JPH0240832A - Manufacture of cathode body structure for magnetron - Google Patents
Manufacture of cathode body structure for magnetronInfo
- Publication number
- JPH0240832A JPH0240832A JP18950388A JP18950388A JPH0240832A JP H0240832 A JPH0240832 A JP H0240832A JP 18950388 A JP18950388 A JP 18950388A JP 18950388 A JP18950388 A JP 18950388A JP H0240832 A JPH0240832 A JP H0240832A
- Authority
- JP
- Japan
- Prior art keywords
- lead wire
- cathode
- hat
- cathode body
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims abstract description 37
- 229910052751 metal Inorganic materials 0.000 claims abstract description 24
- 239000002184 metal Substances 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims description 13
- 239000012212 insulator Substances 0.000 claims description 7
- 238000003763 carbonization Methods 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 11
- 238000005255 carburizing Methods 0.000 description 6
- 238000007747 plating Methods 0.000 description 4
- 239000011265 semifinished product Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- WLTSUBTXQJEURO-UHFFFAOYSA-N thorium tungsten Chemical compound [W].[Th] WLTSUBTXQJEURO-UHFFFAOYSA-N 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Microwave Tubes (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、電子レンジ等のマイクロ波加熱機器に用いら
れるマグネトロンの陰極構体の製造方法に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a cathode assembly of a magnetron used in microwave heating equipment such as a microwave oven.
従来の技術
一般に、マグネトロン用陰極構体は第６図に示すように
構成されており、モリブデンからなるセンターおよびサ
イドのリード線１，２は、両リード線１，２の各一端部
を貫通させたセラミ・ツク製コツプ状の絶縁体３および
その底板部外面に気密に封着された一対の端子片４とと
もに、陰極端子導出用のステムを形成している。サイド
のリード線２の他端部には、センターのリード線１を接
触することな（挿通させた円環状の第１のエンドハツト
５が、そして、センターのリード線１の他端部には第２
のエンドハツト６がそれぞれ固着されている。そして、
第１および第２のエンド／％−ｙト５，６間に螺旋状の
陰極本体７が配設されているのであって、第２のエンド
ハツト６の表面にはチタン等からなるゲッタ金属片８が
付設されている。なお、陰極本体７はトリウムタングス
テンからなり、着炭処理によって形成されたタングステ
ン・カーバイトの表面層を有している。また、絶縁体３
の開口端面に径小開口端面を気密に封着してなる鳩目状
の金属管９は、その上に積み重ねられる図外の陽極構体
に気密に封着されるべきフランジ部９ａを有している。Conventional technology In general, a cathode structure for a magnetron is constructed as shown in FIG. Together with a pot-shaped insulator 3 made of ceramic and a pair of terminal pieces 4 hermetically sealed to the outer surface of the bottom plate, a stem for leading out the cathode terminal is formed. At the other end of the side lead wire 2, there is an annular first end hat 5 through which the center lead wire 1 is inserted, without making contact with it, and at the other end of the center lead wire 1 2
end hats 6 are fixed respectively. and,
A spiral cathode body 7 is disposed between the first and second end hats 5 and 6, and a getter metal piece 8 made of titanium or the like is provided on the surface of the second end hat 6. is attached. The cathode body 7 is made of thorium tungsten and has a tungsten carbide surface layer formed by carburization. In addition, insulator 3
The eyelet-shaped metal tube 9, which is formed by airtightly sealing the small-diameter opening end surface to the open end surface of the tube, has a flange portion 9a that is to be hermetically sealed to an anode structure (not shown) stacked thereon. .
このような陰極構体を備えてなるマグネトロンは、第２
のエンドハツト６に付設されたゲッタ金属片８でもって
陰極近傍のガスを効率よく吸着せしめ得るので、とくに
発振動作の立ち上り特性を良好ならしめることができる
。A magnetron equipped with such a cathode structure has a second
Since the getter metal piece 8 attached to the end hat 6 can efficiently adsorb the gas near the cathode, it is possible to particularly improve the rise characteristics of the oscillation operation.
