JPH0240835A - Manufacture of fluorescent display panel - Google Patents
Manufacture of fluorescent display panelInfo
- Publication number
- JPH0240835A JPH0240835A JP19153088A JP19153088A JPH0240835A JP H0240835 A JPH0240835 A JP H0240835A JP 19153088 A JP19153088 A JP 19153088A JP 19153088 A JP19153088 A JP 19153088A JP H0240835 A JPH0240835 A JP H0240835A
- Authority
- JP
- Japan
- Prior art keywords
- assembly
- electrode plate
- substrate
- sealing material
- display panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000011521 glass Substances 0.000 claims abstract description 41
- 239000003566 sealing material Substances 0.000 claims abstract description 17
- 125000006850 spacer group Chemical group 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims description 50
- 238000000034 method Methods 0.000 claims description 10
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- 238000010030 laminating Methods 0.000 claims description 2
- 238000004026 adhesive bonding Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 230000008929 regeneration Effects 0.000 abstract 1
- 238000011069 regeneration method Methods 0.000 abstract 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- SEPPVOUBHWNCAW-FNORWQNLSA-N (E)-4-oxonon-2-enal Chemical compound CCCCCC(=O)\C=C\C=O SEPPVOUBHWNCAW-FNORWQNLSA-N 0.000 description 1
- LLBZPESJRQGYMB-UHFFFAOYSA-N 4-one Natural products O1C(C(=O)CC)CC(C)C11C2(C)CCC(C3(C)C(C(C)(CO)C(OC4C(C(O)C(O)C(COC5C(C(O)C(O)CO5)OC5C(C(OC6C(C(O)C(O)C(CO)O6)O)C(O)C(CO)O5)OC5C(C(O)C(O)C(C)O5)O)O4)O)CC3)CC3)=C3C2(C)CC1 LLBZPESJRQGYMB-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、コンピュータ等の図形1文字を表示するため
の端末機、メツセージボードの如き多桁の文字、数字を
表示するのに用いられる表示器等の蛍光表示パネルの製
造方法の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention is applicable to terminals for displaying one character in a figure such as a computer, and a display used for displaying multi-digit characters and numbers such as a message board. This invention relates to improvements in the manufacturing method of fluorescent display panels such as containers.
(従来技術)
最近、大面積化、低電圧化のためにセル型の蛍光表示パ
ネルが提案されている。この蛍光表示パネルは、フェー
スガラス基板と、背面基板と、フェースガラス基板の上
面に成膜して形成された陽極電極と蛍光体層と、フェー
スガラス基板と背面基板との間にスペーサを介してM層
されたフィラメント電極板及びグリッド電極板とから成
っている。この蛍光表示パネルは、フィラメント電極と
陽極電極との間に常にlθ〜30V程度の直流電圧をか
け、グリッド電極に数十Vの低い電圧パルスをかけて点
灯/非点灯の選択を行なって駆動することができる。従
来技術では、この蛍光表示パネルは、フェースガラス基
板とフィラメント電極板とグリッド電極板とスペーサと
をそれらの間にフリットガラスの如き低融点封止材を塗
布し、加熱圧着して大気中またはN2Ar等の不活性ガ
ス中で對止し、このようにして組み立てられた積層部品
と背面基板とを1O−4〜I O−’Torr程度の高
真空下て脱ガスベーキング処理または水素置換処理を行
なった後、積層部品と背面基板との間に設けられたはん
だまたはフリットガラスの如き封止材を局部加熱してこ
れらの間を刃止し、バリウムゲッタを高周波加熱して飛
ばすことによって蛍光表示パネルの動作に必要な10−
’Torr程度の高真空を得ていた。(Prior Art) Cell-type fluorescent display panels have recently been proposed in order to increase the area and reduce the voltage. This fluorescent display panel consists of a face glass substrate, a rear substrate, an anode electrode and a phosphor layer formed on the upper surface of the face glass substrate, and a spacer interposed between the face glass substrate and the rear substrate. It consists of an M-layered filament electrode plate and a grid electrode plate. This fluorescent display panel is driven by constantly applying a DC voltage of about lθ~30V between the filament electrode and the anode electrode, and applying a low voltage pulse of several tens of V to the grid electrode to select whether to turn on or off. be able to. In the conventional technology, this fluorescent display panel is manufactured by coating a face glass substrate, a filament electrode plate, a grid electrode plate, and a spacer with a low-melting point sealing material such as frit glass between them, heat-pressing them, and exposing them to air or N2Ar. The laminated parts and the back substrate assembled in this way are subjected to a degassing baking treatment or a hydrogen substitution treatment under a high vacuum of about 1 O-4 to I O-' Torr. After that, the sealing material such as solder or frit glass provided between the laminated component and the back substrate is locally heated to seal the gap between them, and the barium getter is heated with high frequency and blown away to form a fluorescent display panel. 10- necessary for the operation of
A high vacuum of around 'Torr was obtained.
