatory diagram of a first embodiment of the invention set forth in claim (1). In this embodiment, first, a plastic head substrate 1 made of a polymer resin such as polysulfone, polyethersulfone, or polycarbonate, on which a plurality of channels 3 are formed, is molded by injection molding. In addition, a hole 4 for nozzle processing with a diameter of 50 to 60 μm is also available.
Electrospun a nickel plate 4 on which a is arranged in a row. Thereafter, a nozzle plate 2 made of plastic, which is not particularly limited in material, is adhered to the side of the head substrate 1 where the flow path 3 is not provided with an adhesive 7 (FIG. 1(a)). Next, a nickel plate 4 is closely attached to the plastic nozzle plate 2 bonded to the head substrate 1, and a laser beam (for example, an excimer laser) 6 is used to connect the plastic nozzle plate 2 and the bond so that it communicates with the head substrate 1. A nozzle hole 3a is made in the layer 7 (FIG. 1(b)). The nickel plate 4 is positioned using a nozzle plate positioning dowel 5. After opening the nozzle hole 3a, the flow path 3 is cleaned, and a diaphragm 8 made of the same material as the head substrate 1 is bonded to the side opposite to the front surface of the nozzle (FIG. 1(C)).

第2図は特許請求の範囲(1〉に記載した発明に関する
第2実施例の説明図である.前記プラスチック製ヘッド
基板1を射出或形し、前記ニッケル製プレート4を用意
する.その後、ヘッド基板1と同材質のプラスチック振
動板8を、ヘッド基板1の流路3のある側の面に溶着す
る(第2図(a))。次にプラスチック製ノズルプレー
ト2を接着剤7でヘッド基板1に接着する。ヘッド基板
1に接着したプラスチック製ノズルプレート2の上にニ
ッケル製プレート4を密着させ、レーサ光(例えば、エ
キシマレーザー)6によりヘッド基板1の流路3に連通
するようにプラスチック製ノズルプレート2、及び接着
層7にノズル穴3aを開ける(第2図(b)(c))。
FIG. 2 is an explanatory diagram of a second embodiment of the invention described in claim (1).The plastic head substrate 1 is injected or shaped, and the nickel plate 4 is prepared.Then, the head A plastic diaphragm 8 made of the same material as the substrate 1 is welded to the surface of the head substrate 1 on the side where the flow path 3 is located (FIG. 2(a)).Next, the plastic nozzle plate 2 is attached to the head substrate with adhesive 7. A nickel plate 4 is adhered to the plastic nozzle plate 2 adhered to the head substrate 1, and a plastic nozzle plate 4 is bonded to the head substrate 1 so that it communicates with the flow path 3 of the head substrate 1 using a laser beam (for example, an excimer laser) 6. Nozzle holes 3a are made in the manufactured nozzle plate 2 and the adhesive layer 7 (FIGS. 2(b) and 2(c)).

なお、ニッケル製プレート4は、ノズルプレート位置決
め用ダボ5により位置決めする。
Note that the nickel plate 4 is positioned by a nozzle plate positioning dowel 5.

