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JPH02306184A - Magnetic sensor and manufacture thereof - Google Patents

Magnetic sensor and manufacture thereof

Info

Publication number
JPH02306184A
JPH02306184A JP1126946A JP12694689A JPH02306184A JP H02306184 A JPH02306184 A JP H02306184A JP 1126946 A JP1126946 A JP 1126946A JP 12694689 A JP12694689 A JP 12694689A JP H02306184 A JPH02306184 A JP H02306184A
Authority
JP
Japan
Prior art keywords
film
terminal
magnetic sensing
substrate
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1126946A
Other languages
Japanese (ja)
Inventor
Kazuya Kobayakawa
和也 小早川
Hiroyuki Ono
宏行 大野
Toyoji Tsunoda
角田 豊慈
Yasushi Okamura
岡村 康
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1126946A priority Critical patent/JPH02306184A/en
Publication of JPH02306184A publication Critical patent/JPH02306184A/en
Pending legal-status Critical Current

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  • Hall/Mr Elements (AREA)

Abstract

PURPOSE:To achieve a double effects as a resist and a protector of a magnetic sensing film by a method wherein a magnetic sensing film having a terminal section is provided on a substrate to form a terminal plated layer at the terminal section and the part of the magnetic sensing film is covered with a photosensitive resin film except for the top of the terminal plated layer. CONSTITUTION:First, a ferromagnetic film 6 made of permalloy or the like is formed on a substrate 1. Then, the ferromagnetic film 6 is formed into a figure of M using photolithography to form a magnetic sensing film 2. Then, a photosensitive polyimide resin dissolved in a solvent is applied on the substrate 1 covering the film 2 to form a resin film 10. Then, a film 8 on a terminal section 2a is irradiated with ultraviolet rays and subsequently developed with a developer. The resin film 10 at the part irradiated with the ultraviolet rays is dissolved in the developer so that the terminal section 2a is peeled off. A terminal plated film 3 thick about several mum is formed at the terminal section 2a using a plating bath to which are added specified amounts of Sn, Pb, HBF and an organic additive. Finally, a baking is performed by a hot air oven or the like to remove the solvent contained in the resin 10.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、基板に有機物フィルムを用いた磁気センサ及
びその製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic sensor using an organic film as a substrate and a method for manufacturing the same.

従来の技術 近年、磁気センサとして有機物フィルムの基板を用いて
、フレキシブル性を持たせたものが使用される様になっ
てきた。この様な磁気センサは事由に変形させる事が出
来るため機器等に取り付は易いという利点がある。以下
従来の磁気センサについて説明する。
BACKGROUND OF THE INVENTION In recent years, flexible magnetic sensors using organic film substrates have come into use. Such a magnetic sensor has the advantage of being easy to attach to equipment because it can be deformed depending on the situation. A conventional magnetic sensor will be explained below.

第8図及び第9図は従来の磁気センサを示す平面図及び
断面図である。第8図及び第9図において1はポリアミ
ドやポリプロピレン等の有機物フィルムでできた基板、
2は基板1上に形成された磁気感知膜で、磁気感知膜2
はパーマロイやNi−Co合金の様な強磁性材料によっ
て構成されている。又、磁気感知膜2は蒸着やスパッタ
リング等によって基板1上に0.1μm〜0.2μmの
膜厚で形成され、第8図に示す様にM字型にフォトリソ
グラフィ技術を用いて形成されている。又磁気感知膜2
には両端部に端子部2aが設けられている。3は端子部
2aの上に形成された端子鍍金層で、端子鍍金層3はリ
ードを磁気感知膜2に接合しやすくするために形成され
ている。4は磁気感知部2を保護するために設けられた
保護フィルムで、保護フィルム4は接着剤5によって基
板1に接着されている。保護フィルム4には端子部2a
に対応した部分に孔4aが設けられている。
FIGS. 8 and 9 are a plan view and a sectional view showing a conventional magnetic sensor. In FIGS. 8 and 9, 1 is a substrate made of an organic film such as polyamide or polypropylene;
2 is a magnetic sensing film formed on the substrate 1;
is made of a ferromagnetic material such as permalloy or Ni-Co alloy. The magnetic sensing film 2 is formed on the substrate 1 by vapor deposition, sputtering, etc. to a film thickness of 0.1 μm to 0.2 μm, and is formed into an M-shape using photolithography technology as shown in FIG. There is. Also, magnetic sensing film 2
Terminal portions 2a are provided at both ends. Reference numeral 3 denotes a terminal plating layer formed on the terminal portion 2a, and the terminal plating layer 3 is formed to facilitate bonding of the lead to the magnetic sensing film 2. A protective film 4 is provided to protect the magnetic sensing section 2, and the protective film 4 is bonded to the substrate 1 with an adhesive 5. The protective film 4 has a terminal portion 2a.
A hole 4a is provided in a portion corresponding to the hole 4a.

