JPH03108629A - Detection of gas pipeline leakage - Google Patents
Detection of gas pipeline leakageInfo
- Publication number
- JPH03108629A JPH03108629A JP1246706A JP24670689A JPH03108629A JP H03108629 A JPH03108629 A JP H03108629A JP 1246706 A JP1246706 A JP 1246706A JP 24670689 A JP24670689 A JP 24670689A JP H03108629 A JPH03108629 A JP H03108629A
- Authority
- JP
- Japan
- Prior art keywords
- capsule
- test paper
- gas
- detection
- color test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims description 12
- 239000002775 capsule Substances 0.000 claims abstract description 18
- 238000004040 coloring Methods 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims abstract description 3
- 239000004065 semiconductor Substances 0.000 claims abstract description 3
- 231100001261 hazardous Toxicity 0.000 claims description 2
- 238000007689 inspection Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000009428 plumbing Methods 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体材料ガス或いは危険有害ガス等の配管系
接続継手部のリーク検知方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for detecting leaks of semiconductor material gases, hazardous gases, etc. at piping system connection joints.
第３図は、このような工場配管系のガスリーク検知方法
の一例を示すフロア−断面図である。第３図において、
ボンベボックスｌからパイプ２により製造装置４まで配
管を行う際途中配管継手３により接続を行う方法は従来
技術としては公知の通りである。FIG. 3 is a floor cross-sectional view showing an example of such a method for detecting gas leaks in a factory piping system. In Figure 3,
The method of connecting piping from the cylinder box 1 to the manufacturing apparatus 4 via the pipe 2 using the intermediate piping joint 3 is well known in the prior art.
ところが配管パイプ２に接続継手３などを使用した場合
拡散型ガス検知器６を天上部に取つけリークが発生した
場合の対処方法では有害ガスは大気で空気と反応または
希釈され高感度の検知器５が必要となる。また検知した
場合もその作業フロア−７が空調ダクト８により全体的
に充満して危険性があるという欠点があった。However, when a connection fitting 3 or the like is used for the plumbing pipe 2, a diffusion type gas detector 6 is mounted on the ceiling and a leak occurs. 5 is required. Further, even when such air is detected, there is a drawback that the work floor 7 is completely filled with the air conditioning duct 8, which poses a danger.
本発明は配管パイプ及び継手は従来のそのままで既存の
配管系である。近年配管施行は溶接技術も進歩している
ので問題はないが、特に古い配％？（既存）の継手部に
外部よりカプセルを取付け、その内部の継手部に巻き付
けるように色試験紙を入れ、カプセル内にリークして溜
まったガスで着色度合により日常点検等で即座にガス配
管リーク検知する方法を提供するものである。In the present invention, the existing piping system is used, with the piping pipes and joints remaining as they are in the past. In recent years, welding technology has improved in piping construction, so there is no problem, but what about old piping? Attach a capsule to the (existing) joint from the outside, insert a color test paper so as to wrap it around the joint inside the capsule, and check the degree of coloring from the gas that leaks and accumulates inside the capsule to immediately detect gas pipe leaks during daily inspections, etc. This provides a method for detection.
以下、本発明の実施例を第１図により説明する。 Embodiments of the present invention will be described below with reference to FIG.
配管系そのものは第３図に示す従来と変りはない。配管
パイプ２の接続継手３に検知カプセル６を設けその内部
に着色試験紙を入れである。The piping system itself is the same as the conventional one shown in FIG. A detection capsule 6 is provided at the connection joint 3 of the plumbing pipe 2, and a colored test paper is placed inside the detection capsule 6.
第２図は第１図の検知カプセル６の丸で囲んだ部分の拡
大図である。第２−１図は成型加工された検知カプセル
６を２つ割りにしたものを合せた側面図であり、第２−
２図は同型のものを片面のみ取りつけた状態で継手部に
巻きつけるように着色試験紙６−３を巻き付はゴムバッ
キング６−１を乗せ、もう片面も同様にして継手に挟む
ようにしてネジ６−２で複数個所固定する。またカプセ
ルは耐腐食性で内部が観察出来るように透明加工を施し
である。FIG. 2 is an enlarged view of the encircled portion of the detection capsule 6 in FIG. FIG. 2-1 is a side view of the molded detection capsule 6 divided into two parts.
In Figure 2, the same type of test paper 6-3 is attached to one side only, and the colored test paper 6-3 is wrapped around the joint, and the rubber backing 6-1 is placed on it, and the other side is also attached in the same way, with the screw 6 -2 to fix multiple locations. The capsule is also corrosion-resistant and has a transparent finish so that the inside can be observed.
このような配管系にリーク検知用カプセルを取付けるこ
とにより大気にリークさせることなく敏速に検知するこ
とで安全な処置が出来、作業に支障なく生産効率を上げ
ることが出来る。また、従来の方法では高感度検知器が
必要であったが、本発明の方法で高価な検知器は装置内
の検知或いはボンベ保管場所のリーク検知に廻すことが
出来る。By attaching a leak detection capsule to such a piping system, it is possible to quickly detect leakage without causing it to leak into the atmosphere, allowing safe treatment and increasing production efficiency without hindering work. Furthermore, while the conventional method requires a highly sensitive detector, the method of the present invention allows an expensive detector to be used for detection inside the device or for leak detection in the cylinder storage area.