第3図は特許請求の範囲(1)に記載した発明に関する
第3実施例の説明図である。前記プラスチック製ヘッド
基板1を射出或形し、前記ニッケル製プレート4を用意
する. その後、ヘッド基板1と同材質のプラスチック製ノズル
プレート12をヘッド基板1の流路3側と反対側に溶着
する(第3図(a))。ヘッド基板1に溶着したプラス
チック製ノズルプレート12の上にニッケル製プレート
4を密着させ、レーザ光(例えば、エキシマレーザー)
6によりヘッド基板1の流路に連通するようにプラスチ
ック製ノズルプレートl2にノズル穴3aを開ける〈第
3図(b)〉。なお、ニッケル製プレート4はノズルプ
レート位置決め用ダボ5により位置決めする。ノズル穴
3aを開けた後、ヘッド基板1と同材質の振動板8を流
路3のある側に溶着する(第3図(c)). 第4図は特許請求の範囲(1)に記載した発明に関する
第4実施例の説明図である.前記プラスチック製ヘッド
基板1を射出或形し、前記ニッケル製プレート4を用意
する.その後、ヘッド基板1と同材質のプラスチック振
動板8を、ヘッド基板1の流路3のある側の面に溶着す
る(第4図(a)).次に、ヘッド基板1と同材質のプ
ラスチック製ノズルプレート12を溶剤でヘッド基板1
に溶着する.ヘッド基板1に溶着したプラスチック製ノ
ズルプレート12の上にニッケル製プレート4を密着さ
せ、レーザ光(例えば、エキシマレーザー)6によりヘ
ッド基板1の流路3に連通するようにプラスチック製ノ
ズルプレート12にノズル穴3aを開ける(第4図(b
)(c)).  なお、ニッケル製プレート4はノズル
プレート位置決め用ダボ5により位置決めする. 第5図は特許請求の範囲(2)に記載した発明に関する
第1実施例の説明図である。前記プラスチック製ヘッド
基板1を射出成形し、前記ニッケル製プレート4をヘッ
ド基板1の流路3のない側に接着剤7により接着する.
次いでニッケル製プレート4の列状の穴4aを目標にし
て、ニッケル製プレート4と接着層7にノズル穴開け加
工を径φ60μm〜φ70μmのドリル9で施す(第5
図(a)(b)).  その後流路を洗浄し、ヘッド基
板■と同材質のプラスチック振動板8をヘッド基板1の
流路3のある側の面に溶着する(第5図(C))。
FIG. 3 is an explanatory diagram of a third embodiment of the invention described in claim (1). The plastic head substrate 1 is injection-molded and the nickel plate 4 is prepared. Thereafter, a plastic nozzle plate 12 made of the same material as the head substrate 1 is welded to the opposite side of the flow path 3 of the head substrate 1 (FIG. 3(a)). A nickel plate 4 is closely attached to the plastic nozzle plate 12 welded to the head substrate 1, and a laser beam (for example, excimer laser) is applied to the plastic nozzle plate 12.
6, a nozzle hole 3a is made in the plastic nozzle plate l2 so as to communicate with the flow path of the head substrate 1 (FIG. 3(b)). The nickel plate 4 is positioned by a nozzle plate positioning dowel 5. After opening the nozzle hole 3a, a diaphragm 8 made of the same material as the head substrate 1 is welded to the side where the flow path 3 is located (FIG. 3(c)). FIG. 4 is an explanatory diagram of a fourth embodiment of the invention set forth in claim (1). The plastic head substrate 1 is injection-molded and the nickel plate 4 is prepared. Thereafter, a plastic diaphragm 8 made of the same material as the head substrate 1 is welded to the surface of the head substrate 1 on the side where the channel 3 is located (FIG. 4(a)). Next, apply a solvent to the plastic nozzle plate 12 made of the same material as the head substrate 1.
Weld to. A nickel plate 4 is closely attached to the plastic nozzle plate 12 welded to the head substrate 1, and a laser beam (for example, an excimer laser) 6 is applied to the plastic nozzle plate 12 so as to communicate with the flow path 3 of the head substrate 1. Open the nozzle hole 3a (Fig. 4(b)
)(c)). The nickel plate 4 is positioned using a nozzle plate positioning dowel 5. FIG. 5 is an explanatory diagram of a first embodiment of the invention set forth in claim (2). The plastic head substrate 1 is injection molded, and the nickel plate 4 is adhered to the side of the head substrate 1 on which the flow path 3 is not provided using an adhesive 7.
Next, aiming at the row-shaped holes 4a of the nickel plate 4, nozzle drilling is performed on the nickel plate 4 and the adhesive layer 7 using a drill 9 with a diameter of 60 μm to 70 μm.
Figures (a) (b)). Thereafter, the channel is cleaned, and a plastic diaphragm 8 made of the same material as the head substrate 1 is welded to the surface of the head substrate 1 on the side where the channel 3 is located (FIG. 5(C)).