発明が解決しようとする課題
しかし、モリブデン等の高融点金属からなる第２のエン
ドハツト６に、同じく高融点金属たるチタン等のゲッタ
金属片８を溶着するのは容易でな、（、シかも、マグネ
トロンが長期間にわたってオンオフ動作を繰り返してい
るうちに、ゲッタ金属片８が脱落しやすくなる。そこで
、第２のエンドハツト６の表面にゲッタ金属の層を、め
っき等によりあらかじめ一体に積層形成しておくことが
考えられるが、そうすると、着炭処理時における第２の
エンドハツト６が、その表面のゲッタ金属層で着炭処理
用ガスを吸着してしまう結末となる。Problems to be Solved by the Invention However, it is not easy to weld the getter metal piece 8 made of titanium or the like, which is also a high melting point metal, to the second end hat 6 which is made of a high melting point metal such as molybdenum. As the magnetron repeats on-off operations over a long period of time, the getter metal piece 8 tends to fall off.Therefore, a layer of getter metal is integrally formed on the surface of the second end hat 6 by plating or the like. However, in this case, the second end hat 6 during the carburization process will end up adsorbing the gas for the carburization process with the getter metal layer on its surface.
また、特開昭５１−１４２９５５号公報等に開示されて
いるように、着炭処理時におけるゲッタ金属を陰極本体
から遠ざけお（方法があるが、コイル状のゲッタ金属を
リード線にはめ込んだり移動させたりしなければならな
いので、量産に適しない。In addition, as disclosed in Japanese Patent Application Laid-Open No. 51-142955, it is also possible to keep the getter metal away from the cathode body during the carburization process (there are methods such as fitting the getter metal in the form of a coil into the lead wire or moving the getter metal away from the cathode body). It is not suitable for mass production because it requires
課題を解決するための手段
本発明の製造方法によると、センターおよびサイドのリ
ード線ならびに両リード線の各一端部を貫通させた絶縁
体からなるステムの前記サイドのリード線の他端部に、
前記センターのリード線を接触することなく挿通させた
円環状の第１のエンドハツトを固着する第１段階と、前
記センターのリード線を螺旋状陰極本体に挿通して前記
陰極本体の径小に形成された一端部を前記センターのリ
ード線の他端部に、そして、前記陰極本体の他端部を前
記第１のエンドハツトにそれぞれ固着する第２段階と、
前記センターおよびサイドのリード線を通じて前記陰極
本体に通電し着炭処理を施す第３段階と、ゲッタ金属層
を有する第２のエンドハツトを前記センターのリード線
の前記他端部に固着する第４段階とを備える。Means for Solving the Problems According to the manufacturing method of the present invention, the other end of the side lead wire of the stem is made of an insulator and is passed through the center and side lead wires as well as one end of each of the lead wires.
a first step of fixing a first annular end hat through which the center lead wire is inserted without contacting the center lead wire; and a first step of fixing the annular first end hat through which the center lead wire is inserted without contacting the center lead wire, and forming a diameter of the cathode main body by inserting the center lead wire into the spiral cathode body. a second step of fixing one end of the cathode body to the other end of the center lead wire, and fixing the other end of the cathode body to the first end hat;
A third step of applying electricity to the cathode body through the center and side lead wires to perform carburizing treatment, and a fourth step of fixing a second end hat having a getter metal layer to the other end of the center lead wire. Equipped with.
作 用
このように構成すると、ゲッタ金属層を表面に有する第
２のエンドハツトが、着炭処理後におけるセンターのリ
ード線にとりつけられるので、着炭処理用ガスをゲッタ
金属層に吸着させてしまう危惧なく、ゲッタ金属層を第
２のエンドハツトにめっき等の方法で堅固かつ容易に付
設でき、品質および製造能率を向上させることができる
。Effect With this configuration, the second end hat having the getter metal layer on its surface is attached to the center lead wire after the carburization process, so there is no risk that the carburization process gas will be adsorbed to the getter metal layer. Instead, the getter metal layer can be firmly and easily attached to the second end hat by a method such as plating, and quality and manufacturing efficiency can be improved.
実施例
つぎに、本発明を図面に示した実施例とともに説明する
。Embodiments Next, the present invention will be explained along with embodiments shown in the drawings.