(発明が解決しようとする課WJ)
しかし、この従来技術の方法では、多数の積層部品を非
真空下で積層するので封止不良個所が相当に増加する上
にこの封止不良が背面基板を取付ける段階まで分からな
いし、また積層部品と背面基板との間の封止が不良であ
ると、補修再生ができない欠点がありだ。(Problem WJ to be solved by the invention) However, in this conventional method, a large number of laminated components are laminated in a non-vacuum environment, so the number of sealing defects increases considerably. It is not known until the installation stage, and if the sealing between the laminated parts and the back board is defective, there is a drawback that it cannot be repaired and remanufactured.
本発明の目的は、上記の欠点を回避し、有効に封止する
ことができ、また補修再生が可能な蛍光表示パネルを製
造する方法を提供することにある。An object of the present invention is to provide a method for manufacturing a fluorescent display panel that avoids the above-mentioned drawbacks, can be effectively sealed, and can be repaired and recycled.
(課題を解決するための手段)
本発明は、上記の課題を解決するために、フェースガラ
ス基板と、背面基板と、フェースガラス基板の上面に成
膜して形成された陽極電極と蛍光体層と、フェースガラ
ス基板と背面基板との間にスペーサを介して積層された
フィラメント電極板及びグリッド電極板とから成る蛍光
表示パネルを製造する方法において、フィラメント電極
板とグリッド電極板とその間のスペーサとを相互の間に
封止材を介して積層し形成された組立体をフェースガラ
ス基板の上面に封止材を介して載せ、この組立体を囲む
ようにガラスフェース基板の上面に同様に封止材を介し
て枠体な載せ、この枠体の上に同様に封止材を介して背
面基板を載せて枠体から排気しつつ全体を加熱してフェ
ースガラス基板、枠体、背面基板及び組立体を相互に一
体に接着することを特徴とする蛍光表示パネルの製造方
法を提供するものである。(Means for Solving the Problems) In order to solve the above problems, the present invention provides a face glass substrate, a rear substrate, an anode electrode and a phosphor layer formed by forming a film on the upper surface of the face glass substrate. A method for manufacturing a fluorescent display panel comprising a filament electrode plate and a grid electrode plate laminated between a face glass substrate and a rear substrate with a spacer in between, the filament electrode plate, the grid electrode plate and the spacer therebetween. are laminated with a sealing material between them, and the formed assembly is placed on the top surface of the face glass substrate via the sealing material, and the assembly is similarly sealed on the top surface of the glass face substrate so as to surround this assembly. The frame is placed on the frame through the sealing material, and the back substrate is placed on top of the frame through the sealing material, and the whole is heated while exhausting air from the frame to heat the face glass substrate, the frame, the back substrate, and the assembly. The present invention provides a method for manufacturing a fluorescent display panel characterized by bonding three-dimensional objects together.
このようにフィラメント電極板とグリッド電極板との請
居組立体をフェースガラス基板と枠体と背面基板とで囲
み、これらを−括して真空引きしつつ加熱融着すると、
高い封止性能で全体を封止することがてきる。In this way, the assembly of the filament electrode plate and the grid electrode plate is surrounded by the face glass substrate, the frame body, and the back substrate, and when these are collectively heated and fused while being evacuated,
The entire structure can be sealed with high sealing performance.
(実施例)
本発明の実施例を図面を参照して詳細に説明すると、第
1図は蛍光表示パネル10を製造する本発明の方法を示
し、この蛍光表示パネル10は、フェースガラス基板1
2と、ガラス等から形成することができる背面基板14
と、フェースガラス基板12の上面に順次成膜して形成
された陽極電極16及び蛍光体層18(第3図参照)と
、フェースガラス基板12と背面基板14との1ill
に図示しないスペーサを介して積層されたフィラメント
電極板20及び複数枚のグリッド電極板22とから成っ
ている。陽8i電極16は、ITO(I nt Ox
・Snow )の如き透明材料をRFスパッタリング法
によって約2000人の厚みで成膜して形成することが
でき、また蛍光体層18は、ZnO: Znを同様にR
Fスパッタリング法または化学気相法によって約200
0人の厚みで成膜して形成することができる。尚、第1
図において符号24はフィラメント電極板20と背面基
板14との間に記数されたスペーサである0図示の実施
例では、フェースガラス基板12は、第3図に示すよう
に、その上面にアルミニウム、ニッケルの如き金属を直
流スパッタリング法によって3000〜5000人の厚
みで成膜して形成された陽極端子16a、フィラメント
電極端子20a及びグリッド電極端子22aを有する。(Embodiment) An embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a method of the present invention for manufacturing a fluorescent display panel 10, which includes a face glass substrate 1
2, and a rear substrate 14 that can be formed from glass or the like.