第6図は特許請求の範囲(2〉に記載した発明に関する
第2実施例の説明図である。前記プラスチック製ヘッド
基板1を射出成形し、ニッケル、ステンレス等の材質の
穴開けされていない金属製プレート14を、ヘッド基板
1の流路3のない側に接着剤7により接着する。次いで
、前記金B製プレート14と接着M7にノズル穴開け加
工を径φ60μm〜φ70μmのドリル9で施す(第6
図(a)(b)).  その後、流路を洗浄し、ヘッド
基板1と同材質のプラスチック振動板8を、ヘッド基仮
1の流路3を覆う面に溶着する(第6図(c)). 〔発明の効果〕 以上説明したように本発明においては、高分子樹脂を基
材とするプラスチック製ヘッド基板にプラスチック製あ
るいは金属製ノズルプレートを接合した後、レーザある
いはドリルによりノズル六開けをする事により、高精度
の穴を開けることが可能となり、またノズル穴が接着剤
で詰る恐れもなくなる.
FIG. 6 is an explanatory view of a second embodiment of the invention described in claim (2). The gold B plate 14 is adhered to the side of the head substrate 1 where there is no flow path 3 using the adhesive 7. Next, the gold B plate 14 and the adhesive M7 are drilled using a drill 9 with a diameter of 60 μm to 70 μm. 6th
Figures (a) (b)). Thereafter, the flow path is cleaned, and a plastic diaphragm 8 made of the same material as the head substrate 1 is welded to the surface of the head base 1 that covers the flow path 3 (FIG. 6(c)). [Effects of the Invention] As explained above, in the present invention, after a plastic or metal nozzle plate is bonded to a plastic head substrate based on a polymer resin, six nozzles are opened using a laser or a drill. This makes it possible to drill holes with high precision and eliminates the risk of the nozzle hole becoming clogged with adhesive.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)(b)(c)は本発明のレーザ加工による
第1実施例の説明図、第2図(a)(b)(C)は本発
明のレーザ加工による第2実施例の説明図、第3図(a
)(b)(c)は本発明のレーザ加工による第3実施例
の説明図、第4図(a)(b)(c)は本発明のレーザ
加工による第4実施例の説明図、第5図(a)(b)(
c)は本発明のドリル加工による第1実施例の説明図、
第6図(a)(b)(C)は本発明のドリル加工による
第2実施例の説明図である。 1・・・ヘッド基板 2・・・プラスチック製ノズルプレート3・・・流路 3a・・・ノズル穴 4・・・ニッケル製穴開きプレート 5・・・位置決め用ダボ 6・・・レーザ光 7・・・接着層 8・・・プラスチック製振動板 l2・・・ヘッド基板1と同材質のプラスチック製ノズ
ルプレート 14・・・金属製ノズルプレート 以  上
FIGS. 1(a), (b), and (c) are explanatory diagrams of a first embodiment by laser processing of the present invention, and FIGS. 2(a), (b), and (C) are illustrations of a second embodiment by laser processing of the present invention. Explanatory diagram of Figure 3 (a
), (b), and (c) are explanatory diagrams of the third embodiment by laser processing of the present invention, and Figures 4(a), (b, and c) are explanatory diagrams of the fourth embodiment by laser processing of the present invention, Figure 5 (a) (b) (
c) is an explanatory diagram of the first embodiment by drilling according to the present invention;
FIGS. 6(a), 6(b), and 6(C) are explanatory diagrams of a second embodiment of the drilling process according to the present invention. 1... Head board 2... Plastic nozzle plate 3... Channel 3a... Nozzle hole 4... Nickel perforated plate 5... Positioning dowel 6... Laser beam 7. ...Adhesive layer 8...Plastic diaphragm l2...Plastic nozzle plate 14 made of the same material as the head substrate 1...Metal nozzle plate or higher

Claims (2)

【特許請求の範囲】[Claims] (1)高分子樹脂を基材とするプラスチック製ヘッド基
板にプラスチック製ノズルプレートを接合した後、前記
プラスチック製ノズルプレートに対し、レーザで前記ヘ
ッド基板の流路に連通するノズル穴を加工する事を特徴
とするインクジェットヘッドの製造方法。
(1) After a plastic nozzle plate is bonded to a plastic head substrate made of polymer resin as a base material, a nozzle hole that communicates with the flow path of the head substrate is formed in the plastic nozzle plate using a laser. A method for manufacturing an inkjet head characterized by:
(2)高分子樹脂を基材とするプラスチック製ヘッド基
板に金属製ノズルプレートを接合した後、前記金属製ノ
ズルプレートに対し、ドリルで前記ヘッド基板の流路に
連通するノズル穴を加工する事を特徴とするインクジェ
ットヘッドの製造方法。
(2) After joining a metal nozzle plate to a plastic head substrate made of polymer resin as a base material, use a drill to drill a nozzle hole in the metal nozzle plate that communicates with the flow path of the head substrate. A method for manufacturing an inkjet head characterized by:
JP30820189A 1989-11-28 1989-11-28 Manufacture of ink jet head Pending JPH03169559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30820189A JPH03169559A (en) 1989-11-28 1989-11-28 Manufacture of ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30820189A JPH03169559A (en) 1989-11-28 1989-11-28 Manufacture of ink jet head