第１図および第２図に示すように、モリブデンからなる
センターのリード線１およびサイドのリード線２が、両
リード線１．２の各一端部を貫通させたセラミック製コ
ツプ状の絶縁体３およびその底板部外面に気密に封着さ
れた一対の陰極端子片４とともに陰極端子導出用のステ
ムを形成しており、絶縁体３の開口端面に鳩目状金属管
９の径小端面が気密に封着されている点は従来どおりで
ある。ところが、製造の第１段階において、センターの
リード線１を接触することなく挿通させた円環状の第１
のエンドハツト５が、サイドのリード線２の他端部に第
２図図示のように固着される。ついで、トリウムタング
ステンからなる螺旋状の陰極本体７が第３図図示のよう
に装着される。すなわち、第２段階においてはセンター
のリード線１を陰極本体１０に挿通し、陰極本体１０の
径小端部１０ａをセンターのリード線１の他端部に、そ
して、陰極本体１０の他端部１０ｂを第１のエンドハツ
ト５に溶接器１１でそれぞれレーザ溶接またはアーク溶
接して固着する。As shown in FIGS. 1 and 2, a center lead wire 1 and a side lead wire 2 made of molybdenum pass through a ceramic pot-shaped insulator 3 through one end of each lead wire 1.2. A stem for leading out the cathode terminal is formed together with a pair of cathode terminal pieces 4 airtightly sealed to the outer surface of the bottom plate, and the small diameter end face of the eyelet-shaped metal tube 9 is airtightly attached to the open end face of the insulator 3. The sealing is the same as before. However, in the first stage of manufacturing, the annular first wire was inserted through which the center lead wire 1 was inserted without contacting it.
An end hat 5 is fixed to the other end of the side lead wire 2 as shown in FIG. Then, a spiral cathode body 7 made of thorium tungsten is attached as shown in FIG. That is, in the second step, the center lead wire 1 is inserted into the cathode body 10, the small diameter end 10a of the cathode body 10 is connected to the other end of the center lead wire 1, and the other end of the cathode body 10 is inserted into the center lead wire 1. 10b is fixed to the first end hat 5 by laser welding or arc welding using a welder 11, respectively.
陰極本体１０の径小端部１０ａは、リード線１の線径に
合わせて徐々に径小となる螺旋に形成されていることが
望ましいが、第４図に例示したように、同一径で螺旋状
に形成したトリウムタングステンの一端部を当該螺旋の
内側へ僅かに折り曲げた形状のものであってもよい。It is desirable that the small-diameter end 10a of the cathode body 10 be formed into a spiral whose diameter gradually decreases in accordance with the wire diameter of the lead wire 1. However, as illustrated in FIG. One end of the thorium tungsten formed in the shape may be slightly bent inside the spiral.
製造の第３段階では、第２段階で得られた半完成品に着
炭処理を施す。この着炭処理工程では第１図に示すよう
に、ペルジャー１２内に前記半完成品をセットし、ソケ
ット１３から陰極端子片４およびリード線１，２を通じ
て陰極本体１０に通電し、ペルジャー１２内にベンゼン
蒸気等の着炭処理用ガスを導入する。そして、着炭処理
後にペルジャー１２からとり出した半完成品のセンター
のリード線１に、第５図図示のようにチタン等からなる
ゲッタ金属のめっき層１４を表面に有する第２のエンド
ハツト６を、レーザ溶接またはアーク溶接等により固着
する。In the third stage of production, the semi-finished product obtained in the second stage is subjected to carburizing treatment. In this carburizing process, as shown in FIG. A gas for carbonization treatment such as benzene vapor is introduced into the tank. Then, as shown in FIG. 5, a second end hat 6 having a getter metal plating layer 14 made of titanium or the like on the surface is attached to the center lead wire 1 of the semi-finished product taken out from the Pelger 12 after the carburizing process. , fixed by laser welding, arc welding, etc.
発明の効果
以上のように本発明によると、第２のエンドハツトに付
設されたゲッタ金属層が着炭処理時にガス吸着をする心
配がまったくなく、陰極構体に組み込まれる前の単体状
態にある第２のエンドハツトにゲッタ金属層をめっき等
により堅固かつ容易に付設でき、品質および製造コスト
の改善に大きく寄与する効果′大なるものである。Effects of the Invention As described above, according to the present invention, there is no fear that the getter metal layer attached to the second end hat will adsorb gas during the carburizing process, and the second getter metal layer attached to the second end hat is free from adsorption of gas during the carburization process, and the second end hat is in a single state before being incorporated into the cathode structure. The getter metal layer can be firmly and easily attached to the end hat by plating or the like, which has a great effect that greatly contributes to improving quality and manufacturing costs.