1ill of the anode electrode 16 and the phosphor layer 18 (see FIG. 3) formed by sequentially forming films on the upper surface of the face glass substrate 12, and the face glass substrate 12 and the rear substrate 14.
It consists of a filament electrode plate 20 and a plurality of grid electrode plates 22 which are laminated with a spacer (not shown) in between. The positive 8i electrode 16 is made of ITO (IntOx
The phosphor layer 18 can be formed by forming a transparent material such as ZnO:
Approximately 200% by F sputtering method or chemical vapor phase method
It can be formed by forming a film with a thickness of 0. Furthermore, the first
In the figure, reference numeral 24 is a spacer marked between the filament electrode plate 20 and the rear substrate 14. In the illustrated embodiment, the face glass substrate 12 has aluminum on its upper surface, as shown in FIG. It has an anode terminal 16a, a filament electrode terminal 20a, and a grid electrode terminal 22a, which are formed by forming a film of metal such as nickel to a thickness of 3,000 to 5,000 layers using a DC sputtering method.
本発明の方法では、先ず、第1図に示すように、フィラ
メント電極板20とグリッド電極板22とその間のスペ
ーサ(図示せず)及びその上下のスペーサ24とを相互
の間にフリットガラスペーストの如き封止材(図示せず
)を介して積層し加熱圧着して組立体26を形成する。In the method of the present invention, first, as shown in FIG. 1, a filament electrode plate 20, a grid electrode plate 22, a spacer (not shown) therebetween, and a spacer 24 above and below the filament electrode plate 20, a grid electrode plate 22, and a frit glass paste are placed between them. The assembly 26 is formed by laminating them with a sealing material (not shown) in between and bonding them under heat.
次いで、この組立体26をフェースガラス基板12の上
面に同様にフリットガラスペーストの如き封止材(図示
せず)を介して載せ、この組立体26を囲むようにガラ
スフェース基板12の上面に同様にフリットガラスペー
ストの如き封止材(図示せず)を介して枠体28を載せ
る。この枠体28は、例えば、ガラスまたは絶縁処理さ
れた426合金の如き金属から形成することができる。Next, this assembly 26 is similarly placed on the upper surface of the glass face substrate 12 via a sealing material (not shown) such as a fritted glass paste, and a similar sealant is placed on the upper surface of the glass face substrate 12 so as to surround this assembly 26. A frame 28 is placed on the frame 28 via a sealing material (not shown) such as frit glass paste. The frame 28 can be made of, for example, glass or a metal such as 426 alloy treated with insulation.
また、この枠体28は、後にのべるように、その内部を
真空引きすべき排気口28aを有する6図示の実施例で
は、既にのべたように、フィラメント電極端子20a及
びグリッド電極端子22aがフェースガラス基板12の
上面に形成されているので第1図に示すようにフィラメ
ント電極板20及びグリッド電極板22はその両端が折
り曲げられてフィラメント電極端子20a及びグリッド
電極端子22aに直接または銅線の如き結合ワイヤ30
を介して接続されている。In addition, as will be described later, in the embodiment shown in FIG. 6, which has an exhaust port 28a for evacuating the inside thereof, the filament electrode terminal 20a and the grid electrode terminal 22a are connected to the face glass. Since the filament electrode plate 20 and the grid electrode plate 22 are formed on the upper surface of the substrate 12, as shown in FIG. wire 30
connected via.
背面基板14は、この枠体28の上に同様にガラスフリ
ットペーストの如き封止材(図示せず)を介して載せら
れる。The rear substrate 14 is similarly placed on the frame 28 via a sealant (not shown) such as glass frit paste.
このようにして組合わされたフェースガラス基板12、
組立体26及び背面基板14は、枠体28の排気口28
aから図示じない真空ポンプの如き真空装置によって排
気しつつ全体を加熱してフェースガラス基板12.枠体
26、背面基板14及び組立体26を相互に一体に接着
する。この場合、(Ha、AI)Niゲッターを高周波
加熱すると、パネル内部をI O−’Torr程度の高
真空にすることができるので好ましい、この真空引き作
業は、第1図に示すように。The face glass substrate 12 combined in this way,
The assembly 26 and the rear substrate 14 are connected to the exhaust port 28 of the frame body 28.
The entire face glass substrate 12.a is heated while being evacuated by a vacuum device such as a vacuum pump (not shown). The frame 26, the back substrate 14, and the assembly 26 are bonded together. In this case, high-frequency heating of the (Ha, AI)Ni getter is preferable because the inside of the panel can be made into a high vacuum of about IO-'Torr, and this evacuation operation is as shown in FIG.
組立体26の各部品に排気時の空気抵抗を減少するため
に切欠き部26aを形成して行なうのが好ましい。It is preferable to form a notch 26a in each part of the assembly 26 to reduce air resistance during exhaust.