以上の様に構成された従来の磁気センサについて以下そ
の製造方法を第10図から第14図を用いて説明する。
A method of manufacturing the conventional magnetic sensor configured as described above will be described below with reference to FIGS. 10 to 14.

先ず第10図に示す様に基板1の上に、パーマロイ等の
強磁性材料をスパッタリングして強磁性膜6を形成する
。次に第11図に示す様にフォトリソグラフィ技術を用
いて強磁性膜6の不要部分を取り除いてM字型に成型し
、磁気感知膜2を形成する。その上にフォトレジスト膜
7を一様に塗布し、端子部2a上のフォトレジスト膜7
をに紫外線を照射して、その照射部分を現像液で洗い流
して取り除く。この様子を第12図に示す。次に第13
図に示す様に端子部2ai:鍍金を施し、端子鍍金層3
を形成する。その後フォトレジスト膜7全てに紫外線を
照射して現像液で洗う流して取り除き、最後に第14図
に示す様に接着剤5で保護フィルム4を基板1上に接着
する。
First, as shown in FIG. 10, a ferromagnetic film 6 is formed on a substrate 1 by sputtering a ferromagnetic material such as permalloy. Next, as shown in FIG. 11, unnecessary portions of the ferromagnetic film 6 are removed using photolithography and formed into an M-shape to form the magnetic sensing film 2. A photoresist film 7 is uniformly applied thereon, and the photoresist film 7 on the terminal portion 2a is
The irradiated area is removed by irradiating it with ultraviolet light and washing it away with a developer. This situation is shown in FIG. Then the 13th
As shown in the figure, terminal part 2ai: Plating is applied, and terminal plating layer 3
form. Thereafter, the entire photoresist film 7 is irradiated with ultraviolet rays and washed away with a developer, and finally the protective film 4 is bonded onto the substrate 1 with an adhesive 5 as shown in FIG.

発明が解決しようとする課題 しかしながら前記従来の構成では、保護フィルム4を貼
り付ける時に保護フィルム4がずれて接着されると、第
15図に示す様に接着剤5と磁気感知膜2の間に空隙部
8が形成され、磁気感知膜2が空気に触れる事になり、
磁気感知膜2が腐食しやすくなるので、保護フィルム4
は精度良く貼り付けなければならず、作業性が悪く生産
性が向上しないという問題点があった。又第16図に示
す様に保護フィルム4の貼り付けに接着剤5が用いられ
ており、その接着剤5が端子鍍金層3表面にはみだして
しまうと、そのはみだし部9が形成される。このはみだ
し部9によってリードがうまく端子部2aに接合しない
という問題点があった。
Problems to be Solved by the Invention However, in the above-mentioned conventional configuration, if the protective film 4 is misaligned when it is pasted, as shown in FIG. A void 8 is formed, and the magnetic sensing film 2 comes into contact with air.
Since the magnetic sensing film 2 is easily corroded, the protective film 4
must be pasted with high precision, resulting in poor workability and no improvement in productivity. Further, as shown in FIG. 16, an adhesive 5 is used to attach the protective film 4, and if the adhesive 5 protrudes onto the surface of the terminal plating layer 3, a protruding portion 9 is formed. This protruding portion 9 caused a problem in that the lead could not be properly joined to the terminal portion 2a.

本発明は前記従来の問題点を解決するもので、作業性が
良く、シかも接着剤を用いずに作成できる磁気センサ及
びその製造方法を提供する事を目的としている。
The present invention solves the above-mentioned conventional problems, and aims to provide a magnetic sensor that has good workability and can be manufactured without using an adhesive, and a method for manufacturing the same.

課題を解決するための手段 この目的を達成するために、基板上に端子部を有した磁
気感知膜を備え、端子部に端子鍍金層を形成し、端子鍍
金層の上を除いた磁気感知膜の部分を感光性樹脂膜を覆
った。
Means for Solving the Problem In order to achieve this object, a magnetic sensing film is provided which includes a magnetic sensing film having a terminal portion on a substrate, a terminal plating layer is formed on the terminal portion, and the magnetic sensing film is removed from the top of the terminal plating layer. This part was covered with a photosensitive resin film.

作    用 この構成により、端子鍍金層を形成する6時に用いられ
るレジストの役目と、磁気感知膜の保護の役目を入角感
光性樹脂膜で兼用する事ができる。
Function: With this configuration, the angle-of-angle photosensitive resin film can serve both the role of a resist used in forming the terminal plating layer and the role of protecting the magnetic sensing film.

