JPH0298640U - - Google Patents
Info
- Publication number
- JPH0298640U JPH0298640U JP724489U JP724489U JPH0298640U JP H0298640 U JPH0298640 U JP H0298640U JP 724489 U JP724489 U JP 724489U JP 724489 U JP724489 U JP 724489U JP H0298640 U JPH0298640 U JP H0298640U
- Authority
- JP
- Japan
- Prior art keywords
- clean gas
- transport box
- main body
- box main
- storage section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Packages (AREA)
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の一実施例のウエハカセツト搬
送箱を示す斜視図である。
１……搬送箱本体、２……蓋、４……清浄気体
収容ボンベ、６……ノズル、７……清浄気体供給
配管。
FIG. 1 is a perspective view showing a wafer cassette transport box according to an embodiment of the present invention. 1... Transport box body, 2... Lid, 4... Clean gas storage cylinder, 6... Nozzle, 7... Clean gas supply piping.
Claims (1)
、この搬送箱本体に着脱自在に付設された清浄気
体収容部と、この清浄気体収容部から清浄気体を
前記搬送箱本体内に供給する清浄気体供給部とを
備えていることを特徴とするウエハカセツト搬送
箱。 A transport box main body that stores wafer cassettes therein, a clean gas storage section detachably attached to the transport box main body, and a clean gas supply section that supplies clean gas from the clean gas storage section into the transport box main body. A wafer cassette transport box characterized by comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007244U JPH0735396Y2 (en) | 1989-01-25 | 1989-01-25 | Wafer cassette transport box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007244U JPH0735396Y2 (en) | 1989-01-25 | 1989-01-25 | Wafer cassette transport box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0298640U true JPH0298640U (en) | 1990-08-06 |
| JPH0735396Y2 JPH0735396Y2 (en) | 1995-08-09 |
Family
ID=31212092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989007244U Expired - Lifetime JPH0735396Y2 (en) | 1989-01-25 | 1989-01-25 | Wafer cassette transport box |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735396Y2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003007813A (en) * | 2001-06-20 | 2003-01-10 | Nec Corp | Storing box for semiconductor wafer, carrying device, carrying method and storage house |
| CN103662424A (en) * | 2012-09-21 | 2014-03-26 | 上海航天精密机械研究所 | Packing case with vibration reduction and seal storage and transportation functions |
| JP2017212322A (en) * | 2016-05-25 | 2017-11-30 | 信越ポリマー株式会社 | Substrate housing container and management system therefor and management method for substrate housing container |
| JP2017212323A (en) * | 2016-05-25 | 2017-11-30 | 信越ポリマー株式会社 | Substrate housing container and management system therefor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55134239A (en) * | 1979-04-04 | 1980-10-18 | Toshiba Corp | Clean box |
| JPS6218317U (en) * | 1985-07-18 | 1987-02-03 |
-
1989
- 1989-01-25 JP JP1989007244U patent/JPH0735396Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55134239A (en) * | 1979-04-04 | 1980-10-18 | Toshiba Corp | Clean box |
| JPS6218317U (en) * | 1985-07-18 | 1987-02-03 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003007813A (en) * | 2001-06-20 | 2003-01-10 | Nec Corp | Storing box for semiconductor wafer, carrying device, carrying method and storage house |
| CN103662424A (en) * | 2012-09-21 | 2014-03-26 | 上海航天精密机械研究所 | Packing case with vibration reduction and seal storage and transportation functions |
| CN103662424B (en) * | 2012-09-21 | 2016-06-08 | 上海航天精密机械研究所 | The tr of a kind of band vibration damping, sealing storing |
| JP2017212322A (en) * | 2016-05-25 | 2017-11-30 | 信越ポリマー株式会社 | Substrate housing container and management system therefor and management method for substrate housing container |
| JP2017212323A (en) * | 2016-05-25 | 2017-11-30 | 信越ポリマー株式会社 | Substrate housing container and management system therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0735396Y2 (en) | 1995-08-09 |