(発明の効果)
本発明によれば、上記のように、フィラメント電極板と
グリッド電極板との11i層組立体をフェースガラス基
板と枠体と背面基板とで囲み、これらを−括して真空引
きしつつ加熱融着するので高い封止性部で全体を封止す
ることができるから有効に気密封止された蛍光表示パネ
ルを得ることができ、またこの枠体の真空引きすべき排
気口を通して後に封止状態の点検と補修、再生を行なう
ことができる実益がある。(Effects of the Invention) According to the present invention, as described above, the 11i layer assembly of the filament electrode plate and the grid electrode plate is surrounded by the face glass substrate, the frame body, and the rear substrate, and these are collectively vacuum-treated. Since it is heat-fused while being pulled, the whole can be sealed with a highly sealable part, making it possible to obtain a fluorescent display panel that is effectively hermetically sealed. There is a practical benefit in that the sealing condition can be inspected, repaired, and regenerated later through the process.
第1図は本発明に係る蛍光表示パネルの製造方法を説明
する分解斜視図、第2図は本発明の方法によって製造さ
れた蛍光表示パネルの正面図、第3図は本発明に用いら
れるフェースガラス基板の上面図である。
10−−−−一蛍光表示パネル、12−−−−−フェー
スガラス基板、l 4−−−−一背面基板、16−−−
−−陽極電極、l 8−−−−−蛍光体層、20−−−
−−フィラメント電極板、22−−一−−グリッド電極
板、24−−−m−枠体、26−−−−−組立体、28
−一−−−枠体、28a−−−−一排気口。FIG. 1 is an exploded perspective view illustrating a method of manufacturing a fluorescent display panel according to the present invention, FIG. 2 is a front view of a fluorescent display panel manufactured by the method of the present invention, and FIG. 3 is a face used in the present invention. FIG. 3 is a top view of a glass substrate. 10---- one fluorescent display panel, 12---- face glass substrate, l 4---- one rear substrate, 16----
--Anode electrode, l 8---- Phosphor layer, 20---
--Filament electrode plate, 22--Grid electrode plate, 24--M-frame body, 26-----Assembly, 28
-1---Frame body, 28a---1 exhaust port.
Claims (1)
ス基板の上面に成膜して形成された陽極電極と蛍光体層
と、前記フェースガラス基板と前記背面基板との間にス
ペーサを介して積層されたフィラメント電極板及びグリ
ッド電極板とから成る蛍光表示パネルを製造する方法に
おいて、前記フィラメント電極板とグリッド電極板とそ
の間のスペーサとを相互の間に封止材を介して積層し形
成された組立体を前記フェースガラス基板の上面に封止
材を介して載せ、前記組立体を囲むように前記ガラスフ
ェース基板の上面に同様に封止材を介して枠体を載せ、
前記枠体の上に同様に封止材を介して前記背面基板を載
せて前記枠体から排気しつつ全体を加熱して前記フェー
スガラス基板、枠体、背面基板及び組立体を相互に一体
に接着することを特徴とする蛍光表示パネルの製造方法
。A face glass substrate, a rear substrate, an anode electrode and a phosphor layer formed on the upper surface of the face glass substrate, and a layer laminated with a spacer interposed between the face glass substrate and the rear substrate. In a method for manufacturing a fluorescent display panel comprising a filament electrode plate and a grid electrode plate, an assembly formed by laminating the filament electrode plate, the grid electrode plate, and a spacer therebetween with a sealing material interposed between them. is placed on the upper surface of the glass face substrate via a sealing material, and a frame is similarly placed on the upper surface of the glass face substrate via the sealing material so as to surround the assembly,
Similarly, the rear substrate is placed on the frame via a sealing material, and the whole is heated while exhausting air from the frame to integrate the face glass substrate, the frame, the rear substrate, and the assembly. A method for manufacturing a fluorescent display panel characterized by adhesive bonding.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19153088A JPH0240835A (en) | 1988-07-29 | 1988-07-29 | Manufacture of fluorescent display panel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19153088A JPH0240835A (en) | 1988-07-29 | 1988-07-29 | Manufacture of fluorescent display panel |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0240835A true JPH0240835A (en) | 1990-02-09 |
Family
ID=16276202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19153088A Pending JPH0240835A (en) | 1988-07-29 | 1988-07-29 | Manufacture of fluorescent display panel |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0240835A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6669272B2 (en) * | 2000-01-19 | 2003-12-30 | Yanmar Co., Ltd. | Cabin of back hoe |
-
1988
- 1988-07-29 JP JP19153088A patent/JPH0240835A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6669272B2 (en) * | 2000-01-19 | 2003-12-30 | Yanmar Co., Ltd. | Cabin of back hoe |
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