実施例 第1図及び第2図は本発明の一実施例における磁気セン
サを示す平面図及び断面図である。第1図及び第2図に
おいて、lは基板、2は磁気感知膜、2aは端子部、3
は端子鍍金層で、これらは従来の構成と同じである。1
0は感光性ポリイミド樹脂で形成された樹脂膜で、樹脂
膜10は端子鍍金層3以外の部分に設けられている。
Embodiment FIGS. 1 and 2 are a plan view and a sectional view showing a magnetic sensor according to an embodiment of the present invention. In FIGS. 1 and 2, l is a substrate, 2 is a magnetic sensing film, 2a is a terminal portion, and 3
is a terminal plating layer, which is the same as the conventional structure. 1
0 is a resin film formed of photosensitive polyimide resin, and the resin film 10 is provided on a portion other than the terminal plating layer 3.

以上の様に構成された本発明の一実施例について以下そ
の製造方法を説明する。
A manufacturing method for an embodiment of the present invention constructed as described above will be described below.

先ず、第3図に示す様に基板lの上に、パーマロイ等の
強磁性材料をスパッタリングして強磁性膜6を形成する
。次に第4図に示す様にフォトリソグラフィ技術を用い
て強磁性膜6をM字型に成型し、磁気感知膜2を形成す
る。次に磁気感知膜2を覆う様に基板1上に感光性ポリ
イミド樹脂を溶媒で溶かしたものを塗布し、樹脂膜1o
を形成する。この様子を第5図に示す。次に端子部2a
の上の樹脂膜8に紫外線を照射し、その後に現像液で現
像すると、紫外線が照射された部分の樹脂膜10が現像
液に溶け、端子部2aが剥出しになる。この様子を第6
図に示す。次に1リツトルあたりSnを16〜20g、
Pbを7〜11g、HBF  を200〜250g、有
機添加剤を2.0〜5.0gの範囲内で添加した鍍金浴
を作成し、鍍金浴を用いて端子部2aに数μm程度の端
子鍍金膜3を形成する。この様子を第7図に示す。最後
に熱風オーブンや真空オーブンによってベーキングを行
い、樹脂膜10の中に含まれている溶媒を除去する。こ
の様に構成された樹脂膜10は耐熱性や耐薬品性に優れ
ている。従って樹脂膜10だけで十分に磁気感知膜2を
保護する事ができる。
First, as shown in FIG. 3, a ferromagnetic film 6 is formed on a substrate 1 by sputtering a ferromagnetic material such as permalloy. Next, as shown in FIG. 4, the ferromagnetic film 6 is formed into an M-shape using photolithography to form the magnetic sensing film 2. Next, a photosensitive polyimide resin dissolved in a solvent is applied onto the substrate 1 so as to cover the magnetic sensing film 2, and the resin film 10 is coated with a photosensitive polyimide resin dissolved in a solvent.
form. This situation is shown in FIG. Next, the terminal part 2a
When the resin film 8 on the resin film 8 is irradiated with ultraviolet rays and then developed with a developer, the portions of the resin film 10 irradiated with the ultraviolet rays are dissolved in the developer, and the terminal portions 2a are exposed. This situation can be seen in the 6th
As shown in the figure. Next, 16 to 20 g of Sn per liter,
A plating bath containing 7 to 11 g of Pb, 200 to 250 g of HBF, and 2.0 to 5.0 g of organic additives was created, and the terminal portion 2a was plated with a thickness of several μm using the plating bath. A film 3 is formed. This situation is shown in FIG. Finally, baking is performed using a hot air oven or a vacuum oven to remove the solvent contained in the resin film 10. The resin film 10 configured in this manner has excellent heat resistance and chemical resistance. Therefore, the magnetic sensing film 2 can be sufficiently protected only by the resin film 10.

以上の様に本実施例は、基板1上に磁気感知膜2を形成
し、その上に感光性ポリイミド樹脂によって構成された
樹脂膜10を形成した事により、樹脂膜10を端子部2
a上のみに端子鍍金層3を形成するためのレジストの役
目をさせるとともに、樹脂膜8をそのまま保護膜として
利用できるので、工数が減り、生産性が向上した。
As described above, in this embodiment, the magnetic sensing film 2 is formed on the substrate 1, and the resin film 10 made of photosensitive polyimide resin is formed thereon.
Since the resin film 8 can be used as a resist for forming the terminal plating layer 3 only on the surface a and the resin film 8 can be used as it is as a protective film, the number of steps is reduced and productivity is improved.