第１図ないし第５図は本発明の実施例を示すもので、第
１図は着炭処理用ペルジャー内における陰極構体の一部
破断側面図、第２図は製造の第１段階における半完成品
の側断面図、第３図は同第２段階における半完成品の一
部破断側面図、第４図は陰極本体とセンターのリード線
との配列関係を示す平面図、第５図は製造の第４段階に
おける半完成品の一部破断側面図、第６図は従来の陰極
構体の側断面図である。
１．２・・・・・・リード線、３・・・・・・絶縁体、
５，６・・・・・・エンドハツト、１０・・・・・・陰
極本体、１２・・・・・・ペルジャー、１４・・・・・
・ゲッタ金属層。
代理人の氏名 弁理士 粟野重孝 ほか１８第 １ｒＳ
ｉ
ｌ、と− リード環
謄称木４本
第２［２Ｉ
第３図
第４図
第５図
ａ／ＩｌFigures 1 to 5 show embodiments of the present invention, with Figure 1 being a partially cutaway side view of the cathode structure in a Pelger for carburizing treatment, and Figure 2 being a semi-completed cathode structure in the first stage of manufacturing. Figure 3 is a partially cutaway side view of the semi-finished product at the second stage, Figure 4 is a plan view showing the arrangement relationship between the cathode body and the center lead wire, and Figure 5 is the manufacturing process. FIG. 6 is a partially cutaway side view of the semi-finished product at the fourth stage, and FIG. 6 is a side sectional view of a conventional cathode structure. 1.2...Lead wire, 3...Insulator,
5, 6... End hat, 10... Cathode body, 12... Pel jar, 14...
・Getter metal layer. Name of agent: Patent attorney Shigetaka Awano et al. 18th 1rS
i l, and - 4 reed ring pseudonym trees 2nd [2I Figure 3 Figure 4 Figure 5 a/Il
Claims (1)
各一端部を貫通させた絶縁体からなるステムの前記サイ
ドのリード線の他端部に、前記センターのリード線を接
触することなく挿通させた円環状の第１のエンドハット
を固着する第１段階と、前記センターのリード線を螺旋
状陰極本体に挿通して前記陰極本体の径小に形成された
一端部を前記センターのリード線の他端部に、そして、
前記陰極本体の他端部を前記第１のエンドハットにそれ
ぞれ固着する第２段階と、前記センターおよびサイドの
リード線を通じて前記陰極本体に通電し着炭処理を施す
第３段階と、ゲッタ金属層を有する第２のエンドハット
を前記センターのリード線の前記他端部に固着する第４
段階とを備えてなることを特徴とするマグネトロン用陰
極構体の製造方法。An annular shape in which the center lead wire is inserted through the other end of the side lead wire of a stem made of an insulator through which the center and side lead wires and one end of both lead wires are passed through without contacting them. a first step of fixing a first end hat of the center lead wire, and inserting the center lead wire into the spiral cathode body to connect one end portion of the cathode body formed with a smaller diameter to the other end of the center lead wire. To, and
a second step of fixing the other end portions of the cathode body to the first end hat, a third step of applying electricity to the cathode body through the center and side lead wires to perform carbonization treatment, and a getter metal layer. a fourth end hat having a second end hat fixed to the other end of the center lead wire;
A method for manufacturing a cathode structure for a magnetron, comprising the steps of:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18950388A JPH0240832A (en) | 1988-07-28 | 1988-07-28 | Manufacture of cathode body structure for magnetron |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18950388A JPH0240832A (en) | 1988-07-28 | 1988-07-28 | Manufacture of cathode body structure for magnetron |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0240832A true JPH0240832A (en) | 1990-02-09 |
Family
ID=16242361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18950388A Pending JPH0240832A (en) | 1988-07-28 | 1988-07-28 | Manufacture of cathode body structure for magnetron |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240832A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007110739A (en) * | 2000-02-07 | 2007-04-26 | Communication & Power Industries | High tension dc connection part for vacuum electron device |
-
1988
- 1988-07-28 JP JP18950388A patent/JPH0240832A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007110739A (en) * | 2000-02-07 | 2007-04-26 | Communication & Power Industries | High tension dc connection part for vacuum electron device |
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