第１図は本発明の一実施例を示すフロア−断面図、第２
図は本発明の実施した検知カプセルの組立て分解図、第
３図は従来の一例を示すフロア−断面図のガス検知器設
置図である。
ｌ・・・・・・ボンベボックス、２・・・・・・配管パ
イプ、３・・・・・配管継手、４・・・・・・製造装置
、５・・・・・・検知器、６・・・・・検知カプセル、
６−１・・・・・・ゴムバッキング、６−２・・・・・
・止めネジ、６−３・・・・・・着色試験紙、７・・・
・・・作業フロア−８・・・・・・空調ダクト。FIG. 1 is a floor cross-sectional view showing one embodiment of the present invention, and FIG.
The figure is an exploded assembly view of a detection capsule according to the present invention, and FIG. 3 is a floor sectional view showing the installation of a gas detector, showing a conventional example. l...Cylinder box, 2...Plumbing pipe, 3...Piping joint, 4...Manufacturing equipment, 5...Detector, 6 ...detection capsule,
6-1...Rubber backing, 6-2...
・Set screw, 6-3...Colored test paper, 7...
...Working floor-8...Air conditioning duct.
Claims (1)
ンの配管接続部分にカプセル（密閉容器）を取付けカプ
セル内に色試紙を入れ、その反応着色でリーク状態を検
知することを特徴とする配管系リーク検知方法A piping system leak detection method characterized by attaching a capsule (sealed container) to the piping connection part of a piping line that handles semiconductor material gas or hazardous gas, placing a color test paper inside the capsule, and detecting the leak state by the reaction coloring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1246706A JPH03108629A (en) | 1989-09-22 | 1989-09-22 | Detection of gas pipeline leakage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1246706A JPH03108629A (en) | 1989-09-22 | 1989-09-22 | Detection of gas pipeline leakage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03108629A true JPH03108629A (en) | 1991-05-08 |
Family
ID=17152427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1246706A Pending JPH03108629A (en) | 1989-09-22 | 1989-09-22 | Detection of gas pipeline leakage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03108629A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108731880A (en) * | 2018-05-03 | 2018-11-02 | 北京华电中试电力工程有限责任公司 | SF in a kind of high-voltage isulation equipment6Gas detection method and system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5482283A (en) * | 1977-12-13 | 1979-06-30 | Sumitomo Metal Ind | Method and tape for detecting fluid leakage |
| JPS60100027A (en) * | 1983-11-05 | 1985-06-03 | Toshiba Corp | Leakage detector |
| JPH0283441U (en) * | 1988-12-16 | 1990-06-28 |
-
1989
- 1989-09-22 JP JP1246706A patent/JPH03108629A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5482283A (en) * | 1977-12-13 | 1979-06-30 | Sumitomo Metal Ind | Method and tape for detecting fluid leakage |
| JPS60100027A (en) * | 1983-11-05 | 1985-06-03 | Toshiba Corp | Leakage detector |
| JPH0283441U (en) * | 1988-12-16 | 1990-06-28 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108731880A (en) * | 2018-05-03 | 2018-11-02 | 北京华电中试电力工程有限责任公司 | SF in a kind of high-voltage isulation equipment6Gas detection method and system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3949596A (en) | Leak test fixture and method for using same | |
| WO2014109605A1 (en) | Vacuum-pipe connecting member able to detect whether there is a leak | |
| ATE263364T1 (en) | LEAK DETECTION AND LOCATION IN A LANDFILL | |
| WO2006093935A3 (en) | Apparatus and process for leak-testing and qualification of fluid dispensing vessels | |
| KR101495784B1 (en) | Device for collecting and leak detecting of gas pipeline | |
| JP2004309379A (en) | Gas leakage detector | |
| CN109654377B (en) | A pipeline leak detection device | |
| KR101503652B1 (en) | Gas detector and flange assembly for connecting pipe having the same | |
| JP3971683B2 (en) | Double piping equipment | |
| JPH0513568B2 (en) | ||
| JPH03108629A (en) | Detection of gas pipeline leakage | |
| KR200285924Y1 (en) | Gas Leakage Detection Device of Piping Joint | |
| JP2001108181A (en) | Joint | |
| JPH09133603A (en) | Method and apparatus for inspection of airtightness of composite insulating tube | |
| JPS60100027A (en) | Leakage detector | |
| JPH0532764Y2 (en) | ||
| KR102280987B1 (en) | Leak management system using a leak detection clamp | |
| KR200262600Y1 (en) | Apparatus for detecting the gas leakage | |
| DE50205496D1 (en) | Monitoring device of liquid-carrying pipelines | |
| JP2001059794A (en) | Method and device for inspecting airtightness of pipe joint part | |
| CN215832952U (en) | Glove testing tool | |
| JPH082557Y2 (en) | Existing piping cover | |
| JPH067344Y2 (en) | ▲ High ▼ Gas leak detection device for furnace bleeder valve | |
| CN221745422U (en) | A civil air-tightness detection device | |
| JPH0791600A (en) | Gas leakage detector |