Publications (1)

Publication Number Publication Date
JPH03169559A true JPH03169559A (en) 1991-07-23

Family

ID=17978137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30820189A Pending JPH03169559A (en) 1989-11-28 1989-11-28 Manufacture of ink jet head

Country Status (1)

Country Link
JP (1) JPH03169559A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0885212A (en) * 1994-09-19 1996-04-02 Ricoh Co Ltd Nozzle plate of ink jet head and its manufacture
JPH08503176A (en) * 1992-11-12 1996-04-09 ケトーネン,ラウリ,カレルボ Color marking device in cutting flange of felling device
JPH08207291A (en) * 1994-07-14 1996-08-13 Hitachi Koki Co Ltd Manufacture of ink jet recording head and recording device
EP0782923A4 (en) * 1995-07-14 1997-10-22 Seiko Epson Corp Laminated head for ink jet recording, production method thereof, and printer equipped with the recording head
US5948290A (en) * 1992-04-21 1999-09-07 Canon Kabushiki Kaisha Method of fabricating an ink jet recording head
US6158843A (en) * 1997-03-28 2000-12-12 Lexmark International, Inc. Ink jet printer nozzle plates with ink filtering projections
US6183064B1 (en) 1995-08-28 2001-02-06 Lexmark International, Inc. Method for singulating and attaching nozzle plates to printheads
JP2008542076A (en) * 2005-05-28 2008-11-27 ザール テクノロジー リミテッド Passivation of print head assembly and its components
JP2017154179A (en) * 2016-02-29 2017-09-07 ゼロックス コーポレイションXerox Corporation Method for ablating openings in unsupported layers

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5948290A (en) * 1992-04-21 1999-09-07 Canon Kabushiki Kaisha Method of fabricating an ink jet recording head
JPH08503176A (en) * 1992-11-12 1996-04-09 ケトーネン,ラウリ,カレルボ Color marking device in cutting flange of felling device
JPH08207291A (en) * 1994-07-14 1996-08-13 Hitachi Koki Co Ltd Manufacture of ink jet recording head and recording device
JPH0885212A (en) * 1994-09-19 1996-04-02 Ricoh Co Ltd Nozzle plate of ink jet head and its manufacture
US6332254B1 (en) 1995-07-14 2001-12-25 Seiko Epson Corporation Process for producing a laminated ink-jet recording head
US6158847A (en) * 1995-07-14 2000-12-12 Seiko Epson Corporation Laminated ink-jet recording head, a process for production thereof and a printer equipped with the recording head
EP0782923A4 (en) * 1995-07-14 1997-10-22 Seiko Epson Corp Laminated head for ink jet recording, production method thereof, and printer equipped with the recording head
US6836940B2 (en) 1995-07-14 2005-01-04 Seiko Epson Corporation Process for producing a laminated ink-jet recording head
US6183064B1 (en) 1995-08-28 2001-02-06 Lexmark International, Inc. Method for singulating and attaching nozzle plates to printheads
US6323456B1 (en) 1995-08-28 2001-11-27 Lexmark International, Inc. Method of forming an ink jet printhead structure
US6158843A (en) * 1997-03-28 2000-12-12 Lexmark International, Inc. Ink jet printer nozzle plates with ink filtering projections
JP2008542076A (en) * 2005-05-28 2008-11-27 ザール テクノロジー リミテッド Passivation of print head assembly and its components
US8911060B2 (en) 2005-05-28 2014-12-16 Xaar Technology Limited Passivation of printhead assemblies and components therefor
JP2017154179A (en) * 2016-02-29 2017-09-07 ゼロックス コーポレイションXerox Corporation Method for ablating openings in unsupported layers

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