発明の効果 本発明は、基板上に端子部を有した磁気感知膜を備え、
端子部に端子鍍金層を形成し、端子鍍金層の上を除いた
磁気感知膜の部分を感光性樹脂膜を覆った事により、端
子鍍金層を形成する時に用いられるレジストの役目と、
磁気感知膜の保護の役目を入角感光性樹脂膜で兼用する
事ができるので、従来の様に保護フィルムを別途設ける
必要はないので工数の削減になるとともに従来の様に保
護フィルムを精度良く貼り付けるという繁雑な工程が無
(なり、作業性が良くなり生産性が向上する。又接着剤
を用いていないので、接着剤のはみだしによるリードの
接合不良等が生じない。
Effects of the Invention The present invention includes a magnetic sensing film having a terminal portion on a substrate,
By forming a terminal plating layer on the terminal part and covering the part of the magnetic sensing film except for the top of the terminal plating layer with a photosensitive resin film, the role of the resist used when forming the terminal plating layer,
Since the angle-of-view photosensitive resin film can also serve as a protection for the magnetic sensing film, there is no need to provide a separate protective film as in the past, which reduces man-hours and allows the protective film to be applied with greater precision than in the past. There is no need for the complicated process of pasting, which improves workability and productivity. Also, since no adhesive is used, there is no possibility of poor connection of the leads due to adhesive oozing out.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例における磁気センサを示す断
面図、第2図は同平面図、第3図から第7図は本発明の
一実施例における磁気センサの製造方法を示した断面図
、第8図は従来の磁気センサを示す断面図、第9図は同
平面図、第10図から第14図は従来の磁気センサの製
造方法を示す断面図、第15図は従来の磁気センサに不
具合が生じたときの断面図、第16図は同断面図である
。 1 ・・・・・・ 基板 2 ・・・・・・ 磁気感知膜 2a・・・・・・ 端子部 3 ・・・・・・ 端子鍍金層 6 ・・・・・・ 強磁性膜 10 ・・・・・・ 樹脂膜 代理人の氏名 弁理士 粟野重孝 ほか1名第1図 第2図 20   1      どq 第8図 第9図 20   1      どa 第15図
FIG. 1 is a cross-sectional view showing a magnetic sensor according to an embodiment of the present invention, FIG. 2 is a plan view thereof, and FIGS. 3 to 7 are cross-sectional views showing a method of manufacturing a magnetic sensor according to an embodiment of the present invention. 8 is a sectional view showing a conventional magnetic sensor, FIG. 9 is a plan view of the same, FIGS. 10 to 14 are sectional views showing a method of manufacturing a conventional magnetic sensor, and FIG. FIG. 16 is a cross-sectional view when a problem occurs in the sensor. 1...Substrate 2...Magnetic sensing film 2a...Terminal section 3...Terminal plating layer 6...Ferromagnetic film 10... ...Resin membrane agent's name Patent attorney Shigetaka Awano and one other person Figure 1 Figure 2 20 1 Doq Figure 8 Figure 9 20 1 Doa Figure 15

Claims (4)

【特許請求の範囲】[Claims] (1)基板と、前記基板の上に形成され、両端部にリー
ドを接続する端子部を設けた磁気感知膜と前記端子部に
形成された端子鍍金層と、前記磁気感知膜の前記端子鍍
金層の上部以外の部分を覆う感光性樹脂膜を備えた事を
特徴とする磁気センサ。
(1) a substrate, a magnetic sensing film formed on the substrate and provided with terminal parts connecting leads to both ends; a terminal plating layer formed on the terminal part; and the terminal plating of the magnetic sensing film. A magnetic sensor characterized by comprising a photosensitive resin film covering parts other than the upper part of the layer.
(2)感光性樹脂膜を感光性ポリイミド樹脂で構成した
事を特徴とする請求項第1項記載の磁気センサ。
(2) The magnetic sensor according to claim 1, wherein the photosensitive resin film is made of photosensitive polyimide resin.
(3)基板の上に強磁性材料で作られた端子部を有した
磁気感知膜を形成し、その上に感光性樹脂膜を一面に形
成し、前記感光性樹脂膜の内、端子部上に形成されてい
る部分を除去し、前記端子部に端子鍍金層を形成する事
を特徴とする磁気センサの製造方法。
(3) A magnetic sensing film having a terminal part made of a ferromagnetic material is formed on the substrate, a photosensitive resin film is formed all over it, and the part of the terminal part of the photosensitive resin film is A method of manufacturing a magnetic sensor, comprising: removing a portion formed on the terminal portion, and forming a terminal plating layer on the terminal portion.
(4)感光性樹脂膜を感光性ポリイミド樹脂で構成した
事を特徴とする請求項第2項記載の磁気センサの製造方
法。
(4) The method for manufacturing a magnetic sensor according to claim 2, wherein the photosensitive resin film is made of photosensitive polyimide resin.
JP1126946A 1989-05-19 1989-05-19 Magnetic sensor and manufacture thereof Pending JPH02306184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1126946A JPH02306184A (en) 1989-05-19 1989-05-19 Magnetic sensor and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1126946A JPH02306184A (en) 1989-05-19 1989-05-19 Magnetic sensor and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH02306184A true JPH02306184A (en) 1990-12-19

Family

ID=14947809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1126946A Pending JPH02306184A (en) 1989-05-19 1989-05-19 Magnetic sensor and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH02306184A (en)

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